电阻率杂质浓度换算表

1、掺磷硅的电阻率（p P）、掺硼磷或硼掺杂浓度P PP bP PP bP PP bP P(cm-3)0.000.100.200.31.E+124.30E+031.30E+043.90E+031.20E+043.60E+031.10E+043.30E+032.E+122.10E+036.50E+032.00E+036.20E+031.90E+035.90E+031.90E+033.E+121.40E+034.30E+031.40E+034.20E+031.30E+034.10E+031.30E+034.E+121.10E+033.30E+031.00E+033.20E+031.00E+033.10

2、E+039.90E+025.E+128.50E+022.60E+038.30E+022.60E+038.20E+022.50E+038.00E+026.E+127.10E+022.20E+037.00E+022.10E+036.90E+022.10E+036.70E+027.E+126.10E+021.90E+036.00E+021.80E+035.90E+021.80E+035.80E+028.E+125.30E+021.60E+035.20E+021.60E+035.20E+021.60E+035.10E+029.E+12 :4.70E+021.50E+034.70E+021.40E+03

3、4.60E+021.40E+034.60E+021.E+134.30E+021.30E+033.90E+021.20E+033.50E+021.10E+033.30E+022.E+13 :2.10E+026.50E+022.00E+026.20E+021.90E+025.90E+021.80E+023.E+131.42E+024.35E+021.37E+024.21E+021.33E+024.08E+021.29E+024.E+131.07E+023.27E+021.04E+023.19E+021.02E+023.11E+029.92E+015.E+138.53E+012.61E+028.37

4、E+012.56E+028.21E+012.51E+028.05E+016.E+137.12E+012.18E+027.00E+012.14E+026.89E+012.11E+026.78E+017.E+13：6.11E+011.87E+026.02E+011.84E+025.94E+011.82E+025.86E+018.E+135.35E+011.64E+025.28E+011.62E+025.22E+011.60E+025.16E+019.E+134.76E+011.45E+024.71E+011.44E+024.66E+011.42E+024.61E+011.E+144.29E+011

5、.31E+023.90E+011.19E+023.58E+011.09E+023.31E+012.E+14 :2.16E+016.56E+012.06E+016.25E+011.97E+015.97E+011.88E+013.E+141.45E+014.38E+011.40E+014.24E+011.36E+014.11E+011.32E+014.E+141.09E+013.29E+011.07E+013.21E+011.04E+013.14E+011.02E+015.E+148.79E+002.64E+018.62E+002.59E+018.46E+002.54E+018.30E+006.E

6、+147.36E+002.20E+017.24E+002.17E+017.12E+002.13E+017.01E+007.E+146.33E+001.89E+016.24E+001.87E+016.16E+001.84E+016.08E+008.E+145.56E+001.66E+015.50E+001.64E+015.43E+001.62E+015.37E+009.E+144.96E+001.48E+014.91E+001.46E+014.86E+001.44E+014.81E+001.E+154.48E+001.33E+014.09E+001.21E+013.76E+001.11E+013

7、.48E+002.E+152.31E+006.74E+002.20E+006.42E+002.11E+006.14E+002.02E+003.E+151.57E+004.54E+001.53E+004.40E+001.48E+004.26E+001.44E+004.E+151.20E+003.44E+001.18E+003.36E+001.15E+003.28E+001.12E+005.E+159.78E-012.78E+009.61E-012.72E+009.44E-012.67E+009.27E-016.E+158.28E-012.33E+008.16E-012.30E+008.04E-0

8、12.26E+007.92E-017.E+157.20E-012.02E+007.11E-011.99E+007.02E-011.96E+006.93E-018.E+156.38E-011.78E+006.31E-011.76E+006.24E-011.74E+006.17E-019.E+155.74E-011.59E+005.69E-011.58E+005.63E-011.56E+005.58E-011.E+165.23E-011.44E+004.81E-011.32E+004.45E-011.22E+004.15E-012.E+162.87E-017.67E-012.76E-017.34E

