ISO 14644-1：2015 洁净室及相关控制环境国际标准-中英对照

14644-1:2015(E)14644-1:2015(E)#/58图中X图中X计数时间（分钟）Y计数限度（粒子数）■观察计数值的上限□观察计数值的下限KEYXCounttime(min)YCountlimits(particles)■upperlimitfortheobservedcount□lowerlimitfortheobservedcountFigureD.2—Graphicalrepresentationofthepassorfailboundariesforsequentialsampling图D.2-顺序取样法的通过不通过边界线图示ComparethecumulativeobservedcountandtheupperandlowerlimitsandapplytheproceduredescribedinD.3.比较累计观察计数值与上限和下限值FallsituationseeTableD.3不合格情形参见表D.3T（min）时间（分钟）T(S)时间(秒)Expectedcount,E要求的计数ELimitsforthecumulativeobservedcount累计观察计数限度Observedcountduringinterval间隔中观察到的计数Cumulativeobservedcount,C累计观察的计数值Result结果Upper,Cfail上限Lower,Cpass下限1601.05NA22Continue继缕21202.07NA35Continue继续31803.08NA16Continue继续42404.09006Continue继续53005.0101511FAIL不合格TableD.3—Examplesequentialsamplingparticlecounts表D.3一顺序取样法粒子计数举例Theexpectedcountprovidedinthefirstmeasurementis1,0;thecumulativeobservedcountisjudgedto"FAIL"whenitisgreaterthanorequalto5.However,whenthecumulativeobservedcountisbetween0and5,itcannotbejudged.Inthepresentexample,thesamplinghastobecontinued.Whenthesamplingiscontinued,thecumulativeobservedcountincreases.However,itiseasytojudgebecauseboththeexpectedcountandthereferencecountincrease.Inthe5"measurement(f=300s),thecumulativeobservedcountis11andexceedstheupperlimit(10).ThenitisjudgedtoTAIL."在第一次测量中给出的计数值为1.0:累计观察计数值大于等于5时，则判定为"不合格，但是，如果累计观察计数在0-5之间，则不能做出判定。在给出的例子里，必须继续取样。如果继续取样后，累计观察计数值增加。在第5次测量中(t=300秒)，累计观察计数为11,而要求的上限为(10),因此这时判定为"不合格\PasssituationseeTableD.4 合格的情形参见表D.4TableD.4—Examplesequentialsamplingparticlecounts

表D.4--顺序采样法粒子计数举例T(min)时间(分钟)T(S)时间(秒)Expectedcount,E要求的计数ELimitsforthecumulativeobservedcount累计观察计数限度Observedcountduringinterval间隔中观察到的计数Cumulativeobservedcount,C累计观察的计数值Result结果UPper上限,CfailLower卜限，Cpass1601.05NA00ContinUe继续21202.07NA00Continue继续31803.08NA00Continue继续42404.09000PASS合格Theexpectedcountprovidedinthefirstmeasurementis1,0,thecumulativeobservedcountisjudgedtot*FAIL"whenitisgreaterthanorequalto5.However,whentheobservedcountisbetweenθand5,itcannotbejudged.Inthepresentexample,thesamplingiscontinued,butthecumulativeobservedcountdoesnotincrease.Inthe4thmeasurement(/=240s),thecumulativeobservedcountis0andisequaltothelowerlimit(0).Thenitisjudgedto"PASS."在第一个测量阶段要求的计数值为1∙0,累计观测计数值加果大于等于5,则判定为"不合格)但是,如果观测计数值在0-5之间，则无法判定。在本例中，继续取样，但累计观测计数值并未增加。在第4个测量阶段时(t=240秒)，累计观测计数值为0,等于最低限度值(0)。因此判定为"合格工AnnexE附录E(informative)仅供参考Specificationofintermediatedecimalcleanlinessclassesand

