爱德华scrubber高处理量

1、the content of this presentation is confidential and should not be distributed to a third party without prior authorization from edwards. edwards limited 2007atlas2the content of this presentation is confidential and should not be distributed to a third party without prior authorization from edwards

2、. edwards limited 2007atlas rangecombustion abatement combined with wet scrubbing stagessuitable for etch applicationslow coo, user friendly solutionexcellent reliability on harshest processespfc gas abatement capabilitythe content of this presentation is confidential and should not be distributed t

3、o a third party without prior authorization from edwards. edwards limited 2007atlasconstruction4the content of this presentation is confidential and should not be distributed to a third party without prior authorization from edwards. edwards limited 2007atlas layoutall utility connections at topall

4、electrics housed in front-accessible sectiontouch-sensitive colour screeninlet pipework design avoids powder & liquid trappinghydro-cyclone: self-cleaning water filtering deviceeasily accessible heat exchanger and water pumpsuse of cpvc components, large diameters minimise risk of blockageeveryt

5、hing housed in a single cabinetintegral drip-traycpvc is a fm-approved flame-retardant plastic5the content of this presentation is confidential and should not be distributed to a third party without prior authorization from edwards. edwards limited 2007gas pathwateruntreated process gascombustion by

6、-productsdetoxified gasfuel + airthe content of this presentation is confidential and should not be distributed to a third party without prior authorization from edwards. edwards limited 2007atlascombustion section7the content of this presentation is confidential and should not be distributed to a t

7、hird party without prior authorization from edwards. edwards limited 2007inletsl-shaped pipe workavoid blockage by solid/liquid by-productsup to 6 inletstms option availableinlet temperature controlavoid by-products condensation8the content of this presentation is confidential and should not be dist

8、ributed to a third party without prior authorization from edwards. edwards limited 2007combustion sectioninitial gas treatment: combustionoxidation of deposition gasessih4 + o2 sio2 + 2h2oreduction of clean gases (nf3, f2)2f2 + ch4 + o2 4hf + co2 anti-clogging inlet headinward fired combustorporous

9、ceramic constructionexcellent corrosion resistanceproven powder handlingsafe (leak-proof, cold outer wall)atlas inletspneumatic actuatorsspringsinlet head self cleaning mechanisminlet nozzle10the content of this presentation is confidential and should not be distributed to a third party without prio

10、r authorization from edwards. edwards limited 2007combustor150mm150mm11the content of this presentation is confidential and should not be distributed to a third party without prior authorization from edwards. edwards limited 2007combustor: inward fired combustionfuel gas + airprocess gasflame-less,

11、low temperature combustion800oc12the content of this presentation is confidential and should not be distributed to a third party without prior authorization from edwards. edwards limited 2007benefits 1: uniform temperatureflame-less combustioncombustion at the wallheat radiation to the centerlow tem

12、perature 800oclow nox emissions ( 180 cgas temp. 1150ocquench temp. 80ocdrain level highfuel/air press. +3”wgfuel/air temp. 150 cn2 pressure 2” wgsystem warning output attention requiredsystem alarm immediate system shutdownflame detectorquench water flow 12 psi(tpu and kronis versions only)fuel pre

13、ssure. 60 ccombustor pressurecabinet extraction pressure +0.4”wginlet temperature 170cweir temp. 80occombustor wall temp. 70ocpacked tower water flow 8 slmwater pressure 2 bar gaugethe content of this presentation is confidential and should not be distributed to a third party without prior authoriza

14、tion from edwards. edwards limited 2007atlas installed basesince 199426the content of this presentation is confidential and should not be distributed to a third party without prior authorization from edwards. edwards limited 2007inward-fired combustor installed baseatlas use the inward-fired combust

15、ion technologyexpertise gained with the tpu range used in semiconductor fabs since 1994over 3000 systems installed worldwidemajor users and oemintel, ibm, ti, micronumc, psc, winbond, auo, cmoelpida, tti, nec, hitachi, sonytech, hnsst, infineon, atmelsmicnovellus, asm, amat, tel, kokusai, jusung27th

16、e content of this presentation is confidential and should not be distributed to a third party without prior authorization from edwards. edwards limited 2007umci (singapore)installed since december 2006umc12a (taiwan)installed since november 2006kwanjyu-nano (korea)installed june 2007rexchip (taiwan)cmo (fpd taiwan)tianma(chendu,wuhan)gsmc28the content of this presentation is confidential and should