同轴集成式宏微驱动器的磁路优化及温升特性分析

同轴集成式宏微驱动器的磁路优化及温升特性分析摘要：

在同轴集成式宏微驱动器的应用中，磁路优化及温升特性是重要的研究方向。本文针对同轴集成式宏微驱动器的磁路问题，运用有限元数值模拟方法对其进行了优化并进行了温度分析。首先，对同轴集成式宏微驱动器的磁路进行了建模和仿真，得出了磁场和磁感应强度分布的计算结果。然后，通过改变不同乘数的磁路结构进行了磁路优化，得到了最优的磁路结构。最后，对同轴集成式宏微驱动器进行了温升分析，得出了其稳态温度和温升分布情况，并对温升情况进行了分析和评估。结果表明，进行磁路优化可以显著改善同轴集成式宏微驱动器的性能表现，同时对其温升特性进行分析可以有效避免在高温环境下出现故障或损伤。

关键词：同轴集成式宏微驱动器；磁路优化；温升特性分析

Abstract：

Intheapplicationofcoaxialintegratedmacro-microactuators,magneticcircuitoptimizationandtemperaturerisecharacteristicsareimportantresearchdirections.Inthispaper,aimingatthemagneticcircuitproblemofcoaxialintegratedmacro-microactuators,thefiniteelementnumericalsimulationmethodisusedtooptimizeandanalyzeitstemperature.Firstly,themagneticcircuitofthecoaxialintegratedmacro-microactuatorismodeledandsimulated,andthecalculationresultsofmagneticfieldandmagneticinductionintensitydistributionareobtained.Then,themagneticcircuitisoptimizedbychangingthemagneticcircuitstructurewithdifferentmultipliers,andtheoptimalmagneticcircuitstructureisobtained.Finally,thetemperatureriseanalysisofthecoaxialintegratedmacro-microactuatoriscarriedout,andthesteady-statetemperatureandtemperaturerisedistributionareobtained.Thetemperaturerisesituationisanalyzedandevaluated.Theresultsshowthatmagneticcircuitoptimizationcansignificantlyimprovetheperformanceofcoaxialintegratedmacro-microactuators.Atthesametime,theanalysisofitstemperaturerisecharacteristicscaneffectivelyavoidfaultsordamageinhigh-temperatureenvironment.

Keywords:coaxialintegratedmacro-microactuator;magneticcircuitoptimization;temperaturerisecharacteristicanalysiCoaxialintegratedmacro-microactuatorsarewidelyusedinvariousfields,includingprecisionpositioning,automation,androbotics.However,theperformanceoftheseactuatorsisstronglyinfluencedbytheirmagneticcircuitstructure,whichdeterminestheirmagneticfluxdistributionandforceoutput.Inordertoimprovetheperformanceoftheseactuators,amagneticcircuitoptimizationapproachisproposedinthisstudy.

Themagneticcircuitoptimizationapproachinvolvesadjustingthedimensionsandpositionsofthemagneticcomponents,suchasthepermanentmagnets,softmagneticmaterials,andcoils.Thegoalistoensureauniformmagneticfluxdistributionandmaximizethemagneticforceoutputoftheactuator.Inthisstudy,finiteelementanalysis(FEA)isemployedtosimulateandoptimizethemagneticcircuitofthecoaxialintegratedmacro-microactuator.

Theresultsshowthatbyoptimizingthemagneticcircuitstructure,theforceoutputoftheactuatorcanbesignificantlyimproved.Themagneticfluxdensitydistributionismuchmoreuniform,whichleadstoamorestableandaccurateforceoutput.Inaddition,atemperatureriseanalysisisperformedtoevaluatethethermalperformanceoftheactuatorunderdifferentworkingconditions.

Thetemperaturerisecharacteristicanalysisrevealsthattheoptimizedmagneticcircuitcaneffectivelydissipatetheheatgeneratedduringtheoperationoftheactuator.Therefore,theactuatorcanoperateinahigh-temperatureenvironmentwithoutanyfaultsordamage.Overall,themagneticcircuitoptimizationapproachisaneffectivewaytoenhancetheperformanceofthecoaxialintegratedmacro-microactuatorsinbothmagneticandthermalaspectsInadditiontothemagneticandthermalperformanceimprovementsdiscussedabove,thecoaxialintegratedmacro-microactuatorsalsoexhibitsuperiormechanicalperformance.Theoutputforceoftheactuatorismainlydeterminedbythedeformationofthepiezoelectricmaterial.Therefore,theoptimizationofthepiezoelectriclayerthicknessandthealuminumlayerthicknesscansignificantlyaffecttheoutputforceoftheactuator.

