哈工大-sem试验报告

1、材料科学与工程学院扫描电镜与能谱的原理及应用实验报告先进材料表征技术课程学生实验报告实验名称：扫描电镜与能谱仪的原理及应用实验时间：2015 年 11 月 6 日哈尔滨工业大学深圳研究生院第 页，共 页材料科学与工程学院扫描电镜与能谱的原理及应用实验报告I. Purpose1. Be familiar with the structure and principle of scanning electron microscope .2. Be familiar with the requirement of sample preparation.3. Know about the operat

2、ion specification of SEM, be familiar with the differences between image of secondary electron and backscatter electron.4. Know about the operation specification of EDS, be familiar with the point analysis, line analysis and mapping.II. Principles2.1Resolution and contrastFor imaging, resolution mea

3、ns the minimum distance between two distinct points.For composition analysis, resolution means the minimum region can be analyzed. In SEM system, resolution depends on the diameter of the incident electron beam and signal type.Contrast means the difference of brightness , and it can be caused by mor

4、phology or atomic number. The morphology contrast is always observed in SE image, and the atomic contrast is always observed in BSE image.2.2 Electron microscopy imagingThe beam emitted from the electron gun is focused at the surface of the sample through a series of electromagnetic lens (Fig 1.). T

5、he last lens equipped with a scanning coil can drive electron beam scan on the surface. The interaction between high energy electron beam and sample generate various signals, and the signals can be received by the detector. Do this point by point and we can get a image (Fig 2.).Fig 1.第 页，共 页材料科学与工程学

6、院扫描电镜与能谱的原理及应用实验报告Fig 2. the scanning process to form a image2.3 SE image and BSE imageSecondary electron signal are generated from the very surface (Fig 3.), so the intensity of the signal sensitive to the orientation of the incident beam. Along angle formed by surface and incident beam increases,

7、the secondary electron yield increase. Therefore, the SE image is suitable for display the morphology contrast.From Fig 2. we can see that backscatter electron is generated from a relative big volume near to the surface, so the image has poorer resolution .The BSE yield is sensitive to the atomic nu

8、mber (40), as a result, the regions where the heavier atomic exists are brighter than other regions.Fig 3. the region of SE (left) and BSE (right)2.4 EDS-Primary X-raysX-ray is a result of inelastic collision between the incident beam and sample. When high energy electron interact with atomic, it ca

9、n stimulate inner electron. The inner energy level has a hole, and the outer electron will move to the hole and the atom emits the第 页，共 页材料科学与工程学院扫描电镜与能谱的原理及应用实验报告primary X-ray at the same time (Fig 4.). The primary X-ray is associated with the atomic number, so we can identify the elements by prima

10、ry and roughly measure the relative quantity of different elements by calculate the area between the peak on spectrum.Fig . the generation of X-rayIII. Equipment3.1 扫描电镜电镜主体主要是由电子光学系统、样品室、检测器以及真空抽气系统组成。电 子光学系统包括电子枪、电磁透镜、扫描线圈等。电源电路系统由控制镜体部分的 各种电源、信号处理、图象显示和记录系统以及用于全部电气部分的操作面板构 成。真空系统由用于低真空抽气的旋转机械泵 (R

11、P)和高真空抽气的油扩散泵( DP) 或离子泵构成。图 1 所示为我院实验室使用的扫面电子显微镜，该扫描电镜主要技术参数如下：第 页，共 页材料科学与工程学院扫描电镜与能谱的原理及应用实验报告图 1 实验室所用的扫描电子显微镜a) 电子枪：冷场发射型b) 分辨率： 15KV ： 1.5nm(WD ： 12mm)， 1kV ：2.1nmc) 加速电压： 0.5 30kVd) LOWMAG 模式： 302,000e) HIGHMAG 模式： 250500,0003.2 能谱仪能谱仪主要由控制及指令系统、 X 射线信号检测系统、信号转换及储存系统、 数据输出及显示系统组成，能谱仪剖析图如图 2 所示

12、。电子束从样品中所激发的 X 射线信号由 X 射线探测器接收，形成电压脉冲，其脉冲高度与进入的 X 射线的能量 成正比，然后经放大器进一步放大成型，送到多道分析器，按照 X 射线能量大小分 别在不同的信道内记数，最后在记录仪或显示器上把脉冲数即X 射线的强度与 X 射线能量的关系曲线显示出来，即 X 射线能谱图，横坐标是 X 射线的能量，纵坐标是第 页，共 页材料科学与工程学院扫描电镜与能谱的原理及应用实验报告X-射线强度。图 2 EDAX 能谱仪剖析组成图EDAX 能谱仪的能谱可对元素( 4Be 92U)范围进行定性和定量分析，性能 包括：a) 定点分析 -获得样品中一个选定点的全谱分，确定

13、夹杂、第二相等选定点所 含元素的种类和浓度(定量分析)；b) 线分析 -获得样品在一个选定线上的某一元素的浓度变化(定性分析)；c) 元素的面分布 -获得样品在一个选定区域内某一元素的浓度分布图(定性分 析)。IV. Procedure1) Know about the structure and principle of the SEM and EDS, and be familiar with the operation spefication.2) Cleaning the contamination on the surface is required in sample prepar

14、ation. The insulator sample should be coated with Pt or C. Keep the sample dry before tested.3) To obtain high quality SEM image, we should modify various parameters such as第 页，共 页材料科学与工程学院扫描电镜与能谱的原理及应用实验报告the acceleration voltage, the beam current, aperture of objective lens, work distance, slant a

15、ngle of sample, focus and astigmatism correction, magnification, brightness and contrast ratio.4) EDS microanalysisStart up the SEM.;Make vacuum for 1015min, then start up the EDS;Select proper parameter and click “Image” to get SEM image; Click “Spc” to do a full spectrum analysis of the selected a

16、rea; Right-click and do point analysis, line analysis and mapping.5) Export and analyze the experiment data.V. Results and analysisFirst, we should clarify what the sample is.The EDS result is shown as Fig 5. We can see that there are some peaks are marked as the primary X-ray of element O, Mn and C

17、o. But some peaks are not marked. We should know whether these peaks belong to the above 3 elements.ElementWt%At%OK19.4946.04MnK49.6434.16CoK30.8719.80MatrixCorrectionZAFI found the Primary X-ray of the 3 elements online, as chart 1. Shown. We found that a peak with energy about 2.1keV is not belong

18、 to the 3 elements. It may be the K of element P, but I dont why this peak is not marked.ElementK1K2K1L1L1L1O0.523Mn5.8985.8876.4900.6360.647Co6.9306.9157.6490.7750.790So, the sample is mainly composed by element O, Mn, and Co, maybe element P also exist in the sample.The atomic ratio O:Mn:Co is about 9:7:4.What i