改善孔壁粗糙度

1、改善孔壁粗糙度（上海美维电子有限公司201600 ）杜晓平 张春生 殳伟The I rrpr ovement of Roughness of Hol ewallDu Xi aopi ng Zhang Chunsheng ShuMi1、项目简介：孔粗是钻孔工序的重要控制项目，目前业内标准基本上定在30um,我司 目前的内部过程监控的标准是38um,由于客户对电气性能要求的提高，以及尖 端产品安全性能的要求，使得客户对样板孔粗的要求不断提高，例如OPC定单中 许多高层背板的孔壁质量的要求25um,在这祥的情势下，我们必须在现有的工 艺和控制方法的基础上做优化，以实现有能力稳定控制孔粗25um的目标

2、。2.设定目标：期望通过各Si ze钻嘴的DOE实验，找到关键因子和最佳水平，改善孔壁质量, 同时期望找到孔粗控制在1.0M I下的参数因应孔粗25um要求的板子。3.缺陷示意图:4. 样本量测说明：孔壁粗糙度，以平均值为样本，每一样本做4个切片，每个切片6个读数, 以um为单位，共24个数据，合并计算其平均值。5. 特性要因分析（鱼骨图）machine mat eiialEnvirtinni EntHole roughnessfeed 二X、版re"point / speedmethods备注:在现有的生产条件中stack height）叠板数），每次实验固定一台机器， 实验前保证

3、vacuum （抽真空）在110- 130hPa.清洗夹头，选择动态Run- out在 8um以下并保持t ape probl em （胶带贴紧度）和ent ry/ back叩（盖板/垫板 体系）不变的情况下，考察F （落速）、S（转速）、H（最大钻孔数）、R （钻咀翻 磨次数）、B（回刀速）和V（供应商）6个因子。6. 第一谐段实验配置和解析：计划构想：安排从0. 3rm| 0. 4rm 0. 5rrm 1. Onm的实验，以考察不同尺寸钻咀 对应的最佳水平。条件：1、1. 6run L6;2、叠板数：均为两块一叠。3、钻咀无特别注明则选用Uni on-t ool;4、钻孔完毕后至PPTH后

4、进行取样切片，每孔取最大值；5、品质特性评估值为所有孔粗读数的均值。1.0 0. 3rm）钻嘴1.1因子水平设计：采用钻孔参数F, S, H, R; B和V为6因子2水平DOE实验,共16次实验。因子F(i PRS( kr pm)H(hits)R( t i mes)VB(i p"1708010000Uni on-1 ool2002909620002Tul on10001.2实验结果:RUN123456789101112131415AveKfex12525302025253030253525303030352835230253030302535253025252525353028.33

5、53252525202025252525252025302025243042530352525302530303530252525252835530303035253530353035303025353531.335630302525303025303035252530303028.735735303035253030302530303035252529.735830253025302525253035303025303028.3351.3.正交表及Run结果本次实验输出为Y1:切片15个读数之平均值Fact or1234567r esul tRUNFSHRVBE1Average1111111

6、128211122222& 3312211222441222211285212121231.3621221212& 77221122129.78221211228.3水平之和T110&3116.3114.3113109115.6114.4/水平之和T2118110112113.3117.3110.7111.9/极差R9.76.32.30.38.34.92.5/列平方和S11.764.960.660.018.613.00.78/ST=29.781.4.方差分析:Se =SH+SR+SE1=1.45Fact or列平方和(Si )自由度(fi )均方和(Vi )F比(F)贡

7、献率 (P%)显著性F11.76111.7635.6439.38* S4.9614.9615.0315.55*V8.6118.6126.0927.80*B3139.098.97误差项e1.4530.33/8.3FO.01(1,3)=34.12F0.05(1,3)=10. 13F1>F0.01(1,3)故 Feedrate 为特显因子FO.01(1,3)>Fv,Fs>F0.05(1,3)故 Vendor 和 Speed 为显著因子。 贡献率 Feerat e>Vendor >Speed>Ret ract，总的贡献率为 91.7%1.5.贡献率柏拉图Fact o

8、rFSHRVB特性值孔粗均值F1S2V1显著性 *t贡献率39.3815.5527.80综合最佳值F1S2V1结论：1、F1.S2, V1为经Cross table分析后的较佳的参数条件；2、以F,S, V第二谐段实验保留因子；其余因子视为常数项，以便 找出最佳操作条件。3、实验中的最佳结果及对应条件：孔粗均值24um,最大值30um（条 件F1S2V1）,没有达到我们的设定目标。2.00.4mn 钻咀2.1因子水平设计:因子F(i PRS( kr prr|H(hits)R( t i mes)VB(i pm)1607010000Uni on-1 ool20021209920002Tul on1

9、0002.2实验结果:Run12345678910111213141516AveLfax11520201520202015151515202015202017.82022020252525202020202015252020202020.92532020151520152025202015202020202019.12541525202025202020202020252520202521.32551515202025252520252025202025202521.62562025253025252530252520253025252525.330715 15 15 25 25 20 15