9、-012.65E-017.04E-012.56E-013.E+162.06E-015.37E-012.00E-015.22E-011.95E-015.08E-011.90E-014.E+161.64E-014.20E-011.61E-014.12E-011.58E-014.03E-011.55E-015.E+161.38E-013.49E-011.36E-013.43E-011.34E-013.38E-011.32E-016.E+161.20E-013.01E-011.19E-012.97E-011.17E-012.93E-011.16E-017.E+161.08E-012.66E-011.0

10、6E-012.63E-011.05E-012.60E-011.04E-018.E+169.78E-022.40E-019.69E-022.37E-019.61E-022.35E-01P 9.53E-029.E+169.01E-022.19E-018.94E-022.17E-018.87E-022.15E-018.81E-021.E+178.38E-022.02E-017.86E-021.88E-017.43E-021.76E-017.05E-022.E+175.41E-021.22E-015.25E-021.18E-015.11E-021.15E-014.98E-023.E+174.30E-0

11、29.32E-024.22E-029.12E-024.15E-028.93E-024.08E-024.E+173.69E-027.73E-023.65E-027.61E-023.60E-027.49E-023.56E-025.E+173.30E-026.71E-023.27E-026.63E-023.23E-026.54E-023.20E-026.E+173.01E-025.98E-022.99E-025.92E-022.97E-025.86E-022.94E-027.E+172.80E-025.43E-022.78E-025.39E-022.76E-025.34E-022.74E-028.E

12、+172.62E-025.00E-022.61E-024.96E-022.59E-024.92E-022.58E-029.E+172.48E-024.65E-022.47E-024.62E-022.45E-024.58E-022.44E-021.E+182.36E-024.35E-022.25E-024.10E-022.16E-023.88E-022.07E-022.E+181.66E-022.81E-021.62E-022.72E-021.58E-022.64E-021.54E-023.E+181.32E-022.14E-021.30E-022.10E-021.27E-022.05E-021

13、.25E-024.E+181.11E-021.76E-021.09E-021.73E-021.08E-021.70E-021.06E-025.E+189.60E-031.50E-029.47E-031.48E-029.34E-031.46E-02P 9.22E-03：6.E+188.46E-031.31E-028.36E-031.30E-028.27E-031.28E-028.17E-037.E+18 :7.57E-031.17E-027.50E-031.16E-027.42E-031.14E-02:7.34E-038.E+186.86E-031.06E-026.79E-031.05E-026

14、.73E-031.04E-026.67E-039.E+18 :6.27E-039.63E-036.22E-039.55E-036.16E-039.47E-03P 6.11E-031.E+195.78E-038.87E-035.35E-038.22E-034.99E-037.67E-034.68E-032.E+19 :3.25E-035.01E-033.11E-034.81E-032.99E-034.62E-03:2.87E-033.E+192.27E-033.53E-032.20E-033.43E-032.14E-033.33E-032.08E-034.E+191.75E-032.73E-03

15、1.71E-032.67E-031.68E-032.61E-031.64E-035.E+191.43E-032.23E-031.41E-032.19E-031.38E-032.15E-031.36E-036.E+191.21E-031.88E-031.20E-031.86E-031.18E-031.83E-031.16E-037.E+191.06E-031.63E-031.04E-031.61E-031.03E-031.59E-03P 1.02E-038.E+199.38E-041.44E-039.28E-041.43E-039.18E-041.41E-039.08E-049.E+198.45

16、E-041.29E-038.37E-041.28E-038.29E-041.26E-038.21E-041.E+207.70E-041.17E-037.08E-041.07E-036.57E-049.83E-046.13E-042.E+20 :4.29E-046.02E-044.12E-045.75E-043.97E-045.49E-043.84E-043.E+203.10E-044.10E-043.10E-043.90E-043.00E-043.80E-042.90E-044.E+202.60E-043.10E-042.50E-043.00E-042.50E-042.90E-042.40E-

