[信息与通信]少子寿命测试仪故障翻译.doc

15. Diagnostics and Troubleshooting15.诊断和故障The WT-2000 is designed for years of r eliable operation. In the event that a problem occurs, refer to this chapter for procedures you can follow to diagnose the cause of the problem. In section 15.1, the user can find the terminology section, which describes the different parts of the system. It is necessary to understand the terminology in order to do effective troubleshooting. Later sections contain a collection of possible problems and the methods to eliminate them. The topics are organized as shown below:WT-2000 年 r eliable 运作设计。在该事件中出现问题，请参阅本章程序您可以按照来诊断问题的原因。第 151 条用户可以找到条术语描述系统的不同部分。有必要了解术语做有效的疑难解答。后面各节包含可能存在的问题和消除这些方法的集合。该主题组织，如下所示： Communication Problems, section 15.2 Problems at Initialization, section 15.3 4 Problems during measurement, section 15.4 -PCD Lifetime Measurement Errors, section 15.5 JPV Measurement Errors, section 15.615.1 Terminology 术语This section defines the names of the parts in the system. 该章节定义了系统内各个部件的名称。Section 15.1.1 describes parts of the scanner unit,section 15.1.2 describes parts of the industrial computer,and section 15.1.3discusses the operational software, including the System Diagnostic file.15.1.1章节阐述扫描单元的部件。15.1.2章节阐述了工业计算机的部件。15.1.3章节讨论了运行软件，包括系统的诊断文件。15.1.1 Parts of the Scanner Unit15.1.1扫描仪单元的部件 Measurement Stage测量工作台The measurement stage (Figure 15-1) holds the sample. In the middle of the measurement stage, there are the vacuum chuck, which fixes the sample during the measurement, and the optional wafer lift pins which lift up and put down the wafer.如图15-1示，测量工作台装有样品。在测量工作台中间，有一个真空吸口，用来在测量期间固定样品。可选硅片升降针，用来升高或降低硅片。Figure 15-1: Measurement stage 测量平台On the right side of the measurement stage there are some outlets (Figure 15-2).（图15-2）测量工作台右侧有一个出口。Figure 15-2: Outlets on the right side of the measurement stage 图 15-2： 测量工作台右侧的出口The top one is the wafer lift cable (optional).顶部一个是硅片升降线。（可选项）The second one (from the top) is the ground (GND) cable. 从顶部向下数，第二个是地线，GNDWhen the measurement stage is in the system, the GND cable must be connected.测量工作台的地线必须系统接地。The third one (from the top) is the vacuum cable. When the measurement stage is in the system it has to be connected.The bottom one is the wafer lift cable (optional).第三个是真空管，测量工作台在系统中必须连接，底部是硅片升降线。 Bridge 横梁The bridge holds the measurement head with the rail and it moves above the measurement stage. See Figure 15-3.横梁包括有导轨的测量探头，并向上移动测量平台，见图15-3示。 Measurement Head 测量探头All measurement units are in the measurement head. The most frequent units are the following:所有测量单元都在测量探头内部。大部分常见单元如下： Optical finder sensor, 光感式传感器 Capacitive finder sensor, 电容式传感器 Temperature sensor (optional), 温度传感器（可选项） -PCD microwave unit/-PCD head (optional), -PCD微波单元/-PCD 探头（可选项） SPV sensor/head (optional), SPV传感器/探头（可选项） LBIC measurement unit/head (optional), LBIC测量单元/探头（可选项） Resistivity/eddy measurement sensor (optional), 电阻率/eddy 测量传感器（可选项） Kelvin head/sensor (optional) 开尔文探头/传感器（可选项） SHR measurement head/sensor (optional) SHR测量探头/传感器（可选项）Some typical measurement units are shown in Figure 15-4.一些典型的测量单元如15-4所示。Additional measurement units are shown in Figure 15-5 and Figure 15-6.其它测量单元如图15-5和15-6所示。Figure 15-6: SPV sensor/head Indexer for Automatic Loading (Optional)The indexer (elevator) (Figure 15-7) unit is used for automatic loading. The wafer cassette ispositioned on the platform of the indexer when the system operates in automatic wafer loadingmode.