直线式时栅位移传感器的动态测量与频谱分析.pdf

Ma r 2 0 1 5 Hy d r ome cha t r o n ics En g in e e r in g V o 1 4 3 NO 6 H y d r o me c h a t r o n i c s E n g i n e e r i n g h t t p j d y q k s cq u t e d u cn E m a i l j d y g cy w 1 2 6 co m D y n a m i c me a s u r e me n t a n d s p e ct r u m a n a l y s i s o f t h e lin e a r t y p e d t ime g r a t in g dis p la 一 一 ce me n t s e n s o r Tia n h e n g Z HANG L o n g b o S UO Xin g h o n g Z HANG L ia n g WU E n g i n e e r i n g R e s e a r ch C e n t e r o f Me ch a n i ca l T e s t i n g T e ch n o l o g y a n d E q u i p m e n t Mi n i s t y of E d u ca t i o n C h o n g q in g K e y L a b o r a t o r y o f T ime G r a t in g S e n s in g a n d A d v a n ce d T e s t in g T e ch n o l o g y C h o n g q in g U n i v e r s it y o fT e ch n o lo g y C h o n g q i n g4 0 0 0 5 4 C h i n a Abs t r a ct Ba s e d o n t h e s t r u ct u r a l f e a t u r e o f t h e lin e a r t i me g r a t in g d is p la ce me n t s e ns o r t h e ma i n s o u r ce f o r t h e e r r o r o f d y n a mic me a s u r e me n t is p r o p o s e d Us in g g r a t i n g r u le r a s a mo t h e r wh e n t h e lin e a r g r a t i n g d is p la ce me n t s e n s o r s p a t ia l lo ca t io n is t h e me a s u r e d v a lu e o f t h e gra t in g g r a t in g me a s u r e me n t a n d lin e a r t ime gra t in g d is p la ce me n t s e n s o r p r e d ict e d v a lu e is co mp a r e d Dy n a mi c me a s u r e me nt e r r o r is o b t a in e d Th e e rro r v a l ue is t o d a t a t run ca t io n e rro r a n d s a mp lin g a b n o r ma l d a t a t h e n t h e e r r o r v a lu e o f a mpli t u d e s p e ct rum a n d ph a s e s p e ct rum a n a ly s is s o a s t o t h e co rre ct i o n o f e rro r s e pa r a t i o n a n d ha r mo n ic co rre ct io n d e v e l o p me n t o f h ig h p r e cis io n lin e a r t ime g r a t i n g d is p la ce me n t s e n s o r Ke y wor d s Ti me g r a t in g d is p la ce me n t s e n s o r d o i 1 0 3 9 6 9 j is s n 1 0 0 1 3 8 8 1 2 0 1 5 0 6 0 1 5 1 I n t r oduct io n Er r o r s o u r ce Dy n a mic me a s u r e me n t S p e ct r u m a n a ly s is Do cu m e n t co de A CLC nu m b e r TP 21 2 Me a s u r e me n t is s u r e t h a t v a lu e me a s u r e me n t a t t r ib u t e f o r t h e pu r p o s e o f a ll o p e r a t i o n s T h e p o s it io n me a s u r e me n t ma i nl y r e f e r s t o le n g t h a nd An g le o f t h e me a s u r e me n t Th e in t e r n a t io n a l s y s t e m o f u n i t s o f le n g t h is o n e o f s e v e n b a s ic p h y s ica l q u a n t i t ie s 1 e n g t h q u a lit y t im e cu rr e n t t h e r m o d y n a m ics t e rn p e r a t u r e a mo un t o f s u b s t a n ce a nd lumi n o u s in t e n s i t y F o r t h o u s a n d s o f y e a r s p e o p le h a v e b e e n le n g t h o f me a s u r e me n t me t h o d s t u d y W it h mo d e r n in d u s t ry a n d s cie n ce t e ch n o lo g y o f t he d e v e lo p me n t t h e s t a t ic me a s u r e me n t ha s n o t a d a p t t o t h e mo d e r n me a s