17、045.E+202.20E-042.50E-042.20E-042.40E-042.20E-042.40E-042.10E-046.E+202.00E-042.10E-042.00E-042.00E-042.00E-042.00E-041.90E-047.E+201.80E-041.80E-041.80E-041.70E-041.80E-041.70E-041.80E-048.E+201.70E-041.60E-041.70E-041.50E-041.70E-041.50E-041.70E-049.E+201.70E-041.40E-041.70E-041.40E-041.60E-041.40

18、E-041.60E-04率（p p）、掺硼硅的电阻率（p b）与掺杂浓度（cm-3）换算表掺磷硅的电阻率（p p）、掺硼硅的电阻率（p b） : （ Q -cm）0.3p bp Pp bp Pp bp Pp bp Pp b00.400.500.600.701.00E+043.00E+039.30E+032.80E+038.70E+032.70E+038.20E+032.50E+037.70E+035.70E+031.80E+035.40E+031.70E+035.20E+031.60E+035.00E+031.60E+034.80E+034.00E+03：1.30E+033.80E+031.2

19、0E+033.70E+031.20E+033.60E+031.10E+03:3.50E+033.00E+039.70E+023.00E+039.40E+022.90E+039.20E+022.80E+039.00E+022.80E+032.50E+03 :7.90E+022.40E+037.70E+022.40E+037.60E+022.30E+037.50E+02:2.30E+032.10E+036.60E+022.00E+036.50E+022.00E+036.40E+022.00E+036.30E+021.90E+031.80E+03 :5.70E+021.80E+035.70E+021

20、.70E+035.60E+021.70E+035.50E+02:1.70E+031.60E+035.10E+021.60E+035.00E+021.50E+034.90E+021.50E+034.90E+021.50E+031.40E+03 :4.50E+021.40E+034.50E+021.40E+034.40E+021.40E+034.40E+02p 1.30E+031.00E+033.00E+029.30E+022.80E+028.70E+022.70E+028.20E+022.50E+027.70E+025.70E+02 J1.80E+025.40E+021.70E+02 15.20

21、E+021.60E+025.00E+021.60E+02:4.80E+023.96E+021.25E+023.84E+021.22E+023.73E+021.18E+023.63E+021.15E+023.53E+023.04E+029.69E+012.97E+029.48E+012.90E+029.27E+012.84E+029.08E+012.78E+022.47E+027.90E+012.42E+027.76E+012.38E+027.62E+012.34E+027.49E+012.29E+022.08E+026.68E+012.04E+026.57E+012.01E+026.48E+0

22、11.98E+026.38E+011.95E+021.79E+025.78E+011.77E+025.70E+011.74E+025.63E+011.72E+025.56E+011.70E+021.58E+025.10E+011.56E+025.04E+011.54E+024.98E+011.52E+024.92E+011.50E+021.41E+024.56E+011.39E+024.51E+01：1.38E+024.46E+011.36E+024.42E+011.35E+021.01E+023.07E+019.36E+012.87E+018.74E+012.69E+018.19E+012.

23、54E+017.71E+015.71E+01 11.80E+015.47E+011.73E+015.26E+011.67E+015.05E+011.61E+014.87E+013.99E+011.28E+013.87E+011.25E+013.76E+011.21E+013.66E+011.18E+013.56E+013.07E+01 9.96E+003.00E+019.74E+002.93E+019.53E+002.87E+019.33E+002.81E+012.49E+018.15E+002.45E+018.01E+002.40E+017.87E+002.36E+017.73E+002.3

24、2E+012.10E+016.91E+002.07E+016.80E+002.04E+016.70E+002.01E+016.61E+001.98E+011.81E+016.00E+001.79E+015.92E+001.77E+015.85E+001.74E+015.77E+001.72E+011.60E+015.30E+001.58E+015.24E+001.56E+015.19E+001.54E+015.13E+001.53E+011.43E+014.76E+001.41E+014.71E+001.40E+014.66E+001.38E+014.62E+001.37E+011.03E+0

25、13.24E+009.55E+003.03E+008.93E+002.85E+008.38E+002.69E+007.90E+005.88E+001.94E+005.64E+001.87E+005.42E+001.80E+005.22E+001.74E+005.03E+004.14E+001.40E+004.02E+001.36E+003.91E+001.33E+003.81E+001.29E+003.71E+003.21E+001.10E+003.14E+001.08E+003.07E+001.06E+003.01E+001.04E+002.95E+002.63E+009.12E-012.5

