03 探索半导体行业智能制造之路

2018 Greater China Siemens PLM Connection Welcome Realize innovation Restricted Siemens AG 2018 Exploring the way to smart manufacturing in Semiconductor industry 半导体智能制造探索之路 James Lu Realize innovation Restricted Siemens AG 2018 Agenda Introduction Challenges we were are facing Roadmap to smart manufacturing What we are now Next Journey Q A Siemens AG 2018 YYYY MM DDPage 4Siemens PLM Software Introduction 2018 Western Digital CorporationAll rights reserved A Storage Solutions Leader In a strong strategic position to lead global evolution of broad based and changing storage industry Broad storage portfolio including HDDs SSDs embedded and removable flash memory and storage related systems 17 000 active patents worldwide Vertically integrated business model to maximize operational efficiency Consistent profitable performance strong free cash flow Siemens AG 2018 YYYY MM DDPage 5Siemens PLM Software Broadest Portfolio of Products Solutions 2018 Western Digital CorporationAll rights reserved Siemens AG 2018 YYYY MM DDPage 6Siemens PLM Software Global Operations 2018 Western Digital CorporationAll rights reserved Siemens AG 2018 YYYY MM DDPage 7Siemens PLM Software Our Manufacturing Process 2018 Western Digital CorporationAll rights reserved KGD Wafer DP Assembly Test Retail Siemens AG 2018 YYYY MM DDPage 8Siemens PLM Software Challenges we were are facing 2018 Western Digital CorporationAll rights reserved R D Kaizen Change Cost Globalize Flexibility Innovation Time to market DFM Equipment Connect Customize Adopt Speed Volume Quality Delivery Labor Material Big Data Standard Siemens AG 2018 YYYY MM DDPage 9Siemens PLM Software Roadmap 2018 Western Digital CorporationAll rights reserved Phase 3 Foundation systems MES ERP PDM SPAS MBO Phase 2Phase 1 Digitalization EAP RMS SPC YMS CIM Wafer Cell Map Lights Off PT SDT RTD AM ARV ARS E Form Big Data Phase 4 Smart Factory Data Virtualization Big Data Edge computing Edge Analytics B2B APC FDC R2R AI Siemens AG 2018 YYYY MM DDPage 10Siemens PLM Software What we are now 2018 Western Digital CorporationAll rights reserved Achievement Light Off production Auto Siemens AG 2018 YYYY MM DDPage 11Siemens PLM Software 3 Layer Factory Systems 2018 Western Digital CorporationAll rights reserved Siemens AG 2018 YYYY MM DDPage 12Siemens PLM Software Siemens Camstar Semiconductor Suite 2018 Western Digital CorporationAll rights reserved Siemens AG 2018 YYYY MM DDPage 13Siemens PLM Software Siemens Camstar Semiconductor Suite module Implemented 1 2018 Western Digital CorporationAll rights reserved Product Management Product Definition Process Spec BOM List Bins Grades Mapping Process Management Process Specs Workflows Specs Operations Parameters Reason Codes Limits Time Window Mask Layers etc Recipe Equipment Tool and Parameter Matrixes for ease of Workflow and Process controls and management Defines Multi Processes In Line WIP tracking Models for Serial and Parallel process Supplementary Process Spec Calendar Management Calendar Holidays Shifts Security Management Role User Definition User Authentication Setup Access Attribute Access User Group Access Service Rules Mask Film Management Mask Mask Set Mask Layer Process Spec Mask Layer Association Maintenance Management Date Recurring Date Throughput based on Mask Equipment Management Equipment Clustering Equipment Tool Association Maintenance Management Date Recurring Date Throughput based on Equipment Tool Jobs Model State Model Parts Management Part Inventory Stock Part Preparation Withdrawal Request Expiry Control Maintenance Management Jobs Model State Model Siemens AG 2018 YYYY MM DDPage 14Siemens PLM Software Siemens Camstar Semiconductor Suite module Implemented 2 2018 Western Digital CorporationAll rights reserved Material Inventory Control Material Lot Create Inventory Locations Movement BOM Material Definition Inter factory inventory movement Staging FG locations WIP Prepare Start Finish Schedule Source from multi or partial source lots Source Inventory Constraint Supplementary Process Spec assignment Order association Cancellation modification WIP Equipment Tracking Move In Out Track In Out tracking ready for EAP Multiple Equipment Reject Scrap recording Rescreen Variance Panel Level Single Strip Piece Batch multi lot transaction Bin Split product change Tracking Types Lot and or Panel Strip Level Tracking Sort Probe Back Grind Assembly Carrier Sub Lot Mother Lot Test Final Test Pack Carrier Tracking Multi level Carrier and Type Configuration Full history with lot and equipment association for traceability Carrier Slot Mapping Panel IDs Strip Scribe IDs Slot Positioning Support Multi lots in Carrier Carrier Lot Splitting and Merging Manual or Automation Genealogy Lot Split Combine Full tracking and history for genealogy tracing Siemens AG 2018 YYYY MM DDPage 15Siemens PLM Software Siemens Camstar Semiconductor Suite module Implemented 3 2018 Western Digital CorporationAll rights reserved Data Collection Entry enforcement Pre In Post Process Lot Item or Equipment Service attributes Panel Site Location or Quadrant for Defects Bin and Reject Recording Process Yield Control Time Windows Binning Rejects Combination or Overall By percentage or lot size quantity Auto trigger exception Dispatch Control Lot Selection Helper Lot Selection Prioritization All In 1 Operation UIs Move In Track In Track Out or Move Out Data Collection Document Viewing and more Multi flavors Equipment Centric or Equipment Type Module Dispatching Process Ability Configurable required Process Abilities for Recipe Assignment of Process Abilities to Equipment Child Equipment Flexible Control of Equipment Abilities depending on chamber sink unit abilities as well as Equipment health and conditioning Contamination Control Configurable Carrier Types Equipment Child Equipment Flags Flexible Business Rules for Contamination Flags inheritance and Control Siemens AG 2018 YYYY MM DDPage 16Siemens PLM Software Siemens Camstar Semiconductor Suite module Implemented 4 2018 Western Digital CorporationAll rights reserved SPC Equipment and transaction based Exception triggers action plan Email notification Hold Lot Equipment Down OCAP Document SPC Matrix allows 1 Setup to be used for many combinations of Product and Equipment Ad Hoc Qty Variance Reject Bonus Data Collection for lot equipment Hold lot down equipment Non standard move Lot attribute update Split Combine Cancel and re screen Exception Control Non conformance Hold Release Disposition Equipment Status Change Re Work Re Screen Split Future Hold Printing Control for label report Au