图 15-6： 专用汽车传感器/头 索引器的自动加载 （可选） 的索引器 （电梯） （图 15-7） 单位用于自动加载。晶圆片盒式定位平台的索引器时自动加载模式的晶圆该制度的运作。Figure 15-7: Indexer Loading Arm (Optional)The loading arm (Figure 15-8) removes (replaces) wafers from (to) the cassette and places to(picks from) the measurement stage.图 15-7： 索引器 加载臂 （可选） 的加载臂 （图 15-8） 移除 （替换） 晶圆从 (对) 磁带并放到 （从镐） 测试阶段。Figure 15-8: Loading arm Shutter (Optional)The shutter (Figure 15-9) protects the wafers in the cassette from the high intensity lightillumination (flash) during the Fe concentration measurement.图 15-8： 加载臂 快门 （可选） 的快门 （图 15-9） 从高强度光照明 (闪存) 铁浓度测量过程中保护在卡带晶圆。Figure 15-9: Shutter Flash Unit (Optional)This unit (Figure 15-10 and Figure 15-11) creates the high intensity light illumination (causingFe-B pair dissociation) for the Fe concentration measurement.图 15-9: 快门闪存设备 （可选） 本单元 （图 15-10 和图 15 11） 创建高强度光照明 （导致铁 B 对离解） 铁浓度测量。Figure 15-10: Flash lamp with flash interface图 15-10： Flash 灯，闪存接口Figure 15-11: Flash lamp generator图 15-11： Flash 灯发电机 Back Panel (Signal Distributor Board) 步小组 （信号分发服务器委员会）This board is the interface between the interconnect cables and the system. This board is behindthe gray metal plate in the system (see Figure 15-12). The gray plate is on the back side of theolder systems, while it is on the right side of newer systems.Figure 15-13 shows an example of a back panel in an older system. To reach this board it isnecessary to remove the white back side cover and also the metal plate. 该板是互连电缆和系统之间的接口。该板是背后灰色金属板系统中 （见图 15-12）。灰色板将是背面的旧的系统，而是较新的系统右侧。图 15-13 显示较旧系统中的后面板的示例。要达到此板就必须删除白背侧盖和也金属板。Back panel is behind this metal plate后面板位于此金属板Interconnect cablesFigure 15-12: The back panel is behind a metal plate图 15-12： 的背板是金属板的背后Figure 15-13: Back panel (signal distributor board) in older system图 15-13： 较旧系统中后背板 （信号分配器板）Figure 15-14 shows an example of a back panel in a newer system. To reach this board, it is necessary only to remove the white back side cover. 图 15-14 显示一个更新的系统中的后面板的一个示例。要达到此板，是仅要卸下白背侧盖。Figure 15-14: Back panel (signal distributor board) in newer system图 15-14： 在更新的系统中后背板 （信号分配器板）15.1.2 Parts of the Industrial Computer14.1.2 地区的工业计算机There are two versions of industrial computer chassis configuration. 有两种版本的工业计算机机箱配置。 Systems installed before the beginning of 2006 have one double industrial computer chassis. This chassis has two independent industrial computers (DOS and Windows). 系统安装在 2006年年初前有一双工业计算机机箱。此机箱有两个独立的工业计算机 (DOS 和 Windows)。 Systems installed after the beginning of 2006 have two single industrial computerchasses. The scanner unit is connected to the DOS computer by three (or four) interconnect cables, yellow-green GND cable and a power cable (optional).Inside the DOS computer are some special cards and boards which are inserted into the ISA slots of passive motherboard. The names of the cards are shown in Figure 15-15. (The picture was taken on a single chassis computer.)2006 年年初后安装的系统有两台工业计算机使用。扫描仪连接到由 DOS 计算机 3 （或 4） 互连电缆、 黄绿色吉安达电缆和电源线 （可选）。DOS 计算机内部有一些特殊的卡和插入被动主板的 ISA 插槽的主板。卡的名称将显示在图 15-15。这幅画了一个机箱的计算机上。Figure 15-15: Cards inside the DOS computer (single chassis version) 图 15-15： 卡内 DOS 计算机 （单个机箱版本）The functions of the cards are listed below. 下面列出了卡的功能。-PCD board -PCD microwave unit and -PCD laser control, -PCD signalevaluation. PCD 板 PCD 微波单位和 PCD 激光控制， PCD 信号评价。Interlock card Digital signal input and output, power switching. 互锁卡数字信号输入和输出、 电源开关。