particlesizethresholds中间洁净级别标准和粒径阈值E.1IntermediatedecimalcleanlinessclassesE.1中间洁净级别Ifintermediatedecimalcleanlinessclassesarerequired,TableE.1shouldbeused.如果需要使用中间洁净级别，应使用表E.1。TableE.1providesthepermittedintermediatedecimalaircleanlinessclasses.Uncertaintiesassociatedwithparticlemeasurementmakeincrementsoflessthan0,5inappropriate,andthenotesbeneaththetableidentifyrestrictionsduetosamplingandparticlecollectionlimitations.表E.1给出了允许的中间洁净级别。粒子测量中的不确定度使得小于0.5的增量并不恰当。表卜的注科指出「由于取样的粒子收集的局限性带来的限制。TableE.1——Intermediatedecimalaircleanlinessclassesbyparticleconcentration表E.1-按粒子浓度划分的中间空气洁净级别Concentrationofparticles(particles/m3)a粒广浓度(个/、工方K)IOSClassnumber(N)ISo级别号(N)ISOClass1.5[32]bddddeISOClass2.5316[75]b[32]bddeISOClass3.53.160748322111deISOClass4.531.6007.4803.2201,110263eISOClass5.5316.00074.80032,20011,1002,630eISOClass6.53,160,000748,000322.000111,00026,300925ISOClass7.5CCC1,110,000263,0009,250ISOClass8.5fCCC11,100,0002.630.00092.500Allconcentrationsinthetablearecumulative,e.g.forISOClass5,5,the11100particlesshownat0.5μmincludeallparticlesequaltoandgreaterthanthissize.在表中的所仃浓度均为累积浓度，如，ISo第5.5级，在0.5Pm时显示IlJOo的粒G包括了大于和等于此粒径的所有粒子。These∞ncentrationswillleadtolargeairsamplevolumesforclassification.SeeAnnexD,Sequentialsamplingprocedure.这些浓度会使得级别的取样体积很大。参见附录D,顺序取样法.Concentrationlimitsarenotapplicableinthisregionofthetableduetoveryhighparticleconcentration.由于粒子浓度很高，浓度限度不适用于表中此区域。Samplingandstatisticallimitationsforparticlesinlowconcentrationsmakeclassificationinappropriate.在低浓度时，取样和统计学局限使得分组并不恰当.Sample∞llectionlimitationsforbothparticlesinlowconcentrationsandsizesgreaterthan1μmmakeclassificationinappropriate,duetopotentialparticlelossesinthesamplingsystem.由卜取样系统可能的粒子丢失，在低浓度或粒径人Flpm时，样品采柴局限性使得分级并不恰当。Thisclassisonlyapplicableforthein-operationstate.本级别仅适用J:动态测试.E.2Intermediateparticlesizes中间粒径Ifintermediateparticlesizesarerequiredforanyintegerordecimalclass,Formula(E.1)maybeusedtodeterminethemaximumparticleconcentrationattheconsideredparticlesize:如果有任何十位整数或中间数级别需要有中间粒径，可以使用公式(E∙1)来计算所考虑的粒径的最大粒子浓度。… /人2°8Cn=IONX (E.1)whereCCiSthemaximumpermittedconcentration(particlespercubicmetre)ofairborneparticlesthatareequaltoandgreaterthantheconsideredparticlesize.CCiSroundedtothenearestwholenumber,usingnomorethanthreesignificantfigures;Λ/istheISOClassnumber,whichshallnotexceedavalueof9orbelessthan1;Distheconsideredparticlesize,inmicrometres,thatisnotlistedinTable1;Kisaconstant,0,1,expressedinmicrometres.其中Cn是大于等于要考虑的粒径的空气悬浮粒子的最大允许浓度（个/立方米）。Cn修约至最近的整数，保持有效位数不大于三位：N是ISo级别,不应大于9或小于1；D是所考虑的粒径，单位微米，在表1中未列出：K为常数0.1,单位微米AnnexF附录F(informative)仅供参考Testinstruments测试仪器F.1Introduction概述ThisannexdescribesthemeasuringapparatusthatshouldbeusedfortherecommendedtestsgiveninAnnexesA,CandD.本附录描述了附录A、C和D中给出的建议测试中所应使用的测量仪器。Inthisannex,datagiveninTablesF.1andF.2indicatetheminimumnecessaryrequirementsforeachitemofapparatus.Measuringapparatusshouldbechosensubjecttoagreementbetweenthecustomerandsupplier.在本附录中，在表F.1和F.2中给出的数据表示的是仪器各项目所应达到的最低要求。客户和供应商应就测量仪器的选择达成一致。Thisannexisinformative,andshouldnotpreventtheuseofimprovedapparatusasitbecomesavailable.本附录仅供参考，如果仪器在将来被改进，本附录并不会禁止使用。Alternativetestapparatusmaybeappropriateandmaybeusedsubjecttoagreementbetweencustomerandsupplier.也可以使用其它客户和供应商之间达成一致的测量仪器来代替。F.2Instrumentspecifications仪器标准ThefollowinginstrumentsshouldbeusedfortherecommendedtestsgiveninAnnexesA,CandD:附录A、C和D中给出的建议测试应使用以下仪器：lightscattering(discrete)airborneparticlecounter(LSAPC);光散射(不连续)空气悬浮粒子计数器(LSAPC)NOTEThespecificationsfortheLSAPCaregiveninISO21501-4:2007.(1]注:ISo2150142007中给出了LSAPC的标准。discrete-macroparticlecounter;不连续大颗粒计数器time-of-flightparticlesizingapparatus;飞行时间粒径测量仪microscopicmeasurementofparticlescollectedonfilterpaper.SeeASTMF312-8.[3]采用滤纸采集的粒子的显微测量，参见ASTMF312-8oThetermsanddefinitionsfortheseinstrumentsaregiveninClause3.第3款中给出了这些仪器的术语和定义。

TableF.1——Specificationsfordiscrete-macroparticlecounter表F.1一不连续大颗粒计数器的标准Item项目Specification标准MeasuringlimitsTheminimumdetectablesizeshouldbeintherange5to80μmandbeappropriatefortheparticlesizeunderconsiderationandtheinstrumentcapability.ThemaximumparticlenumberconcentrationoftheLSAPCshouldbeequaltoorhigherthanmaximumexpectedconcentrationfortheparticlesunderconsideration测量限度最小检出粒径应在5-80Pm,与所考量的粒径和仪器能力相当。LSAPC的最大粒子数浓度应大于或等于所考量粒子的最大预期浓度。Resolution20%forcalibrationparticlesofasizespecifiedbythemanufacturer分辨率生产商指定粒径的校正粒子数的20%Maximumpermissibleerror20%forparticlecountataspecifiedsizesetting最大允许误差指定的粒径设置下粒子计数的20%TableF.2——Specificationsfortime-of-flightparticlesizingapparatus表F。2—飞行时间粒径测定仪规格Item项目Specification规格MeasuringlimitsParticlesize0,5to20μm;Particleconcentration1,0X1θ3∕m3to1,0×108∕m3测量限度粒径0.5-20μm.粒子浓度1.0X103/立方米至1.0X108/立方米Resolutionaerodynamicdiameter:0,02μmat1,0μm;0,03μmat10μm分辨率空气动力学直径1∙0时0∙02μm,10Pm时0.03μmMaximumpermissibleerror10%offullreading最大允许误差所有读数10%Bibliography文献ISO21501-4:2007,DeterminationOfparticlesizedistribution—Singleparticlelightinteractionmethods—Part4:Ligh