u r e me n t r e q u ir e me n t s At p r e s e n t t h e d y n a mic me a s u r e me n t is co n ce r n e d b y ma n y n a t io n a l r e s e a r ch i n s t it u t io ns a n d s ch o la r s Dy n a mic me a s u r e me n t t e chn o lo gy a s a n e w me a s u r e me n t t e ch n o lo g y is o f b e in g wid e ly Re ce iv e d 1 0 O ct o b e r 2 0 1 4 r e v is e d 1 3 No v e mb e r 2 01 4 a cce p t e d 2 5 De ce mb e r 2 01 4 Co r r e s p o nd ing a ut ho r Tia n h e n g ZHANG En g in e e r E ma il z t h cq u t e d u cn us e d in v a ri o u s me a s u r e me n t o cca s io n s t he me a s u r e me n t t e ch n o lo g y h a v e b e co me b ig g e r ch a n g e No ma t t e r f r o m e ffi cie n cy o r t e ch n ica l co n n o t a t io n Th e r e f o r e Th e L in e a r T y p e d Time Gr a t in g Dis p la ce me n t Se n s o r d y n a mic me a s u r e me n t r e s e a r ch n o ma t t e r whe t h e r Th e Lin e a r T y p e d Ti me Gr a t in g Dis p la ce me n t Se n s o r imp r o v e d y n a mic a ccu r a cy in h ig h s p e e d me a s ur e me n t o r d e s ig n i mp r o v e me n t wit h imp o r t a n t t h e o r e t ica l s i g n i f i ca n ce a n d p r a ct ica l v a l ue 2 The pr inciple o f line a r g r a t ing s e ns o r A cco r d in g t o t h e L in e a r A C Mo t o r p r in cip le 1 2 L in e a r AC Mo t o r s s h e l1 u n f o ld al o n g t h e li n e ca n f u r t h e r d e s ig n Th e L in e a r Ty p e d Ti me Gr a t in g S e n s o r a s s h o wn in F ig 1 Afte r t h e p o we r s u p p ly t h e t r a v e lin g wa v e ma g n e t ic fi e ld M fro m c p o in t be g in n in g t o d p o i n t e n d a lo n g t h e s t r a ig h t lin e e v e r y a f t e r t ime T f o r wa r d a pi t ch w wh e n t r a v e l in g wa v e s u cce s s iv e ly t h r o u g h t h e fi r s t s e t a n d a d y n a mic me a s ur e me n t b will h a s a h e a d s in e wa v e ch a r a ct e r is t i cs o f t h e e l e ct ri ca l s ig n a ls g e t t h e i ns t a n t a n e o u s mo me n t s v a l u e a n d T i t y p e 1 is t h e m e a s u rin g lin e o f d is 7 6 T ia n h e n g Z HANG e t a l p la ce me n t ma t h e ma t ica l mo d e l 一 V A T 1 Re a li z e t h e u s e o clo ck p u ls e s t o me a s u r e s p a ce d is p la ce me n t I n a wo r d u s e t y p e lin e wa v e s ca n e s t a b lis h t h e me ch a n ica l wa y ca n n o t e s t a b lis h in fi n i t e lo n g co o r d in a t e s y s t e m Th e Li n e a r Ty p e d Ti me Gr a t in g a p p ly f o r a n g u la r d is p la ce me n t me a s u r e me n t e x p a n d e d t o L in e a r d is p l a ce me n t me a s u r e me n t Th is is T h e L in e a r T y p e d Time Gr a t in g Dis p la ce me n t S e n s o r s p r in ci p le p r o j e ct w ave f ie ld F i g 1 Th e l in e a r t y p e d t i me gr a t i n g s e n s o r p r in c i p l e di a g r a m 3 Dyna m ic m e as ur eme nt o f linea r t y pe d t ime g r a t ing s e ns o r Acco r d in g t o t h e d e fi n it i o n o f d y n a mic me a s u r e me n t t h e me a s u r e me n t d e v ice u s e d i n d y n a mic me a s u r e me n t t h a t is for d y n a mic me a s u r e me n t Dy n a mic me a s u r e me n t is t o p o in t t o d e t e r min e t h e a mo u n t t h e i n s t a n t a n e o u s a n d o r t h e ch a n g e s w it h t im e o f m e a s u r e me n t t h e me a s u r e me n t is t h a t o v e r t ime t h e ch a n g e Dy n a mic me a s u r e me n t h a s f o u r n o t a b le le a t u r e s in s t a n t d e g e n e r a t i o n a n d r a n d o mici t y r e l e v a n ce a n d d y n a m ic I 3 1 Ht im a n n t e r f a ce M ot o r d r iv e F ig 2 D y n a mi c me a s u r e me n t e x p e r i me n t d e v ice di a g r a m 3 T h e d y n ami c ch a r a ct e r i s t i cs a n d ma in d y n ami c e r D r S0 rces Th e Lin e a r T y p e d T ime Gr a t in g Dis p la ce me n t S e n s o r d y n a mic me a s u r e me n t e x p e ri me n t d e v ice is s h o wn in F ig 2 Th e Li n e a r T y p e d Ti me Gr a t in g Dis p la ce me n t S e n s o r d y n a mic e r r o r is ma in it s a ct ua l d y na mic cha r a ct e r is t ics d e v ia t io n f r o m id e a l d y n a mic cha r a ct e r is t ics o f g e n e r a t io n Th e dy n a mic ch a r a ct e ri s t ics b e co me t h e d y n a mic e r r o r r e s e a r ch f o un d a t io n Th e g r a t in g me a s u ri n g v a lu e a s Th e L in e a r Ty p e d T ime Gr a t in g Dis p la ce me n t S e ns o r s p a ce p o s it i o n me a s u r e me n t s t a n d a r d a mo u n t s t a n d a r d a mo u n t a n d g r a t in g p r e d ic t io n co mp a r e t h u s o b t a in s t h e d y na mic p r e di ct i o n o f me a s u r e me n t e r r o r v a lu e S p a t i a l P o s it io n o f T h e Lin e a r T y p e d Ti me Gr a t in g Dis p la ce me n t S e n s o r h a s t i me lin e s s a n d s p a t ia li t y s o d y n a mic p r e d i ct io n e r r o r in e v it a b ly h a s t ime a n d s pa ce I n o r d e r t o p r e cis e ly me a s u r e d y na mic e r r o r Th e L in e a r T y p e d Ti me Gr a t i n g Dis p la ce me n t S e n s o r n e e d t o co mp a r e s y n ch r o no u s di s p la ce me n t mo v e me n t in t h e p r o ce s s s y n ch r o no u s s a mp lin g g r a t in g v a lu e a n d p r e d ict iv e v a lu e o f Ti me Gr a t in g Th is r e q u ir e s h ig h p r e ci s io n g r a t in g s u b d iv i s io n a n d co u n t s ci r cu it t h e s in e s ig n a l p r o ce s s in g t h e r e ce iv e e x t e r n a l s y n ch r o no u s s ig n a l lo ck in g u p d a t a a n d t h e r e s u lt s a r e t r a n s mit t e d t o t h e co mp u t e r 4 5 S t e p p in g mo t o r d ri v e t he b a ll s cr e w T h e L in e a r Ty p e d Time Gr a t in g Dis p la ce me n t S e n s o r o f mo v in g h e a d a n d lin e a r g r a t in g s c a n n in g h e a d s o f s y n ch r o n o us mo v e me n t in t h e d y na mic me a s u r e me n t t h e me a s u r e me n t s p e e d wi ll ch a n g e co n s t a n t l y a ll mo v in g co mp o n e n t s will be a f f e ct e d b y la r g e r i n e r t ia f o r ce a n d b e ca u s e t h e m o v in g p a rt s o f j o i n t s t if