PIC card Digital signal evaluation. PIC 卡数字信号评价。Motor driver interface card 电机驱动程序接口卡Transmission of motor encoder signals and motor power.(only for automatic systems) 电机编码器信号和电机功率的传输。（只适用于自动系统）Motor driver card Transmission of motor encoder signals and motor power control. Motion controller card Motor control. 马达驱动卡的电机编码器信号和电机功率控制传输。运动控制器卡电机控制。DOS computer board This card is functioning as a complete DOS computer (calledMeasuring computer or Remote computer). This card control all function and movement of the scanning unit by the operational software and it keeps contact with the Windows (User) computer via an Ethernet interface. 此卡作为完整的 DOS 计算机 （称为的测量计算机或远程计算机） 的 DOS 电脑板。这张卡的所有功能和扫描装置的运动通过业务软件和控制它保持接触 Windows （用户） 的计算机通过以太网接口。Cables connected to the system and the computer (interconnect cables) are described in section 4.2.2. 电缆连接到系统和计算机 （互连电缆） 第 4.2.2 条所述。15.1.3 Operational Software 14.1.3 业务软件There is one-to-one operational software for both computer “sides.” The operational software of the DOS side is wsos2.exe, while the Wintau32.exe runs on the Windows side. Wsos2.exe is used only for service, troubleshooting, and maintenance. 有一对一的业务软件，为计算机双方。DOS 侧的业务软件是 wsos2.exe，而在 Wintau32.exe 运行 Windows 侧。Wsos2.exe 仅用于服务、 故障排除，和维护。It is possible to switch usage of peripherals (monitor, keyboard and mouse) between the DOS and Windows computers. Keyboard shortcuts can be used (e.g. double or double + etc.) depending on the type of the KVM switch. Another possibility is the button(s) on the KVM switch itself. Please see the manual for the KVM switch.有可能在 DOS 和 Windows 计算机之间进行切换的外设 （显示器、 键盘和鼠标） 的使用情况。可以使用键盘快捷方式 （如双 或双 + 等） 取决于的 KVM 交换机类型另一个可能性是按钮上 KVM 切换本身。请参阅 KVM 切换器的手册。 System Diagnostic File 系统诊断文件If you contact Semilab for help with troubleshooting, please provide information about your problem. Additionally, one file is almost always necessary for the proper discussion and problem elimination. This file is the System Diagnostic file. To get this file, turn on both computers and start the Wintau32 operational software.如果您与 Semilab 联系有关故障排除的帮助，请提供有关您问题的信息。此外，一个文件是几乎总是正确的讨论和问题消除所必需的。此文件是系统诊断文件。获取此文件、 两台计算机上启用和启动 Wintau32 业务软件。Before initializing, select the Measure|System Diagnostics menu item (Figure 15-16).在初始化之前, 选择 Measure|System 诊断程序菜单项 （图 15-16)Figure 15-16: Measure|System Diagnostics menu item图 15-16: Measure|System 诊断程序菜单项The following window will appear (Figure 15-17). This report contains information about the system configuration and certain hardware parameters.以下窗口将显示 （图 15-17)。该报告包含有关系统配置和某些硬件参数的信息。Figure 15-17: Example of System Diagnostic file 图 15-17： 系统诊断文件为例Please save this file and send it to Semilab together with the error report.When troubleshooting errors, additional information may be needed. To save time in diagnosing errors, Semilab also needs error specific information. The required additional information will be listed in the section that describes troubleshooting procedure for the error. Please send us this information also with the error report.请保存此文件并将其发送给 Semilab 错误报告一起。诊断错误时, 可能需要的其他信息。若要保存时间诊断错误 Semilab 还需要特定的错误信息。部分中描述的错误故障排除过程中，将列出所需的其他信息。请向我们发送此信息还与错误报告。15.2 Communication ProblemsSometimes there is an error in the Ethernet-based communication between the DOS and Windows computers. These sections provide some instruction to find the source of error and to resolve it. It is recommended to read each section in the order provided.