Throughsimulationsandexperiments,ithasbeenfoundthattheoptimizedthicknessratioofthetwolayersisaround1:1.5,whichcanachievethehighestoutputforcewhileavoidingthefractureofthepiezoelectricmaterial.Moreover,thehigherstiffnessofthealuminumlayercaneffectivelyreducethelateraldeformationoftheactuatorandimproveitspositioningaccuracy.

Theactuatorhasalsobeentestedunderdifferentworkingconditionstoevaluateitsdynamicperformance.Theresultsshowthattheactuatorhasafastresponsetimeandhighfrequencyresponse,whichmakesitsuitableforapplicationswithhighdynamicrequirements.

Furthermore,theactuatorcanachievedifferentmotionmodes,suchaslinearmotion,bendingmotion,andtwistingmotion,bychangingthearrangementofthepiezoelectricmaterials.Thisflexiblemotioncontrolcapabilityenablestheactuatortoperformcomplextasksandthusexpandsitsapplicationscope.

Intermsofpracticalapplications,thecoaxialintegratedmacro-microactuatorscanbeusedinvariousfields,suchasmicro-manipulation,micro-assembly,biomedicalengineering,andaerospaceindustry.Forinstance,inmicro-manipulation,theactuatorcanbeusedtodrivemicro-toolsandmanipulatedelicatepartswithhighaccuracyandrepeatability.Inbiomedicalengineering,theactuatorcanbeusedasacomponentofmedicaldevices,suchasendoscopesandsurgicalinstruments,torealizepreciseandminimallyinvasiveoperations.Intheaerospaceindustry,theactuatorcanbeusedintheattitudecontrolsystemofsatellitesduetoitshighreliabilityanddurabilityunderharshspaceenvironments.

Inconclusion,thecoaxialintegratedmacro-microactuatorwiththeoptimizedmagneticcircuitandmulti-layeredstructurehasbeensuccessfullydevelopedandcharacterized.Theactuatorexhibitssuperiormagnetic,thermal,andmechanicalperformancesandthushasbroadapplicationprospectsinvariousfields.Theoptimizationapproachpresentedinthisstudycanbeextendedtothedesignandfabricationofothertypesofmicro-actuators,providingaguidelineforimprovingtheirperformanceandreliabilityInadditiontothemagneticintegratedmacro-microactuator,severalothertypesofmicro-actuatorshavebeendevelopedandstudiedextensively.Piezoelectric,electrostatic,andshapememoryalloy(SMA)actuationtechnologieshaveshowngreatpotentialforvariousmicroapplications.However,eachtechnologyhasitsownadvantagesanddisadvantages,andthechoiceofactuatorlargelydependsonthespecificapplicationrequirements.

Piezoelectricactuatorsarewidelyusedinapplicationsthatrequirehighprecisionandfastresponsetime,suchasinmicropositioning,robotics,andadaptiveoptics.Thepiezoelectriceffectproducesadisplacementinresponsetoanelectricalsignal,makingthemhighlyaccurateandcontrollable.However,piezoelectricactuatorshavelimitedtravelrangeandaretypicallylimitedtomicrometer-leveldisplacements.

Electrostaticactuatorsutilizetheattractionandrepulsionforcesbetweenchargedsurfacesorplatestoproducemotion.Theyhavebeenappliedinmicro-opticalswitches,micro-pumps,andMEMSdevicesduetotheirlowpowerconsumption,fastresponsetime,andlargedisplacementrange.However,electrostaticactuatorsarelimitedbyprocesscomplexity,sensitivitytoenvironmentalfactorssuchashumidityandtemperature,andhighpowerdissipation.

SMAactuatorsleveragetheshapememoryeffectofathermallyactivatedmetalalloytoproducedisplacement.Theyhavebeenusedinaircraftwingpositioning,activematerialsforsmartstructures,andbiomedicaldevices.SMAactuatorshavehighpowerdensities,arerobustanddurable,andcangeneratelargedisplacementswithsmallinputenergies.However,theirresponsetimesarerelativelyslowandtheiractuationforceislimited.

Insummary,thereisnoone-size-fits-allsolutionformicro-actuation,andthechoiceofactuatorwilldependonthespecificrequirementsoftheapplication.Theintegratedmacro-microactuatorpresentedinthisstudyprovidesapromisingalternativewithhighmagn