生产管理知识_mes制造执行系统

Jon Chang May. 2005P. 1 製造執系統製造執系統 Manufacturing Execution System : MES 製造執系統製造執系統製造執系統製造執系統 Manufacturing Execution System : MES Manufacturing Execution System : MES Jon Chang May. 2005P. 2 Outline ? 產業Operation ? 產業e化架構 ? Manufacturing Sequence Flow ? Why MES (factory operation point of view) ? Why MES (Industry point of view) ? MES 定義 ? MES 功能 ? MES 架構 ? MES 技術 ? MES 與其它e 化系統的整合 Jon Chang May. 2005P. 3 產業活動產業活動 策規劃策規劃 品 質 工 程 銷 工程與研發生產規劃 廠區控制 （生產）工廠自動化 維修與服務 政 支 援 與 管 品 質 工 程 銷 工程與研發生產規劃 廠區控制 （生產）工廠自動化 維修與服務 政 支 援 與 管 配送配送 Jon Chang May. 2005P. 4 Outline ? 產業Operation ? 產業e化架構 ? Manufacturing Sequence Flow ? Why MES (factory operation point of view) ? Why MES (Industry point of view) ? MES 定義 ? MES 功能 ? MES 架構 ? MES 技術 ? MES 與其它e 化系統的整合 Jon Chang May. 2005P. 5 產業電子化活動產業電子化活動 供應商之 供應商 供應商之 供應商 供應商供應商 顧客之 顧客 顧客之 顧客 顧客顧客主企業主企業 採購採購生產生產配銷配銷採購採購生產生產配銷配銷採購採購生產生產配銷配銷 工程研發工程研發工程研發工程研發工程研發工程研發 政支援政支援政支援政支援政支援政支援 營業營業營業營業營業營業 Jon Chang May. 2005P. 6 電子化應用系統電子化應用系統 (I) 供應商之 供應商 供應商之 供應商 供應商供應商 顧客之 顧客 顧客之 顧客 顧客顧客主企業主企業 MESMESPES/CSMPES/CSMSCMSCMPES/CSMPES/CSMMESMESSCMSCMMESMESPES/CSMPES/CSMSCMSCM CE/PDMCE/PDMCE/PDMCE/PDMCE/PDMCE/PDM ERPERPERPERPERPERP EC/QREC/QREC/QREC/QREC/QREC/QR Jon Chang May. 2005P. 7 電子化應用系統電子化應用系統 (II) Supply Chain Management (SCM) Procurement Execution System (PES) Procurement Execution System (PES) Enterprise Information Management (PIM) Component & Supplier Management (CSM) Product Data Management (PDM) Enterprise Document Management (EDM) Engineering CADCAECAPP Manufacturing CAMMESMCS Quick Response (QR) e-Commerce (EC) Customer Relation Management (CRM) Enterprise Resource Planning (ERP) Quick Response (QR) e-Commerce (EC) Customer Relation Management (CRM) Knowledge Management 。 Jon Chang May. 2005P. 8 供應鏈管供應鏈管供應鏈管供應鏈管 SCMSCM 顧客關係管顧客關係管顧客關係管顧客關係管 CRMCRM 企業智財企業智財BIC / 企業資源規劃企業資源規劃企業資源規劃企業資源規劃 ERPERP EC Platform / WEB Application Server/ Application ServerEC Platform / WEB Application Server/ Application Server 電子商務平台電子商務平台電子商務平台電子商務平台/ /網站應用程式伺服軟體網站應用程式伺服軟體網站應用程式伺服軟體網站應用程式伺服軟體/ /應用程式伺服軟體應用程式伺服軟體應用程式伺服軟體應用程式伺服軟體 基礎發展環境基礎發展環境基礎發展環境基礎發展環境 供應面需求面供應面需求面 知管知管KM 工程資管工程資管 PDM 工程資管工程資管工程資管工程資管 PDMPDM 製造執系統製造執系統 MES 製造執系統製造執系統製造執系統製造執系統 MESMES 電子化應用系統電子化應用系統 (III) Jon Chang May. 2005P. 9 Outline ? 產業Operation ? 產業e化架構 ? Manufacturing Sequence Flow ? Why MES (factory operation point of view) ? Why MES (Industry point of view) ? MES 定義 ? MES 功能 ? MES 架構 ? MES 技術 ? MES 與其它e 化系統的整合 Jon Chang May. 2005P. 10 What is IC industry Jon Chang May. 2005P. 11 IC Manufacturing Process (I) Poly P Substrate Pwell NAPT Nwell PAPT VTP Poly PSD NSDNSD NSDPSD PSD W WW W ILD Trench oxide IMD-1 WWWW Metal-1 Metal-2 Poly P Substrate Pwell NAPT Nwell PAPT VTP Poly PSD NSDNSD NSDPSD PSD W WW W ILD Trench oxide IMD-1 WWWW Metal-1 Metal-2 Jon Chang May. 2005P. 12 IC Manufacturing Process (II) 黃光黃光 薄膜薄膜 蝕刻蝕刻植入植入 光阻去除光阻去除 程 明圖釋 程 明圖釋 薄膜薄膜(Thin_film) 1.化學氣相沉積化學氣相沉積(CVD) 2.屬濺鍍屬濺鍍(PVD) 3.