26、8E+008.96E-012.53E+008.82E-012.49E+008.68E-012.45E+002.23E+007.81E-012.19E+007.70E-012.16E+007.59E-012.13E+007.49E-012.10E+001.94E+006.85E-011.91E+006.76E-011.89E+006.68E-011.87E+006.60E-011.84E+001.72E+006.11E-011.70E+006.04E-011.68E+005.98E-011.66E+005.92E-011.64E+001.54E+005.52E-011.53E+005.47E-0

27、11.51E+005.42E-011.50E+005.37E-011.48E+001.13E+003.89E-011.06E+003.67E-019.93E-013.47E-019.37E-013.30E-018.87E-016.77E-012.47E-016.52E-012.39E-016.29E-012.31E-016.08E-012.24E-015.88E-014.95E-011.86E-014.82E-011.82E-014.70E-011.78E-014.59E-011.74E-014.49E-013.95E-011.52E-013.88E-011.49E-013.81E-011.4

28、7E-013.74E-011.44E-013.67E-013.33E-011.30E-013.28E-011.28E-013.23E-011.27E-013.18E-011.25E-013.14E-012.89E-011.15E-012.86E-011.13E-012.82E-011.12E-012.79E-011.11E-012.76E-012.58E-011.03E-012.55E-011.02E-012.52E-011.01E-012.50E-011.00E-012.47E-012.33E-01 :9.45E-022.31E-019.37E-022.29E-019.30E-022.27E

29、-019.22E-02P 2.25E-012.13E-018.74E-022.12E-018.68E-022.10E-018.62E-022.08E-018.56E-022.07E-011.66E-016.72E-021.58E-016.44E-021.50E-016.19E-021.43E-015.96E-021.37E-011.11E-014.87E-021.08E-014.75E-021.05E-014.65E-021.02E-014.55E-029.99E-028.76E-02 :4.02E-028.59E-023.96E-028.43E-023.90E-028.27E-023.84E

30、-028.13E-027.38E-023.52E-027.27E-023.48E-027.17E-023.44E-027.07E-023.40E-026.98E-026.47E-023.17E-026.39E-023.15E-026.32E-023.12E-026.25E-023.09E-026.18E-025.80E-022.92E-025.75E-022.90E-025.69E-022.88E-025.64E-022.86E-025.58E-025.29E-022.72E-025.25E-022.71E-025.21E-022.69E-025.16E-022.67E-025.12E-024

31、.89E-022.56E-024.85E-022.55E-024.82E-022.53E-024.78E-022.52E-024.75E-024.55E-022.43E-024.52E-022.41E-024.49E-022.40E-024.47E-022.39E-024.44E-023.69E-02 :2.00E-023.53E-021.93E-023.38E-021.87E-023.24E-021.81E-023.12E-022.56E-021.51E-022.49E-021.47E-022.42E-021.44E-022.36E-021.41E-022.30E-022.01E-02 :1

32、.23E-021.97E-021.21E-02：1.93E-021.19E-021.89E-021.17E-02P 1.86E-02；1.67E-021.04E-021.64E-021.03E-021.62E-021.01E-021.59E-021.00E-021.57E-021.44E-02 :9.11E-031.42E-028.99E-03 :1.40E-028.88E-031.38E-028.77E-03P 1.36E-02：1.27E-028.08E-031.25E-027.99E-031.24E-027.90E-031.22E-027.82E-031.21E-021.13E-02 :

33、7.27E-031.12E-027.20E-03 :1.11E-027.13E-031.10E-027.06E-03:1.09E-02：1.03E-026.61E-031.02E-026.55E-031.01E-026.49E-039.98E-036.44E-039.89E-039.39E-03 :6.06E-039.31E-036.01E-039.23E-035.96E-039.16E-035.91E-03P 9.08E-037.18E-034.40E-036.76E-034.15E-036.39E-033.93E-036.05E-033.73E-035.75E-034.45E-03 j2.

