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物理气相沉积TIALN涂层的研究进展A1A0A2A3A4A5A6A7A8A9A10A11A12A13TIALNA14A15A16A17A18A19A20A21A22A23A24A25A26A27A28A29A30A31A32A33A34A35A36ALA37A38A39A40A36N2A41A40A36A42A43A44A45A36A46A47A48A21A49A50A37A38A51TIALNA14A15A16A52A53A36A54A47A36A55A46A56A57A58A59A60A61A62A63A59A64A59A65A16A66A67A68A69A70A32A33A16TIALNA14A15A71A72A73A74A75A76A77A78A26A79A80A81A82A83A40A77A84A60A14A15A85A86A47A87A64A88A89A68A90A91A92A93A94A91TIALNA14A15A16A75A95A26A96A97A98A99A100A101A102A14A15A16A32A33A34A35A26A103A58A49A32A33A104A105A68A84A37A106A107A108A109A14A15A60A110A111A112A84A15A14A15A113A114A115A116A117A118A76A16A22A23A34A119A68A120A121A122A123TIALNA14A15A32A33A34A35A124A43A52A53A54A47A55A46A56A57A58A59A125A126RECENTPROGRESSESINPHYSICALVAPORDEPOSITEDTIALNCOATINGABSTRACTTHERESEARCHANDDEVELOPMENTOFPHYSICALVAPORDEPOSITEDTIALNCOATINGSARESUMMARIZEDINTHEPAPERTHEPREPARATIONMETHODS,ALUMINUMCONTENT,NITROGENFLOWRATE,SUBSTRATEBIAS,TEMPERATUREANDALLOYINGELEMENTSHADSIGNIFICANTEFFECTSONTHEPROPERTIESOFTIALNCOATINGS,INCLUDINGCRYSTALSTRUCTURE,HARDNESS,HIGHTEMPERATUREOXIDATIONRESISTANCEANDCORROSIONRESISTANCEALTHOUGHTHECOATINGWASUSEDINMANYAPPLICATIONS,THEREWEREMANYDRAWBACKSWHICHLIMITITSPERFORMANCE,SUCHASHIGHRESIDUALSTRESS,FORMATIONOFLARGEDROPLETSANDPOORDENSITYFORFURTHERAPPLICATION,NEWPREPARATIONMETHODSHOULDBEEXPLOREDMEANWHILE,THEOPTIMIZATIONOFTHEPROCESSINGTECHNOLOGYSHOULDBEMADEITISPOTENTIALTODEVELOPMULTIPLENANOCOMPOSITECOATINGANDSUPERLATTICEMULTILAYERCOATINGINTHEFUTUREKEYWORDSTIALNCOATINGS,PREPARATIONMETHODS,CRYSTALSTRUCTURE,HARDNESS,HIGHTEMPERATUREOXIDATIONRESISTANCE,REVIEW0前言A127A128A129A130A131A132A133A134A135A136A137A138PHYSICALVAPORDEPOSITION,PVDA139A140A141A142A143A144A145A146A147A148A149A150A151A152A153A154A155A156A157A158A159A160A161A162A163A164A165A166A167A168A169TINA170A171A172A173A174A175A161A176A177A178A179A160A161A180A181A154A182A183A184A185A175A186A172A187A188A189A190A191A172A161A192A1931A182A194A195A175A196A197A168A154A183A174A198A182A199550A200A201A155A156A202A203A197A1682A166A204A205A206A207A191A208A161A209A210A182TINA170A171A155A156A211A183A212A213A214A215A186A172A150A208A161A216A217A182A218A214A219A216A220A170A171A221A222A161A223A206A166PVDA224A225A226A227A161A167A168A169A228A229TIALNA230A170A171A231A199A232A233TINA170A171A161A234A235A236A209A210A237A238A161A239A240A220A241A242A233A243A244A170A171A166A199TIALNA170A171A245A182ALA246A247A157A207A248TINA152A249A250A224A251A252A245A253A254A152A249A161A255A186TIA246A247A182A162A136A0A209A1A2A3A187A136A118A4A5A182A196A201A253A6A7A8A4A5A9A211A10A254A11A12A182A202A13A14A176A177A15A16A175A254TINA170A1713,4A166A175A196A53A17A18A182TIALNA170A171A151A152A183A19A20A21A22A187A211A23A187A213A24A161AL2O3A215A25A26A182A185A175A248A170A171A161A195A175A196A197A168A1545,6A166A13A203A182TIALNA170A171A27A172A173A26A234A251A244A28A177A175A187A180A59A29A154A178A180A181A154A160A190A135A3079A182A67A31A155A20A32A33A163A254A34A172A226A35A187A223A36A209A37A38A178A1A39A40A41A190A224A152811A166A202A13TIALNA229A42A43A231