擴散擴散(Diffusion) 黃光黃光(PHOTO) 1.光罩光罩(MASK) 2.光阻光阻(Coater) 3.曝光曝光(Exposure) 4.顯影顯影(Development) 蝕刻蝕刻(ETCH) 1.濕蝕刻濕蝕刻(Wet-ETCH) 2.乾蝕刻乾蝕刻(DRY-ETCH) 光阻去除光阻去除(PR remove) 將光阻去除後就是我們所需的 圖形 將光阻去除後就是我們所需的 圖形(PATTERN) FILM Wafer Wafer FILM Wafer 光阻光阻 FILM Wafer 光阻光阻 FILM Wafer 光罩光罩 Jon Chang May. 2005P. 13 IC Manufacturing Process (III) HDP PSG SiN 300A W-Plug FSG 1.7KA (2.9KA) SiN 500A SiN 300A M1 (Cu) M1 (2.6K) M2 (Cu) M2 (3.5K) FSG 4.9KA FSG 2.3KA (4.2KA) Via1 STI SiN 500A SiN 300A M3 (Cu)M3 (3.5K) FSG 4.9KA FSG 2.3KA (4.2KA) Via2 SiN 500A SiN 300A M8 (Cu)M8 (9K) USG 7.2KA USG 7.5KA (9.9KA) Via7 SiN 300A FSG 2.3KA (4.2KA) SiN 500A SiN 750A M7 (3.5K) 5.5KA 600A 900A 1200A 900A AlCu 12KA PESiN 6KA PEOX 4KA 4KA SiN 400A (IMD7=6.5KA) for V7=0.36*0.36 (IMD16=4.5KA) Jon Chang May. 2005P. 14 IC Manufacturing Process (IV) Jon Chang May. 2005P. 15 Outline ? 產業Operation ? 產業e化架構 ? Manufacturing Sequence Flow ? Why MES (factory operation point of view) ? Why MES (Industry point of view) ? MES 定義 ? MES 功能 ? MES 架構 ? MES 技術 ? MES 與其它e 化系統的整合 Jon Chang May. 2005P. 16 IC Manufacturing Process Management (1) ? 整合4M (Man, Machine, Material and Method) 以最短的時間及最少的成本產出最好品質的產品. 整合4M (Man, Machine, Material and Method) 以最短的時間及最少的成本產出最好品質的產品. ?CostCost ?Cycle TimeCycle Time ?YieldYield ?Productivity Productivity Jon Chang May. 2005P. 17 IC Manufacturing Process Management (2) ? There are 30-50 basic routes for production FAB ? There are 500-1000 product routes in one FAB ? There are 3000 tools monitoring routes in one FAB ? There are 500-1000 production tools in one FAB ? There are 1K wafers start in one FAB ? There are daily 80K track-in-out in one FAB ? There are daily 15M transactions in one FAB ? There are average daily 600 people operation in one FAB ? There are daily 1-2K tool monitoring operation in one FAB ? There are average 10K control/dummy wafers in one FAB ? There are average 14K SPC charts used in one FAB ? There are 20K real-time tool monitoring charts in one FAB ? There are average 4000 tool alarms in one FAB ? There are average 2K final wafer test data files generated Jon Chang May. 2005P. 18 Human Tool Material Technology Quality Knowledge IC Manufacturing Process Management (3) ?Why we need MES ? ?More technologies ?More tighten process control ?More cost for any production lost ?More demand for cycle time management ?More automation operation is required Jon Chang May. 2005P. 19 IC Manufacturing Process Management (4) Sec.Min.DayMonthHour Die Site Wafer Resolution CP WAT Defect Scan SPC IM FDC Insp. Lot Real-timeReal-timeReal-timeReal-time 300mm Sec.Min.DayMonthHour Die Site Wafer Resolution CP WAT Defect Scan SPC IM FDC Insp. Lot Real-timeReal-timeReal-timeReal-time 300mm Human Dispatching Human Decision RTD dispatching Auto Decision RTD dispatching Lot Base DSA DSA CLIP KSR DSA SPC 300mm Human Dispatching Human Decision RTD dispatching Auto Decision RTD dispatching Lot Base DSA DSA CLIP KSR DSA SPC Human Dispatching Human Decision RTD dispatching Auto Decision RTD dispatching Lot Base DSA DSA CLIP KSR DSA SPC 300mm Jon Chang May. 2005P. 20 Outline ? 