Semiconductor_physics_and_devices_B1

Semiconductorphysics devices 1 Instructor Asso Prof Tao LeiZHENG Introduction绪论 Asemiconductorisakindofconductor 半导体 导体的一种introduction TherelationbetweensemiconductormaterialsanddevicesorICs 半导体材料与器件或集成电路的关系TheimportanceofSemiconductorProcesstotheproduction fabricationofintegratedcircuits半导体工艺对集成电路生产制造的重要性 1 1crystalstructure晶体结构lattice晶格basicvector基矢unitcell元胞3basiccubicstructure simplecubic body centeredcubic face centeredcubic 3种基本立方结构primitivecell原胞 固体物理学元胞 Whatisasemiconductor asitsnameimplies如名所寓Theconductivitiesofthesekindsofmaterialarebetweenthoseofmetals conductors andinsulators这些材料的电阻率在金属 导体 和绝缘体之间Theyarefabricatedthroughprocessflowtoprovidevariousdevices conductors withtheirownspecialproperties它们通过工艺流水制出以提供具有自身特别性能的各种器件pnjunctionisthemostimportantbuildingblocktogointoactioninasemiconductordevicepn结是在半导体器件中发挥最重要作用的构件 DevelopmentofSemiconductor Materialprocess 材料工艺 Oxidation 氧化 Thinfilmgrowth 薄膜生长 ordeposition 淀积 Photolithography 光刻 Etch 刻蚀 Metallization 金属化 Silicidation 硅化 DevicesBipolartransistor 双极晶体管 FieldEffectTransistor 场效应晶体管 SchottkyBarrierDiode 肖特基势垒二极管 MESFET 金属半导体场效应晶体管 ApplicationHighpowerHighspeed prospectofsemiconductor Semiconductorlighting 半导体照明 Photovoltaiccell 光伏电池 CMOSimageprocessingchip 图像处理芯片 bio chipforfastdiagnosis 用于快速检验的生物芯片 Contentsofthiscourse SemiconductorphysicsSemiconductorofequilibriumSemiconductorofnon equilibriumConductingabilityofsemiconductorBuildingblocksThepnjunctionTheMOScapacitanceSemiconductordevicesDiodesTransistors bipolarjunctiontransistorandunipolarMOSFETJFETandMESFETThyristorOpticaldevices photoresistor lightemittingdiode LED laserdiode solarcell SyllabusofclassroomCourse Illustrator Tao LeiZhengSubject SemiconductorPhysicsandDevices BasicprinciplesCourseNo 10L206QAttribute BasicTheoryofthespecialtyCredit 4hoursPrerequisite AdvancedMathematics CollegePhysics fundamentalsofelectroniccircuit Functionandobjectives Functioncorecourseforadvancedcoursesofvariousspecialtiesofinformation suchaselectronicScienceandTechnology TelecommunicationandautomationObjective fromthewholeillustrationofthiscourse studentscannotonlylearnthebasictheoryofsemiconductorphysicsanddevicesaswellasprincipleofICdesign haveagoodknowledgeofactualstructureofsemiconductordevice theirmechanismofoperation theirpropertiesandapplications haveanideaaboutthestructureandtheprocessofanintegratedcircuit whichishelpfultounderstandthemethodology flowchartandrulesofdesignofICslayout hopefulforthestudentstogetaninsightofdependenceofthecharacteristicsofthesemiconductordevicesuponthesizesofitsmicrostructure Catalog goaltoequipthestudentswiththeessentialtheoryofsemiconductorphysics devicesandskillsofICsdesigntomakethemwellpreparedforthedesignofsemiconductordevicesorintegratedcircuits Maintopicsmaterial solidtheory semiconductorphysics bipolarjunctiontransistor FieldEffectTransistor Hetero structurejunctiondevices BipolarandMOSIC Microelectronictechnologyetc Chapter1crystalstructure CrystalpropertyDefinitemelting andboiling temperatureTransparentTrue WhataboutmetalsPeriodicityRegulararrangementextendinginspaceAunittorepeatinthevolume unitcells CubicstructureofcrystalSc simplecubic showedinFig a Bcc body centeredcubic showedinFig b Fcc face centeredcubic showedinFig c Primitivecell Thesmallestunitcell approximatelyinthesmallcubic thereisatetrahedron Basicvector ai i 1 2 3 orabcThewholecrystallatticecanbeexpressedR pa qb sc p q sareintegers Planesincrystalexpressedas abc ThewaytodetermineMillerindices firstIntercepts2ndReciprocal3rdSmallestdenominatorParallelplanesMillerindice