衍射光栅论文：衍射波前测试方法的研究

1、衍射光栅论文：衍射波前测试方法的研究【中文摘要】衍射光栅是应用在光谱仪器中最重要的元件之一。随着光谱仪器应用领域的扩展,衍射光栅不仅应用于物质元素的光谱分析,而且在天文学、量子光学、集成光学、生物学、光通讯、化工以及冶金等领域也得到了广泛应用。同时,随着科学技术的不断发展,光栅加工也达到了一个崭新的高度。衍射光栅应用领域的扩展使得制造光栅刻划技术的提高成为目前光栅研究领域的首要任务。光栅面型复杂化,面积增大,刻线密度的提高等均给光栅的制备带来新的挑战,与此同时光栅的质量检测就成为不可或缺的重要环节。对于衍射光栅的检测,测量光栅衍射波面的波象差是评价光栅质量是否合格的重要环节,对其测量主要有干涉

2、法、全息术法和位相对比法三种方法。通过对干涉条纹的获取、处理即可得知波前缺陷,从而反映出此光栅的质量水平和加工上的不足,并得以改进。目前衍射光栅波前检测已应用于在平面光栅的检测中,而对于凹面光栅的质量检测仅是对其衍射效率进行检测,未应用于其衍射波前进行检测。本文在阐述了光栅衍射理论性质基础之上,论述了衍射波前检测在光栅加工质量评价的重要性,并对凹面衍射光栅波前检测方法进行研究。基于泰曼干涉仪检测原理搭建实验光路,针对于凹面光栅检测进行相应的改进,成功获得凹面光栅零级和一级干涉条纹,并用ZEMAX软件对本系统中凹面光栅模拟进行了相关的像差分析。从而证明了干涉检验针对凹面光栅衍射波前的可行性,为凹

3、面光栅的加工质量检测提供了依据。【英文摘要】Diffraction grating is one of the most important components which have used in spectroscopic instruments. With the expansion of application fields, diffraction grating have not only been applied in diffraction grating spectrum, but also been widely used in astronomy, quantum op

4、tics, integrated optics, biological, optical communications, chemical and metallurgy and other fields.At the same time as the development of science and technology, craft of diffraction grating has reached a new height. The development in characterization technology and research in diffraction grati

5、ng nature have become priority mission in diffraction grating research. It would be new challenges under the consideration of complex in grating face, increasing of the grating area, improving of grooves characterization density. Therefore, grating quality testing has become an indispensable link.Fo

6、r the detection of diffraction grating, wave aberration measurement of diffraction grating is the important means in evaluating grating quality. Interference, holography and phase comparison have been widely applied. Wave-front defects can be discovered by acquisition and processing of the interfere

7、nce fringes. It will also reflect the lack of grating processing and grating quality,and improve the defects after that. Test in diffraction grating wave-front is mainly used in plane grating currently, as for concave grating diffraction, diffraction efficiency is only parameter can be tested.Wavefr

8、ont detection methods of concave diffraction grating is discussed in this paper. Wavefront detection methods of concave grating is improved from the plane grating, based on the principle of testing concave grating by the Twyman interferometer. Zero and one class grating fringes can be got by this ex

9、periment, Aberration in experiment have been analyzed by the ZEMAX.which has proved feasibility of interfere testing in concave grating.【关键词】衍射光栅 凹面光栅 波前检测 泰曼干涉仪 波前像差【英文关键词】diffraction grating concave grating wave-front testing Twyman interferometer wavefront aberration【目录】衍射波前测试方法的研究摘要4-5Abstract5第一章 绪论7-141.1 引言7-81.2 干涉技术发展及应用8-91.3 衍射光栅的介绍9-131.4 本论文研究目的及意义13-14第二章 衍射理论及衍射光栅性质14-242.1 惠更斯菲涅耳原理14-152.2 菲涅耳-基尔霍夫衍射公式15-162.3 旁轴近似16-172.4 菲涅耳近似172.5 夫琅禾费近似17-182.6 衍射光栅衍射性质18-24第三章 产生衍射波前缺陷的参数及测量方法24-373.1 光栅衍射图样光强度分布的数字解24-253.2 刻