產業Operation ? 產業e化架構 ? Manufacturing Sequence Flow ? Why MES (factory operation point of view) ? Why MES (Industry point of view) ? MES 定義 ? MES 功能 ? MES 架構 ? MES 技術 ? MES 與其它e 化系統的整合 Jon Chang May. 2005P. 21 IC Manufacturing Process Management (4) Quick Response to Business Change Cycle Jon Chang May. 2005P. 22 Complexity Management ?Rapid changes to business needs and demands. ?Increasing process and product complexity. ?Larger wafers and carriers. ?Increased reliance on factory information and control systems. Factory and Process Optimization ?Increased customer expectation to meet on time deliver. ?Increased urgency for improved factory effectiveness. ?High factory yield at start-up. ?Reduce wafer and product costs. Extendibility, Flexibility and Scalability ?Reuse of factory information and control systems. ?Factory systems that support rapid process and technology changes. Semiconductor challenge in ITRSSemiconductor challenge in ITRS Source : ITRS 2003 Jon Chang May. 2005P. 23 ?Cost per unit area of siliconManufacturing cost per unit area of silicon is a easure of productivity. The capital cost of a factory has grown significantly each year, from $50M US in the 1980s to over $3B US in 2003.2 ?Time to ramp a factory to high-volumeproduction with high yieldsDecreasing time to ramp a factory to high volume production and high yield has more economic impact than reducing operating costs. New factories must be built and ramped to mature production at a much faster rate as reflected in Tables 86 and 89. Existing factories must be upgraded faster without impacting ongoing production. ?Increasing flexibility to accommodate technology and business changesTechnology advances and the globalization of manufacturing enterprises have led to a decrease in cost for electronic components. This enables new markets to open and creates the need to increase the pace of new product introduction. The flexibility to accommodate these changes in business expectations must improve without significant cost impacts. Improvement for Semiconductor challenge in ITRSImprovement for Semiconductor challenge in ITRS Jon Chang May. 2005P. 24 KPI in ITRS KPI in ITRS Factory OperationFactory Operation Source : ITRS 2003 Jon Chang May. 2005P. 25 KPI in ITRS KPI in ITRS Production EquipmentProduction Equipment Source : ITRS 2003 Jon Chang May. 2005P. 26 KPI in ITRS KPI in ITRS FICSFICS Source : ITRS 2003 Jon Chang May. 2005P. 27 KPI in ITRS KPI in ITRS FacilityFacility Source : ITRS 2003 Jon Chang May. 2005P. 28 KPI in ITRS KPI in ITRS MetrologyMetrology Source : ITRS 2003 Jon Chang May. 2005P. 29 KPI in ITRS KPI in ITRS Process IntegrationProcess Integration Jon Chang May. 2005P. 30 KPI in ITRS KPI in ITRS Yield LearningYield Learning Source : ITRS 2003 Jon Chang May. 2005P. 31 KPI in ITRS KPI in ITRS Yield EnhancementYield Enhancement Source : ITRS 2003 Jon Chang May. 2005P. 32 Outline ? 