外文翻译---复杂光学曲面慢刀伺服超精密车削技术研究.doc

study on the technology of slow tool servo ultra-precision diamond turning for complex optical surfacejournal of manufacturing systems vol. 16/no. 1 1997the inclusion of freeform elements in an optical system provides opportunities for numerous improvements in performance. however, designers are reluctant to utilize freeform surfaces due to the complexity and uncertainty of their fabrication. single diamond turning is a novel machining process capable of generating freeform optical surfaces or rotational non-symmetric surfaces at high levels of accuracy. in order to achieve good results with this technology some key parameters need to be satisfied. these parameters include tool geometry, tool path generation, tool radius correction,and servo system performance. the servo capacity of slow-tool-servo machine is analysed, and a method to determine tool geometry parameter based on surface analysis is developed. the methods of tool radius compensation and tool path generation to ensure the stability of x-axis are researched. experiment results show that slow-tool-servo machining technology can be used in preparation of optical free form surfaces elementslow tool servo and fast tool servo are the develop faster ultra-precision processing technology in the rencent , the two kind of technology can significantly improve the microstructure are arrays and free surface optical device processing efficiency.slow tool servo is on the lathe spindle and turning the z axis are control, make the spindle into position controllable c axis, machine tool of the x and z, c three axis in the space form the cylindrical coordinate system, at the same time, high performance and high programming of cnc system will resolution complex face form components of the three-dimensional cartesian coordinate into polar coordinates, and all moving axis to send interpolation into to instructions, precise coordination shaft and the relative motion of the cutting tool, and to realize the complex face form of turning machining parts. slow knife servo turning the z axis x axis and often also make sine reciprocating motion, requires multi-axis interpolation linkage. therefore, in the process of parts required before more face form the analysis of the coordination between the shaft, then determines the tool path and cutting tools compensation. in addition, slow sword by machine tool servo slide inertia and response speed and motor to influence is bigger, machine tool dynamic response speed is low, suitable for processing face form and larger complex for optical device.fast tool servo turning and slow knife servo differ in that will be processing complex shape face turning into shape face and form the microstructure of the surface, and then will both stack. the x axis and z axis to realize the turn into shape trajectory, lathe spindle of only position detection do not track control. with installed in the z axis but independent of cnc outside the system of redundancy axes to drive the cutting tools, complete turning the surface microstructure form the z axis movement. the processing method has high frequency, high stiffness, the characteristics of high precision.diamond tools in piezoelectric actuators can be under the reciprocating movement of the z axis. control system in real-time acquisition spindle angle signal, and on the basis of real-time sends out of control, real-time control tool to micro into, so as to realize the cutting tool tracking face form the rise and fall of the change. a sharp sword servo in processing only for parts before face form for accurate calculation, generation of the components of the form that can characterize data files. in addition, a