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广广州州公公司司 msa编编号号: msa-507仪仪器器名名称称: 75倍镜 量量程程: 1mm仪仪器器编编号号: eq-507 零零件件名名称称: dh2032测测量量项项目目: 线宽 评价人 a姓姓名名: 宁梅杨 12345678910 1 9.9669.9749.9639.9829.9719.9819.9789.9749.9709.966 2 9.9669.9749.9649.9819.9729.9819.9789.9729.9709.965 3 9.9679.9759.9649.9819.9719.9819.9779.9739.9709.967 平平均均值值9.9669.9749.9649.9819.9719.9819.9789.9739.9709.966 范范围围0.0010.0010.0010.0010.0010.0000.0010.0020.0000.002 评价人 b姓姓名名: 佘遵辉 12345678910 1 9.9679.9739.9649.9909.9729.9829.9769.9749.9699.964 2 9.9669.9739.9639.9909.9719.9819.9759.9729.9699.965 3 9.9669.9729.9639.9909.9729.9819.9749.9719.9699.966 平平均均值值9.9669.9739.9639.9909.9729.9819.9759.9729.9699.965 范范围围0.0010.0010.0010.0000.0010.0010.0020.0030.0000.002 评价人 c姓姓名名: 刘抢荣 12345678910 1 9.9679.9729.9639.9859.9679.9839.9749.9709.9659.963 2 9.9649.9709.9609.9849.9709.9839.9729.9699.9659.961 3 9.9679.9719.9609.9869.9689.9849.9739.9719.9629.961 平平均均值值9.9669.9719.9619.9859.9689.9839.9739.9709.9649.962 范范围围0.0030.0020.0030.0020.0030.0010.0020.0020.0030.002 可可重重复复性性范范围围控控制制表表 xbarp9.9669.9739.9639.9859.9709.9829.9759.9729.9689.964 ucl-r0.0040.0040.0040.0040.0040.0040.0040.0040.0040.004 lcl-r0.0000.0000.0000.0000.0000.0000.0000.0000.0000.000 rbarbar0.0020.0020.0020.0020.0020.0020.0020.0020.0020.002 xbarbar9.9729.9729.9729.9729.9729.9729.9729.9729.9729.972 ucl-xbar9.975683 9.975683 9.975683 9.975683 9.975683 9.975683 9.975683 9.975683 9.975683 9.975683 lcl-xbar9.967961 9.967961 9.967961 9.967961 9.967961 9.967961 9.967961 9.967961 9.967961 9.967961 d2a(ev)=1.128 d2(pv)=3.180 零零件件评评价价人人平平均均读读数数表表 countd4d3a23/d2sizea2d3d43/d2tolerance 32.57402.5741.77221.8803.2682.6590.08 31.02302.5741.772 40.72902.2821.457 计计量量型型量量具具 分分析析报报告告 读数 读数 读数 评评价价人人 a a 12345678910 0.000 0.005 0.010 0.015 0.020 0.025 r - op1 ucl-r lcl-r rbarbar 评评价价人人 b b 12345678910 0.000 0.002 0.004 0.006 0.008 0.010 0.012 r - op2 ucl-r lcl-r rbarbar 评评价价人人 b b 12345678910 1.470 1.480 1.490 1.500 1.510 1.520 xavg - op2 ucl-xbar lcl-xbar xbarbar 评评价价人人 a a 12345678910 1.470 1.480 1.490 1.500 1.510 1.520 xavg - op1 ucl-xbar lcl-xbar xbarbar 50.57702.1141.29 所有的计算均基于预计5 .15 sigma 的标准(99% 的面积是呈正态分布曲线) av - 如果根号下出现负数,评价人的变差(av) 缺省为(0) 评评价价人人 b b 12345678910 1.470 1.480 1.490 1.500 1.510 1.520 xavg - op2 ucl-xbar lcl-xbar xbarbar 评评价价人人 a a 12345678910 1.470 1.480 1.490 1.500 1.510 1.520 xavg - op1 ucl-xbar lcl-xbar xbarbar 测测量量参参数数:0.2mm:0.2mm日日期期:nov.25,2005nov.25,2005 正正公公差差(+):0.04制制表表:h.m.xuh.m.xu 负负公公差差(-):0.04审审核核: 平平均均值值 9.973 9.972 9.973测测量量系系统统分分析析 xbara9.972 rbara0.0010.005 0.006 平平均均值值 9.9730.008 9.973 9.972零件变差 (pv):0.037 xbarb9.973总变差(tv):0.038 rbarb0.001 % 过过程程 变变异异(tv) 平平均均值值 9.971% 设备变差:12.11 9.970% 评价人变差:16.55 