薄膜光学与技术 绪论

1、课程概述课程概述性质：研究生专业选修课课时：32个学时薄膜光学：16个学时 光学薄膜理论基础，设计理论，减反射膜，分束镜， 高反膜，截止滤光片，带通滤光片，特殊膜系薄膜技术：16个学时 薄膜真空设备，制备技术，薄膜材料， 薄膜的厚度均匀性，厚度监控，薄膜微结构，薄膜的光学性质及测量课程成绩： 平常作业和到课情况 50% 期末考试（开卷） 50%主要参考文献主要参考文献1. H. A. Macleod, Thin-Film Optical Filters , Bristol & Philadelphia, 20032. 唐晋发，顾培夫，刘旭，李海峰，现代光学薄膜技术，浙江大学出版社, 2

2、0063. 唐晋发，郑权，应用薄膜光学，科学技术出版社，19864. 唐晋发，顾培夫，薄膜光学与技术，机械工业出版社,19895. 李正中，薄膜光学与镀膜技术，艺轩图书出版社 , 20016. 林永昌，卢维强，光学薄膜原理，国防工业出版社 ,19907. 顾培夫，薄膜技术，浙江大学出版社，19908.H.K.Pulker, Coating on Glass, Elsevier ,19849.Allred Thelen, Design of Optical Interference coatings, 199210. Ron Willey系列丛书绪论绪论(Introduction) . 光学薄膜

3、的光学薄膜的发展历史发展历史 . 为什么是为什么是薄膜薄膜,不是厚膜不是厚膜 . 光学薄膜的光学薄膜的应用应用 . 光学薄膜的光学薄膜的发展趋势发展趋势 1. 新应用新应用 2. 新技术新技术 3. 微器件微器件 . HISTORY1. ”Newtons rings” was discovered in 17th century, which is called “modern thin film optics”.2. Faunhofer had made the first AR coatings by chemical method in 1817 .3. Fresnel produced

4、 the laws of reflection and refraction in 1832.4. “A treatise on electricity and magnetic” was published by Maxwell in 18735. Diffusion pump made it possible for thin film process in 1930.6. Geffeken produced the first thin film metal- dielectric interference filter by PVD in 19397. The first He-Ne

5、laser was developed in Bell Tel. Lab. In 1960,which was attributed to the low loss high reflectors.8. The columnar structure of thin film was discovered in 1970 by Pearson.9. Thin film filters used for optical communication was made significant progress in around 2000. Why thin and not thick films?

6、能有效应用的干涉厚度，可称薄膜；能有效应用的干涉厚度，可称薄膜； 薄还是厚取决于波长，而不是实际厚度。薄还是厚取决于波长，而不是实际厚度。 Applications of thin films (1) in WDM (Wavelength Division Multiplexing)l光纤在光纤在1310nm(1260-1360nm)1310nm(1260-1360nm)和和1550nm(1480-1580nm)1550nm(1480-1580nm)具有很低的损耗。波具有很低的损耗。波长带宽长带宽200nm200nm，30THz30THz带宽资源。若带宽资源。若100GHz100GHz复用，可

7、达复用，可达300300个信道个信道; ;l早期早期1310nm1310nm和和1550nm1550nm两个波段复用，叫两个波段复用，叫WDM; WDM; l EDFA EDFA的出现，在的出现，在1550nm1550nm窗口实现多通道窗口实现多通道(1530-1565nm)(1530-1565nm)，叫，叫DWDM (Dense DWDM (Dense WDM);WDM);l 光纤到户需要光纤到户需要CWDM (Coarse WDM);CWDM (Coarse WDM); f = c/ ( c = 2.99 x 108 m/s) For 1 = 1550 nm, f1 = 1.929 x 1

8、014 Hz For 2 = 1551.6 nm, f2 = 1.927 x 1014 Hz = 1551.6 - 1550 = 1.6 nm f = 200 GHz 200GHz-1.6nm(0.8nm); 100GHz-0.8nm(0.4nm); 50GHz-0.4nm (0.2nm) . Applications12 nn0.98 or 1.48DetectorGFF : EDFAdB Typical DWDM system 1 .DemuxMuxlDWDM Filter: Mux, Demux, OADM ,OXC etc.lInterleaver: used together wit

9、h DWDM Filter, increase the level of multiplexinglGFF: EDFA gain smoothinglEdge filter: separate 1310nm and 1550nm,C-band and L-band, pump light and signal lightlAR Coatings: transparent opticslHR Coatings: reflective optics lBeam splitter: transit bump light，signal control lPolarizing and non-polar

