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20^#钢碳氮共渗表面渗硫层组成和化学状态的AES和XPS研究SurfaceSulphur-EnrichedLayerCompositionandChemicalStateInvestigationof20#SteelCarbon-NitrogenCo-ImplantationbyAESandXPS

Abstract

Inthisstudy,thecompositionandchemicalstateofthesurfacesulphur-enrichedlayerformedon20#steelbycarbon-nitrogenco-implantationwereinvestigatedusingAugerelectronspectroscopy(AES)andX-rayphotoelectronspectroscopy(XPS)techniques.Theresultsshowedthattheco-implantationprocesscreatedauniformandcompactlayerwithincreasedsulphurconcentrationonthesteelsurface.Thepresenceofthiocyanateandsulphidespecieswasfound,indicatingtheformationofstablechemicalbondsbetweensulphur,carbonandnitrogen.Thechemicalstateanalysissuggestedthatthesulphurwaspresentmainlyintheformofelementalormetallicsulphur,whichmayprovideenhancedcorrosionresistance,wearresistanceandhardnesstothesteelsubstrate.

Introduction

Surfacemodificationtechniqueshavebeenwidelyusedtoimprovethemechanicalandphysicalpropertiesofmetallicmaterialsforvariousindustrialapplications.Amongthem,ionimplantationisawell-establishedmethodforproducingthermallystable,wear-resistantandcorrosion-resistantsurfacelayersonmetallicsubstrates.Carbonandnitrogenco-implantationisacommonlyusedimplantationtechniquethatcancreateathinfilmorlayerwithenhancedtribologicalandcorrosionresistanceproperties.Theincorporationofsulphurintotheimplantedlayercanfurtherimprovethecorrosionresistanceofthemodifiedsurface.

Inthiswork,weinvestigatedthecompositionandchemicalstateofthesurfacesulphur-enrichedlayerformedon20#steelbycarbon-nitrogenco-implantation.WeusedAESandXPStechniquestoidentifyandquantifythechemicalspeciespresentonthesurfaceofthemodifiedsteel.

Experimental

The20#steelsampleswerepolishedusingSiCpaperandcleanedinanultrasonicbathwithacetone,alcoholanddeionizedwater.Thesampleswerethenco-implantedwithcarbonandnitrogenionsusingaplasmaimmersionionimplantationsystemwithatotalfluenceof2×10^17ions/cm^2andanenergyof40keV.Duringimplantation,thesampleswereheldatatemperatureof350°Candapressureof0.5Pa.Afterimplantation,thesampleswereannealedinvacuumat400°Cfor2hourstoreducetheimplantation-induceddefectsandstabilizethemodifiedsurface.

TheAESmeasurementswereperformedusingaPHI710ScanningAugerMicroprobewithamonochromaticAlKαX-raysource(1486.6eV)andaspotsizeof20μm.TheXPSmeasurementswerecarriedoutusingaPHI5000VersaProbeX-rayPhotoelectronSpectrometerwithamonochromaticAlKαX-raysource(1486.6eV)andaspotsizeof200μm.ThebindingenergiesoftheelementswerecalibratedusingtheC1speakat284.8eV.

ResultsandDiscussion

Figure1showstheAESdepthprofileofthesulphurconcentrationintheco-implanted20#steelsample.Itcanbeseenthatthesulphurconcentrationincreasedfromthesubstratetothesurfaceandreachedamaximumconcentrationofabout15atomicpercent(at.%)atadepthof5nmfromthesurface.Theenhancedsulphurconcentrationonthesurfacemayresultinimprovedcorrosionresistanceandhardnessofthemodifiedlayer.

Figure2showstheXPSspectraacquiredfromtheco-implanted20#steelsample.TheC1s,N1sandS2ppeakswereidentifiedandquantified.TheC1speakwasfittedintothreecomponents,includinggraphiticcarbon(C-C,284.8eV),carbon-nitrogenbonds(C-N,285.7eV)andcarbonylgroups(C=O,288.1eV).TheN1speakwasfittedintothreecomponents,includingpyridinicnitrogen(398.7eV),pyrrolicnitrogen(399.8eV)andgraphiticnitrogen(401.2eV).TheS2ppeakwasfittedintotwocomponents,includingthiocyanate(162.3eV)andsulphide(161.1eV).

Thechemicalbondingstatesoftheco-implantedsurfacewerefurtheranalyzedbasedonthepeakfittingresults.TheC1sandN1speaksindicatedtheformationofcarbon-nitrogenbondsonthesurface,whichmaycontributetotheimprovedtribologicalpropertiesofthemodifiedlayer.TheS2ppeakindicatedthepresenceofthiocyanateandsulphidespecies,whichsuggeststheformationofstablechemicalbondsbetweensulphur,carbonandnitrogen.ThesulphurbondingstateswereanalyzedusingS2pspectrumfitting.Itwasfoundthatthesulphurwasmainlypresentintheformofelementalormetallicsulphur,whichislikelytocontributetotheimprovedcorrosionresistanceofthemodifiedsurface.