9.970% r & r:20.50 xbarc9.970% 零件变差:97.88 rbarc0.002ndc=1.41pvgrr=1.410.0390.018=3.04 (5,可接受) # parts10 m (for ev(k1) = # of trials)(for av(k2) = # appr and g=1)(for pv(k3) = # of parts and g=1) op1?1d2234567 op2?111.4101.9102.2402.4802.6702.830 op3?121.2801.8102.1502.4002.6002.770 # oper331.2301.7702.1202.3802.5802.750 # trials (m)341.2101.7502.1102.3702.5702.740 (g) 30.000g51.1901.7402.1002.3602.5602.730 d2(ev)=1.69361.1801.7302.0902.3502.5602.730 d2(av)=1.910 71.1701.7302.0902.3502.5502.720 xdiff (ro): 0.00281.1701.7202.0802.3502.5502.720 rp: 0.02391.1601.7202.0802.3402.5502.720 3.32532av1: 0.000101.1601.7202.0802.3402.5502.720 av2: 0.000111.1601.7102.0802.3402.5502.720 评评价价人人 c c 12345678910 1.465 1.475 1.485 1.495 1.505 1.515 xavg - op3 ucl-xbar lcl-xbar xbarbar 评评价价人人 c c 12345678910 0.000 0.002 0.004 0.006 0.008 0.010 0.012 r - op3 ucl-r lcl-r rbarbar g ga ag ge e r r & & r r分 分析析结结果果 重复性(ev) (设备变差): 再现性(av) (评价人变差): r & r (重复性&再现性): 75倍镜 eq-507 线宽 可可重重复复性性范范围围控控制制表表 零零件件评评价价人人平平均均读读数数表表 计计量量型型量量具具 分分析析报报告告 评评价价人人 b b 12345678910 0.000 0.002 0.004 0.006 0.008 0.010 0.012 r - op2 ucl-r lcl-r rbarbar 评评价价人人 b b 12345678910 1.470 1.480 1.490 1.500 1.510 1.520 xavg - op2 ucl-xbar lcl-xbar xbarbar 121.1501.7102.0702.3402.5502.720 g131.1501.7102.0702.3402.5502.710 141.1501.7102.0702.3402.5402.710 151.1501.7102.0702.3402.5402.710 151.1281.6932.0592.3262.5342.704 评评价价人人 b b 12345678910 1.470 1.480 1.490 1.500 1.510 1.520 xavg - op2 ucl-xbar lcl-xbar xbarbar 评评价价人人 c c 12345678910 1.465 1.475 1.485 1.495 1.505 1.515 xavg - op3 ucl-xbar lcl-xbar xbarbar 结果 % 公公差差 变变异异 (tol) 5.70 7.80 9.66 46.11 8910 2.9603.0803.180 2.9103.0203.130 2.8903.0103.110 2.8803.0003.100 2.8702.9903.100 2.8702.9903.100 2.8702.9903.100 2.8702.9803.090 2.8602.9803.090 2.8602.9803.090 2.8602.9803.090 测测量量系系统统分分析析 ndc=1.41pvgrr=1.410.0390.018=3.04 (5,可接受) m (for ev(k1) = # of trials)(for av(k2) = # appr and g=1)(for pv(k3) = # of parts and g=1) 评评价价人人 c c 12345678910 1.465 1.475 1.485 1.495 1.505 1.515 xavg - op3 ucl-xbar lcl-xbar xbarbar 评评价价人人 c c 12345678910 0.000 0.002 0.004 0.006 0.008 0.010 0.012 r - op3 ucl-r lcl-r rbarbar g ga ag ge e r r & & r r分 分析析结结果果 2.8502.9803.090 2.8502.9803.090 2.8502.9803.080 2.8502.9803.080 2.8472.9703.078 评评价价人人 c c 12345678910 1.465 1.475 1.485 1.495 1.505 1.515 xavg - op3 ucl-xbar lcl-xbar xbarbar gage r&r (2)gage r&r rev ae3350f5a481bfd9c9b83b38f9ed0ed29.xls 广广州州公公司司 msa编编号号: msa-507仪仪器器名名称称: 75倍镜测测量量参参数数:0.2mm:0.2mm日日期期:nov.25,2005nov.25,2005结果 量量程程: 1mm仪仪器器编编号号: eq-507正正公公差差(+):0.04制制表表:h.m.xuh.m.xu 零零件件名名称称: dh2032测测量量项项目目: 线宽负负公公差差(-):0.04审审核核: 评价人 a姓姓名名: 宁梅杨 12345678910平平均均值值 1 1.5001.4921.4901.5011.5151.5021.4901.5051.5101.494 1.500 2 