有时在 DOS 和 Windows 计算机之间的基于以太网的通信中有错误。以下各节提供了一些指令，以查找错误的来源及解决它。建议阅读每一节中提供的命令。15.2.1 Windows Side Problems 15.2.1 Windows 侧问题 How can I recognize that there is a connection error? 如何识别有连接错误？The Wintau32 operational software has a status bar at the bottom left corner. When the communication is limited the Down status can be seen (Figure 15-18). Wintau32 业务软件在左下角的状态栏。当通信是有限状态下可以看到 （图 15-18）。Figure 15-18: Down status indicates a communication problem图 15-18 日: 状态下指示通信问题Sometimes the software displays the following error message which refers to limited connectivity. 有时软件将显示以下错误消息所指的是有限的连接。Figure 15-19: “No connection available!” message “No connection available!” messageOne possible reason: UTP cable connection error Two computers communicate with each other by a crosslink UTP cable. Please check the position of plugs of the cable. Sometimes the plug removes from the outlet.图 15-19： 无连接可用 ！消息 无连接可用 ！消息的一个可能的原因： UTP 缆线连接错误两台计算机相互沟通的交联 UTP 线缆。请检查电缆插头的位置。有时插头从电源插座中移除。 How can I check the Wintau32-related connection settings?The wintau32.exe software communicates via Ethernet-based communication with the DOS side software. The parameters of the Wintau32-related Ethernet card can be found in the Network Connection menu of the Windows operating system. (See Figure 15-20.) 如何检查与 Wintau32 相关的连接设置？wintau32.exe 软件通信通过与 DOS 端软件的基于以太网的通信。与 Wintau32 相关的以太网卡的参数可以在 Windows 操作系统的网络连接菜单中找到。（请参见图 15-20。Figure 15-20: Displaying the Windows Network Connections menu图 15-20： 显示 Windows 网络连接菜单After the Network Connections menu item was activated the Network Connections window will appear (Figure 15-21).网络连接菜单项被激活后网络连接窗口将显示 （图 15-21)。Figure 15-21: Network Connections window图 15-21： 网络连接窗口The connection is usually called WT or WT-2000 but other names are also possible. Select the WT icon (or a different name if applicable). The wt Status window will appear (Figure 15-22).连接通常被称为 WT 或 WT-2000年但其他名称也是可行的。选择变换图标 （或一个不同的名称，如果适用的话）。小波变换状态窗口将显示 （图 15-22）。Figure 15-22: The wt Status window 图 15-22： 小波变换状态窗口Press the Properties button. The wt Properties window will appear.按属性按钮。小波变换的属性窗口将出现。Figure 15-23: The wt Properties window图 15-23： 属性窗口Select Internet Protocol (TCP/IP) and press Properties. The TCP/IP Properties window will appear (Figure 15-24).选择 Internet 协议 (TCP/IP)，然后按属性。TCP/IP 属性窗口将显示 （图 15-24）。Figure 15-24: The TCP/IP Properties window图 15-24： TCP/IP 属性窗口Parameters IP address and Subnet mask must be the same as shown in Figure 15-24. The Default gateway and Preferred DNS server fields can be empty. If your system settings are different (and there is no connection between the DOS and Windows systems), modify the parameters to these values, then press OK.参数的 IP 地址和子网掩码必须相同，如图 15-24 所示。默认网关和首选 DNS 服务器字段可以为空。如果您的系统设置是不同 （并且没有 DOS 和 Windows 系统之间的连接） 修改这些的值的参数，然后按确定。Interface setting of the Wintau32 software can be checked or modified using the Measure|Options menu item and the Interface tab. Settings must be as shown in Figure 15-25.可以检查 Wintau32 软件界面设置或修改使用 Measure|Options 菜单项和接口选项卡设置必须图 15-25 所示。Figure 15-25: Measurement Options window, Interface tab Almost all items of Measure menu are gray, or there is no Measure menu. What is wrong?图 15-25： 测量选项窗口中的接口选项卡 几乎所有项目的措施菜单都为灰色，或有没有措施菜单。怎么了？Your copy of Wintau32 software does not have registration. In this case you can see the Unregistered Version words on the top of the Main Window (see Figure 15-26).您的 Wintau32 软件副本并没有注册。