汽车板镀铜铜厚均匀性改善总结.doc

1ME技術報告書 文件編號:檔傳送和檔做成.審核.批准收件1#PLAT,1#維修部,QA,QAE,PMC,采購作成張飾成 30.Sep.07抄送高生,鄧生,相關經理/副經理審核FAX批准檔核心內容描述技術專案汽車板高低電位銅厚均勻性改善總結目標指標改善汽車板鍍銅銅厚均勻性,使電鍍銅厚不夠問題率為0現況描述現狀: 我司汽車板目前都安排在1#厂5#P-Tin線生產,而孔銅要求35um汽車板銅厚要求較厚,電流偏大時,容易發生夾膜Short問題,為解決此問題,ME將35um汽車板生產電流都控制在下限,而此措施導致35um汽車板時有孔銅偏薄問題發生為改善此問題,需對5#P-Tin線鍍銅銅厚均勻性進行一系列評估及改善.技術點：評估不同因素對銅厚均勻性的影響,以確定最佳改善方案.QDC變化量：Q：汽車板銅厚偏薄報廢率為0 D：鍍銅均勻性提高20% C：成本增加約40*7*300=84000元 註：5#PTIN線共40條飛巴,每條增加7個夾仔,每個約300元試驗方案 評估陽極排列方式對鍍銅均勻性的影響,具體方案如下對5#PTIN線29#-2銅缸陽極排列方式進行改變使銅缸兩邊的陽極排列較分散而中間陽極排列緊密排列如下圖而29#-1銅缸陽極排列方式不變, 排列如下圖 然後在同樣的電鍍條件下用光銅板進行試板取數分析以確定改善效果。評估電鍍板時所夾夾仔數對鍍銅均勻性的影響具體方案如下1.用光銅板在同一飛巴上評估夾兩個夾仔與夾三個夾仔鍍銅均勻性狀況試板掛板圖及夾仔夾點圖:如下圖試板掛板圖及夾仔夾點圖: 試驗方案2.用35um汽車板DH-7459在同一條飛巴生產時評估夾板夾仔數對銅厚均勻性影響2-1. 用27-1#飛巴生產DH-7459使該飛巴生產板一些板夾兩個夾仔另一些板夾三個夾仔蝕刻後取數分析銅厚分佈狀況2.2. 用同一飛巴27-1#生產同lot號DH-7459,使該飛巴板全部夾三個夾仔蝕刻後取數分析銅厚分佈狀況.在方案二評估OK的基礎上, 對5#PTIN取任一飛巴進行增加夾仔改裝,然后用汽車板及光銅試板進行對比評估.備注掛板圖及夾仔夾點圖:參見上圖詳細的試驗方案列表如下:試板方案評估特點試板特點及數目電鍍條件評估方式取數方式數據分析1原陽極排列尺寸18.25”16.16” 底銅 H/HOZ 光銅板(10塊)14ASF*50min 鍍液控制條件同正常生産條件光銅板-鍍銅-鍍銅厚度檢測儀測量每塊板正反面取3*4共12個點偏差,平值偏差,COV對比2陽極排列改變尺寸18.25”16.16” 底銅 H/HOZ 光銅板(10塊)14ASF*50min 鍍液控制條件同正常生産條件光銅板-鍍銅-鍍銅厚度檢測儀測量每塊板正反面取3*4共12個點偏差,平值偏差,COV對比3同一飛巴有夾兩個夾仔有夾三個夾仔35um汽車板DH-7459(12塊) 生產電流 鍍液控制條件同正常生産條件鍍銅-蝕刻-鍍銅厚度檢測儀測量每塊板上中下測6個大孔孔銅偏差,平值偏差,COV對比4同一飛巴全部夾三個夾仔35um汽車板DH-7459(10塊)生產電流 鍍銅-蝕刻-鍍銅厚度檢測儀測量每塊板上中下測6個大孔孔銅偏差, 鍍液控制條件同正常生産條件平值偏差,COV對比5一條飛巴增加8個夾仔,另一條不變35um汽車板FH-7022(12塊) 生產電流 鍍液控制條件同正常生産條件鍍銅-蝕刻-鍍銅厚度檢測儀測量每塊板上中下測6個大孔孔銅偏差,平值偏差,COV對比6一條飛巴增加8個夾仔,另一條不變尺寸13.5”19.5” 底銅 H/HOZ 光銅板(12塊)16ASF*75min 鍍液控制條件同正常生産條件光銅板-鍍銅-鍍銅厚度檢測儀測量每塊板正反面取3*4共12個點偏差,平值偏差,COV對比 試驗結果及分析總結按方案一進行試板1. 原陽極排列試板得到以下正面銅厚分佈測試數據:1234567891039.432.833.535.132.334.733.733.136.539.134.134.933.131.733.728.829.428.329.129.529.134.632.533.434.332.733.234.333.438.939.731.93334.331.434.134.132.835.537.233.33432.831.533.329.530.129.328.930.330.333.633.33433.633.43333.934.236.841.231.9343531.435.434.933.636.738.43434.832.631.733.93030.430.129.330.930.733.634.134.833.433.83435.834.638.542.134.436.537.631.438.137.935.339.241.437.537.235.13634.231.631.73230.732.733.735.534.637.53634.936.73836.639.8原陽極排列正面鍍銅銅厚分佈波動圖數據總結: MAX:42.1um ;MIN:28.3um;AVE:34.0um; STDEV:2.9;COV:8.5%;偏差:13.8um2. 陽極排列改變後試板得到以下正面銅厚分佈測試數據:1234567891035.831.434.430.529.929.433.530.433.628.230.132.43031.433.231.631.231.132.430.329.729.628.829.936.831.629.530.730.13635.731.533.330.730.53134.531.332.530.131.533.53333.934.933.534.233.533.432.833.430.130.831.236.733.729.632.331.53737.731.835.432.230.632.335.631.733.331.831.83433.834.336.234.834.934.534.134.634.630.931.53335.433.231.333.533.438.240.434.135.533.831.53436.53435.633.332.834.934.135.135.636.235.634.534.433.733.63131.431.537.933.731.636.235.537.9陽極排列改變後正面鍍銅銅厚分佈波動圖數據總結: MAX:40.4um ;MIN:28.2um;AVE:33.1um; STDEV:2.3;COV:7.0%;偏差:12.2um試驗小結: 陽極排列前後銅厚分佈數據對比如下:項目MAX(um)MIN(um)AVE(um)偏差(um)STDEVCOV備注原陽極排列42.128.334.013.82.98.5%中部第6塊板銅厚較薄陽極排列改變40.428.233.112.22.37.0%中間整體分佈較均勻試驗結果及分析總結 從陽極排列改變前後試板數據對比,可以看出陽極排列方式改變後,中部銅厚有提高,但兩邊銅厚因陽極較少而銅厚有偏低,且考慮到陽極排列方式改變的可操作性不強不能理論上給出一個具體的排列方式所以該改變銅厚均勻性的方法有待進步確認。按方案二進行試板1. 同一飛巴光銅板(底銅2oz18.25*16.16,14ASF*50MIN)試板夾兩個夾仔與夾三個夾仔鍍銅銅厚數據如下板號12345678910夾仔編號123456 7 89101112131415161718 19232425202122262728銅厚88.983.887.785.182.290.579.182.678.987.783.982.284.685.384.285.182.38479.478.779.481.28179.987.582.484.989.28889.688.885.288.985.48690.383.184.177.890.785.886.286.282.483.28783.886.283.282.480.78484.481.587.584.581.78882.689.391.989.788.385.88587.48282.880.490.883.786.885.283.384.188.282.284.481.28081.184.88382.587.587.381.686.883.288.990.390.188.292.187.993.988.287.786.597.287.292.286.282.485.388.288.889.183.483.384.189.187.482.988.289.98586.389.287.6AVE88.587.682.887.984.485.881.483.585.787.4數據總結:同一飛巴中夾兩個夾仔的第37塊板銅厚較其他夾三個夾仔的板薄27um,可見夾板夾仔數是影響鍍銅均勻性的重要因素。2.1 用生產板DH-7459重復上述夾仔數對鍍銅均勻性影響測試數據如下板號123456789101112夾仔 1 2345 6 78910 11 12131415 16 1718192021 22 23 2425262728 29銅厚49.448.554.552.946.446.449.550.74947.648.350.15047.148.55749484846.950.25345.648.849.746.152.854.245.347.950.849.15047.949.249.14647.249.5524747.84746.25052.447.146.552.448.652.556.450.256.55751.55049.254.2514852.853.7524651.14846.851.351.852.148.8AVE49.153.948.851.44950.348.55248.147.251.448.1數據總結: MAX:57um ;MIN:45.3um;AVE:49.9um; STDEV:2.85;COV:5.7%,平均銅厚偏差:6.7um上述數據同復了光銅板試驗結果可見使夾板夾仔數均勻是可以改善銅厚均勻性的。2.2 用生產板DH-7459全部夾三個夾仔生產測試數據如下板號12345678910夾仔編號123456789101112131415161718192021222324252627282930銅厚51.148.152.553.84746.952.550.4484952.851.25147.148.8515048.85051.548.547.856.151.247.949.851.548.54949.353.348.24647.648.7514949.15250.350.551.858.953.450.455.756.148.84852.156.748.85152.151.1495152.65750.3AVE49.6 54.3 49.6 51.3 49.2 51.8 49.1 50.0 50.1 51.9 數據總結: MAX:58.9um ;MIN:46.2um;AVE:50.7um; STDEV:2.69;COV:5.3%. 平均銅厚偏差:5.2um試驗小結: 從夾板夾仔數試板數據對比可以得到以下結論夾板電鍍時夾仔數越均勻電鍍銅厚越均勻電鍍效率越好.試驗結果及分析總結按方案三進行試板： 在試驗二的基礎上,ME出聯絡書要求維修及生產對5#PTIN選一飛巴增加8個夾仔,使夾仔中心距由原來的12.5CM改為12CM,夾仔由31個增為39個,然后分別取汽車板及光銅板進行試板對比,具體數據如下：3.1 用汽車板FH-7022A對已增加的飛巴及未改飛巴分別試板（同一銅缸,電流參數一樣）,測試數據分別如下： 1.