IC-FAB-厂务系统简介

ICFAB廠務系統簡介,H:OK000PUBOK000PUBLIC訓練課程教材SCLIUFAB-3廠務系統介紹.ppt,ICFAB/廠務供應系統,酸/鹼化學藥品供應站,有機溶劑供應站,清潔用真空,廢氣處理AcidScrubberSolventVOC,空調設施,UPW,DI回收,軟水裝置,自來水儲存槽(20000m3),設備冷卻水供應系統,208V/480V電力供應站,特殊氣體供應站,CDA,廢水中和處理站,HF處理站,有機溶劑收集槽,維修區/製造支援區,潔淨室(IC製造設備),CIM+晶片自動傳送,潔淨室(IC製造設備),液態氮液氧液氬氦氣氫氣,補充空氣,熱水蒸氣,廢氣,冰水,RO,pcw,酸/鹼,H2SO4回收,有機溶劑,IPA再生系統,廢溶劑光阻劑,酸鹼廢水,廢HF,260scliufacFACTTSYS1.PPT,20000502.,清洗用水,接地系統,大地,科管局廢水/污水處理站,合格環保處理公司,供應商,氣体供應商,氮氣供應商,台灣電力公司變電站,新竹自水公司(上坪溪)(竹東大圳)(寶山水庫)(永和山水庫)園區儲水池園區加壓站,合格環保廢棄物處理公司,濃縮污泥,供應商,供應商,溪,溫水,衛生排水,設備用真空,柴油儲槽,供應商,TFMS/TFPS,Fuel天然瓦斯LPG/柴油,FireDetection0.5mG(AC).ESD(PlanarGround)Inbetween106and108;Voltage+/-50V.GroundingGridProcessOtherareas300-600Lux.,file:scliumf3fepc1.ppt,19991005,2000/03/06.,GeneralFABCRRequirement,Floorloading:2000kg/m2,Particlerecovery:5min.,Lighting:600-800Lux,AirVelocity:0.25-0.35m/s,Acousticnoise:NC-60,Airtight:positivepressure,Flowpattern:10。,N2purge:60cycles/hr,file:scliufab3fac-cr1.ppt,50000504.,Vibration125u/s2-250Hz(FAB/M)500u/s2-250Hz(FAB/U)500u/s2-250Hz(SUP),ParticleClass-100T/0.3um(BallRoom)Class-0.1/0.1um(SMIF),Contamination(NH3,Cl2,HF,Na,TOC)1ppb0.1ppb(Micro-chamber),ESD50V(10V),EMI20LPM),RO3kg/cm2(forlocalscrubber),ELECTRICAL208V10%480V10%(Non-Shutdown),B-GASPurity1ppbClass-1,0.1um,*S-GASPurity1ppbMix1%Class-1,0.1um,PVAC65-130mbar(absolute),Ground15mg/l,Yes,No,Yes,No,ConsistsofF,Yes,*IPADrain,WasteDrain?,DIReclaim,IPA80%,TOC?2mg/l,Yes,No,Yes,No,ConsistsofIPA,No,Yes,*SolventDrain,WasteDrain?,DIReclaim,Solvent80%,TOC?2mg/l,Yes,No,Yes,No,SolventNotIncl.IPA,Yes,WasteDrain,FDAReclaim,Acid/Alkali3000us/cm,No,Yes,No,No,pudrainrule1.ppt,20020501.,“drainlinewithwaterseal&exhaust”,EQ,Acid/Alkali?800us/cm,DIReclaim,Yes,CLF01SUGAIFRE-FURNACECLEANER,第1槽,第2槽,第3槽,第4槽,第5槽,第6槽,第7槽,第8槽,NH4OH,H2O2,HF,DIW,DIW,IPA,第9槽,DIW,DIW,H2O2,CDIW,HDIW,DIW,C/C,HF,O/F,SC-1,H/CQDR,SC-2,H/CQDR,F/R,IPA,HDIW,HCL,HDIW,Dr-HF,Dr-R,Dr-IPA,Dr-W,Dr-IPA,Dr-HF(W),Dr-HF,Dr-IPA,Dr-IPA,DIW,Dr-HF,Dr-W,Dr-W,Dr-HF,Dr-W,Dr-FDA,Dr-Waste,Dr-R,Dr-R,Dr-R,Dr-W,Dr-R,Dr-Reclaim,Dr-W,IPASCRUBBER,Dr-W,Dr-IPA,Dr-HF,pufab3wreq1.ppt,Dr-FDA,FSIWaterReclaim,PROCESSCONSOLE,CANISTERCONSOLE,CANISTERCONSOLE,Dr-HF?,Dr-Solvent?,Dr-HF?,Dr-HF?,