sharp sword servo system frequency response high, the movement of the trip with only a few mm, more suitable for processing face form mutation or discontinuous, limited schedule tiny structures within. freeform surfaces can be used in optical systems to achieve novel functions, improve performances, reduce size, and decrease the cost of various products. therefore, optical freeform surfaces find applications in the fields of optics, medicine, fiber communication, life science, aerospace etc. freeform optics has become the key element of quantitative light technology, which is becoming increasingly important in various fields. however, designers are reluctant to utilize freeform surfaces due to the complexity and uncertainty of their fabrication. slow slide servo is a novel machining process capable of generating freeform optical surfaces or rotationally non-symmetric surfaces at high levels of accuracy. in order to achieve high accuracy optical complex surface by using slow tool servo turning, the major research efforts include the following points.1. the theory of slow tool servo turning and key technologies. a systematic introduction of the theory of slow tool servo turning is first given by analyzing machine architecture and movements. by comparing with some other conventional technologies, the key technologies are high dynamic feed drive system, advanced interpolation technology and position control spindle technology. then, the research emphasis on the performance of feed drive system and curve interpolation algorithm. several aspects are discussed to improve the motion accuracy and control performance of feed drive system. pvt interpolation algorithm is introduced to slow tool servo turning to overcome inherit drawback of conventional interpolation algorithm. in order to estimate the machining scope and accuracy, study on the machining capacity of slow tool servo turning.2. the design theory of tool geometry parameters in ultra-precision slow tool servo turning complex optical surface. based on the requirements of slow tool servo, two types of tool are designed and analytic geometry models of cutting edge are built. a geometrical approach is introduced to formulate the relationship between tool tip and complex surface. by virtue of surface analytic method, the problem is solved efficiently, combined with the nurbs representation of complex surface. experiments are carried out to validate solving algorithm. in addition, the relation models between tool shape and roughness, optical property and materials are built.3. the programming theory of tool path in ultra-precision slow tool servo turning complex optical surface. in the basic design algorithm of complex optical surface slow tool servo turning, firstly study on the tool contact path design method and accuracy control skills of discrete process. then, cutting edge compensation problem is considered. two algorithms (normal direction compensation method and keeping x steady method) are proposed to avoid interfaces between surface and tool tip of zero rake angle. a tool path correct algorithm is developed to overcome over cutting and lack cutting due to non-zero rake angel. with regard to the calculate problem of tool path outer of surface region, space curve interpolation algorithm and surface continuation methods are proposed. in order to improve the manchining accuracy, error compensation algorithm is studied base on the tool path correction.4. the error model and simulation algorithm of slow tool servo turning. base on the discrete vector intersection, geometry simulation algorithm of slow tool servo turning is constructed. then, major error sources and its transformations in complex surface