產業Operation ? 產業e化架構 ? Manufacturing Sequence Flow ? Why MES (factory operation point of view) ? Why MES (Industry point of view) ? MES 定義 ? MES 功能 ? MES 架構 ? MES 技術 ? MES 與其它e 化系統的整合 Jon Chang May. 2005P. 33 MES Jon Chang May. 2005P. 34 ?manufacturing execution system: Software systems designed to integrate with enterprise systems to enhance the shop floor control functionality that is usually inadequate in ERP systems. MES provides for shop floor scheduling, production and labor reporting, integration with computerized manufacturing systems such as automatic data collection and computerized machinery. ?MES is a term used to describe systems that track and manage all aspects of a job in real time while it is in the execution phase or in process It may include resource management, capacity scheduling, maintenance management, statistical quality control, laboratory information management, process management, data collection, plant wide document management and process optimisation. MES is focused on the short term and may link to ERP/MRPII software for higher level planning and control tasks. ?Enables network managers to gather control data from the shop floor into coherent and relevant information. Key functions include data acquisition, dispatching, document control, scheduling, resource allocation, product history, operational analysis, and management of labor, maintenance, processes, and quality. ?製造執系統是一從接到訂單從事生產開始到產品完成，傳送產品在生產線上生 產的即時資訊 給使用者監看。它將工廠生產的即時和準確資回應於報表或其他 方式上，呈現的結果會隨著 現在情況的同迅速改變，其目的在於低沒有附加 價值的活動，如機台當機等，並提高有效 的生產。MES可以將讓產品準時交貨， 提高庫存週轉，增加總生產盈餘，和加速資的動， 當生產活動發生緊急事 件時，他還提供現場緊急態的資訊，並可經由條以上的管道通知使用者 MES definition Jon Chang May. 2005P. 35 MES History 1960代的晚期到1970代初期 從會計系統衍生出物需求規劃（MRP），此系統用協助工廠對物需求做好規劃。 1970的晚期到1980代初期 電腦對資的處能越越強，MRP則衍生為MRPII，此MRPII則包含現場報表系統（Shop Floor Reporting System）、採購系統（Purchasing System）與其他相關功能。在這段期間，許多公司開始認為他 們需要其他系統去管多事物，因MRPII強調預測及需求分配上的管，對現場的管功能也較缺 乏；為改善這些缺失，預測、配銷資源規劃（Distributed Resource Planning；DRP）、MES（強調WIP 追蹤）與單一功能的系統（如品管功能）等相關系統就應運而生，但這些系統卻未完全整合，所以系統 間資的交換非常困難。 1980的晚期至1990初期 這些系統開始嘗試藉著擴大功能解決資訊孤島的問題。於是MRPII變成企業資源規劃（Enterprise Resource Planning, ERP）、DRP衍生為供應鏈管，而現場管功能則變為整合性的MES。到1990代 後期，傳統製造系統之間的界線就變得很模糊，如ERP逐漸含有現場管功能。 以上資整自【MESA International White Paper No. 5, 1997】。 Jon Chang May. 2005P. 36 MES History Jon Chang May. 2005P. 37 Jon Chang May. 2005P. 38 Jon Chang May. 2005P. 39 MES Response Planning Level Execution Level Control Level Supervisory Level ms seconds hours days weeks month years ERP (Enterprise Resource Planning) DCS MES (Manufacturing Execution System) PLC (Programmable Logic Controller) (Distributed Control System) (Supervisory Control and Data Acquisition) SCADA Jon Chang May. 2005P. 40 Outline ? 產業Operation ? 