10、15 15 20 15 20 15 20 15 15 17.5 251.6 Cross tabl e820152020201515 20 252020202520252520.3252.3.正交表及Run结果:RunFSHRVBE1Ave1111111117.8132111222220.9383122112219.0634122221121.2505212121221.5636212212125.3137221122117. 5008221211220.313T179. 06385.62576.56375. 93875.93880.93881.875/T284. 6887& 12587

11、. 18887. 81381.25082.81381.875/R-5.6257.500-10.625-11.875-5.313-1.8750.000/S3.95517.03114.11117. 6273.5280.4400.000/ST=46.69192.4.方差分析Error f act or =SB+Se1=0. 440因子(Si )(fi )(Vi )(F)(P%)显著性F3.955113.955117.98&0S7.03117.03131.9614.59H14.111114. 11164. 1429.28*R17.627117.62780. 1237.28*V3.52813.5

12、2816.047.01Er r or0. 4420. 2214. 84FO.01( 1,2)=98.50 F0.05(1,2)=18.51FO. 01(1,2) >FH>FR >F0. 05(1,2),所以H, R为显著因子，落速及转速，供应商, 回刀速为不显著因子。2.5贡献率柏拉图:2. 6 Cross t abl eFact orFSHRVB特性值孔粗均值H1R1显著性t*贡献率29.2837.28综合最佳值H1R1结论：1、H1,R1为经Cross table分析后的较佳的参数条件；2、以H,R第二谐段实验保留因子；其余因子视为常数项，以便找出最佳操作条件。3、从实验

13、结杲可知，目前的0.4mm参数可以实现孔粗25um以下的设定 目标。3. 0 0. 5mn钻嘴：3.1因子水平设计因子F(ipm)S(krprr)Rep( t i nes)H(hits)V11107001000ST( Uni on-1 ool)21809522000UC( Uni on-1 ool)3.2实验结果:Run读数|1302525353025302520252025252525303025302522020202525252020202525252015202520152520315252525303030253030253525252530203020254152020151020

14、151515152020252020151015101052020202515202025252020202015252015102015630303035353030404030354030253530302525257201525252020152025201520151515201510151583025252530304035303535303530353030353530Run读数Ave帕X13030253030352525303030252735215101515151515201010151519253202525352520202025252520253541510201010

15、101510101515101525510201515101515201515152018256303025303030302530303525314071515102020151515202015151725830253035353540352530303532403.3正交表及Run结果:RunFSHRVE1E2Ave.11111111272111222219312211222541222211155212121218621221213172211221178221211232T186.25094.68895.15687.96987.96991.87590. 156T297.65689.2

16、1988.75095.93868.90692.03193.750R-11.4065.4696.406 7.96919.063 0.156-3.594S16.26283.73845.13007.937645.42240.00311.6144ST=80.113. 4方差分析Se=Se1+Se2=0. 0031+1. 6144=1.6175因子(Si )(fi )(Vi )(F)(P%)显著性F16.2628116.262820. 1319.3*S3.738413.73844.633.66H5.1315. 136.355.40R7.937617.93769.83& 9V45.4224145.

17、422456.2355.69*Error1.617520.8078/7.05F0. 01( 1,2)=98.50 F0. 05(1,2)=18.51所以显著因子为F和V.其余S, H及R均为不显著因子。3.5贡献率柏拉图：3. 6 Cross t abl eFact orFSHRVB特性值孔粗均值F1V2显著性*贡献率19.355.69综合最佳值F1V2结论：1. F1, V2为经Cross table分析后的较佳的参数条件；2、以F,V第二谐段实脸保留因子；其余因子视为常数项，以便找出最佳操作条件3. 从实脸结果可得，在V2条件下，可以达到设定目标.4. 0 1. Orrm钻嘴：4.1因子水

18、平设计:因子S( kr pm)F(ipm)Rep( t i mes)H(hits)160180030002801303200034080610004.2实验结果:Run读数1202520252020202530302520202025252025253020252025202303030303530353030402525303545252530303030303030353202530302535253030303535354035353040403020253030254252020202025202020202020202020252540303025202020205404535453

19、54545656550505545505050405050504045354535620202020202525201525202020202520202520252020202020725253030303030253030303030252525252520252525303030820202020252530304540403030304050353030302020202025935202020202015152015151520202015202015153520202020Run读数12020253030252020202525202525302015202025201520202

20、020152303530304025253035452525303030252025202020252025202520335253030303535354035353040403020202020202020202015202042520202020202020202025254030302525152025252020202025255454565655050554550505040505050252525253030302530302525625252015252020202025202025202520201520252020202015202073030253030303030252

