[毕业论文]电感式位移传感器的设计.doc

1402135112 2006 2006520 1AbstractAbstract AbstractAbstract 21 411 12 513 62 83831 8051832 1233 1434 1435163617371838 A/D1944122428051C22424525 ,.,.,.,.,.:ABSTRACT A New high piracies inductance sensor is developed. This sensorconsist s of a high piracies inductance probe and signal processingcircuit . The circuit adopt speak sampling technique and direct digitaloutput interface to substitute the conventional phase frequency detectiontechnique and analog output interface. The non2linearity is alsodecreased. In addition ,the circuit adopts frequency and ampli2tube stabilizing technique too. The accuracy and stability of the sensorcircuits also increased greatly.Key Words :Key Words :Key Words :Key Words : inductance sensor, self-fixed amplitude circuit,digital phase sensitivity detection, digital filter, statictesting1 1.1 1. 2 1pm )0.01um-1um0.1um0.1,.25um-50mm, 1.3 A/D()B-HU0()2,.,.A/D21 331 8051 805189C51Intel8CPU256KRAMROM8I/OP0-P3/UARTI/O12MHZ A/D CPU8(ALu)ABB5w5P16(Pc)(DM)8+-x/ 0PcIoPc Pc16KcPcCPUcRJcRJ 1 8051XTALIXTAL2C1C2 1212MHZXTAL2XTALI2 MGL5l6(s1s6)2P1P21212MHz1us16usNP2S1P2s4511Mcs51124 MovxMovxMovx MCS514022432I/O41VccVssVcc40+5VVss20+5V2XTAL1XTAL2XTAL119HMOSCHOMSXTAL218HMOSCHMOS3RST/VPDALE/PPSENEA/VPP4ARST/VPD9RSTRESETVPDVCCVPD+5VRAMRAMBALE/ P 30ALEP0CPSEN(29):,PESNPESNDEA/Vpp31EAEA4KBMS528KBEAEPROMEPROM21VVpp4./I/OP0P1P2P3(A).P03922P0.0P0.7P0I/O8/I/OP0/8EPROMEPROMP0(B).P118P1.0P1.7P1I/OMCS52P1.0P1.12P1.0/2T2P1.1/2T2EXEPROMP08(C).P22128P2.0P2.7P2I/OI/O256P288EPROMP28 (D).P31017P3.0P3.7P3I/O12P312P32P3.0MCS511) .22) .3P2P016P0 3.2 L=N2/RmN ,Rm - ,LN :; 2P3.0 RXD0P3.1 TXDP3.2 INT00P3.3 INT11P3.4 T0/0P3.5 T1/1P3.6 WRP3.7 RD lrNlaramLla3aZ1Z2;L1=L2=L;Z1=Z2=Z=R+jwL,R1=R2=RZ1=Z+ZZ2=ZZZL22222)1(4aamrllrlNL?+=lrxr a12 2 1- 2- MLLc)UU/2 U/2 U 0 b) Z1Z2Z1Z2U0 U R 1 R 2 R 1 Z L U 0 a)3 ZZUURZZZZRRZURRRUZZZU