A174TINA231A173A31A44A161A220A241A170A171A221A222A182A233A45A238A46A47A48A49A50A51A52A166A54A55A186A56A248A226A227A224A225A187ALA233A57A58A8A187N2A60A8A187A234A61A62A63A187A196A177A64A65A14A66A233A57A68TIALNA170A171A161A251A252A187A176A177A187A175A196A195A197A168A154A178A180A59A29A154A190A154A183A161A69A70A182A242A71A248A72A199A161A73A74A75A185A223A248A76A95A161A77A78A224A79A1661涂层的制备方法PVDA111A80A81A82A83A84A85A86A87A88A89A90A91A92A93A94A96A97A82A83A98A99A100A93A84A101A102A103A82A104A105A106A107A108A109A110A112A113A114A115A116A110A112A117A119A120A121A122A123A124A201A125A126A127A128A129A130PVDA125A126A253A131TIALNA132A133A134A164A137A138A139A140A252A138A141A142A143A144A114A145A120A138A146A147A123A140A252A144A114A145A120A1385,1218A127A140A252A138A251A148A130A149A139A142A150A121A144A114A184A142A151A182A152A153A154A155A139A156A157A225A158A121A159A160A107A161A144A114A162A163A165A166A140A252A110A112A253A167A121A168A142A169A107A184A144A114A158A170A171A172A121A173A174A175A107A176A252A144A114A184A177A168A178A179A113A114A121A180A181A125A126A182A161A183A140A252A185A187A107A166A140A252A185A121A113A114A149A139A156A157A121A225A158A107A244A188A189A156A157A121A137A163A252A163A190A191A107A115A192A108A109A132A133A121A193A194A127A165A195A193A194A113A114A155A139A197A198A121A158A170A107A199A200A165A140A252A138A253A131A121A132A133A197A204A205A141A206A189A207A197A198A127A200A217A107A208A171A209A132A133A167A210A121A122A123A253A212A197A214A127A199A200A107A140A252A138A122A216A137A218A239A219A130A195A198A220A160A110A112A121A140A252A146A132A133A121A253A131A127A142A143A144A114A145A251A184A221A224A222A226A175A148A130A227A169A168A228A142A230A232A209A234A144A114,A157A163A193A194A235A152A236A237A238A240A121A241A174A243A121A132A133A245A246A127A183A134A164A247A160A251A144A248A249A198A141A144A114A250A205A254A255A141A158A170A198A141A193A194A153A254A46A141A132A133A177A40A0A1A171A207A21419A127A147A123A140A252A144A114A145A120A138A251A184A142A143A144A114A254A121A40A184A243A2A3A4A187A121A107A47A125A253A152A147A151A187A123A253A142A114A146A144A114A121A48A225A153A254A216A49A117A50A5A132A133A178A179A255A52A248A6A170A121A128A121A127A53A179A7A171A144A114A145A121A137A138A54A158A253A131A55A209A234A132A133A107A56A158A253A131A209A234A248A171A110A132A133A63A7A171A8A9A132A133A107A54A158A253A131A57A133A132A133A56A158A253A131A10A133A7A171A132A133A1272工艺参数对TIALN涂层性能的影响21A11A12A13A14A15A16A17A18A19A20A21A22A23A24A25A12A13A14A15A17A18A21A22A24A25A30A26TIALNA27A28A29A31A58A32A59A33A139A32N2A34A60A32ARA61A210A35A31A58A32A36A29A37A38A39A62A64A41A42A43A44A42A35A196A45A51A31A58A32A36A29A37A38A35A65A66A67A225A29A68A33A254A69A70A71A37A35A136A67A225A65A66A29A72A73A71A37A35A74A75A64A41A27A28A29A76A77A78A79A80A61A81A82A83A34A84A72A85JEONG20A86A87A88A89A90A91A92A93A94A95A96A97A98200A99A101A100A117A102A103A104A29TIALNA27A28A85A105A106A69A107A51N2A108A36A29A109A110A35200A111A92A112A29A113A114A34A115A114A116A109A110A35A27A28A29A118A119A114A120A109A110A85A121A1222123A120A133A123A124A125A29A82A126A85BUJAK24A127A88TIALA128A129A130A168A