34、77E-034.29E-032.67E-034.14E-032.58E-034.00E-032.49E-03:3.87E-033.24E-032.03E-033.16E-031.98E-033.08E-031.93E-033.00E-031.88E-032.93E-032.56E-031.61E-032.50E-031.58E-032.45E-031.54E-032.40E-031.51E-032.36E-032.11E-031.34E-032.08E-031.31E-032.04E-031.29E-032.01E-031.27E-031.98E-031.80E-031.15E-031.77E

35、-031.13E-031.75E-031.11E-031.72E-031.10E-031.70E-031.57E-031.01E-031.55E-039.94E-041.53E-039.82E-041.51E-039.71E-04P 1.49E-031.39E-038.98E-041.38E-038.89E-041.36E-038.80E-041.35E-038.71E-041.33E-031.25E-038.13E-041.24E-038.06E-041.23E-037.98E-041.21E-037.91E-041.20E-039.11E-045.76E-048.49E-045.43E-0

36、47.94E-045.15E-047.47E-044.89E-047.04E-045.26E-04 :3.71E-045.05E-043.60E-044.85E-043.49E-044.67E-043.39E-044.50E-043.70E-042.90E-043.60E-042.80E-043.50E-042.80E-043.40E-042.70E-043.30E-042.90E-04 12.40E-042.80E-042.40E-042.70E-042.30E-042.70E-042.30E-04P 2.60E-04：2.30E-042.10E-042.30E-042.10E-042.20

37、E-042.10E-042.20E-042.10E-042.20E-042.00E-041.90E-041.90E-041.90E-041.90E-041.90E-041.90E-041.90E-041.80E-041.70E-041.80E-041.70E-041.80E-041.70E-041.80E-041.60E-041.80E-041.60E-041.50E-041.70E-041.50E-041.70E-041.50E-041.70E-041.40E-041.70E-041.40E-041.30E-041.60E-041.30E-041.60E-041.30E-041.60E-04

38、1.30E-041.60E-041.30E-04p pp bP PP b0.800.902.40E+037.20E+032.20E+036.90E+031.50E+034.70E+031.50E+034.50E+031.10E+033.40E+031.10E+033.30E+038.90E+022.70E+038.70E+022.70E+037.30E+022.30E+037.20E+022.20E+036.30E+021.90E+036.20E+021.90E+035.40E+021.70E+035.40E+021.70E+034.80E+021.50E+034.80E+021.50E+03

39、4.30E+021.30E+034.30E+021.30E+032.40E+027.30E+022.20E+026.90E+021.50E+024.70E+021.50E+024.50E+021.12E+023.44E+021.09E+023.35E+028.89E+012.72E+028.71E+012.67E+027.36E+012.25E+027.24E+012.22E+026.29E+011.92E+026.20E+011.90E+025.49E+011.68E+025.42E+011.66E+024.87E+011.49E+024.81E+011.47E+024.37E+011.34

40、E+024.33E+011.32E+022.40E+017.29E+012.27E+016.91E+011.55E+014.69E+011.50E+014.53E+011.15E+013.47E+011.12E+013.38E+019.14E+002.75E+018.96E+002.69E+017.60E+002.28E+017.48E+002.24E+016.51E+001.95E+016.42E+001.92E+015.70E+001.70E+015.63E+001.68E+015.07E+001.51E+015.02E+001.49E+014.57E+001.36E+014.53E+00

41、1.34E+012.55E+007.47E+002.42E+007.08E+001.68E+004.85E+001.62E+004.69E+001.26E+003.61E+001.23E+003.52E+001.02E+002.89E+009.97E-012.83E+008.54E-012.41E+008.41E-012.37E+007.39E-012.07E+007.29E-012.04E+006.53E-011.82E+006.45E-011.80E+005.86E-011.63E+005.80E-011.61E+005.32E-011.47E+005.28E-011.46E+003.14E-018.42E-013.00E-018.03E-012.17E-015.70E-012.11E-015.53E-011.7