Centrotherm扩散炉培训

1、Centrotherm扩散炉培训培训内容开机操作 生产操作 关机操作 维护保养 生产提示开机操作（_）开机操作（二）3、打开电气柜上的“Main Switch"在 "ON"位置，设备 上电；CMI电脑f自 动启动。4、打开设备冷却水, 先开出水阀，再开I 进水阀。检查水压 在3-6kg /cm2范丐 内。开机操作（三）5、输入XP操作系统用户“Operator”密码“6065= 进入CMI计算机的XP系统，自动启动CMI软件。6、检查并打开气柜上14管“CESAFT的开关，启动“CESAFT系统。设定各管“Paddle"温度为默认值，按下：“ Manua

2、l/T_Paddle/AII/Setpoint/Defauir。设定升温速度为5°C/min,按下："Manual/T_Paddle/AII/RampPos",输入 “5J 并按确认键 “ENTERSnom-1 | r pacn-3 IC vcoi-4 |Mdha：rcciL(QiiiUBnn»c««icrocbcrm"刁g厶血刃rrrrrr :二二HTli开机操作（四）7、8、开机操作（五）9、当温度到达500°C 时，用手推动炉门 的气缸，使炉门关 闭。10、顺时针打开TGA 上部调压阀，使压 缩空气压力恢复到

3、 4Bar左右。开机操作（六）11、打开恒温箱控制器的 黑色电源开关，检查 并确认设定温度20°C； 按下"RUN"按钮， 启动恒温箱。当实际 温度达到设定温度后, 才可生产。12、当源瓶的磷源用尽需 要更换时，恒温控制 器会有液位报警提示, 需更换新的磷源。勻 FUJIFILME (3 E 吩 FUJIFILM开机操作（七）13、粼讐科聽赠腮腮务黠别上显示各管“CESAR” 炉体加热部分共分5个温区，每个温区在600-1200°C范围内的精度开机操作（八）Ft) "2Start：运行一个准备好的工艺或启动正在暂停的匸艺。Stop：停止正在运行

4、工艺，在任一时间按f StarT按钮，被终止的工艺将被继续 运行。Standby：女I果没有运行艺，按卜'Standby,所有设备参数恢复默认值和Standby 状态卜设定值。如巣正卷运行匸艺，按下Standby,使匸艺一賣保再在正冷运行的 这一步；在按下“Stop，按钮之后，按卜Standby,将口动终止工艺。Ft) "2-RemoteCcjuraOcr. CE5A0. Exl： HsilpSystem state Recipe:in RllP0C11"2 I109/17/200609:55:37 Time ProcTine= 0:00:00 0/0 Rendin

5、ingn 0:00:90 Timer:HWait = 0:00:00 iMaxTm= 43:56:04 0:00:00 43:56:04LoadZoneCcnt-LZCenterCent-GZGasZoneIcepointPrclm=Cascade:OnOnOnOnOnStep =Seipoint:810.0810.0810.0810.0810.0°CActSet:810.0810.0810.0810.0810.0°CT.Spike:791.9778.6784.2775.5774.328.5 °CT_Paddle:810.0810.0810.0810.0810.0

6、27.9 °COff0 timeswithin ToleranceTemperature:Autoprof =0 position3Setpos.=0 ntnLift = ready SLS = upActpos. =0 mmTube =Door = closedProcFlag = OK TGfi free = YesEnter TobStopGas:02Set =0Act =0seemEndPause22 s200 mN2-P0C1300seemP0C13>Exh.F1F? | F8Ft) "2生产操作（_）1、检查 “Slider"是否在上料位置，若

7、不在，手动状态下 移到上料处："Manual/Slider/t o port”。2、把插好硅片的舟放到“slider”上。尽量使舟在"slider中间位LUljJsj jJ自置。生产操作（二）3、在“Setup"界面选择"Boat"项，选择一个舟号，进行工艺信息编 辑。4、选择确定后，进入 uboat activation55界面，点选“Set boat active for handling"、 “Set boat to 'Ready for processing，禾口 'Boat willSetup boat 2B