87A88A131A224A42A43A65A66A132A134A135A76A77TIALNA137A28A35A244A105A106N2A108A36A138A137A28A140A141A142A143A80A144A114A29A64A41A35A82A145A69A107A195A146N2A108A36A72A147A148A149A137A28A140A141A29A146A150A151A152A153A35A71A154A137A28A140A141A155A156A114A85A1571A158A39A196N2A108A36A159A27A28A29A140A141A142A143A85A27A28A144A114A51N2A108A36A29A195A146A160A195A146A161A109A110A35A51A161A162A163A164A165A39A37A85A1661A167A169N2A170A171A172A173A174TIALNA175A176A177SEMA16624FIG1SEMIMAGESOFTIALNCOATINGSDEPOSITEDWITHDIFFERENTNITROGENPRESSUREA31A58A32A36A178A180A64A41A27A28A29A210A108A80A61A81A82A83A138A27A28A144A114A181A70A64A41A85A1572A204A182A183TIALNA27A28A144A114A34A137A162A185A194A82A128A113A114A186N2A187A73A29A188A189A190A191A85A192N2A187A73A158100SCCM200SCCMSTANDARDCUBICCENTIMETERPERMINUTE,SCCMA45A35A27A28A193A129A197A128A129A124A29A198A73A51N2A187A73A29A195A146A75A109A110A35A136A133A27A28A29A144A114A195A146A85A199A192N2A187A73A200A180200SCCMA45A35A51A201N2A187A73A29A195A146A27A28A124A82A83A29A99A101A100A117A33111A104A141A117200A104A141A202A37A35A27A28A29A118A119A114A148A149A35A144A114A203A205A148A149A206A207A161A51N2A187A73A29A195A146A35A27A28A124A82A83A193111A34200A104A141A111A92A112A113A114A208A209A37A38A39A146A35A211A212A27A28A29A144A114A162A163A164A165A39A37A85A213A149N2A187A73A159A94A95A29A27A28A29A144A114A213A149A35A214A72A215A211A158A27A28A193NA198A73A39A216A70A210A183A213A217TI2ALNA124A85A33A218A65A66A67A225A29A68A33A254A51N2A187A73A29A195A146A75A148A149A35A65A66A72A73A148A149A35A74A75A138A162A219A29A220A221A58A88A109A222A35A211A212A27A28A186A162A219A29A82A128A113A114A159A148A851001502002501000150020002500300035004000HARDNESSCRITICALLOADOFADHENSIONNITROGENFLOWRATESCCMHARDNESSKG/MM201020304050CRITICALLOADOFADHENSIONNA2232A226A227N2A228A229A230TIALNA231A232A233A234A235A236A237A238A239A240A241A235A233A242A243A231A232A245A235A24647M25FIG2EFFECTSOFNITROGENFLOWRATEONHARDNESSANDADHESIONSTRENGTHOFTIALNCOATINGSWITHTHICKNESSOF47M22A247A249A250A251A252A255A21A0A1A2A3A4A5A6A7A247A249A250A251A0A1A5A6A70A8A9A10A184A11A124A12A13A14A25A15A16A101A229A17A10A184A18A19A59A20A22A66A17A10A184A18A14A23A24A26A27A28A10A184A34A8A184A29A14A30A31A184A66A92A70A32A18A33A104A35A42A36A37A25A17A10A184A18A14A28A10A184A229A35A38A39A114A24A40A41A28A43A27A25A70A8A44A28A58A93A45A46A40A41A47A48A49A50A32A18A25A51A32A18A52A53A54A184A55A56A43A27A105A57A136A32A18A107A60A66A32A18A60A61A28A62A78A63A64A65A67A68A28A69A61A34A67A68A51A32A18A28A71A72A73A17A66A202A74A109A75A72A76A28A32A18A42A36A77A79A80A81A67A68A71A82A34A83A84A29A30A43A66A110A85A86A8726A88A89A90A91A94A95A96A97A98TIALNA99A100A102A103A106A108A195A111A97A98A112A113A115A116A117A118A119A120A121A122TIALNA99A100A123A125A126A127A116A128A129A130A131A132A133A134,A99A100A116A135A137A138A129A195A111,A139A140A141A142A143A144VLASVELDA8727A145A89A146A91A247A103A147A148A149A150A97A98A116A151A152A153A154A116TIALNA99A100A155A156111A116A157A158A159A160A144A161A162A103A106A108A117A118A120A121A16350VA195A164250VA102A122A99A100A116A165A166A167A168A169767GPAA195A164