未改飛巴汽車板銅厚分布數據板號123456789101112夾仔編號123 4 5 6 7 8 9101112 13 1415161718 19202122 23 2425262728 29銅厚68.566.267.856.461.758.661.358.560.759.46159.865.366.364.758.658.560.763.867.26254.357.760627072.363.163.467.568.36771.256.758.756.77166.867.457.562.358.464.363.76358.962.259.866.967.464.364.363.76366.867.571.557.159.560.363.567.771.462.162.465.270.168.4736159.156.774.968.971.960.162.758.967.466.466.360.262.158.666.967.665.367.466.466.663.566.57058.362.762.364.966.37160.360.465.565.568.670.463.460.856.3AVE69.3 59.6 63.5 60.2 66.1 63.2 66.5 59.1 67.7 63.3 69.2 58.8 數據總結：MAX:74.9um;MIN：54.3um;AVE：63.9um;偏差：20.6um;COV:7.0% 平均銅厚偏差：10.5um2.飛巴增加夾仔後汽車板銅厚分布數據板號123456789101112夾仔編號12345678910 11121314151617181920212223242526272829303132333435銅厚6964.568.562.164.864.961.264.365.66160.362.470.466.364.555.161.370.161.864.470.263.764.469.164.664.668.959.458.560.463.464.866.364.561.459.570.270.1369.362.263.362.26560.269.66159.360.272.267.867.457.661.767.364.764.569.566.766.568.566.966.27063.460.660.96766.366.267.265.660.271.468.770.761.96260.163.260.966.160.759.661.973.268.763.260.763.468.865.965.569.369.966.76967.367.569.165.26060.967.866.565.670.962.559.7AVE69.2 62.6 64.0 60.7 68.2 62.9 66.2 67.2 67.2 61.0 66.0 63.5 數據總結：MAX:73.2um;MIN：55.1um;AVE：64.9um;偏差:18.1um;COV:5.8% 平均銅厚偏差：8.5um小結3.1.1：從生產汽車板銅厚數據對比可以看出,在所有生產條件相同的情況下,飛巴增加夾仔後,最大最小銅厚偏差可以降低2.5um;COV降低1.2%;同一飛巴板與板之間平均銅厚偏差降低2.0UM.通過COV數據計算得飛巴增加夾仔可以提高電鍍均勻性17.1%.小結3.1.2：經統計目前所有汽車板尺寸及生產情況,在5#PTIN生產的汽車板都是夾短邊,而且短邊長度都是在13.39”14.16”,而且5#PTIN線一條飛巴長196”,所以一條飛巴可以夾12PANEL,每PANEL夾三個夾仔時夾點分布較均勻,（12*3+2）-31=7個,所以每個飛巴應增加7個夾仔為佳.3.2 用尺寸13.5*19.5,底銅H/HOZ,光銅板16ASF*75MIN進行試板數據測試如下： 1.未改飛巴光銅板銅厚分布數據板號123456789101112夾仔123 4 5 6 7 8 9# 13 14#18 19# 23 24#28 29銅厚49.639.442.838.639.64332.936.938.944.943.349.741.940.240.447.545.650.342.443.948.451.643.649.545.340.843.744.84244.441.139.941.746.641.950.948.140.742.940.140.644.335.539.140.245.443.647.542.542.341.846.144.849.841.542.146.546.642.948.844.540.443.245.441.842.942.24041.545.741.646.553.641.543.840.742.244.636.43841.546.744.74243.742.441.746.345.75042.241.745.949.64448.843.540.444.346.242.542.442.540.840.346.741.746.954.246.948.547.74948.235.242.845.549.44848.646.643.645.750.948.95345.945.746.153.946.854.245.843.44652.244.146.845.942.14950.946.250.7AVE46.0 43.2 38.6 46.2 42.7 48.2 44.4 48.4 43.4 44.6 42.3 46.4 備註: 上述反面銅厚數據與正面銅厚取得相近的結果,反面檢測檢測數據現暫不列舉數據總結：MAX:54.2 um;MIN：32.9um;AVE：44.5um;偏差：21.3um;COV:9.6% 平均銅厚偏差：9.8um2.飛巴增加夾仔後光銅板銅厚分布數據板號123456789101112夾仔123456789101112131415161718192021222324252627282930313233343536銅厚50.942.244.647.641.845.548.444.748.149.444.447.347.242.94440.74146.548.543.650.641.537.846.648454943.240.338.344.443.146.645.742.851.347.941.242.644.641.646.345.844.348.3474345.347.139.644.340.741.244.84641.24742.139.944.448444843.239.838.443.24246.245.142.95146.94245.644.441.247.944.442.648.94843.145.844.541.645.143.541.746.547.942.748.742.540.744.649434845.540.738.54