8、oat activation and loading optionsCheck »o odnyoie handling ior this bo iM or unch eck 1o remove boot Select loading options for loading moteriol monuolly. handle boat on lyone cycle, deodjvole bod after boo* unloodmgBoat activationLoading optionsV Set boat active for handling| Delete ad irrc&#

9、39;na: of :h uniManual material loadingUse boat for only one cyleSet boat to 'inactiw after unloadingSei boat to 'Read/ for processing*Boat will bB removed for unlaadBoa: has to be loader completely forCancel生产操作（三）5、进入“Handling informatiorT界而，把舟上的编号输入到“Boat ID" 一栏，同时选擦Load position% “S

10、lider",再点击 “Next”按钮。6、进入“Process tube selection"界面,选择需运行工艺的管号,在正 常情况下14管全部选中，再点击“Next”按钮。Setup boat 2Process tube selection|7 poch-4y pocn-3V POCI1-2|y POCI1-1Process tube selectionDedineihe process tubes, ih« mH be usedlor outomobc process cube selection.7891G4564-123f0w-< (kickNe

11、xt >FinishCancel生产操作（四）7 进入 u Boat information"界面，在Actual boat location位置选择 “Slider",在Boat state位置选择 “Wait for tube”,再点击“Next”按钮。Setup boar 28进入"Process information"界面，选择相应的运行工艺名,在“Lots in boat呻输入相关舟的信息，再点击“Finish”按钮。Setup boat 2Boat informationDelmBihe oduol position ollhe bo

12、ntinlhehcndling syiern. vhich typed wder ore inside the bod ond the acluaJ stale oltie boat Invoke ruri counlers tor the boatProcess informationDeline 1he lat numbers in the bad When 'Manual malenal loading' is chcckecl yxau herc to ddinc vhch recipe to use for process njn After recipe njnth

13、eer>Dr state g checkedBoat informationActual boat location|Slider” |dodoWaler1789014564-Boat loaded 心th11Boatstato- Not active|procoss waf©r No changeCooling endWail for end proces123fBoat countefs 0K-Process informationRecipeAutomatic789o4564-123f0K-< BackNext >FinishCancel< BockFi

14、nishCancel生产操作（五）9、进入“Summary"界面，显示38步输入的信息，核对无误后，点击 "0K信息输入完成。10、在“Job"页面点击然“Run"按钮，回到自动运行状态。机械手自动送舟到SiC桨上，开始运行工艺。Setup boat ZSummaryPlease check all defined values. Press 'OK' Button toaccept or press 'Back*-Button to make changesfBoat ID.Actual boat location.Boat t

15、ype.Boat loaded 祠thMode-Boat state-02SliderQuartz process wafer WaferWait for tub©Runs total for ibis boat* 56Runs since last mainto仃ancp 56Majntenance runs totalProcess tube. Recipe.Cooling storage. Load position: Lots in boat:oAutomaticP156-50.PRZSlider11 Manual material loading Us。boat for o

16、nly one cycle Set boat to 'inacte' after unloading13 Set boat to 'Ready for processing* Boat will be removed for unload Start maintenance after unload Boat has to be loaded completely< BackOK生产操作（六）11、当某一管的“Tube state"显示蓝色时，需要人工输入信息，打开 相应管的CESAR界面。12、在红色的对话框“Adjust temperature?&q

17、uot;中输入需要修改的温度或 默认值，SiW盘丄魚击“Enter"键。RXLVAft ftXLVAft RXIWR HXIWJebtc*価I-伽(I1?401«01WbxoeP*«H?PWbM 1阳HWNTUmW?9K91>r©外XU4AcdMM*UeJv*.U*WM3"血P«>c«cti»9P>«CK3ciMPitcaairQFSco«»nei：3>uOH219ai«ss力83201 2P0D11?ocn 4KJCtl 3BK<l.VAfsP