21、5252525202535403540406060607075354082530304540403030304050353030302020202520152020202020209201515201515152020201520201515202020202020202020202020Run12015202025201520202015202025252515202020202025201520202252025202020252025202020202525252020152025202020252025320202020202020202015202020202020202025252

22、020202020202042525152025252020202025252525202020252020152025252020205252525253030302530302525203030253025252525253030302530620201520252020202015202015201515202020201520252020202073540354040606060707540252525254030405040354040606060708202020252015202020202020151515202520252520252015202020920202020202

23、0202020201515202020202020201520202020202020Run读数AveMax1201520202525251520202021.2302202020202525252020152024.7453152020202020202020252524.1404202525252520202025202022.3405302525203030253025252533.8656152020152015152020202019.8257754025252525403040504037.6758202020151515202520252523.75092015152020202

24、02020201519.1354. 3正交表及Run结果:SFRepHitsYi1111121.22122224.73133324. 14212322.35223133.86231219.84. 4方差分析：将列平方和最小的列划为误差项，得:Se =Ss + Sh =18.3+25=43.3Run列平方和 (Si )自由度(fi )均方和(Vi )F比(F)F%显著性因子2(F)782393.5817.4因子3®201.82100.99.2655.7*误差项Se43.3410.9116.893321T17081. 164.774. 1T275.982.266.182. 1T380.4

25、6395.570.1S18.378201.82537.623.7-T=226O 3LYi *Yi =6012.4ST=322.9F0. 01(2, 4)=18.0 F0. 05(2, 4) =6. 94F0.01(2,2)> >F3>F0.05(2,2)>F2 故R为显著因子，S,F,H为非显著因子4. 6 Cross t abl eFact orSFRH特性值孔粗均值R1显著性t贡献率55.7综合最佳值R1结论：1、R1为经Cross t abl e分析后的较佳的参数条件；2、以R为第二谐段实验保留因子；其余因子视为常数项，以便找出最佳 操作条件3、实验最佳结果：S2

26、F3R1H2,均值19. Sum,最值25um需要验证。7第二谐段实验配置和解析，挑选最佳参数：为对实验的正确性做再次确认及肯定，同时亦想找寻出较明确的操作条 件，故必须做第二次实验。而在第二次实验中，因子的显著性已十分明确，故选 用的因子已减少。且为确定良好的操作条件，在次以多水平方式安排实验，再以 方差分析进行解析。1.0 0.3ITTT1三水平正交实验：1.1因子水平设计:因子F(i pm)S(krpm)V17095Uni on26097CKY350100ZL1.2、实验常数项因子设定条件Hi t s count2000Ret r act600St ack hei ght2Resharp

27、 t i rres11.3、实验结果:Run12345678Avehfex1202525303025251524.3302202020202520301521.3303252020201525253022.4304152515252520251520.6255202525242616302824.230651510151510261013.3267202428252526282425288101825102020202017.8259151215202515162017.3251.4.正交表及Run结果:Fact or1234r esul tRUNFSVE1Average1111124.321

28、22220.33133322.44212320.65223124.26231213.373132258321317.89332117.3水平之和T16769.955.465.8/水平之和T258. 162.35& 25& 6/水平之和T360. 15371.660.8/极差R14.54850.091列平方和ST=121.51.5.方差分析：将列平方和小于1的列划为误差项，得:Se =S1+S4 =23.5Fact or列平方和(Si )自由度 (fi )均方和(Vi )F比(F)贡献率(P%)显著性s48.0224.04.0729.8V50.0225.04.231.4误差项e2

29、3.545.9/51.2FO. 01(2,4)=18.0F0. 05(2, 4) =6. 94经方差分析，孔粗并未出现显著因子，并考虑最值，因此，第二次实验的配 1:中可选则可以适用。1.7.第二次实验结果：经方差分析，孔粗并未出现显著因子，代表第二次实验配置的水平范围都可以适 用。考虑生产成本和产能效益，决定釆用最佳操作条件如下表：操作条件对照表实验因子因子代号原始参数最佳参数落速F7050转速S9599Hi t s countH10001500回刀速R600600翻磨次数R22供应商VUNIONUnion/CKY/ ZL1.8验证: 孔粗记录:读数Ave.Max10151515151515

30、15202020151515151515.6201520151520201515202520201520201518.1252025201520202525202020252525252522.2252020251525202025201520202015202019.7252.004mn验证实验：（第一次实验已找到可达到设定目标的条件H1R1）2.1.实验常数项因子设定条件Hi t s count1000Ret r act1000St ack hei ght2Reshar p t i rres0Feedrat e90Speed952. 2 结果：（60326 ）读数AveWx2520201520252525252020252020201521.3252520252520252520152525151520202521.6253.0 0.5rrm验证实验:3.1实验常数项：因子设定条件Hi t s count2000Ret r act1000St ack hei ght2Resharp t i mes2speed95Drill bitUni on Tool UC3.2验证结果:Feedrat e读数max110101015101515151515151520