產業e化架構 ? Manufacturing Sequence Flow ? Why MES (factory operation point of view) ? Why MES (Industry point of view) ? MES 定義 ? MES 功能 ? MES 架構 ? MES 技術 ? MES 與其它e 化系統的整合 Jon Chang May. 2005P. 41 MES core functions Jon Chang May. 2005P. 42 MES assist functions Jon Chang May. 2005P. 43 MES functions MES 系統系統 規劃及排程規劃及排程 生產指及 操作程序 產品規格管 資源使用及 追縱 原物(特氣 化)需求 生產產品 追蹤 追蹤及控制追蹤及控制 作業員 管 SPC 工程資收集 資管自動化資管自動化 自動化介面及 pc線 MES 資結 產能效管 現場生產排單 維修保養 管 品質管 Jon Chang May. 2005P. 44 How MES help MES Production Objects 生產/效/品管 Fab In-line Operations UPF 標準化, 合化UPF 標準化, 合化 減少 MO - 機台線自動化減少 MO - 機台線自動化 減少人 - 傳輸搬運自動化減少人 - 傳輸搬運自動化 製造效控制 (派工)製造效控制 (派工) 製程條件控制 (光罩,Recipe)製程條件控制 (光罩,Recipe) 即時品檢即時品檢 IPQC/OQCIPQC/OQC 提高設備/資產使用提高設備/資產使用 現場產品況現場產品況 Fab Off-line Analysis 人機效能分析人機效能分析 產能分析產能分析 生產效分析生產效分析 成本分析成本分析 QA 管QA 管 提昇提昇 Fab Off-line Management WIP 在製品管WIP 在製品管 統計統計 機台管機台管 Cycle Time管Cycle Time管 工單管工單管 材管材管 Manufacturing Flow + Process Criteria Material FlowResource (人人, 設備設備, Cassette) Jon Chang May. 2005P. 45 How MES help Challenge if Without MES Run Cards 記所有事件Run Cards 記所有事件 人工控制所有生產活動人工控制所有生產活動 ? 生產程控制靠Run Card 生產程控制靠Run Card ? 人工機台操作人工機台操作 ? 人工製程條件控制人工製程條件控制 ? 生產資收集困難, 無即時 SPC 管制生產資收集困難, 無即時 SPC 管制 ? 品質管制即時,需人工重新輸入品質管制即時,需人工重新輸入 ? 派工困難派工困難 ? 材管材管 無即時現場管資訊 (在製品,機台,人)無即時現場管資訊 (在製品,機台,人) 生產效分析困難生產效分析困難 工程資分析困難工程資分析困難 管報表產生困難管報表產生困難 With MESs Help 所有資存入電腦, 方資擷取及管所有資存入電腦, 方資擷取及管 電腦控制 (或建議) 所有生產活動電腦控制 (或建議) 所有生產活動 ? 簡化操作程並防止錯誤發生簡化操作程並防止錯誤發生 ? 自動化並防止 Miss Operation自動化並防止 Miss Operation ? Recipe/Mask, Data Feedback/ForwardRecipe/Mask, Data Feedback/Forward ? 資自動收集, 分, 送給 SPC 管制資自動收集, 分, 送給 SPC 管制 ? 電腦即時管制, 並採取 Actions電腦即時管制, 並採取 Actions ? 有效的派工輯有效的派工輯 ? 材比對及管材比對及管 Real-time Fab-wide 管Real-time Fab-wide 管 Real-time 資隨時可作分析Real-time 資隨時可作分析 節資整時間節資整時間 Information at your fingertipInformation at your fingertip Jon Chang May. 2005P. 46 Manufacturing Function Group in semiconductor(1) ? PART management ?BOM, Process management (tool, equipment) ?SPEC management (quality spec in each process, queue time) ?Technology Management ?Tool management ?Layout management ? Scheduling and Dispatching management ?Priority management (Link with SCM) ?Capacity Planning ?Dispatching agent ? Track-In-Out management ?Recipe management ?Tool ALM management ?Equipment management ?Process control management Jon Chang May. 2005P. 47 Manufacturing Function Group in semiconductor(2) ? Automatic Tool Control ?Integrated Material, MES and Tool ?Automatic data collection (MFG data and ENG data) ?Tool control (track-in, process, track-out) ?Real-time tool monitoring ?Real-time process monitoring ? WIP tracking and decision support system ?Detail WIP tracking (WIP-Tool-Human-Time-Event) ?Tool Utilization (OEE) ?Super Hot Lot Management ?Hold Lot management ?Alarm management ? Data quality control ?Queue time management ?Rework Management ?SPC control ?OCAP ?Yield analysis Jon Chang May. 2005P. 48 Manufacturing Function Group in semiconductor (3) ? Tool Management ?Tool ID, Capability ?Tool constraint ?Tool Layout (link with AMHS) ?AMHS management ? Human