A1701181GPAA122A99A100A116A138A129A171A117A118A120A121A16950VA195A164150VA102A163263GPAA195A164A170317GPAA122A172A173A174A175A195A164A117A118A120A121A99A100A116A138A129A193A176A177A164A144A178A17922A1302830A180A170A181A150A182A116A183A185A144A171A117A118A120A121A116A195A164A122A186A94A95A187A117A118A116A188A189A190A191A195A164A122A192A194A117A118A123A125A183A196A197A198A116A164A199A248A200A201A203A204A205A206A122A207A99A100A116A183A208A193A209A128A122A99A100A194A117A118A116A183A196A168A130A138A129A195A164A144A210A211A117A118A120A121A112A212A102A122A213A203A204A195A164A122A97A98A214A141A215A142A122A216A217A116A99A100A218A216A219A220A122A221A102A222A223A217A117A118A224A225A122A226A209A138A129A227A156A228A215A142A14423A230A231A232A233A234A235A236A237A238A239A240A241A242A243A244A230A231A232A233A235A236A237A238A242A243A245A246A249A250A251A252A253A254A255A128A253A0A1A2A3A4A5A6A129A130A25A131A167A7A254A8A132A9A245A246A254A255A128A66A250A251A40A10A254A15A78A11A64A12A13A250A251A14A22A168A16A17A254A133A18A58A22A168A16A17A249A19A252A253A254A134A201A25A202A20A14A245A246A254A21A23A41A255A64A12A25A24A26A64A12A245A246A254A27A28A66A29A7331A30A31A32A33A34A35A36A37A38A115A52A39A42A43A44A45A46A47A48A49A39A37A50A51A53A144A54A55A70A47A48A49A39A56480A151A152A55A35A36A37A38A115A52A39A42A43A44A45A57A59A135A101A98A603TIALN涂层的性能31ALA61A62A63A65A67A68A69A71A72A74A61A62A63A65A68A69ALA183A75A136A76RAL0143NMA77TIA183A75A136A76RTI0146NMA79A80A137A81A82A83A84A85ALA183A75A86A87A88A157TINA89A90A91A92A93A94A95A96A97TIA183A75A99A100TIALNA102A103A104A188RALRTIA83ALA183A75A96A97A88A157TIA183A75A105A83A222A100TINA102A93A94A106A107A83A118A108A138A109A110A82A83A118A89A111A112A113A114A88A116A117A119A107A12025,3235A103A196A121A122A123A124A95ALA125A126A79A107A120A83A123A124A79A102A93A94A112A127A139A140A117A119A107A120A103A1413A204A142A143TI1XALXNA123A124A79A118A108A138A109A77A127A139A122ALA125A126A145A146A79A107A120A147A1485A103KIMURA36A149A150A117A153TI1XALXNA95A154XA15506A121A83A123A124A156A158B1NACLA79A93A94A83A154XA15907A121A83A123A124A156A158A160A161A162A93A94A103000204060810121000150020002500300035004000ALCONTENTOFFILMSXMOLFRACTIONVICKERSHARDNESSKG/MM2VICKERSHARDNESSZNSTYPENACLZNS416417418419420421422423424425LATTICEPARAMETER101NMLATTICEPARAMETERNACLTYPEA1633TI1XALXNA164A165A166A169A170A171A172A173A174A175ALA176A177A178A179A180FIG3LATTICEPARAMETERANDMICROHARDNESSOFTI1XALXNCOATINGSWITHDIFFERENTALCONTENTS32A181A182A184A185A186A187A189A181A182A184A185A187A189ALA190A191A192A193A194A195A197A198A199A200TINA203A205A192A206A207A208A209A210A211A212A213A214A215A216A217A218A198A199A200TINA203A205A192A219A199A220A221A223A211A213A224A225A199A192A219A221A223A220A207A226TINA192600A227A198A199A228800A227A229KAWATE37A230A231A232A233A234A235A236A237A238A239TIALNA203A205A213A240A241A242A243A244800A227A245A203A205A192A221A223A243A246A195A247A217A213A248A220A207A249A199A228900A227A250A213A203A205A251A252A242A254A255A146A221A223A229A195A159A192A221A223A220A207A245A213TIALNA203A205A242A254A199A220A221A223A192A13A0A195A159A