半导体厂废水来源及处理介绍精选PPT课件.pptx

1,WastewaterTreatmentSystemofCISEMI,CISEMI废水处理系统1期简介,.,2,Newlvit04/08/2012,2,Content,WasteWaterSystemWasteCodesinChinaWastewaterEffluentStandardWasteClassificationWasteDefinitionWastewaterSystemFlowWasteChemicalCollectionChemicalDosingSystemWasteTankMaterial&ListWastePhotoresistLiftingstationLayoutWasteWaterLiftingStationWastewaterTreatmentLayout,.,3,Newlvit04/08/2012,3,WasteCodesinChina,中华人民共和国水污染防治法(水)中华人民共和国国家标准地面水环境质量标准中华人民共和国国家标准地下水环境质量标准污水综合排放标准GB8978-2002之第三级标准其中氨氮实行二级标准污水处理设施环境保护监督管理办法污水排入城市下水道水质标准,.,4,Newlvit04/08/2012,4,WasteCodesinChina,国家危险废物名录HW06有机溶剂废物：废催化剂；清洗剥离物、反应残渣及滤物与载体废物感光材料废物：废显影液定影液、正负胶片、相纸及药品表面处理废物：废电镀溶液、镀槽淤渣、电镀水处理污泥、处理酸碱渣、氧化槽渣、磷化渣HW22含铜废物HW24含砷废物HW31含铅废物HW32无机氟化物废物：氢氟酸不包括氟化钙HW34废酸：废硫酸、硝酸、磷酸HW35废碱：NaOH、KOHHW42废有机计溶剂：异丙醇、丙酮、环戊酮、二甲苯,.,5,Newlvit04/08/2012,5,WastewaterEffluentStandard,其他水质项目亦须符合GB8978-2002污水综合排放标准之第三级标准。,.,6,Newlvit04/08/2012,6,WasteClassification,WastewaterFromFab,Dr-REC,Dr-DHF,GeneralAcid/CausticWastewater,Dr-GW,Dr-HPM,Dr-APM,FluorideWastewater,Dr-MHF,Dr-HHF,Dr-CMP-M,Dr-CMP-O,AcidWastewater,Dr-H2SO4,Dr-H3PO4,SolventWastewater,Dr-Sol.,Dr-IPA,PhotoResistWastewater,Dr-PR-P,Dr-FL,Dr-ES,Dr-H2SO4+HF,Dr-CMP-I,Dr-L/S,Dr-PR-N,ReclaimWastewater,CMPWastewater,Dr-CMP-P,.,7,Newlvit04/08/2012,7,WasteClassification,DIWaterPlant,Dr-CAREG,Dr-MGREG,HVAC,ChemicalRoom,Dr-C/S,Dr-CTBW,Dr-GW,Dr-MHF,Dr-H2SO4,Dr-Sol.,Dr-HPM,Dr-H3PO4,ToFWW,ToGWW,ToGWW,ToGWW,WastewaterFromFacility,.,8,Newlvit04/08/2012,8,DrainageClassificationForChemicalRoom,.,9,Newlvit04/08/2012,9,DrainageClassificationForChemicalRoom,.,10,Newlvit04/08/2012,10,WasteDefinition,Definitionofliquidwasteinwastewatertreatment-1Dr-GW,Dr-HPM&Dr-APM(GeneralWaste)QuickDumpRinsestepofchemicalbathdrain(APM,HPM,SPMexcludingforHF),Others(IncludingSO4-2,PO4-3&OrganicSolvent),Resistance2M-cm.Dr-FLFloordrain.Dr-ESEmergencyshower.Dr-HHF49%,Fluoridecontainchemicaldrain.Dr-MHFLessthan49%,Fluoridecontainchemicaldrain.Dr-DHFQuickDumpRinseFluoridecontainchemicaldrain.Dr-CMP-MContainMetalslurryofCMP&waferscrubberdrain.Dr-CMP-OContainOxideslurryofCMP&waferscrubberdrain.,.,11,Newlvit04/08/2012,11,WasteDefinition,Definitionofliquidwasteinwastewatertreatment-2Dr-CMP-PContainPolyslurryofCMP&waferscrubberdrain.Dr-CMP-ICMPIdlingwaterdrain.Dr-H2SO4SPMDrain.Dr-H3PO4H3PO4Drain.Dr-H2SO4+HFSulfuricacid+HydrofluoricacidDrain.Dr-SolventOrganicsolventDrain.Dr-IPAIPADrain.Dr-ACT-935ACT935Drain.Dr-PRP&Dr-PRNPhotoresistancedrain.,.,12,Newlvit04/08/2012,12,WasteDefinition,Definitionofliquidwasteinwastewatertreatment-3Dr-L/SLocalScrubberdrainageandblowdown.Dr-C/SCentralScrubberdrainageandblowdown.Dr-CAREGC/ARegenerationwater.Dr-MGREGMGRRegenerationwater.Dr-CTBWCoolingTowerdrainageandblowdown.,.,13,Newlvit04/08/2012,13,HFTreatmentSystemFlow,HFCollectionTank30M3,Dr-DHF,DHFLiftingTank20M3,Dr-HHF,HHFLiftingTank20M3,Dr-CMP,CMPCollectionTank10M3,FromEMP,FromSLCT,FromSLFP,FromWWSUP,AirBlower,ToHFWRT,.,14,Newlvit04/08/2012,14,HFTreatmentSystemFlow,NaOH,HFWReactionTank210M3,HFWReactionTank310M3,HFWReactionTank410M3,M,ToAWCT,M,CaCl2,Polymer,PAC,M,M,HFWReactionTank110M3,H2SO4,M,ToSLCT,ToHFWRT,FromCDA,.,15,Newlvit04/08/2012,15,HFTreatmentSystemFlow,M,FromCDA,TOHFWCT,SlurryFilterpress,FromHFWST,Lorryout,英文简写说明EMP：EmergencyPumpSLCT：SludgeStorageTankHFWRT：HFWReactionTankAWCT：AWCollectionTankSLFT：SlurryFilterpressWWSUP：WastewaterSumpPumpHFWST：HFWSedimentationTankHFWCT：HFWCollectionTank,ToHFWCT,.,16,Newlvit04/08/2012,16,GWTreatmentSystemFlow,AWCollectionTank100M3,Dr-GM,AWLiftingTank10M3,FromEMP,FromHFWST,FromCSUP,AirBlower,FromASUP,FromMMF/ACFBackwashWW,FromReclaimBypass,ToAWNT,.,17,Newlvit04/08/2012,17,GWTreatmentSystemFlow,NaOH,M,M,AWNeutrTank123M3,H2SO4,M,AWNeutrTank323M3,AWNeutrTank223M3,AWEffluentTank12M3,Discharge,ToEMT,.,18,Newlvit04/08/2012,18,EMSystemFlow,EmergencyTank150M3,AWCollectionTank100M3,HFCollectionTank30M3,AWEffluentTank12M3,ToAWCT,ToHFCT,.,19,Newlvit04/08/2012,19,WasteChemicalCollection,SolventLiftingTank5M3,DrH2SO4,DrH3PO4,DrSOL,Lorryout,.,20,Newlvit04/08/2012,20,WastePhotoresistCollection,DrWastePhototesist,Lorryout,WastePhotoresistLiftingTank5M3,.,21,Newlvit04/08/2012,21,ChemicalDosingCollection,NaOHTank20M3,Lorryin,ToAWNT,ToHFWRT,FromAWNT,FromHFWRT,H2SO4Tank10M3,Lorryin,ToAWNT,ToHFWRT,FromAWNT,FromHFWRT,.,22,Newlvit04/08/2012,22,ChemicalDosingCollection,GaCl2Tank20M3,Lorryin,ToHFWRT,FromHFWRT,.,23,Newlvit04/08/2012,23,ChemicalDosingCollection,PACTank5M3,Lorryin,ToHFWRT,PAMTank5M3,ToHFWRT,Manual,.,24,Newlvit04/08/2012,24,P&IDandWaterBalance,.,25,Newlvit04/08/2012,25,WasteSegregation,Piping：Classifiedaspossible.System：-GeneralWaste-HF-SludgeDewater-ChemicalDosing-WasteChemicalCollectionDikeArea：-AcidWaste：H2SO4,H2SO4+HF,H3PO4,HF-CausticChemical：NaOH-AcidChemical：CaCl2,PAC,(Polymer)-OrganicWaste：Solvent,IPA,PR,.,26,Newlvit04/0