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外文翻译--线锯过程中凹凸不平面的损伤情况 英文版.pdf

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外文翻译--线锯过程中凹凸不平面的损伤情况 英文版.pdf

INTERNATIONALJOURNALOFPRECISIONENGINEERINGANDMANUFACTURINGVOL12,NO6,PP941947DECEMBER2011/941DOI101007/S1254101101264NOMENCLATUREFZVERTICALFORCEONAGRITFZGFORCEONASINGLEGRITFZSTOTALVERTICALFORCEACTIONONSAMPLEΣYYIELDSTRESSRGRITRADIUSHCUTDEPTHFORASINGLEPARTICLEVXWIRESPEEDVZFEEDSPEEDTWIRETENSIONAPPROJECTEDAREAOFTHECUTTRENCHLOCUTLENGTHOFSAMPLELGDISTANCEBETWEENCUTTINGPARTICLESDWIDTHOFCUTTRENCHSSLIDINGDISTANCECMEDIANCRACKLENGTHΨHALFOFTHEINCLUDEDANGLEOFTHEGRITSEMODULUSOFELASTICITYOFINGOTHHARDNESSOFTHEINGOTPINDENTATIONFORCEKCFRACTURETOUGHNESSOFTHEINGOTWDISTRIBUTEDWIRELOADONTHESAMPLENNUMBEROFCUTTINGPARTICLESINTHECUTLENGTHΑWIREBOWANGLE1INTRODUCTIONSILICONWAFERSUSEDINTHESOLARCELLANDMICROELECTRONICSINDUSTRIESCANBECUTFROMSILICONCRYSTALSUSINGINNERDIAMETERIDSAWORWIRESAWWIRESAWHASADVANTAGESOVERIDSAWTHESEADVANTAGESAREHIGHERPRODUCTIVITY,LESSWAFERSURFACEDAMAGE,ANDLOWERKERFLOSS1MOREOVER,THEDIAMETEROFWAFERTHATCANBESLICEDBYAWIRESAWISHIGHERTHANTHATOBTAINABLEBYANIDSAWWIRESAWSAREUSEDTOCUTSAPPHIRE,SILICONCARBIDE,LITHIUMNIOBATE,WOOD,ROCK,ANDALMOSTALLKINDSOFCERAMICS,INCLUDINGFOAMCERAMICS13MOLLER4STATEDTHATTHEWIRESAWPROCESSISRESPONSIBLEFOR30ROUGHNESSDAMAGEEVOLUTIONDUETOWIRESAWPROCESSEGEMENTEOMETE1,1DEPTCIVILENGINEERING,DOKUZEYLULUNIVERSITY,KAYNAKLARCAMPUSBUCA,IZMIR,TURKEY,35160CORRESPONDINGAUTHOR/EMAILETEOMETEGMAILCOM,TEL902324127060,FAX902324531192KEYWORDSCERAMIC,DAMAGEMODEL,DUCTILEREGIMEMACHINING,ROUGHNESS,WIRESAWTHEWIRESAWPROCESSISWIDELYUSEDFORSILICONWAFERPRODUCTIONWITHHIGHYIELDANDLOWSURFACEDAMAGEINSOLARCELLANDMICROELECTRONICSINDUSTRIESTHEWIRESAWPROCESSISUSEDTOMACHINEBRITTLEMATERIALSINTHEDUCTILEREGIMEWHEREHIGHYIELDANDLOWSURFACEDAMAGEAREDESIREDTHEWIRESAWPROCESSISALSOUSEDTOCUTCONCRETEANDROCKSINCIVILENGINEERINGINTHISSTUDY,ANEXPERIMENTALPARAMETRICSTUDYWASCONDUCTEDBYVARYINGPROCESSPARAMETERSTODETERMINESURFACEROUGHNESSDAMAGEDUCTILEREGIMEMATERIALREMOVALBYTRANSGRANULARFAILUREANDBRITTLEFRACTUREBYINTERGRANULARFAILUREAREOBSERVEDINELECTRONMICROGRAPHSOFTHECUTSURFACESADAMAGEMODELTHATRELATESTHEROUGHNESSDAMAGETOPROCESSPARAMETERSWASDERIVEDTHEDAMAGEMODELPREDICTSTHEROUGHNESSDAMAGESATISFACTORILYTHEMODELSHOWSTHATTHEROUGHNESSDAMAGEISPROPORTIONALTOTHERATIOOFFEEDSPEEDTOWIRESPEEDIMPROVEMENTINTHEEFFICIENCYOFTHEPROCESSWITHOUTINCREASINGTHEROUGHNESSDAMAGECANBEATTAINEDBYINCREASINGTHEFEEDSPEEDPROPORTIONALLYTOWIRESPEEDWIRETENSIONDOESNOTAFFECTROUGHNESSDAMAGEROUGHNESSDAMAGE,HOWEVER,ISAFFECTEDBYPROPERTIESOFTHEWIREWIRESHAVINGSMALLERGRITRADIUSANDSMALLGRITSPACINGCAUSELESSROUGHNESSDAMAGEMANUSCRIPTRECEIVEDMAY4,2010/ACCEPTEDMAY15,2011KSPEANDSPRINGER2011942/DECEMBER2011INTERNATIONALJOURNALOFPRECISIONENGINEERINGANDMANUFACTURINGVOL12,NO6OFTHETOTALSILICONWAFERPRODUCTIONCOST,WHICHDIRECTLYAFFECTSINDUSTRYTHEREISANEEDTOOPTIMIZETHEPROCESSBYDEVELOPINGMODELSRELATINGPROCESSPARAMETERSTOPRODUCTQUALITYANDPROCESSEFFICIENCYMEASURES4EARLYWIRESAWPROCESSESFORWAFERPRODUCTIONDEVELOPEDINTHE1990SCONSISTEDOFABARESTEELWIREANDABRASIVECARRYINGSLURRY,RESULTINGINFREEABRASIVEMACHININGUSINGELASTOHYDRODYNAMICFORCES5,6THEABRASIVEPARTICLESCANBESICORDIAMONDTHEMEANGRITSIZEOFABRASIVEPARTICLESCANBE5TO30MWITHA30TO60VOLUMEFRACTIONINTHESLURRYAVERAGEWIREDIAMETERIS180M,LEADINGTOAKERFLOSSOF200TO250MTHESLURRYCANBEWATERBASEDOROILBASEDOILBASEDSLURRYCAUSESTHEWAFERSTOSTICKTOEACHOTHER,ANDITISHARDTOSEPARATETHEM,WHILEREMOVALOFTHEOILFROMTHEWAFERSURFACEISANOTHERPROBLEMDISPOSALOFTHEOILBASEDSLURRYAFTERUSEISALSOAPROBLEMHYDROGENGASPRODUCEDFROMTHEINTERACTIONOFWATERBASEDSLURRYANDSILICONMAYCAUSEEXPLOSIONSHOWEVER,FROMANENVIRONMENTALPOINTOFVIEW,CONSIDERINGTHEHIGHAMOUNTOFSLURRYDISPOSEDOFDURINGTHEPROCESS,WATERBASEDSLURRIESAREGENERALLYPREFERRED4CLARKETAL5STATEDTHATINORDERTOINCREASETHEPRODUCTIVITYANDTOBEABLETOCUTHARDERCERAMICS,DIAMONDIMPREGNATEDWIRE,WHICHLEADSTOFIXEDABRASIVEMACHINING,WASDEVELOPEDINWIRESAWINGWITHFREEABRASIVES,WIRESPEEDISBETWEEN5TO15M/SANDWIRETENSIONIS20TO30NTHEFEEDINTOTHEINGOTRESULTSINAWIREBOWSOTHATTHEWIREMAKES2OTO6OWITHTHEHORIZONTAL6INTHEFIXEDABRASIVEMACHININGWIRESAWPROCESS,THEWIRESPEEDISLOWERASMATERIALREMOVALISNOTOCCURRINGBYHYDRODYNAMICACTIONINMULTIWIRETECHNOLOGY,ASINGLEWIREISWINDEDTOATENSIONCONTROLUNITANDSEVERALGUIDEPULLEYS,WHICHAREGROOVEDWITHCONSTANTPITCHFIVETOSEVENHUNDREDPARALLELWIRESRUNTOGETHERANDARECOLLECTEDATATAKEUPSPOOLTHEINGOTISSLICEDINTOHUNDREDSOFWAFERSASITISFEDINTOTHEWIREWEBTHEWAFERSINSOLARCELLINDUSTRYARECUTBYRUNNINGTHEWIREINONLYONEDIRECTIONATAHIGHSPEEDBETWEEN5TO20M/S,WHILETHEWAFERSINTHEMICROELECTRONICSINDUSTRYARECUTBYRUNNINGTHEWIREINBOTHDIRECTIONSWITHALOWERSPEEDOSCILLATINGTHEWIREFROMONESPOOLTOANOTHER4RESEARCHONTHEWIRESAWPROCESSHASBEENONGOINGINTHREEMAINAREASMATERIALREMOVALMECHANISMS,KINEMATICSOFWIRES,ANDPARAMETRICSTUDIESBETWEENTHEPROCESSINPUTSANDOUTPUTSLIETAL7PRESENTEDTHESTRESSESUNDERANABRASIVEPARTICLE,WHICHISROLLINGANDINDENTINGINAWIRESAWPROCESSMATERIALREMOVALMECHANISMSFORFREEABRASIVEMACHININGWEREDEVELOPEDUSINGFRACTUREMECHANICSANDHYDRODYNAMICBEHAVIOROFSLURRYBYMOLLER4THEMATERIALREMOVALRATEISDEFINEDASAFUNCTIONOFPOWERSUPPLIEDTOTHEABRASIVEBYHYDRODYNAMICEFFECTANDTHEHYDRODYNAMICFILMPROPERTIESARECALCULATEDUSINGTHEFINITEEL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