在这种情况下，您可以看到主窗口的顶部未注册版本字 （见图 15 26）。Figure 15-26: Unregistered version of Wintau 32 software图 15-26： 未注册的版本 Wintau 32 软件There are two methods for the registration. Method 1: Please copy the id.txt file from the Wintau32 installation disk to the directory of the Wintau32 software (c:wintau32 is the default). 方法 1： 请将 id.txt 文件从 Wintau32 安装磁盘复制到 Wintau32 软件的目录 （c:wintau32 是默认值）。 Method 2: Type your code into the Register Wintau32 window (Figure 15-27). This window can be reached from the Help|Register menu. Your registration code can be found on the cover of the Wintau32 installation disk or in the id.txt file. For more information, refer to section 16.1.6. 方法 2： 您的代码类型到注册 Wintau32 窗口 （图 15-27)。可以从 Help|Register 菜单访问此窗口。上盖的 Wintau32 安装磁盘或 id.txt 文件中，可以找到您的注册码。有关详细信息，请参阅第 16.1.6 条。Figure 15-27: Registration window图 15-27： 注册窗口15.2.2 DOS Side Problems2 DOS 边问题If you are having problems with the DOS side computer, first check all solutions in section 15.2.1 (Windows Side Problems). If those procedures do not fix the problem, then follow the procedures in this section.如果有 DOS 方计算机的问题，首先检查部分 14.2.1 （Windows 侧问题） 中的所有解决方案。如果这些程序做解决问题，然后按照本节中的步骤。 How can I check the DOS side communication interface?After the DOS side computer is turned on, the MS-DOS operating system boots up and performs the commands of autoexec.bat file. During this period, the packet driver of the network card is loaded and the wsos2.exe operational software is started in remote mode (or the UDP command interface software).If the operational software loaded correctly the following screen (Figure 15-28) can be seen: 如何可以检查 DOS 端通信接口？DOS 侧计算机开机后 MS-DOS 操作系统启动，并执行 autoexec.bat 文件的命令。在这段期间的网络卡的数据包驱动程序加载和 wsos2.exe 业务软件启动远程模式 （或 UDP 命令接口软件） 中。如果正确加载操作的软件，可以看到下面的屏幕 （图 15-28)：Figure 15-28: DOS start-up screen for operational software图 15-28： DOS 启动屏幕上的操作软件If the UDP command interface software was started the following screen can be seen:如果 UDP 命令接口软件启动，可以看到以下屏幕：Figure 15-29: DOS start-up screen for UDP command interface software图 15-29： DOS 启动屏幕上的 UDP 命令接口软件If your DOS side screen is different after the system was started, please restart the DOS side computer.如果在系统启动后不同屏幕 DOS 侧请重新启动 DOS 方计算机。 DOS side CPU card was replaced and there is a communication error. What is wrong? DOS 侧 CPU 卡被取代，通信错误。怎么了？If the crosslink cable is connected correctly and there is a communication error, one possible cause is the bad packet driver of network card. DOS side CPU cards have two types of network controller, and they work with different packet driver software. The packet driver is loaded by the autoexec.bat. The versions of packet drivers are loaded by the following lines of the autoexec.bat file.如果交联电缆正确连接，并且有一个通信错误一个可能的原因是网络卡的坏数据包驱动程序。DOS 侧 CPU 卡有两种类型的网络控制器和他们使用不同的数据包驱动程序软件。通过在 autoexec.bat 加载数据包驱动程序。数据包驱动程序的版本加载由 autoexec.bat 文件的以下行。 Version 1: “fe32pd 0x60” in the autoexec.bat file is used for CPU cards with the Realtek chipset.版本 1：fe32pd 0x60，autoexec.bat 文件用于 CPU 卡与 Realtek 芯片组。 Version 2: “e100bpkt 0x60” in the autoexec.bat file is used for CPU cards with the Intel chipset. If the driver does not match the chipset, the following screens can be seen (Figure 15-30):版本 2：e100bpkt 0x60，autoexec.bat 文件用于 CPU 卡具有英特尔芯片组。如果该驱动程序与芯片组不匹配以下屏幕可以看到 （图 15-30)：Figure 15-30: Packet driver error messages图 15-30： 包驱动程序错误消息If one of them can be seen, modify the relevant line to another version in the autoexec.bat. If the or the file