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REFERENCENUMBERISO1488032006EINTERNATIONALSTANDARDISO148803FIRSTEDITION20060601OPTICSANDPHOTONICSMICROLENSARRAYSPART3TESTMETHODSFOROPTICALPROPERTIESOTHERTHANWAVEFRONTABERRATIONSOPTIQUEETPHOTONIQUERSEAUXDEMICROLENTILLESPARTIE3MTHODEDESSAIPOURLESPROPRITSOPTIQUESAUTRESQUELESABERRATIONSDUFRONTDONDEIIIIICONTENTSPAGEFOREWORDIVINTRODUCTIONV1SCOPE12NORMATIVEREFERENCES13TERMSANDDEFINITIONS14SUBSTRATETEST15MICROSCOPETESTMETHOD151PRINCIPLE152MEASUREMENTARRANGEMENTANDTESTEQUIPMENT253PREPARATION46PROCEDURE461GENERAL462MEASUREMENTOFEFFECTIVEBACKORFRONTFOCALLENGTH463MEASUREMENTOFCHROMATICABERRATION464MEASUREMENTOFTHEUNIFORMITYOFTHEFOCALSPOTPOSITIONS57RESULTSANDUNCERTAINTIES58COUPLINGEFFICIENCY,IMAGINGQUALITY69TESTREPORT6ANNEXAINFORMATIVEMEASUREMENTSWITHWAVEFRONTMEASURINGSYSTEMS8ANNEXBNORMATIVECONFOCALMEASUREMENTOFEFFECTIVEBACKORFRONTFOCALLENGTHOFLENSARRAY10ANNEXCINFORMATIVECOUPLINGEFFICIENCY,IMAGINGQUALITY12ANNEXDNORMATIVEMEASUREMENTOFTHEUNIFORMITYOFTHEFOCALSPOTPOSITIONSOFAMICROLENSARRAY13BIBLIOGRAPHY14IVFOREWORDISOTHEINTERNATIONALORGANIZATIONFORSTANDARDIZATIONISAWORLDWIDEFEDERATIONOFNATIONALSTANDARDSBODIESISOMEMBERBODIESTHEWORKOFPREPARINGINTERNATIONALSTANDARDSISNORMALLYCARRIEDOUTTHROUGHISOTECHNICALCOMMITTEESEACHMEMBERBODYINTERESTEDINASUBJECTFORWHICHATECHNICALCOMMITTEEHASBEENESTABLISHEDHASTHERIGHTTOBEREPRESENTEDONTHATCOMMITTEEINTERNATIONALORGANIZATIONS,GOVERNMENTALANDNONGOVERNMENTAL,INLIAISONWITHISO,ALSOTAKEPARTINTHEWORKISOCOLLABORATESCLOSELYWITHTHEINTERNATIONALELECTROTECHNICALCOMMISSIONIECONALLMATTERSOFELECTROTECHNICALSTANDARDIZATIONINTERNATIONALSTANDARDSAREDRAFTEDINACCORDANCEWITHTHERULESGIVENINTHEISO/IECDIRECTIVES,PART2THEMAINTASKOFTECHNICALCOMMITTEESISTOPREPAREINTERNATIONALSTANDARDSDRAFTINTERNATIONALSTANDARDSADOPTEDBYTHETECHNICALCOMMITTEESARECIRCULATEDTOTHEMEMBERBODIESFORVOTINGPUBLICATIONASANINTERNATIONALSTANDARDREQUIRESAPPROVALBYATLEAST75OFTHEMEMBERBODIESCASTINGAVOTEATTENTIONISDRAWNTOTHEPOSSIBILITYTHATSOMEOFTHEELEMENTSOFTHISDOCUMENTMAYBETHESUBJECTOFPATENTRIGHTSISOSHALLNOTBEHELDRESPONSIBLEFORIDENTIFYINGANYORALLSUCHPATENTRIGHTSISO148803WASPREPAREDBYTECHNICALCOMMITTEEISO/TC172,OPTICSANDPHOTONICS,SUBCOMMITTEESC9,ELECTROOPTICALSYSTEMSISO14880CONSISTSOFTHEFOLLOWINGPARTS,UNDERTHEGENERALTITLEOPTICSANDPHOTONICSMICROLENSARRAYSPART1VOCABULARYPART2TESTMETHODSFORWAVEFRONTABERRATIONSPART3TESTMETHODSFOROPTICALPROPERTIESOTHERTHANWAVEFRONTABERRATIONSPART4TESTMETHODSFORGEOMETRICALPROPERTIESENISO1488032006VINTRODUCTIONTHISPARTOF14880SPECIFIESMETHODSOFTESTINGOPTICALPROPERTIES,OTHERTHANWAVEFRONTABERRATIONS,OFMICROLENSARRAYSEXAMPLESOFAPPLICATIONSFORMICROLENSARRAYSINCLUDETHREEDIMENSIONALDISPLAYS,COUPLINGOPTICSASSOCIATEDWITHARRAYEDLIGHTSOURCESANDPHOTODETECTORS,ENHANCEDOPTICSFORLIQUIDCRYSTALDISPLAYS,ANDOPTICALPARALLELPROCESSORELEMENTSTHETESTINGOFMICROLENSESISINPRINCIPLESIMILARTOTESTINGANYOTHERLENSTHESAMEPARAMETERSNEEDTOBEMEASUREDANDTHESAMETECHNIQUESUSEDHOWEVER,INMANYCASESTHEMEASUREMENTOFVERYSMALLLENSESPRESENTSPRACTICALPROBLEMSWHICHMAKEITDIFFICULTTOUSETHESTANDARDEQUIPMENTTHATISAVAILABLEFORTESTINGNORMALSIZELENSESTHEMARKETINMICROLENSARRAYSHASGENERATEDANEEDFORAGREEMENTONBASICTERMINOLOGYANDTESTMETHODSSTANDARDTERMINOLOGYANDCLEARDEFINITIONSARENEEDEDNOTONLYTOPROMOTEAPPLICATIONSBUTALSOTOENCOURAGESCIENTISTSANDENGINEERSTOEXCHANGEIDEASANDNEWCONCEPTSBASEDONCOMMONUNDERSTANDINGTHISPARTOF14880CONTRIBUTESTOTHEPURPOSEOFTHESERIESOFISO14880STANDARDSWHICHISTOIMPROVETHECOMPATIBILITYANDINTERCHANGEABILITYOFLENSARRAYSFROMDIFFERENTSUPPLIERSANDTOENHANCEDEVELOPMENTOFTHETECHNOLOGYUSINGMICROLENSARRAYSTHEMEASUREMENTOFFOCALLENGTHISDESCRIBEDINTHEBODYOFTHISPARTOFISO14880ANDTHEUSEOFANALTERNATIVETECHNIQUE,INTERFEROMETRY,ISDESCRIBEDINANNEXAMEASUREMENTOFTHEFOCALLENGTHOFANARRAYOFMICROLENSES,USINGACONFOCALTECHNIQUE,ISDESCRIBEDINANNEXBCOUPLINGEFFICIENCYANDIMAGINGQUALITYAREDISCUSSEDINANNEXCMEASUREMENTOFTHEFOCALSPOTPOSITIONSOFANARRAYOFMICROLENSESINPARALLEL,USINGTHESHACKHARTMANNTECHNIQUE,ISDESCRIBEDINANNEXDENISO1488032006BLANK1OPTICSANDPHOTONICSMICROLENSARRAYSPART3TESTMETHODSFOROPTICALPROPERTIESOTHERTHANWAVEFRONTABERRATIONS1SCOPETHISPARTOFISO14880SPECIFIESMETHODSFORTESTINGOPTICALPROPERTIES,OTHERTHANWAVEFRONTABERRATIONS,OFMICROLENSESINMICROLENSARRAYSITISAPPLICABLETOMICROLENSARRAYSWITHVERYSMALLLENSESFORMEDONONEORMORESURFACESOFACOMMONSUBSTRATEANDTOGRADEDINDEXMICROLENSES2NORMATIVEREFERENCESTHEFOLLOWINGREFERENCEDDOCUMENTSAREINDISPENSABLEFORTHEAPPLICATIONOFTHISDOCUMENTFORDATEDREFERENCES,ONLYTHEEDITIONCITEDAPPLIESFORUNDATEDREFERENCES,THELATESTEDITIONOFTHEREFERENCEDDOCUMENTINCLUDINGANYAMENDMENTSAPPLIESISO148801,OPTICSANDPHOTONICSMICROLENSARRAYSPART1VOCABULARYISO101105,OPTICSANDOPTICALINSTRUMENTSPREPARATIONOFDRAWINGSFOROPTICALELEMENTSANDSYSTEMSPART5SURFACEFORMTOLERANCES3TERMSANDDEFINITIONSFORTHEPURPOSESOFTHISDOCUMENT,THETERMSANDDEFINITIONSGIVENINISO148801APPLY4SUBSTRATETESTTHEOPTICALQUALITYOFTHESUBSTRATECONTRIBUTESTOTHEQUALITYOFTHEFOCALPOSITIONSDEFINEDBYTHEMICROLENSESANDSHALLBEQUANTIFIEDINACCORDANCEWITHISO1011055MICROSCOPETESTMETHOD51PRINCIPLETHEBASICPRINCIPLEISTOLOCATE,BYOPTICALMEANS,THESURFACEOFTHEMICROLENSUNDERTESTTHEEFFECTIVEBACKFRONTFOCALLENGTHISDETERMINEDBYMEASURINGTHEAXIALDISPLACEMENTNECESSARYTOLOCATETHEFOCALPOSITIONENISO1488032006252MEASUREMENTARRANGEMENTANDTESTEQUIPMENT521GENERALTHETESTINGOFMICROLENSESISSIMILARINPRINCIPLETOTESTINGLARGERLENSESINMANYCASESHOWEVER,THEMEASUREMENTOFVERYSMALLLENSESPRESENTSPRACTICALPROBLEMSWHICHMAKEITDIFFICULTTOUSESTANDARDEQUIPMENTINGENERAL,TWOOPTICALTECHNIQUESCANBEUSEDONEISBASEDONMICROSCOPY,THEOTHERISBASEDONINTERFEROMETRYTHEFIRSTTECHNIQUEUSESAMICROSCOPETOLOCATE,BYFOCUSING,THEVERTEXOFTHEMICROLENSTHEEFFECTIVEBACKFRONTFOCALLENGTHISDEDUCEDFROMAMEASUREMENTOFTHEDISPLACEMENTNECESSARYTOREFOCUSTHEMICROSCOPEONTHEIMAGEOFADISTANTSOURCEASSHOWNINFIGURE1AFOCUSINGAIDINTHEMICROSCOPESUCHASASPLITFIELDFOCUSINGGRATICULEENABLESTHEFEATURELESSVERTEXOFAMICROLENSTOBEMOREREADILYLOCATEDWHENVIEWINGWITHREFLECTEDLIGHTFORFOCALLENGTHMEASUREMENTSTHEDISTANTPOINTSOURCEMAYBETHEEMITTINGTIPOFANOPTICALFIBREORANILLUMINATEDTESTGRATICULETESTSMAYBEPERFORMEDWITHWHITELIGHTORMONOCHROMATICILLUMINATIONTHESECONDTECHNIQUEUSESWAVEFRONTSENSINGTOLOCATETHETESTSURFACEORTHECENTREOFCURVATURETHELOCATIONTESTMAYBECARRIEDOUTWITHTHEHELPOFONEOFTHEFOLLOWINGDEVICESFIZEAUINTERFEROMETER,TWYMANGREENINTERFEROMETER,LATERALSHEARINGINTERFEROMETER,ORSHACKHARTMANNDEVICETHESEAREMOREFULLYDESCRIBEDINISO148802ANDISO/TR149991ONEADVANTAGEOFINTERFEROMETRYISTHATFORSTRONGLYABERRATEDLENSES,THEVARIATIONINFOCALLENGTHWITHAPERTURERADIUSCANBEREADILYDEDUCEDFROMTHEINTERFERENCEPATTERNSADISADVANTAGEISTHATTESTSARERESTRICTEDTOTHEWAVELENGTHOFTHEINTERFEROMETERLIGHTSOURCEKEY1DISTANTPOINTSOURCE2SUBSTRATEANDMICROLENSPRODUCINGFOCUSSEDSPOT3MICROSCOPEOBJECTIVE4AXIALADJUSTMENTOFMICROSCOPETOLOCATELENSSURFACEANDFOCUS5BEAMSPLITTER6SOURCEFORFOCUSLOCATIONONLENSSURFACE7CHARGECOUPLEDDEVICECCDCAMERAFIGURE1ACOLLIMATEDSOURCEANDMICROSCOPEUSEDTOMEASURETHEEFFECTIVEBACKORFRONTFOCALLENGTHOFAMICROLENSENISLAUSES5TO9CONCENTRATEONTHEMICROSCOPETECHNIQUEWHILEANINTERFEROMETRICTECHNIQUEISDESCRIBEDINANNEXAANDASHACKHARTMANNTECHNIQUEINANNEXDTHECONFOCALMEASUREMENTOFTHEEFFECTIVEFOCALLENGTHSOFLENSARRAYSISDESCRIBEDINANNEXB522TESTSYSTEM5221GENERALTHETESTSYSTEMCONSISTSOFAMICROSCOPEFITTEDWITHDISPLACEMENTTRANSDUCERS,SUITABLELIGHTSOURCE,TESTOBJECT,MICROSCOPEVIDEOCAMERA,MONITORANDIMAGEANALYSERLINEINTENSITYSCAN5222MICROSCOPEAMICROSCOPEFITTEDWITHAFOCUSINGAIDSUCHASASPLITIMAGERANGEFINDERISREQUIREDTOENABLEFOCUSSETTINGSTOBEMADEONAFEATURELESSSURFACESUCHASTHEVERTEXOFTHEMICROLENSSURFACETHEMECHANICALDESIGNSHALLALLOWTHEDISTANTPOINTSOURCEORTESTGRATICULETOBEPLACEDBELOWTHESTAGECARRYINGTHETESTLENSIDEALLY,THETESTLENSSHOULDBESUPPORTEDWITHNOADDITIONALOPTICALCOMPONENTSUCHASAGLASSPLATEBETWEENITANDTHEDISTANTPOINTSOURCEORTESTGRATICULETHEDISPLACEMENTOFTHETESTSURFACERELATIVETOTHEMICROSCOPEOBJECTIVEISMEASUREDWITHACALIBRATEDDISPLACEMENTTRANSDUCERTHENUMERICALAPERTURENAOFTHEMICROSCOPEOBJECTIVESHALLBELARGERTHANTHENUMERICALAPERTUREOFTHETESTLENSATTHEFOCALPOINT5223LIGHTSOURCEALIGHTSOURCEEMITTINGRADIATIONINTHEBANDOFWAVELENGTHSORATASPECIFICWAVELENGTHREQUIREDFORTHETESTSHALLBEUSEDTHEPROPERTIESOFTHELIGHTSOURCESHALLBEDESCRIBEDINTHEEXPERIMENTALRESULTSREPORTWHITELIGHTCANBEPROVIDEDBYAQUARTZHALOGENLAMPINCOMBINATIONWITHASUITABLEAPERTURESTOPNARROWBANDFILTERSCANBEUSEDWHEREARESTRICTEDRANGEOFWAVELENGTHSISREQUIREDALASERCANBEUSEDFORMONOCHROMATICILLUMINATIONANDHIGHERINTENSITIES5224TESTOBJECTSTHEDISTANTPOINTSOURCECANBEAPPROXIMATEDUSINGTHEEMITTINGTIPOFANOPTICALFIBRETHEDISTANTPOINTSOURCESHALLBEPLACEDONAXISWITHTHELENSANDATANEFFECTIVELYLARGEDISTANCETOENABLETHEFOCALLENGTHTOBEDETERMINEDALTERNATIVELY,THEOBJECTMAYBEAGRATICULETHISENABLESTHEOPTICALPROPERTIESATPARTICULARSPATIALFREQUENCIESANDFIELDANGLESTOBESTUDIEDTHEDETECTIONOFTHEFOCUSSPOTMAYBESUSCEPTIBLETOUNDERSAMPLINGBYTHEDETECTORARRAYTHEDISTANTPOINTSOURCEORTESTGRATICULEUSEDSHALLBEDESCRIBEDINTHEDOCUMENTATIONOFTHETESTREPORT5225IMAGEDISPLAYIFTHEIMAGEGENERATEDBYTHEMICROSCOPEISRELAYEDBYAVIDEOCAMERATOAVIDEODISPLAY,ANELECTRONICINTENSITYDISPLAYCANBEUSEDTOASSISTINLOCATINGTHEPOSITIONOFBESTFOCUSTHEINTENSITYOFTHEIMAGEATTHEDETECTORSHALLBEADJUSTEDTOMAINTAINALINEARRESPONSEFROMTHEDETECTORSYSTEM5226STANDARDSURFACESAMICROLENSOFKNOWNFOCALLENGTHATADEFINEDWAVELENGTHSHALLBEUSEDASACALIBRATIONARTEFACTTOVERIFYTHEPERFORMANCEOFTHEMEASUREMENTSYSTEMENISSTEPHEIGHTARTEFACT,FOREXAMPLETWOTHINGLASSPLATESHELDTOGETHERINOPTICALCONTACTTOPROVIDEASTEPOFKNOWNHEIGHT,SHALLBEUSEDTOVERIFYTHEPERFORMANCEOFTHEDISPLACEMENTMEASUREMENTSYSTEM53PREPARATIONFORCONSISTENTRESULTSTHETESTEQUIPMENTSHALLBEMAINTAINEDINATEMPERATURECONTROLLEDENVIRONMENT,PREFERABLYAT20CANDNOTEXPOSEDTOVIBRATIONTHEOPTICALSURFACESTOBETESTEDSHALLBECLEANUNCOATEDGLASSSURFACESMAYBESAFELYCLEANEDWITHALCOHOLANDCOTTONWOOLTHECOTTONWOOLSHOULDBESOAKEDINAVERYSMALLAMOUNTOFSOLVENTBEFORETOUCHINGTHESURFACEANDWIPEDONLYONCEACROSSTHEOPTICALSURFACEBEFOREBEINGDISCARDEDTHISMINIMIZESTHECHANCESOFSCRATCHINGTHESURFACEDUSTMAYBEREMOVEDUSINGACLEANCAMELHAIRBRUSHORFILTEREDCOMPRESSEDAIRCOATEDOPTICALSURFACESSUCHASANTIREFLECTIONSURFACESSHOULDBETREATEDWITHGREATCAREANDNOTCLEANEDUNLESSABSOLUTELYNECESSARYTHEYMAYBEDUSTEDUSINGFILT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TH4DISPLACEMENTTRANSDUCERUSEDETESTRESULTS1EFFECTIVEBACKFOCALLENGTH2EFFECTIVEFRONTFOCALLENGTH3FOCALSPOTPOSITIONSHIFTSSXANDSY4CHROMATICABERRATIONSZ5UNCERTAINTYTABLEENISNNEXAINFORMATIVEMEASUREMENTSWITHWAVEFRONTMEASURINGSYSTEMSA1INTERFEROMETERMEASUREMENTPRINCIPLEAVARIETYOFMETHODSEXISTFORMEASURINGTHEFOCALLENGTHOFLENSES5BACKFRONTFOCALLENGTHMAYBEMEASUREDUSINGANINTERFEROMETERTOHELPLOCATETHEVERTEXOFTHELENSSURFACEANDTOFINDTHEBESTFOCUSPOSITIONANDUSINGALINEARDISPLACEMENTTRANSDUCERFORLENGTHMEASUREMENTONEOFTHEFOLLOWINGDEVICESCOULDBEUSEDFORTHISPURPOSEFIZEAUINTERFEROMETERTWYMANGREENINTERFEROMETERLATERALSHEARINGINTERFEROMETER,ORSHACKHARTMANNDEVICEUSEOFAFIZEAUINTERFEROMETERISDESCRIBEDHEREASANEXAMPLEACOLLIMATEDBEAMFROMACOHERENTLIGHTSOURCEISPARTIALLYREFLECTEDFROMAPLANEREFERENCESURFACETOGENERATEAREFERENCEWAVEFRONTTHETRANSMITTEDLIGHTISFOCUSEDTOASPOTBYAHIGHQUALITYLENSANDTHISSPOTISUSEDTOPROBETHEPOSITIONOFTHELENSSURFACEANDTHEFOCALPOINTINTERFERENCEPATTERNSAREMONITOREDTODETERMINETHETWOLOCATIONSNOTEFORSTRONGLYABERRATEDMICROLENSES,THEEFFECTIVEFOCALLENGTHASDEFINEDINISO148801MAYDIFFERSIGNIFICANTLYFROMVALUESBASEDONWAVEFRONTDEVIATIONCRITERIAA2MEASUREMENTARRANGEMENTANDTESTEQUIPMENTTHEFIZEAUINTERFEROMETERISSHOWNINFIGUREA1KEY1COHERENTLIGHTSOURCEANDCOLLIMATOR2BEAMSPLITTER3REFERENCEPLANE4HIGHQUALITYMICROSCOPEOBJECTIVE5MICROLENSUNDERTEST6OPTICALFLATFIGUREA1FIZEAUINTERFEROMETERENISNPRINCIPLE,INTERFEROMETERSAVAILABLEFORTESTINGCONVENTIONALSIZEDLENSES,PARTICULARLYTHOSEOFTHEFIZEAUTYPE,MAYAPPEARTOBESUITABLEFORMEASUREMENTSWITHMICROLENSESINPRACTICE,PROBLEMSMAYARISEFROMSTRAYREFLECTIONSFROMSECONDARYSURFACESINCLOSEPROXIMITYTOTHESURFACEUNDERTESTTHERELATIVELYHIGHMAGNIFICATIONINVOLVEDMAYLEADTODIFFICULTIESINFOCUSINGONTHETESTSURFACESOFTHEMICROLENSINTERFEROMETERSSPECIALLYDESIGNEDFORMICROSURFACESOVERCOMETHESEPROBLEMS6POSITIONTHEOPTICALFLATASCLOSEASPOSSIBLETOTHEMICROLENSUNDERTESTTOMINIMIZEAPERTUREDIFFRACTIONERRORSANDFOCUSTHELENSARRAYONTOTHEDETECTORARRAYA3MEASUREMENTOFEFFECTIVEBACKORFRONTFOCALLENGTHTOMEASUREFOCALLENGTH,THEMICROLENSUNDERTESTISPOSITIONEDONAXISSOASTOCOLLIMATETHEDIVERGINGBEAMAHIGHQUALITYPLANEMIRROROROPTICALFLATISUSEDTOREFLECTTHELIGHTBACKTHROUGHTHESYSTEMWHEREITCOMBINESWITHTHEREFERENCEWAVEFRONTTOFORMANINTERFERENCEPATTERNITISADVISABLETOFIRSTALIGNTHEPLANEMIRRORWITHOUTTHEMICROLENSANDMICROSCOPEOBJECTIVEINPLACEBYTILTINGTHEPLANEMIRRORUNTILTHEINTERFERENCEPATTERNISNULLED,THATISTHEINTENSITYISUNIFORMLYDISTRIBUTEDTHEMICROSCOPEOBJECTIVEANDMICROLENSARETHENINSERTEDANDTHEAXIALPOSITIONOFTHEMICROLENSISADJUSTEDUNTILTHEINTERFERENCEPATTERNISAGAINNULLEDALTERNATIVELY,ASMALLTILTMAYBEINTRODUCEDBETWEENTHETWOWAVEFRONTSTOGENERATEAPATTERNOFINTERFERENCEBANDSANDTHESETTINGISMADEBYADJUSTINGTHEAXIALPOSITIONOFTHEMICROLENSUNTILTHEBANDSARESTRAIGHT,PARALLELANDEQUIDISTANTTHELENSUNDERTESTISTHENMOVEDAXIALLYUNTILTHEPROBEBEAMISFOCUSEDONTHELENSSURFACEINTHISPOSITION,THELIGHTISPARTIALLYREFLECT
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