Scrubber 评估重点.doc

Scrubber 評估重點1. 依Gas 種類先評估使用Type(wet/burn/ thermal )2. 評估Process Gas 處理能力(例如下表)Gas KindMaker代理商Gas1%99%95%95%99%Gas2%99%90%90%99%Gas3%99%99%90%99%3. 安全裝置之評估(例如下表)(最好有安全單位認證.semi-s2 or 工研院.GE.等)itemMaker代理商評價1. Backfire(回火)interlock2. By-pass Function3. Leakage Detector(O2 sensor)4. Extinguish Interlock(UV)5. LNG/LPG Exchanger6. LNG/LPG Detector7. Facility Pressure Low8. Fuel Pressure Low9. Reactor high temp.10. Reactor low temp.11. Miss Fire (UV)12. Blower Trip (電流、溫度)13. N2 Pressure Low14. CDA Pressure Low15. UV sensor Abnormal16. Exhaust High Temp.17. CO2 splinker4. Gas 流量及處理流量之評估(例如下表)Layer I CHAMBERGas KindFlow Rate(sccm)Use TimeUsage/pcsEfficiencyGas1By Process RecipeTLV1000ppmGas299%Gas399%Gas499%Gas5一 Chamber 流量By Scrubber docking chamber Qty.三 Chamber 流量總 system 流量(含pump N2流量)要考慮Pump 運轉時的N2流量單一Chmaber 進行抽真空所需容量1. PC部分：(Chamber 容積) / ? sec (大氣到2000mT的時間) = ? L / min2. TMP N2 purge的部分：? L / min3. DP N2 purge的部分：? L / min5. 評估基本資料及scrubber的Cap.可容許chamber及處理量及(如下表)ItemMaker代理商Technical DataMax. Capacity (Lpm)Max. Inlet Port QtyMax. Working Temperature ()Leak DetectorDimension L*W*H (mm)Weight (kg)6. 評估廠商Service 能力itemMaker代理商得分ServicesupportParts Stock Qty in TaiwanArrived ArrivedArrivedService Center in Tainan?Qty of Engineer in Tainan Service Center24-Hour On-call7. COO 比較Running cost (NT/Year)Maker代理商Initial costElectrical Power (Phase/Hz/KW) RW (L/min) PCW (L/min) - CDA (L/min) - GN2 (L/min) O2 (L/min) CH4 (L/min) First Year running cost 3台 Five Year running cost 3台 Av