10、izing films: split light; light insulation Optical coating in DWDM systemApplications of thin films (2)in LCD ProjectorMirror Cold mirror: lamppolarising film : PCS、pre-polariser and polariser, especially PBS with wide angle and wavelength zoneEdge filter: divide white light into R,G,B or recombinat

11、ion of colorful images；modify colors；color wheelsAR Coatings: transmittance optics, wide angle AR coatings in TIR cubesReflector: reflective optics, wide angle mirrors used in light tubeNon-polarising coatings: Nonpolarising edge filters used in Philips cubesPhase retarder: compliment the phase diff

12、erences between different wavelengths of LCD, enhance contrast Applications of thin films (2)in LCD Projector Blue glass OLPF+ITOApplications of thin films (3)in DSC and mobileUV-IR Cut filter used in mobile phoneOptical low pass filter used in digital camera The global market for DSC from 2003 to 2

13、008（from TSR0812） Around 60% of optical elements and devices were made in Mainland China，30% in Taiwan China，and rest were made in Japan.Applications of thin films (4)Laser Ignition美国国家点火设施（美国国家点火设施（National Ignition Facility Project，简称简称NIF），），长长215米，宽米，宽120米，是世界上最大的激光器，建造和运行成本米，是世界上最大的激光器，建造和运行成本3

14、5亿美元。亿美元。30,000 optics are manufactured for NIF between 2000 - 20081600 hard dielectric coatings (large mirrors and polarizers)2112 sol gel coatings (fused silica windows and lenses)576 sol gel AR coatings (KDP & DKDP)2688 Brewster angle plate laser glass slabs20,000 25,000 small optics (25 cm)A

15、pplications of thin films (5)Optical InstrumentHigh Performance Raman Spectroscopy4755005255505756006256506757007257500.00.20.40.60.81.0TransmittanceWavelength(nm)T /2 3. 微器件微器件- - 微纳结构薄膜微纳结构薄膜蛾眼结构增透膜蛾眼结构增透膜 3. 微器件微器件- - 微纳结构薄膜微纳结构薄膜 3. 微器件微器件- - 微纳结构薄膜微纳结构薄膜波状结构薄膜光子晶体波状结构薄膜光子晶体 3. 微器件微器件- - 微纳结构薄膜微

16、纳结构薄膜波状结构薄膜光子晶体波状结构薄膜光子晶体偏振分束镜偏振分束镜(PBS)设计设计测试测试 3. 微器件微器件- - 微纳结构薄膜微纳结构薄膜波状结构薄膜光子晶体波状结构薄膜光子晶体 测试结果测试结果周期不同，滤光片带通波长不同周期不同，滤光片带通波长不同长波通滤光片长波通滤光片evaporatedSi1. 左、右左、右旋光器件旋光器件2. 波片波片3. 位相补位相补偿片偿片4. 偏振光偏振光成象传感成象传感器等器等 3. 微器件微器件- - 微纳结构薄膜微纳结构薄膜 3. 3. 微器件微器件- Optical MEMS- Optical MEMS40045050055060065070

17、00102030405060708090100Airgap=295nmAirgap=520nmReflectivity(%)Wavelength(nm)Airgap=425nmAirgap=83nm 3. 3. 微器件微器件- Optical MEMS- Optical MEMS不同的空气隙厚度反射不同的颜色不同的空气隙厚度反射不同的颜色 3. 3. 微器件微器件- Optical MEMS- Optical MEMSDigital Paper, a New Reflective Display DeviceThe left figure shows a set of iMoDsTM comb

18、ined in a single color pixel so that different levels of color can be obtained from what is basically a binary device. The right shows a photograph of an actual display. Color resolutions of 300dpi are achieved.Main Advantages: Low power consumption Natural color（高通光电公司）（高通光电公司） 3. 3. 微器件微器件-集成滤光片阵列集成滤光片阵列滤光片阵列：滤光片阵列： 由宽度小于由宽度小于500m m，中心波长不同的带通滤光片排列组成，中心波长不同的带通滤光片排列组成 结合探测器，构成紧凑型成像光谱仪结合探测器，构成紧凑型成像光谱仪可见光七通道滤光片实物图实测滤光片透过率曲线 3. 3. 微器件微器件-集成滤光片阵列集成滤光片阵列风云三号采用集成滤光片成像光谱仪拍摄的图像风云三号采用集成滤光片成像光谱仪拍摄的图像 风云三号成像光