turning are analyzed. an error model of slow tool servo turning is built base on multi-body theory. experiments are carried out to validate simulation algorithm and error model.5. finally, plentiful experiments are performed on a variety of complex optical surfaces including off-axis parabolic, array lenses, wave front correcting glass, spiral phase plate, continuous phase plate and so on. the successful machining results prove the validity and advantages of the proposed algorithms and the proposed process improvements.slow knife servo turning the typical machine tool layout forms as shown in figure 1 shows, and common single point diamond turning and a sharp sword servo turning processing layout is similar. two straight line into a t to shaft font layout. the main shaft is installed on the x axis. x axis direction of the movement and workpiece axis of vertical direction of the axis. cutting tools installed in the z axis, movement direction perpendicular to the x axis and the spindle and workpiece axis parallel. the installation in the spindle and then turn together, diamond tools according to the different angle and radial position relative to the surface movement x, namely tool by cylindrical coordinate system should be movement.fig.1 configuration of slow-tool-servo turning lathethis in ultra-precision turning ordinary machine developed on the basis, the spindle movement speed control to the position control, use c, x, z axis in polar coordinates or cylindrical coordinate system linkage realized in the rotary symmetrical surface processing method, because the z axis motion drive tools can only achieve the highest dozens of hertz, compared with a sharp sword hundreds, even thousands of hertz sports slower so called slow knife servo technology.复杂光学曲面慢刀伺服超精密车削技术研究自由曲面光学元件具有许多优异的光学性能，越来越多地应用到现代光学系统设计中。而自由曲面光学元件制造的复杂性和不确定性是制约其应用的瓶颈之一。慢刀伺服单点金刚石车削是一种可以加工很高精度自由曲面光学表面或非回转对称光学曲面的新技术。机床伺服执行能力是自由曲面能否加工的基本条件。金刚石刀具几何参数的选择、刀具路径规划及刀具半径补偿是确保加工精度的关键。在理论上，对伺服执行能力进行了分析；发展了基于曲面特性分析的刀具参数确定方法；研究了稳定 x 轴的刀具圆弧半径补偿及刀具路径生成技术。使用慢刀伺服技术加工了多种典型的自由曲面光学元件，取得了较好的结果。慢刀伺服和快刀伺服车削是2种近年发展比较快的超精密加工技术，这2种技术均能显著提高微结构阵列和自由曲面光学器件的加工效率。慢刀伺服车削是对车床主轴与z轴均进行控制，使机床主轴变成位置可控的c轴，机床的x、z、c三轴在空间构成了柱坐标系，同时，高性能和高编程分辨率的数控系统将复杂面形零件的三维笛卡尔坐标转化为极坐标，并对所有运动轴发送插补进给指令，精确协调主轴和刀具的相对运动，实现对复杂面形零件的车削加工。慢刀伺服车削z轴和x轴往往同时作正弦往复运动，需要多轴插补联动。因此，在加工前需要对零件面形进行多轴协调分析，进而确定刀具路径和刀具补偿。此外，慢刀伺服受机床滑座惯性和及电动机响应速度影响较大，机床动态响应速度较低，适合加工面形连续而且较大的复杂光学器件。快刀伺服车削与慢刀伺服的差别在于：将被加工的复杂形面分解为回转形面和形面上的微结构，然后将两者叠加。由x轴和z轴进给实现回转形面的轨迹运动，对车床主轴只进行位置检测并不进行轨迹控制。借助安装在z轴但独立于车床数控系统之外的冗余运动轴来驱动刀具，完成车削微结构形面所需的z轴运动。这种加工方法具有高频响、高刚度、高定位精度的特点。金刚石刀具在压电陶瓷驱动下可以进行z轴的往复运动。控制系统在实时采集主轴角度信号的基础上，实时发出控制量，控制刀具实时微进给，从而实现刀具跟踪工件面形的起伏变化。快刀伺服在加工前仅需对零件面形进行精确计算，生成能表征零件面形的数据文件。此外，快刀伺服系统的运动频响高、行程只有数毫米，更适于加工面形突变或不连续、有限行程内的微小结构。复杂光学曲面在提高光学系统性能。实现特殊光学特性。减少系统零件数量。减小系统尺寸等方面有许多显而易见的优点。随着光电信息技术的迅猛发展。复杂光学曲面零件的应用领域将十分广阔。复杂光学曲面无疑是非球面光学零件发展和应用的趋势之一。但目前还远未能纳入到现代光学系统的主流当中。问题的重要原因之一就在于复杂光学曲面的超精密制造相当困难。随着机床技术的进步。直线电机驱动、主轴伺服等一系列新技术应用于超精密车床的设计中。使得一种新的基于慢刀伺服技术的超精密车削创成加工成为可能。机床具有主轴伺服的多轴联动功能。刀具可严格按照规划路径相对于工件复杂表面运动。实现各种高精度的复杂曲面加工。本文以慢刀伺服车削技术作为复杂光学曲面的加工手段。对其创成原理、刀具设计、轨迹规划和精度分析等几方面的关键技术开展研究。1、 慢刀伺服超精密车削技术原理及关键技术通过对机床结构和创成运动的分析。研究了慢刀伺服车削加工原理。揭示了其与快刀伺服和普通三轴数控加工之间的根本区别。分析指出：直线轴运动性能、先进插补技术以及主轴位置控制是技术关键所在。为研究制约进给驱动性能的关键因素。建立了直线驱动进给系统模型。开展了一系列仿真及实验研究。研究表明进给轴达到高动态、高精度驱动的必要条件是：导轨具有足够的动态刚度。反馈环节量化误差噪声抑制到较低水平。针对复杂曲面数控插补问题。提出了适应加工特点的参数计算方法。将pvt插补技术引入复杂曲面车削。解决了使用线性插补存在的弊端。从伺服轴驱动能力限制和轨迹跟踪精度两个角度分析。得到伺服轴执行能力幅频图。用于确定可加工范围。这些研究为构建慢刀伺服加工平台。正确选择慢刀伺服加工方法奠定了理论基础。2、 复杂光学曲面慢刀伺服超精密车削的刀具设计理论刀具设计是指刀具模型的建立和几何参数的确定。运用解析分析方法。得到了切削刃轮廓的空间解析模型。为确定刀具几何参数的合理范围。从复杂曲面面形、加工表面微观形貌、加工表面光学特性以及加工材料等角度。研究了对刀具几何参数的制约关系。复杂曲面每一点处对刀具的限制均不相同。通过对曲面基本方程的分析。推导出代表制约关系的关键矢量。解决了复杂曲面对刀具制约问题。这些工作为复杂曲面慢刀伺服车削加工合理设计刀具提供了理论支撑。3、 复杂光学曲面慢刀伺服超精密车削的刀具路径规划理论精确规划刀具路径是复杂曲面车削加工的基本