半导体厂废水来源及处理介绍

Newlvit04/08/20121WastewaterTreatmentSystemofCISEMICISEMI废水处理系统1期简介Newlvit04/08/20122ContentNewlvit04/08/20123WasteCodesinChina中华人民共和国水污染防治法(水)

中华人民共和国国家标准地面水环境质量标准

中华人民共和国国家标准地下水环境质量标准

污水综合排放标准GB8978-2002之第三级标准

其中氨氮实行二级标准

污水处理设施环境保护监督管理办法

污水排入城市下水道水质标准Newlvit04/08/20124WasteCodesinChinaNewlvit04/08/20125WastewaterEffluentStandard项目单位验收标准三级标准备注pH696-9CODppm＜350＜500SSppm＜250＜400F-ppm＜15＜20NH4-Nppm＜25按二级标准＜25其他水质项目亦须符合GB8978-2002污水综合排放标准之第三级标准。Newlvit04/08/20126WasteClassificationWastewater

FromFabDr-RECDr-DHFGeneral

Acid/Caustic

WastewaterDr-GWDr-HPMDr-APMFluoride

WastewaterDr-MHFDr-HHFDr-CMP-MDr-CMP-OAcid

WastewaterDr-H2SO4Dr-H3PO4Solvent

WastewaterDr-Sol.Dr-IPAPhotoResist

WastewaterDr-PR-PDr-FLDr-ESDr-H2SO4

+HFDr-CMP-IDr-L/SDr-PR-NReclaim

WastewaterCMP

WastewaterDr-CMP-PNewlvit04/08/20127WasteClassificationDIWaterPlantDr-CAREGDr-MGREGHVACChemical

RoomDr-C/SDr-CTBWDr-GWDr-MHFDr-H2SO4Dr-Sol.Dr-HPMDr-H3PO4ToFWWToGWWToGWWToGWWWastewater

FromFacilityNewlvit04/08/20128DrainageClassificationForChemicalRoomGroupNameRoomNameEquipmentWaterDrainRemarkDI/CWDRG/CHClroomHClCDSDIDR-HPM

Acidroom-11%HFCDSDIDR-MHF

49%HFCDSPoly(I)CDSPoly(II)CDSH3PO4CDSDR-H3PO4HNO3CDSDR-GW/MHF

Acidroom-2BHF7:1CDSDIDR-MHF

BHF40:1CDSBHF400:1CDS

CausticroomDev#1CDSDIDR-GW

Dev#2CDS29%NH4OHCDS0.5%NH4OHCDSNewlvit04/08/20129GroupNameRoomNameEquipmentWaterDrainRemarkDI/CWDR

SolventroomIPACDSNADR-Sol防爆IPAstoragetankRinse#1CDSRinse#1storagetankACT-935CDSEGCDSDev#3CDS

H2SO4

roomH2SO4

CDSDIDR-H2SO4

H2SO4storagetank

H2O2roomH2O2CDSDIDR-GW

H2O2storagetank

DevstorageroomDev#1storagetankDIDR-GW

Dev#1storagetankDrainageClassificationForChemicalRoomNewlvit04/08/201210WasteDefinitionDefinitionofliquidwasteinwastewatertreatment-1Dr-GW,Dr-HPM&Dr-APM(GeneralWaste)

QuickDumpRinsestepofchemicalbathdrain(APM,HPM,SPM

excludingforHF),Others(IncludingSO4-2,PO4-3&Organic

Solvent),Resistance<2M-cm.Dr-FL

Floordrain.Dr-ES

Emergencyshower.Dr-HHF

49%,Fluoridecontainchemicaldrain.Dr-MHF

Lessthan49%,Fluoridecontainchemicaldrain.Dr-DHF

QuickDumpRinseFluoridecontainchemicaldrain.Dr-CMP-M

ContainMetalslurryofCMP&waferscrubberdrain.Dr-CMP-O

ContainOxideslurryofCMP&waferscrubberdrain.Newlvit04/08/201211WasteDefinitionDefinitionofliquidwasteinwastewatertreatment-2Dr-CMP-P

