SECSI-SECSII-HSMS-GEM总结.ppt

SEMI Cim部Cell与Module科徐宝龙 SEMI SEMI SemiconductorEquipmentandMaterialsInternational国际半导体设备与材料产业协会 SEMICONTENTS EquipmentAutomationHardwareEquipmentAutomationSoftwareFacilitiesFlatPanelDisplayGasesMaterialsMicrolithographyPackagingProcessChemicalsSafetyGuidelinesSiliconMaterials ProcessControlTraceabilitySemiconductor EIS用到标准 SECS SemiconductorEquipmentCommunicationStandardSECSI E4 SECSII E5 GEM E30 HSMS E37 SECSI 该标准定义了半导体工艺设备 晶片制造 加工 检测 组装 打包设备 和主机之间交换消息通信的接口 该标准包括物理连接器 9 pinor25 pin 电平信号 传输速率 以及交换消息的逻辑协议 物理传输单位 传输10个bit 0和9是开始和结束信号 1 8bit是数据 逻辑传输单位 Block ReceiveEOT 1byte Blocklength 10 254byte block 2byte Checksum 先传输块的长度 在传输块 最后发送校验码 Block组成 DefineinE5 SECSIHeader组成 HandshakeBytes ENQ5RequesttoSendEOT4ReadytoReceiveACK6CorrectReceptionNAK21IncorrectReception HSMS HIGH SPEEDSECSMESSAGESERVICES HSMSGeneralMessageFormat Length HeaderLength MessageTextLength FormatisspecifiedbyPType HSMSHeader组成 HeaderByte2 3 Ptype 0 Function HeaderByte2 HeaderByte3 W 1 reply W 0Noreply PType PresentationType 0SECS IIEncoding1 127Reservedforsubsidiarystandards128 255Reserved notused SType SessionType SType是一个识别该消息是HSMSDataMessage value 0 或者其他HSMSControlMessages other 0DataMessage1Select req2Select rsp3Deselect req4Deselect rsp5Linktest req6Linktest rsp7Reject req8 notused 9Separate req10 notused 11 127Reservedforsubsidiarystandards128 255Reserved notused SelectStatus DeselectStatus RejectReasonCode HSMSConnectionStateDiagram NotConnection NotSelected Selected Connection T7ConnectionTimeout 2 3 4 5 1 7 HSMS TCP IP ConnectModes SECSII DataStructuresDataItem VariableItem ObjectDictionaryMessageDetail DataStructures 0 Illegal dataformaterror1 Onebinarylengthbyte max 255 2 Twobinarylengthbytes max 64k 3 Threebinarylengthbytes max 7 99M ItemFormatCodes 000000LIST lengthinelements 001000Binary001001Boolean010000ASCII1010001JIS 80100102 bytecharacter2 40110008 byteinteger signed 20110011 byteinteger signed 0110102 byteinteger signed 20111004 byteinteger signed 21000008 bytefloatingpoint31001004 bytefloatingpoint31010008 byteinteger unsigned 21010011 byteinteger unsigned 1010102 byteinteger unsigned 21011004 byteinteger unsigned 2 example a binary10101010 00100001Item binary 1lengthbyte000000011bytelong10101010databyteb ABC 01000001ItemASCII 1lengthbyte00000011Threebyteslong01000001ASCIIA01000010ASCIIB01000011ASCIICc Anitemcontainsthreebinarynumbersin2 bytesignedintegerform 01101001Item 2 byteintegers000000102bytestotal 2 2 1integers xxxxxxxxMSBytenumberxxxxxxxxxLSBytenumberx GEM GENERICMODELFORCOMMUNICATIONSANDCONTROLOFMANUFACTURINGEQUIPMENT该标准定义了一套通用的设备的动作以及通信功能的标准 HarelNotation State ORSubstates ANDSubstates Transition状态转换标志 Defaultentrypoint默认进入点 h History历史记录 s Select c Conditionalselector CommunicationsStateDiagram c RS1f14 RS1f13 ECID 2 ControlStateModel OfflineEQPcan tcommunicationwithHostexceptS1F13 S1F17andS2F42 andSxFyreplyS F0 OffLine OnLineneedsendS2F17Date TimeRequestIfPTSTLRorURreportceid200203 ECID 3 ProcessingStateDiagram LimitStateModel DISABLED BELOWLIMIT NOZONE ABOVELIMIT C ENABLED StateDiagramforAlarmALIDn AlarmClear AlarmSet S5F1AlarmReportSent S5F3Enable DisableAlarmSend EAS S5F103CurrentAlarmSetListRequest transaction TransactionDefinition AtransactionformsthebasisforallinformationexchangesinSECS II Atransactionconsistsofeitheraprimarymessageforwhichnoreplyisrequested oraprimarymessagewhichrequestsareplytogetherwithitscorrespondingsecondarymessage Secondarymessagescannotrequestareply SystemBytesT3TimeOutS F0 S6F1 S9F noReplymessage conversation Aconversationisaseriesofoneormorerelatedtransactionsusedtocompleteaspecifictask ConversationTimeout S9F13 Session session arela