文献翻译——触摸板的力量和位置传感

第1页外文文献资料ATouchpadforForceandLocationSensingThispaperpresentsthedesignandfabricationmodelofatouchpadbasedonacontact-resistance-typeforcesensor.Thetouchpadworksasatouchinputdevice,whichcansensecontactlocationandcontactforcesimultaneously.Thetouchpadis40mmwideand40mmlong.Thetouchpadisfabricatedbyusingasimplescreenprintingtechnique.Thecontactlocationisevaluatedbythecalibrationsetup,whichhasaloadcellandthree-axisstages.Thelocationerrorisapproximately4mmwithrespecttox-axisandy-axisdirections.Theforceresponseofthefabricatedtouchpadisobtainedatthreepointsbyloadingandunloadingoftheprobe.Thetouchpadcandetectloadsfrom0Nto2N.Thetouchpadshowsahysteresiserrorrateofabout11%anduniformityerrorrateofabout3%.Keywords:Touchinputdevice,touchscreen,touchpad,contact-resistance-typeforcesensor,contactforce,contactlocation.1.IntroductionRecently,personalcomputers,mobilephones,andothermultimediadeviceshaveevolvedtobecomeuser-friendlyeventhoughtheycoveranincreasingnumberoffunctions.Additionally,theirstructuresandsizesarebecomingmoreslimandminiaturized.Thus,theuserrequiresagreatervarietyofuser-friendlyinputdevices,suchasamouse,keyboard,touchpad,andtouchscreen.Inparticular,touchscreensandtouchpadshavedevelopedrapidlyformobilephonesandMP3playersbecauseoftheirlimitationsregardingsize.Sinceitsuseinthemilitaryinthe1970s,thetouchpadhasbecomeanimportantpartofthemaininputinterfaceofmobiledevices.AfterGlidePointwascommercializedin1994,Appleadoptedatouchpadasaninputdeviceforitspowerbooklaptopcomputer.Touchpadshavemostlydevelopedthroughtheimprovementstoitsdesignandsensor.第2页Meanwhile,sinceApplelaunchedthesmartphone,IPhone,theuserinterface(UI)isconsideredanimportantparameterthatcanappealtousers.However,mosttouchinputdevices,suchastouchpadandtouchscreen,canmeasureonlycontactlocationwhenausertouchesthedevice.FromtheviewpointofUI,theforthcomingtouchpadsandtouchscreensrequireaforcecomponentand,ifpossible,acontactlocation.Ifaninputdevicecansenseforceandpositionbycontactandtouch,somehandsetmanufacturerscanreleaseavarietyofmobiledevicesthatcanbeusedforcommunicationsandgames.Particularly,whenahumanfingermakescontactwithadevice,theintensityoftheforcecanbeusedasanewfunctionwithinthecontentsofagameplayerandmobilephone.Researchoncontactpositionandforceusingforce/pressuresensorshasbeenconductedinthefieldsofroboticsandmedicalinstruments1-8.Inthecaseofatactilesensorbasedonanarrayofforcesensors,itiseasytosimultaneouslyacquirethecontactlocationandforcebyascanningprocessusinginputandoutputsignallines9.However,itisdifficulttoapplyatactilesensorhavingmanysignallinestoamobiledevicebecauseofaphoneslimitedsize.Therefore,itisnecessarytodecreasethenumberofsignallinesinordertoapplythetactilesensortoamobilephone.Ontheotherhand,inthecaseofanexistingcapacitivetouchpad,itcanalsosensethepositionandforcesimultaneously.However,theforceisessentiallycausedbychangingthecontactareawhenhumanfingersmakecontactwiththedevice.Thus,itisnoteasytosensetheforceofapenbecauseitscontactareadoesnotchangewithrespecttotouch.Additionally,thecapacitivetouchpadneedsmanysignallinesrelatedtoanarrayofunitsensorstoobtainthepositionandforce.Thispaperpresentsanopaqueinputdevicesimilartoalaptopstouchpadusingacontact-resistance-typeforcesensor,whichcansimultaneouslysenseacontactpositionandforce.2.TouchpadDesignFigure1(a)showstheschematicdrawingofatouchpadusingacontact-第3页resistance-typeforcesensortoobtainacontactlocationandforcesimultaneously.Thesensorhastworesistivelayersandfourconductivelayersforsignallines.Thedesignissimilartoa4-wiretypetouchscreen.Whenacontactpoint(CP)withintheuppersubstrate,forexample,CP1,ispressedbyafingerorpenatacertainpressure,theresistivelayeroftheuppersubstratetoucheswithCP2oftheresistivelayerwithin.Fig.1.