f n e s s o f g u id e r a i l a n d we a k o f t h e id e a l n a t u r e mo v in g pa rts will p r o d u ce la r g e r e la s t ic d e f o rm a t io n b e ca u s e s t r u ct ur e o f t h e g u id e is n o t co r r e s p o n d t he Ab b e s p r in cip le p r o d u ce Ab b e s e r r o r in t h e me a s u ri ng h e a d I n a d d i t i o n t h e me a s uri n g h e a d a n d t h e s e r v o co n t r o l s y s t e m o f d y n a mic ch a r a ct e ri s t ics a n d v ib r a t io n e t c Va ri o u s k in d s o f r a n d o m f a ct o r s wi ll a ls o b r in g dy n a mic me a s u r e me n t e rro r in r e s u h o f a me a s u r e me n t Th e ma i n d y n a mic e r r o r s o u r ce s a n d mu t u a l r e la t io n s hi p o f Th e Li n e a r T y p e d T ime Gr a t in g Dis p la ce me n t S e ns o r a r e s h o wn in F ig 3 F i g 3 Ma i n d y na mi c e r r or s o u r c e o f t h e li n e a r t y p e d t i me gr a t in g s e n s o r Dy n a mic me a s u r e me n t a n d s p e c t r u m a n a l y s is o f t h e l in e a r t y p e d t ime g r a t in g d is p la c e me n t s e n s o r 7 7 3 2 Dy n a mi c me a s u r e me n t d a t a s a mp li n g I n t h e e x p e ri me n t s He id e n h a in co mp a n y t o t h e I BV1 0 2 L I DA1 01 lin e gra t i n g s ig n a l p r o ce s s in g t h e I BV1 0 2 is b a s e d o n PCI b us s u b d i v is i o n a n d co un t ca r d I n W in d o ws XP e n v ir o n me n t t h r o u g h t h e W DM f Win d o w s D ri v e r Mo d e 1 d e v ice d r i v e t o v is i t I B V1 0 2 5 T h e co m p u te r d a ta p r o ce s s i n g a n d a n a l y s i s s o f t wa r e us e t h e Vis u a l Ba s i c la n g u a g e Us e i t s v is u al gr a p h ics p r o g r a m m in g e n v ir o n me n t u s e o f o b j e ct o e n t e d p r o g r a m d e s i g n m e t h o d t o d e s ig n s o f t w a r e 4 I n Vis ua l Ba s ic b y ca lli n g a d y n a mic lin k L ib r a r y D L L Dy n a mic L in k L i b r a ry v is i t I B Vl0 2 C o mp u t e r r e a d gra t in g me a s u ri n g d a t a b y t imi n g wa y t i min g p u ls e a u t o ma t i c lo ck t o s a v e I BV1 0 2 d is p la ce me n t me a s u r e me n t d a t a By t h e co u n t o f t ime g r a t in g ca r d in t e r f a ce ci r cu it o f t h e o u t p u t p u ls e h a s co u n t a n d p r o ce s s in g t he co u n t ca r d t h r o u g h t h e PCI p o we r s u p p ly u s e lo ck t o s a v e I BV1 0 2 d a t a o f t h e t imi n g p u ls e s ig H a l lo ck t o s a v e d a t a o f co u n t ca r d a t t h e s a me t ime a n d t h r o u g h t h e RS一 2 3 2 in t e rfa ce o u t p u t S t e p p in g mo t o r d ri v e r co n t in u o us mo v e me n t o f T he L in e a r Ty p e d Ti me Gr a t in g S e n s o r t h e co mp u t e r i s s y nch r o n o u s s a mp lin g g r a t in g v a lu e a n d p r e d ict io n v a lu e o f t i me g r a t in g e v e ry t ime g r a t in g me a s u ri n g v a lu e h a s t h e s t a n d a r d a mo u n t s o f t wa r e d o a u t o ma t ic d r a w t ime gra t in g o f p r e d ict io n e r r o r cu r v e l6 J Acco