《KEITHLEY讲座》PPT课件.ppt

Hardware configuration (1) Device Characterization/Parametric test,DC I-V 4200-SCS Series 2600 SMU Series 2400 SMU Series 230 SMU Switch Matrix 707A/708A switch mainframe 7072A/7174A matrix cards,C meter 4200-84 (4284A) 4200-80 (4980A) 4294A Pulse Generator 81110A 3401/3402 4200-PG2 Special PIV package 4200-PIV,Hardware configuration (2) SMU per pin for high speed production and WLR,High speed parallel test High accuracy measurements,Utilizing TSP engine on Series 2600 SMU for parallel test,Probers supported,Alessi Cascade Alessi 6100 Summit 12000 series S300 Micromanipulator 8860 or any compatible semiautomatic probers Suss PA 200/300,Tokyo Semitsu (TSK) TSK A-PM-60/80/90 TSK UF 200/3000 TEL TEL P8/P12 TEL 19S EG 2001/2010 4080/4090 6000,Automated Characterization Suite (ACS) Improve productivity with easy software,Test plan development & execution at the device, site, wafer, and cassette level Full GUI operation including interactive test mode Wafer map and description utility Semi and fully automatic prober support,Test Flow,Draw Wafer Map,Setup Test Tree,Control Prober,Automation Test,Summary Report,Run a test here,ACS Hardware Config Flow on PC for 2600,Install GPIB card on PC/laptop,Assigning GPIB address and node number for 2600,Connect PC and 2600 using GPIB line and TSP link connector,Connect DUT,Start licensed ACS, it will enter offline mode,Scan hardware and configure prober in Hardware Config Utility,Configure other instruments in KCON if necessary and restart ACS,Now ACS can control 2600 for testing,Operating environment,Operating System: Windows XP Pro Installed on PC CPU: Pentium 4 2.4GHz+ or equivalent System Memory (RAM): 1GB Hard Disk: 200M free space Graphics Card: 16MB of VRAM Minimum Display: Minimum 1024x768, “32-bit True Color” GPIB supported: KPCI488, KPCI488A, KPCI488LP,KUSB488A 4200-SCS Pentium 4 CPU, 1GB memory External monitor preferred KTEI 6.0 or above,Programming Environment - C,C programming on 4200 or PC Additional requirements Visual Studio VC or .NET Keithley User Library Tool (KULT) Needed for writing test algorithm on 4200, external instrument via GPIB and RS232 Open environment,Programming environment - TSP,TSP script is an embedded test script executed on 2600 firmware It reduces GPIB communication time, increase flexibility and improve execution speed Script editor directly embedded in STM window (Script Test Module),Wafer Level Reliability Option,Reliability option WLR libraries Device Reliability HCI NBTI Fast measure NBTI (require 2600 SMU) NBTI On-The-Fly NBTI Pulse On-The-Fly (requires 4200-PIV) GOI TDDB V-Ramp J-Ramp EM Constant I EM IsoThermal EM MySQL Database ACS-PDA (Parametric Data Analysis) Lifetime Analysis for HCI and TDDB Weibull distribution analysis,Fast NBTI (2600),Perform single point NBTI test in less than 300us,NBTI on_the_fly method (2600),Denais On_the_fly method Change gate voltage in small voltage step Source code provided Can be performed with parallel groups,Hot Carrier Injection (2600),TDDB (2600),Support up to 4 SMUs and 4 devices in one group Compliance with JEDEC standard 92A Including soft and hard breakdown detection,Common test libraries examples MOSFET,BVDSS (Drain Source voltage break down, gate source shorted) BVDSV (Drain Source voltage break down, gate biased) BVGDO (Gate Drain voltage break down, source opened) BVGDS (Gate Drain voltage break down, source drain shorted) BVGSO (Gate source voltage break down, drain opened) IDL (Drain leakage current, gate source shorted) IDS (single point Drain current) IDVD (ID-VD curve) IDVG (ID-VG curve) IDVGVSUB (ID-VG curve with step substrate voltage) IGL (Single point gate leakage current) IGVG (IG-VG curve) ISD (single point source current) ISL (source leakage) ISUBVG (Isub-Vg curve) SO (Subthreshold voltage swing) VTH_CI (Constant current Vth) VTH_EX (Max GM Vth) VTH_LLSQ (Linear extrapolated Vth) VTH_SEL (Self biasing Vth),Common test libraries examples BJT,BVCBO (collector-base breakdown voltage with emitter open) BVCEI (collector-emitter breakdown voltage with bias I) BVCEO (collector-emitter (base open) breakdown voltage) BVCES (collector-emitter (base-emitter shorted) breakdown voltage) BVCEV (collector-emitter (base bias) breakdown voltage) BVEBO (emitter-base (collector-open) breakdown voltage) BVECO (emitter-collector breakdown voltage at opening base) HFE_SW (DC current gain sweep method) HFE_TRA1 (DC current gain, traditional method) IBCO (base-collector current, collector opened) IBEO (base-collector current, emitter opened) IBICVBE (IB and IC vs VBE curves) IBVBE (IB vs VBE curve) ICBO (collector-emitter cut off current, base opened) ICEO (collector-emitter cut off current, base opened) ICES (collector-emitter cut off current, base-emitter shorted) ICEV (collector-emitter cut off current, base biased) ICVCB (IC-VCB curve) ICVCEIB (IC-VCB curve with Based biased current) ICVCE_VB (IC-VCB curve with Based biased voltage) IEBO (emitter-base cut off current, collector opened) IECO (emitter-collector current, base opened) IEVEB (IE-VEB curve) VBCO (base-collector voltage, emitter open) VCE (collector-emitter voltage),Common test libraries Diode,DynamicZ_I1I2 (Dynamic Impedance ) Ifd_Vfd (Forwad current forward bias V) Ileakage_Vrd (Leakage current reverse bias V) Vbr_Ird (Reverse break down voltage) Vfd_Ifd (Forward voltage forward bias I) Vfd_Ifd_vsweep (Forward I-V sweep) Vrd_Ird (Reverse voltage reverse bias I) Vrd_Ird_vsweep (Reverse I-V sweep),Capacitance measurement library,Keithley 590 C meter c_meas (single point c measurement) ct_sweep cv_sweep cv_pulse_sweep Agilent 4284/4980 library c_meas cv_sweep Agilent 4294 library cv_sweep FI_sweep (frequency sweep),Charge pumping library,4200 + PG2 Amplitude sweep Base voltage sweep Rise time sweep (linear and log) Fall time sweep (linear and log) Frequency sweep (linear and log) T