1.5021.4891.4851.4951.4981.5081.4851.4971.5081.496 1.496 3 1.5061.4891.4811.4981.4951.5041.4891.4981.5051.494 1.496测测量量系系统统分分析析 平平均均值值1.5031.4901.4851.4981.5031.5051.4881.5001.5081.495xbara1.497 范范围围0.0060.0030.0090.0060.0200.0060.0050.0080.0050.002rbara0.0070.013 评价人 b姓姓名名: 佘遵辉0.013 12345678910平平均均值值 1 1.5021.4911.4901.5011.5121.5091.4991.4981.5101.499 1.5010.018 2 1.5061.4901.4891.4991.5161.5091.4891.4991.5101.499 1.501 3 1.5081.4911.4891.4991.5121.5101.4891.4991.5101.495 1.500零件变差 (pv):0.039 平平均均值值1.5051.4911.4891.5001.5131.5091.4921.4991.5101.498xbarb1.501总变差(tv):0.043 范范围围0.0060.0010.0010.0020.0040.0010.0100.0010.0000.004rbarb0.003 % 过过程程% 公公差差 评价人 c姓姓名名: 刘抢荣变变异异(tv) 变变异异 (tol) 12345678910平平均均值值 1 1.5011.4891.4821.4981.5131.5021.4841.4961.5051.490 1.496% 设备变差:31.1716.60 2 1.5011.4901.4831.4961.5121.5131.4821.4921.5031.491 1.496% 评价人变差:29.4015.66 3 1.5021.4901.4821.4951.5121.5021.4821.4981.5021.489 1.495% r & r:42.8522.83 平平均均值值1.5011.4901.4821.4961.5121.5061.4831.4951.5031.490xbarc1.496% 零件变差:90.3648.14 范范围围0.0010.0010.0010.0030.0010.0110.0020.0060.0030.002rbarc0.003ndc=1.41pvgrr=1.410.0390.018=3.04 (5,可接受) 可可重重复复性性范范围围控控制制表表 xbarp1.5031.4901.4861.4981.5091.5071.4881.4981.5071.494# parts10 m (for ev(k1) = # of trials)(for av(k2) = # appr and g=1)(for pv(k3) = # of parts and g=1) ucl-r0.0110.0110.0110.0110.0110.0110.0110.0110.0110.011op1?1d22345678910 lcl-r0.0000.0000.0000.0000.0000.0000.0000.0000.0000.000op2?111.4101.9102.2402.4802.6702.8302.9603.0803.180 rbarbar0.0040.0040.0040.0040.0040.0040.0040.0040.0040.004op3?121.2801.8102.1502.4002.6002.7702.9103.0203.130 xbarbar1.4981.4981.4981.4981.4981.4981.4981.4981.4981.498# oper331.2301.7702.1202.3802.5802.7502.8903.0103.110 ucl-xbar1.509206 1.509206 1.509206 1.509206 1.509206 1.509206 1.509206 1.509206 1.509206 1.509206# trials (m)341.2101.7502.1102.3702.5702.7402.8803.0003.100 lcl-xbar1.486727 1.486727 1.486727 1.486727 1.486727 1.486727 1.486727 1.486727 1.486727 1.486727(g) 30.000g51.1901.7402.1002.3602.5602.7302.8702.9903.100 d2a(ev)=1.128d2(ev)=1.69361.1801.7302.0902.3502.5602.7302.8702.9903.100 d2(pv)=3.180d2(av)=1.910 零零件件评评价价人人平平均均读读数数表表 71.1701.7302.0902.3502.5502.7202.8702.9903.100 countd4d3a23/d2sizea2d3d43/d2tolerancexdiff (ro): 0.00581.1701.7202.0802.3502.5502.7202.8702.9803.090 32.57402.5741.77221.8803.2682.6590.08rp: 0.02491.1601.7202.0802.3402.5502.7202.8602.9803.090 31.02302.5741.7720.50358av1: 0.000101.1601.7202.0802.3402.5502.7202.8602.9803.090 40.72902.2821.457av2: 0.000111.1601.7102.0802.3402.5502.7202.8602.9803.090 50.57702.1141.29121.1501.7102.0702.3402.5502.7202.8502.9803.090 g131.1501.7102.0702.3402.5502.7102.8502.9803.090 141.1
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