Management ?Security ?Certification ?Time management ? Material Management ?FOUP ?AMHS (MCS management) ?GAS/ Chemistry ? Integration ?SCM integration (scheduling) ?PDM integration (PART) ?Engineering Data Integration Jon Chang May. 2005P. 49 MES benefit Benefit TypeDescription Improve yield Reduce cycle time Production floor management General Benefits Improve customer satisfaction Improve overall effectiveness Improve competitiveness Qualitative Benefits Improve throughput Improve equipment utilization Eliminate/Reduce manual errors Project-Specific Benefits Source: TIBCO Software Jon Chang May. 2005P. 50 MES benefit The potential gain by implementing MES addresses the need for immediate current, on-line information that allows users of the MES system to make the best informed decisions regarding the application of inventory, plant resources and people: Reduces manufacturing cycle times Reduces WIP Inventory Reduces paperwork between shifts Eliminates lost paperwork/blueprints Improves customer services Reduces or eliminates data entry Reduces lead time Improves product quality Empowers plant operations people Responds to unanticipated events Jon Chang May. 2005P. 51 Outline ? 產業Operation ? 產業e化架構 ? Manufacturing Sequence Flow ? Why MES (factory operation point of view) ? Why MES (Industry point of view) ? MES 定義 ? MES 功能 ? MES 架構 ? MES 技術 ? MES 與其它e 化系統的整合 Jon Chang May. 2005P. 52 MES 架構架構 MES的架構的架構 關式資庫關式資庫 (Relational Database)： MES 的最大特色就是資庫，因它記著整廠的生產資訊，包括：統計品管分析、設備和人追蹤（Labor Tracking）、物追蹤（Material Tracking）、實驗室資（Laboratory Data）、製程資（Process Data）、工 廠文件（PlantDocument）等。這些資訊可提供給各部門做成報表，進分析，然而製作報表或進分析的工具 往往與MES同一系統。欲能提供簡單快速且能跨平台存取功能的資庫別，非關式資庫莫屬。 圖形使用者介面（圖形使用者介面（Graphical User Interface；GUI）： 圖形使用者介面的應用，提供使用者一個容使用的環境。 開放式系統架構（開放式系統架構（Open System Architecture）： 在開放式系統下才能受電腦廠商 的技術牽絆，而且能使企業內新舊的電腦技術相容。開放式系統提 供標準的介面、跨平台的應用程式，且資可跨平台的交換。 主從架構（主從架構（Client/Server Architecture） ： 這種架構比大型主機架構節成本。 系統訂做工具（系統訂做工具（System Customization Tools）：）： 每一企業對MES功能要求情況各有 同，MES廠商除提供標準的功能模組外，還需提供一套好訂做工具， 根據客戶個別需要，快速符合顧客需求。 整合性工具（整合性工具（Integration Tools） ： 企業內可能存在許多系統；如分散式控制系統 (Distributed Control System)、工廠支援系統(Plant Support System) 、MRP II與ERP，MES 必需提供介面接這些系統，使資能夠互通。 Reference From: Joe deSpautz, “Quantifying the benefits of automation“, ISA Transaction, No.33, 1994, pp.107-102. Jon Chang May. 2005P. 53 MES 架構架構 Factory ModelingFactory Modeling WIP ManagementWIP Management EQP ManagementEQP ManagementSecurity ControlSecurity Control EDC/SPCEDC/SPC SEMI DevSEMI Dev NT ClientsNT Clients Bus Bus rulesrules Area Applications FACTORYworks Process PlanProcess Plan Message Bus Semi-auto EDC Dispatch/What is next Lot Schedule/Based on C/T Reticle Usage forecast Reticle Management Recipe Management Event/Alarm Management Preventive Maintenance Carrier Management EEN/ECN ToolTool Intelligent User Interface SECS I/F ReportReport EDAEDA MonitoringMonitoring IUI + Web UI Jon Chang May. 2005P. 54 MES 架構架構 MES Server TCS(Cell Lev