18、OttVAHpoavxnfDClVAflY»Bi2ttlc*钞e100ICMnSTK生产操作（七）13、在弹出的红色对话框"Adjust diffusion time?"+输入需要修改的时间或默认值，再 右:键扁点击“Enter"键14、在弹益的芬越对话框"Adjust drive in time?" +输入需要修改的时间或默认值，再 在键盘上点击"Enters,信息输入完毕，桨自动送舟到石英管，开始扩散工艺。10/18/20% 10:46:03 Recipe StartRecipe:POCLWRType:Productio

19、nUser:POC11-LRun no：1Boat:D7Lot ntinber:wCo»»ent:Remote start boat 07Adjust iGwpGrature? (.) 854.5i room rocn-2 T C rocns C roan Tj 呛“叩 1 cms | sem eioRun tine inputI IPOCLVfiR IP0C11-2 IAct = Adjust diffusion time? Irainl (.) 20Is “ P0C13Exh.Cancel Insert K DeletoF1F2F3F4F5FBF7F8C rooi-i

20、poai 2 G pocno C P06 4 cms | sgmieio"ill4|单| 於I忌 I明eIDa=*)95e»x*生产操作(八)15、当工艺运行完，H动取舟到"Storage置冷却；冷却后“Slider州动取舟到下料位置并伴有蜂鸣提示，进行取舟卸畀和测试方块电阻；再放上需要扩散的舟。16、同吐CMI电脑弹出“Boat Info”界面，点击“Unload done"按钮，在软件中完成卸 舟信息。17、进入 “Boat Info Mode Select”界面,选择 “Wafer (Production wafer with host valid

21、ation) ”项，点击 “OK哝钮。(MlWXHzcrothamM»POCI11:flfi o)uld baP0CI1 l>pMayWinj AiAnalcr*A«6ivif MoJobSm OK8ce» Di心)929wjii?Roca POCLVAR.PRZT4e POCH-3Fube rui na IRCdpOnnttiQ uniocid donePleax unload the boat, then press 'Unload docw' If this function wns selected by mtstake press

22、*CanceT18:27/#Rwsranad <9:21 ieAwcc*nnwrl关机操作（_）1、检查并确定各管工艺已运行完毕，设定“Paddle"温度为500°C： 按丁 "Manual/T_Paddle/AII/Setpoinr输入 “500"并按 “ENTER” 确认。2、逆时针旋转TGA顶部调压阀，关闭炉门的压缩空气，使压力为零。CMIc<>ncrohrmD»H0pej&“0 FOOH 0 R0b2 C roCIV3 0 TOQU CX&SEMI£10Manual controlRuntim

23、e： 01*21:17 OKIP0C11-3 ICh Operator 13State:11/06/2066 13:35*7 Recipe StartRecipe:POCLVfiRTvpe:ProductionUserP0C11-LRun no. :216Manuol controlT.Poddle All Setpoint - 500_Actual value -810 °CUserPOCU-LRun no.216Boat:0177Lot rxinber- w5-6 295*100 Runtime:8L.18:33State:OKEnterCancelFlF2F3JI3E1ETab

24、EacF4P5F6F8A I I4rcg关机操作（二）3、当各管炉温降到500°C,用手推开炉门5mm左右，防止冷凝后偏磷酸粘住炉门。4、设定 “Spike'温度到20°Co 按F "Manual/T_Spike/AII/Setpoinr,输入 “20” 并按确认 “ENTERS5、在朗瓏¥1 分潜腔綁結奖系统按下ervice/Shutdown/Yes.并6lobnnrIP0C11-3 iCh OCerator11/06/2M6 13:35:4?Haiiuol controlSWfKto/AAsrnP0C11 L216D17?5-6 295H8001 W WOKOplcaikuntine01:211/State:OKRecipe Start Recipe;POCLVARType;ProdtxzlionUserI»OC11-LRun no. :2160 Ron .C pooi