ContainPolyslurryofCMP&waferscrubberdrain.Dr-CMP-I

CMPIdlingwaterdrain.Dr-H2SO4

SPMDrain.Dr-H3PO4

H3PO4Drain.Dr-H2SO4+HF

Sulfuricacid+HydrofluoricacidDrain.Dr-Solvent

OrganicsolventDrain.Dr-IPA

IPADrain.Dr-ACT-935

ACT935Drain.Dr-PRP&Dr-PRN

Photoresistancedrain.Newlvit04/08/201212WasteDefinitionDefinitionofliquidwasteinwastewatertreatment-3Dr-L/S

LocalScrubberdrainageandblowdown.Dr-C/S

CentralScrubberdrainageandblowdown.Dr-CAREG

C/ARegenerationwater.Dr-MGREG

MGRRegenerationwater.Dr-CTBW

CoolingTowerdrainageandblowdown.Newlvit04/08/201213HFTreatmentSystemFlowHFCollectionTank30M3Dr-DHFDHFLiftingTank20M3Dr-HHFHHFLiftingTank20M3Dr-CMPCMPCollection

Tank10M3FromEMPFromSLCTFromSLFPFromWWSUPAir

BlowerToHFWRTNewlvit04/08/201214HFTreatmentSystemFlowNaOHHFWReactionTank210M3HFWReactionTank310M3HFWReactionTank410M3M

HFWSedimentationTankL3.8m*W3.8m*H3.05mToAWCTM

CaCl2PolymerPACM

M

HFWReactionTank110M3H2SO4M

ToSLCTToHFWRTFromCDANewlvit04/08/201215HFTreatmentSystemFlowHFWSludgestorageTankL3.8m*W3.8m*H3.05mM

FromCDATOHFWCTSlurryFilterpressFromHFWSTLorryoutToHFWCTNewlvit04/08/201216GWTreatmentSystemFlowAWCollectionTank100M3Dr-GMAWLiftingTank10M3FromEMPFromHFWSTFromCSUPAir

BlowerFromASUPFromMMF/ACFBackwashWWFromReclaimBypassToAWNTNewlvit04/08/201217GWTreatmentSystemFlowNaOHM

M

AWNeutrTank123M3H2SO4M

AWNeutrTank323M3AWNeutrTank223M3AWEffluentTank12M3DischargeToEMTNewlvit04/08/201218EMSystemFlowEmergencyTank150M3AWCollectionTank100M3HFCollectionTank30M3AWEffluentTank12M3ToAWCTToHFCTNewlvit04/08/201219WasteChemicalCollectionSolventLiftingTank5M3DrH2SO4DrH3PO4DrSOLLorryoutNewlvit04/08/201220WastePhotoresistCollectionDrWastePhototesistLorryoutWastePhotoresistLiftingTank5M3Newlvit04/08/201221ChemicalDosingCollectionNaOHTank20M3LorryinToAWNTToHFWRTFromAWNTFromHFWRTH2SO4

Tank10M3LorryinToAWNTToHFWRTFromAWNTFromHFWRTNewlvit04/08/201222ChemicalDosingCollectionGaCl2

Tank20M3LorryinToHFWRTFromHFWRTNewlvit04/08/201223ChemicalDosingCollectionPACTank5M3LorryinToHFWRTPAMTank5M3ToHFWRTManualNewlvit04/08/201224P&IDandWaterBalanceNewlvit04/08/201225WasteSegregation

Piping：Classifiedaspossible.

System：

--GeneralWaste

--HF

--SludgeDewater

--ChemicalDosing

--WasteChemicalCollectionDikeArea：

--AcidWaste：H2SO4,H2SO4+HF,H3PO4,HF

--CausticChemical：NaOH

--AcidChemical：CaCl2,PAC,(Polymer)

--OrganicWaste：Solvent,IPA,PRNewlvit04/08/201226WastewaterTankMaterialAWLiftingTankSS+FRPAWCollectionTankConcrete+FRPAWNeutralizationTank1Concrete+FRPAWNeutralizationTank2Concrete+FRPAWNeu