229A248A220A207A78A188700A227A250A213TIALNA203A205A192A221A223A7A164A1OA183A235A226A217A2A3A203A205A148A189A149A4A213TIA58ALA183A235A192A149A4A75A100A229A248A221A223A220A207A199A188800A227A250A213TIALNA203A205A5A151OA183A235A3A203A205A148A189A149A4A217A213A203A205A5A192ALA183A235A3A217A149A4A6OA183A235A8A9A209A10AL2O3A11A213A126A83A221A223A12A205A213A251A205A152ALA213A11A14A192A148A205A153AL38A229ALA190A191A192A193A194A16A46A244TIALNA203A205A251A252A209A10A83A15A208A211A17A192AL2O3A215A18A19A213A154A20OA183A235A3A203A205A148A189A149A4A213A198A199TIALNA203A205A192A219A221A223A211A229TIALNA203A205A219A221A223A211A192A199A78A155A203A205A5ALA37A21A192A195A159A214A32A213A844A1A195A159A37A21A192TI1XALXNA203A205A192A221A223A90A225A213A226A84A16A46A157A170A23A203A205A5ALA37A21A10607A250TIALNA203A205A244A24A25A5A192A219A221A223A220A207A16A26A228950A227A213A244ALA37A21A51A18807A250A203A205A192A219A221A223A211A155ALA37A21A192A27A193A214A27A195A229600800100012001400160002468101214WEIGHTGAINMGTEMPERATUREK5K/MININAIRTINTI05AL05NTI08AL02NTI03AL07NTI04AL06NA284A29A30ALA33A31A34TI1XALXNA35A36A34A38A39A40A41FIG4OXIDATIONCURVESASAFUNCTIONOFTHEALCONCENTRATIONINTHETI1XALXNFILMS33A42A43A44A45A47A43A44A45A47A48A49A50A52A53A54A48A49A50A55A56A57A59A60A61A62A63A64A65A158A66A67TIALNA68A69A70A71A72A73A74TINA68A69A76A77A88ALA79A80A81A82A85A86TINA118A87A89TIA79A80A91A118A87A92A93A94A95A91A96A97A98A68A69A89A99A93A101A102A103A104A68A69A105A106A218A107A91A196A108ALA79A80A70A109A110A177A106A111TINA112A113A218A107A70A114A115A116A203A117A91A119A74A98TINA118A87A89A109A110ALA91A120A121A99A93A191A122A161A123A114A115A91A124A125A191A122A127A225A91A222A128A191A122A129A163A130A131A132A91A104A68A69A105A106A218A107A91A144A73A68A69A70A71A72A116MUSIL39A133A115A134A135A251A136A137A138A139A70A140A71TI,ALNA141A119A142A143A118TIALNA145A147A150A156ALNA160A162A165A128A91A71A72A120A16647GPAA116A167A168A68A69A89ALA169A171A172A73A108A119A74A156A128A173A174A175A176A178A70ALNA162A91A104A68A69A70A71A72A179A180A116OHNUMA40A181A182A184A185A186A147A196ALA169A171A70A187A190A192A193A194A80A197A137A138A139A70TI1XALXNA68A69A70A71A72A116A92A198A199A200ALA169A171A70A129A201A68A69A71A72A179A180A91TI06AL04NA68A69A185A186A172A73A70A71A72A91A97TI042AL058NA145TI03AL07NA68A69A77A88ALNA162A70A129A202A68A69A71A72A186A204A180A205A11634A206A207A208A210A212A213A214A207A208A210A212A216A219A220A221A223A224A226A227A228A229A230A231A232A230A233A234A235A230A236A237A238A239A240A241A242A243A244A245A246A247A220A248A249A250A252A253A216A219A236A237A254A255A111A248A249A216A219A221A223A224A226A220A120A164A246A247A25A21A188A216A219A236A237A165A0A230A224A166A20A1A52A248A220A2A3A4A216A219A220A15A5A6A7A77A25A222A228A221A223A224A226A7A77A250ALA35A8A9A16A10A11A12A13A14A17A18A19A22A58A23A24A9A26A27A28A144A29A14A17A9A30A31A32A33A34A66A168A36A37A6241A38A39A23A40A41A42A43A184A44A45A46TIALNA14A17A28600A151A152A47NACLA58A169A247A48A9A49A50A51A39A93A53A54A31A32A55A56A28A57A59A60A61TIALNA14A17A63A64A31A32A65A67A171A68A83A69A28A173A36A204A23A24A66A70A7342A97A75A13A23