r d in g t o T h e L in e a r T y p e d Ti me Gr a t in g Dis p la ce me n t S e n s o r o f b a s ic p ri n cip le s me a s u r e me n t r e s u lt s is t he s o ft wa r e p r o ce s s a f t e r t h e co n cr e t e v a lu e n o t t h e g e n e r a l d y n a mi c me a s u r e me n t s y s t e m ch a n g e s wi t h t ime o f t ime s e q u e n ce W h e n me a s u r e me n t h e a d wo r k in p o in t co n d it io n o b t a in t h e r e s u lt is o fte n me a s u r e d s p e cific v a lv e d is cr e t e v a lu e s co n s i d e r in g d y n a mic e r r o r co mp o n e n t b u t s i mp le a n d h ig h s pe e d a n d lo w s p e e d o f me a s u r e me n t d i f f e r e n ce h a s d y n a mic e r r o r f o r p r o ce s s in g I f i t ma k e s f u r t h e r r e s e a r ch o n d y n a mic e r r o r r e s e a r ch t h e me a s u r e me n t o f o ri g i n a l d a t a ch a r a ct e ri s t ics Re s e a r ch f o u n d t h a t d y n a mic e r r o r h a s r e p e t it iv e in ce r t a i n co n d it i o n s t his is ma n y d y n a mic e r r o r co mp e ns a t io n me t h o d o f p r e mis e T he co n d it i o n s h a v e s a me me a s u ri n g co n d it io n s t h e s a me me a s u r e me n t p r o ce s s t h e s a me me a s u r e d wit h s p e e d p a r a m e t e r s a s p a r a m e t e r 7 8 Dy n a mi c me a s u r e me n t o ri g in a l e r r o r o f Li n e a r T y p e d Time Gr a t in g S e ns o r s p a t ia l p o s it i o n h a s 1 3 9 6 mm f o n ly t a k e o n e o v e r t e n o f t h e s a m p lin g p o in t s B e ca us e ma n y u nk n o wn f a ct o r s in v o lv e d i n o ri g i na l e r r o r s p e a k p e a k is bi g g e r t h a n t he s t a t ic me a s u r e me n t 4 Pr e t r e a t me n t in t h e m ent I n o r d e r t o s e pa r a t e e rro r co mp o s it io n e s t a b lis h t h e e r r o r mo d e l d a t a o f d y n a mic me a s u r e me n t h a s p r e t r e a t m e n t in t h e d y n a m ic m e a s u r e m e n t 9 4 1 Ab n o r ma f d a t a e limin a t e d I n t h e d y n a mic me a s u r e me n t in o ri g in a l d a t a will b e mix e d i n wi t h s o me f a ls e d a t a ca lle d a b n o r ma l d a t a o r d if f e r e n t po in t s Di f f e r e n t p o in t is me a s u r e d b u lk y e 卜 r o r 0 f t h e ca us e mus t fi r s t e limin a t e t h e a bn o r ma l d a t a Th e v is io n is t h e k e y p o in t o u t p r o p e r ly d e t e ct d if f e r e n t p o i n t s a lt h o u g h me a n s i s n o t v e r y p e r f e ct b u t t h e r e a r e s t il l s o me me t h o d I f Tu lce y p r o p o s e d 5 3 H me t h o d e a rl d e t e ct d i f f e r e n t p o in t s De t e ct io n o f d i f f e r e n t p o in t s b a s ic id e a is t o t h in k is no r ma l d a t a is s mo o t h a n d d i f f e r e n t p o in t is mu t a t io n I f t h e fi r s t o r ig in a l d a t a s mo o t h e s t ima t e a nd s e t t h e co e f f i cie n t f o r K s a y s n o r ma l d a t a e s t ima t e s r a n g in g f r o m s mo o t h I f s o 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