TFT-LCD制造 流程技术.ppt

,TFT-LCD產品的基本構成元件,基本構造背光板(BACKLIGHT)下偏光片(DOWNPOLARIZER)薄膜基板(TFTSUBSTRATE)液晶(LIQUIDCRYSTAL)彩色濾光片(COLORFILTER)上偏光片(UPPOLARIZER),TFT-LCD構造剖面圖,下偏光片,薄膜(TFT)基板,液晶,電晶體,彩色濾光片,上偏光片,線路,TFT-LCD的顯示原理(一),TFT-LCD的顯示原理(二),TFTTurnOFF,TFTTurnON,光源經液晶層扭轉90,TFT-LCD的顯示原理(三),TFT-LCD的驅動原理,Array:電晶體(矩形陣列)TFT基板生成,Cell:面板生成(Panel),Module:產品模組組裝,製造流程概述(一),製造流程概述(二),薄膜ThinFilm,黃光Photo,ColorFilter,OK,蝕刻Etch,測試ArrayTest,基板投入,CELL,TFTProcess,TFT的製造流程概述(一),素玻璃,TFT基板,鍍膜(sputter,cvd),光罩(reticle),蝕刻(etch),去光阻液stripper,鍍下一層膜,TFT的製造流程概述(二),酸,氣體,顯影液,TFT的循環製程圖解1,去光阻液,顯影液,酸,氣體,TFT的循環製程圖解2,去光阻液,鍍第三層膜,請依之前所示範的方法舉一反三,自行模擬想像,TFT的循環製程圖解3,CELL的製造流程概述(一),TFT基板(TFTSubstrate),彩色濾光片(ColorFilter),CELL的製造流程概述(二),PI塗佈PICoating,PI塗佈PICoating,配向Rubbing,配向Rubbing,Spacer灑佈SpacerSpray,框膠SealantDispenser,點銀膠AgDispenser,對位Misalignment,熱壓Hotpress,切割裂片Scribe&Break,液晶注入LCinjection,封口Endsealing,再配向Isotropic,偏光片貼片PolarizerAttachment,加壓脫泡AutoClave,Cell測試Celltest,TFT,CF,穿透式TFTLCD側視圖,Printedcircuitboard,Prismsheet,螢光灯泡,背光模組,偏光板,偏光板,TFTArray,液晶層,ColorFilter,TFT-LCD的剖面圖,畫素結構圖,何謂畫素(Pixel)?,顯示色彩學(一),畫素(PIXEL)構成螢幕上所有顏色的單位主要以三元色為主(紅、綠、藍)其中紅、綠、藍三色則稱為子畫素,畫素,子畫素,彩色濾光片ColorFilter,顯示色彩學(二),不同畫素的組合及應用,Mosaic,Triangle,Strip,適合AV動畫，小尺寸panel之設計。,常用於Monitor，NB等大尺寸Panel。,0.20,0.25,0.30,6,8,10,12,14,16,18,9.4”,8.4”,7.8”,6.5”,12.1”,11.3”,10.4”,15.0”,14.1”,13.3”,12.1”,10.4”,14.1”,15.0”,DiagonalSizeofScreen(inch),PixelPitch(mm),85,90,95,100,105,110,120,130,0.15,140,150,160,170,115,125,(ppi),12.1”,12.1”,14.1”,15.0”,VGA(640 x480)(921,600),SVGA(800 x600)(1.44M),XGA(1024x768)(2.36M),SXGA+(1400 x1050)(4.41M),UXGA(1600 x1200)(5.76M),QXGA(2048x1536)(9.44M),15.0”,17.0”,13.3”,畫素與尺寸規格,CrGlassInput,ColorFilterOutput,BlackMatrix,Rsub-pixel,Gsub-pixel,Bsub-pixel,andthenITO,PositiveresistCoating,Dosing,Developing,Post-baking,Etching,Stripping.,RNegativeresistCoating,Dosing,Developing,Post-baking.,GNegativeresistCoating,Dosing,Developing,Post-baking.,BNegativeresistCoating,Dosing,Developing,Post-baking.,Cutting,FinalInspection,ColorFilter的製造流程(二),ColorFilter的Profile,LCDTVsPureTVsProductsmanufacturedbyTVbrandsandsoldthroughconventionalTVdistribution(consumer)channelMulti-FunctionMonitors(MFMs)OtherproductssoldasLCDTVsbyPCbrandsthroughconsumerchannel=MFM/CEOtherproductssoldasLCDTVsbyPCbrandsthroughITchannel=MFM/ITLCDMonitorsProductsmanufacturedbyPCbrandsandsoldthroughITdistributionchannel,LCDTV的定義,AVEnjoymentAnytimeAnyplace,Inthegym,Free-StyleSettingtoMatchAnyAVViewingSituation,Inthekitchen,Inthecar,BedroomTV,PersonalTV,AVEntertainment,Easytocarry,LCDTV未來的應用(一),Inthelivingroom,Inthepersonal&diningroom,Inthebedroom,LCDTV未來的應用(二),大尺寸TFT-LCD的發展趨勢,PanelSize,Application,NB,Monitor,TV,NB,TV,Monitor,1.HighBrightness2.WeightReducing3.HighResolution4.PowerConsumptionSaving,1.HighColorPurity2.WideViewAngle3.FasterResponseTime,1.HighResolution2.HighColorSaturation3.HighContrast,Resolution,Application,NB,Monitor,TV,TFT-LCD的願景,-ReducedmaterialcostHigherthroughputequipmentsLargersubstratewithimprovedproductivity,CostReduction,Standardization,ReplacingCRTProducts:Monitor,LCD-TV-Creatingnewapplicationarea:Game,Web-Pad,PDA,HHP,etc.,MarketGro