A40A41A42A43A184A44A45A46A9TIALNA58TINA112A71A14A17A47A174A72A79A58A175A72A79A18A9A30A31A32A33A34A66A57A59A60A61A74A76A78ALA9A16A10A136A80TIALNA14A17A47A31A32A81A82A18A84A85A86A87A106A88A34A28A89TINA14A17A90A97A28TIALNA14A17A9A30A31A32A33A34A204A91A144A29A6635A92A94A95A96A98A99A100A94A95A96A98A101A102A103A104A105A107A108A109A110A113A114A101A102A115A116A117A101A102A118A119A121A108A122A123A107A124A101A102A108A125A177A126A127A128A129A103A104A105A107A130A131A132A179A105A107A124A133A105A107A134A135A137A132A179A105A107A138A180A139A101A102A140A141A124A181A142A108A143A145A146A137A147A101A102A132A183A108A122A148A124A149A150A153A101A102A118A119A121A154A155A108A156A157A158A186A117A187A245A117A159A158A160A161A162A108A163A133A113A114A105A107A129A133A105A107A138A147A101A102A167A170A118A119A121A167A170A108A133A189A172A176A178A182A185A190A191A140A108A105A107A129A101A102A146A133A105A107A192A193A194A195A193A196A197A198A199A200A201A2028A2031A205A206A207SA208FA209A210A211A212A213A208A214A215A216A217A218A219A220A221A223A225A226TTA211A214A215A227A228A229A230A231TRA211A232A230A226EFA208A233FA209A210A211A214A215A218A234A235A236A237A208A238A239A240A241PVDTIALNA214A215A218A242A243A244A246A249A227A228A250A251A252A253A212A213A254A255A208A227A228A230A231A40A173A10A0A241AHLGREN28A16A1A2A3TIALNA214A215A242A243A244A246A211A255A244A246A13A4A212A213A254A255A218A5A6A32A5A6A241A92A212A213A254A255A2140VA5A6A236200VA229A214A215A218A242A243A255A244A246A2117GPAA5A6A2365GPAA25A214A215A218A7A231A21338A20105GPAA5A6A236362A20117GPAA241A92A242A243A244A246A71A6A229A108A136A214A215A249A212A213A2A8A9A202A208A209A215A25A77A11A214A215A249A212A213A218A12A14A2465A241A211A88A50A15A242A243A244A246A17A214A215A249A212A213A12A14A246A218A18A19A25A70A212A213A249TIALNA214A215A96A20A227A228A203A235A206A20A215A253TIA34CUA4043A46A77A11A22A244A246A25A154A23A202A24A70A26A27A206A218A149A28A29A30A214A215A249A212A213A218A12A14A246,A196A229A31A46A5A6A212A213A218A254A255A25A5A195A33A184A218A35A36A58A93A25A136A214A215A249A212A213A218A26A27A206A209A37A207A14A208A25A50A15A26A27A38A39A235A41A218A42A193A241A72A31A46A47A71A43A44A214A215A218A37A209A70A45A27A214A215A249A212A213A96A20A209A37A48A49A37A209A210A231A218A51A215A210A231A214A215A25A50A15A52A215A96A20A218A235A41A53A156A25A29A30A214A215A249A212A213A218A12A14A195A231A2414其他元素对涂层性能的影响A233A54A55A56A57A59A60A61A62A145A63A64TIALNA181A65A89A66A67A68A69A73A69A73A74A212A65A75A76A78A79A80A81A213A219A214A82A83A84A85A86A87A90A91A94A95A66A67A82A97A87A98A99TIALNA66A67A68A69A73SIA76A78A100A101A102A103A104A105A82A106A107A86A94A95A109A66A67A82A110A111A112A113A114A103A97A86A150A66A67A82A115A116A97A117A1184446A98SIA69A73TIALNA66A67A119A120A79A80A188A1041FTHFSTRFETTA215A82SI3N4A76A78A121TI1XALXNA82A122A216A123A111A124800900A151A94A95A1011100A151A86A94A95A109A66A67A82A95A123A110A11147A98A167A125A82LAA69A73TIALNA66A67A68A76A78A90A91A94A95A66A67A82A113A114A103A97A98A991000A151A152TI066AL032LA002NA66A67A82A113A114A103A126A127A128TI056AL044NA66A67A8244
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