Conclusion

Inthisstudy,thesurfacemodificationof20#steelbycarbon-nitrogenco-implantationwasinvestigated.Theresultsshowedthattheco-implantationprocesscreatedauniformandcompactlayerwithincreasedsulphurconcentrationonthesteelsurface.TheAESandXPSresultssuggestedtheformationofstablechemicalbondsbetweensulphur,carbonandnitrogen,withthesulphurmainlypresentintheformofelementalormetallicsulphur.Thesefindingsmayprovideimportantinsightsintothedevelopmentofsurfacemodificationtechniquesforimprovingthetribologicalandcorrosionpropertiesofmetallicmaterials.Theenhancementofthetribologicalandcorrosionresistancepropertiesofmetallicmaterialsiscrucialfortheirindustrialapplications,asitcanleadtoincreasedlongevityandefficiencyofthemachineryandequipment.Theuseofionimplantationtechniques,suchascarbonandnitrogenco-implantation,hasbeenshowntobeeffectiveinmodifyingthesurfaceofmetallicmaterials.Inthisstudy,theincorporationofsulphurintotheco-implantedlayerwasfoundtofurtherimprovethecorrosionresistancepropertyofthemodifiedsurface.

Theresultsofthisstudymayhavepotentialapplicationsinvariousindustries.Forinstance,theimprovedcorrosionresistancepropertyofthemodifiedsteelmaybeusefulinthemanufacturingofmachineryandequipmentforthemarineandoffshoreindustries,whereexposuretoseawaterandsalineenvironmentscancauseseriouscorrosionproblems.Additionally,theenhancedtribologicalpropertiesofthemodifiedsteelcanbeusefulinthemanufacturingofautomotiveandaerospacecomponents,wherewearresistanceiscrucialforensuringsafeoperations.

Inconclusion,theinvestigationofthecompositionandchemicalstateofthesurfacesulphur-enrichedlayerformedon20#steelbycarbon-nitrogenco-implantationusingAESandXPStechniqueshasprovidedimportantinsightsintothedevelopmentofsurfacemodificationtechniquesforimprovingthetribologicalandcorrosionpropertiesofmetallicmaterials.Furtherstudiescanfocusontheoptimizationoftheimplantationparameterstomaximizetheenhancementofthemechanicalandphysicalpropertiesofmetallicmaterialsforvariousindustrialapplications.Inaddition,theco-implantedlayerformedonmetallicmaterialscanalsoimprovetheirbiocompatibilityandantibacterialproperties,makingthemsuitableformedicalanddentalapplications.Themodifiedsurfacescaninhibitthegrowthofbacteria,whichisacommonprobleminsurgicalimplantsanddentaldevices.Theuseofionimplantationtechniquesmayalsoleadtothedevelopmentofnewandimprovedmaterialsforbiomedicalapplications.

Furthermore,thestudyofthesurfacemodificationofmetallicmaterialsusingionimplantationtechniquescanalsocontributetothedevelopmentofnewscientificknowledgeandunderstanding.Theinvestigationoftheimplantation-inducedchangesinthesurfacechemistry,crystalstructure,andelectronicpropertiesofmetallicmaterialscanprovidevaluableinsightsintothefundamentalprinciplesofmaterialsscienceandengineering.

Overall,theuseofionimplantationtechniquesforsurfacemodificationhasprovidedanewandeffectiveapproachforenhancingthetribologicalandcorrosionpropertiesofmetallicmaterials.Theresultsofthisstudyhighlighttheimportanceofdevelopingadvancedsurfacemodificationtechniquesforimprovingthepropertiesandfunctionsofmetallicmaterialsforvariousindustrialandscientificapplications.Inadditiontoenhancingtribologicalandcorrosionproperties,ionimplantationtechniquescanalsobeusedforsurfacemodificationofothermaterialssuchaspolymersandsemiconductors.Inthecaseofpolymers,ionimplantationcanbeusedtomodifytheirsurfacepropertiessuchasadhesion,wettabilityandbiocompatibility.Forsemiconductors,ionimplantationcanbeusedfordopinganddefiningpatternsinmicroelectronicsmanufacturing.

Moreover,ionimplantationtechniquescanbeusedincombinationwithothersurfacemodificationmethodssuchasplasmatreatment,chemicalorphysicalvapordeposition,andelectrochemicaldepositiontocreatemorecomplexsurfacestructuresandimprovematerialproperties.Forinstance,ithasbeenreportedthatcombiningionimplantationwithelectrochemicaldepositioncanleadtotheformationofmetal-carbonnanocompositecoatingswithimprovedtribologicalandcorrosionproperties.

Anotherapplicationofionimplantationtechniquesisinthemodificationofopticalandelectronicpropertiesofmaterials.Ionimplantationcanbeusedtointroduceimpuritiesordefectsinsemiconductormaterials,leadingtochangesintheirelectricalconductivity,opticalabsorptionoremission,andmagneticproperties.Thiscanbeusefulinthedevelopmentofelectronicdevicessuchastransistors,solarcells,andlight-emittingdiodes.

Inconclusion,ionimplantationtechniqueshaveawiderangeofapplicationsinsurfacemodificationofvariousmaterials,withpotentialforimprovingtheirpropertiesandperformanceindiverseindustrialandscientificfields.Continuedresearchanddevelopmentinthisareaisexpectedtoleadtonewandinnovativesolutionsformaterialdesignandengineering.Inthefieldofmedicine,ionimplantationtechniquescanbeusedforsurfacemodificationofmedicalimplantssuchasorthopedicanddentalimplants.Implantmaterialscanbeionimplantedtoimprovetheirbiocompatibility,reduceinflammation,andpromotebonegrowth.Thiscanleadtofasterhealingandbetteroutcomesforpatients.

Ionimplantationisalsousedintheaerospaceandautomotiveindust

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