(a)Schematicdiagramoftouchpadusingcontact-resistance-typeforcesensorand(b)itsequivalentcircuitcomposedoffourlineresistancesandonecontactresistance.thelowersubstrate.Whenaresistivelayerconnectstotwoconductivelayers,suchassilverandcopperlayers,theresistivelayerbecomesaone-dimensionalresistorinx-axisory-axisdirection.Thus,theupperandlowersubstrateshavefourelectrodes:a,b,c,andd.Figure1(b)showsthelineresistancesofx-axisandy-axiscomponentsandacontactresistancebetweenCPs.Thelineresistancesofanx-axisnearelectrodesareRx1andRx2.Meanwhile,thelineresistancesofy-axisnearelectrodesare,Ry1andRy2.ThecontactresistanceacrossCPsisRz,which第4页iscausedbyachangeofthecontactareaunderloadingconditions.Thecontactlocationandforceareobtainedbymeasuringeachlineresistanceinx-axisandy-axisandcontactresistance.Inordertomeasurethelocationcomponentofx-axis,inputvoltage(Vin)isappliedtoelectrodeb,andelectrodeaissettoground.Then,theoutputvoltage(Vout)ismeasuredateitherelectrodecord.Thus,outputvoltageVout,xcanbeexpressedbyInthecaseofthey-axiscomponent,aninputvoltageisappliedtoelectroded,andelectrodecissettoground.TheoutputvoltageVout,yismeasuredateitherelectrodeaorbandexpressedby.ThecontactloadcanbeobtainedbyusingthecontactresistanceRzbetweenCP1andCP2.Aninputvoltageisappliedtoelectrodea,andelectrodecissettoground.TheoutputvoltageVCP1ismeasuredbyelectrodebwhileelectrodedisopen.Inasimilarway,theoutputvoltageVCP2isobtainedbysignallinedwhiletheothersignallinebisopen.TheVCP1andVCP2outputvoltagescanbeexpressedby.Fig.2.Schematicdesignoftouchpadhavingresistivelayersanddot第5页spacers.thelowersubstrate.Thedistancebetweenspacersis2.5mm.3.TouchpadFabricationFigure3presentsthefabricationprocessofatouchpadusingasilkscreeningtechnique.Weuse50mpolyethyleneterephthalatefilmasthesubstrateofsensor(Fig.3(a).Beforeprocessing,thefilmissoakedinacetonefor10mintogetridoforganicdebris.Next,thefilmisrinsedwithmethanolfor5mintoremoveacetone.MethanolisrinsedwiththeDI-water.Then,thefilmisdried.Theconductivelayer,resistivelayer,anddotspacerarecoatedbyascreenprintingtechnique.Weuseasemi-automaticprintingmachinebyLinesystemCo.,whichusesasquare-edgetypesqueegee.Thehardsqueegeeisofpolyurethanematerialhavingshorehardness(Hs)of70durometersbecauseitisnecessarytospreadinkontothescreenmask.Aconductivelayerisformedontherinsedfilmbyusingasilverink(CMICo.)(Fig.3(b).Themeshforsilverprintingis300-meshsize.Thecoatedfilmneedstobelevelatroomtemperaturefor30min.Next,thefilmiscuredinanovenat140Cfor10min.Aresistivelayerusingacarbonpaste(CMICo.)iscoatedonetime(Fig.3(c).Themeshforprintingis250-meshsize.Thecoatedfilmiscuredinanovenat150Cfor60minafterbeingleveledatroomtemperaturefor30min.Next,dotspacersusinganUVink(CMICo.)areformedonheresistivelayer(Fig.3(d).Themeshis325-meshsize.ThecoatedUVinkiscuredinaUVlightsystemfor1min.Weuseadouble-coatedadhesivetapetobondbothupperandlowersubstrates(Fig.3(e).Figure4showsatouchpadusingthefabricationprocess.Theactiveareaofthetouchpadis36mm36mmbecausethecoatedwidthoftheconductivelayeris4mm.Thelineresistancebetweenconductivelayersisabout1.9Mbecausethesurfaceresistivityofthecarboninkisabout2M/第6页Fig.3.Fabricationprocessofcontactlocationandforcesensingtouchpad.Fig.4.Fabricatedtouchpad(40mmwideand40mmlong).4.EvaluationSetupWeuseanevaluationsystemtoobtainthelocationdeviationofatouchpadanditsforceresponseunderstaticload.Figure5showstheevaluationsystemthathasa3-axisloadcelland3-axislinearstages.Theverticalforcecomponent,Fz(ofthe3-axisloadcell),isemployedto第7页measuretheforceresponseofatouchpad.Theothercomponents,FxandFy,areusedtocheckthealignmentbetweentouchpadandtheloadcellunderloadingandunloadingconditions.Thecapacityofaloadcellis50NinFx,Fy,andFzcomponents.The3-axislinearstagescanmakethestagemoveinx-axisory-axisdirectionsandtranslatethestagetoapplysomeloadinthez-axisdirection.Weuseaprobeof1mmindiametertoevaluatetheresolutionofthecontactlocation.Incaseofalargeprobe,itisnoteasytomeasuretheexactresolutionofapositionbecausetheerroroftheresolutiontendstobelargeinproportiontothesizeoftheprobe.Inthecaseofforceresponseunderstaticload,anotherprobeof10mmindiameterisused.Therangeofmotionofalinearstageinz-axisdirectionis50mm,anditspositionresolutionis1m.Thecalibrationsetupobtainsthesignaloftheloadcellandcontrolsthemotionofthelinearstagetomaintainanapplyingload.Theamplifier(InstrumentDivisionCo.,Model2310)amplifiestheforcesignalandtransmitsittoadataacquisitionboard(NationalInstrumentCo.,ModelPXI-6251).Thesoftware,LabVIEW,isemployedtocontrolthelinearstageandobtainthesensorsignal.4.1.EvaluationofDeviationErrorforaTouchpadThetouchpadisattachedtothestagetomeasurethedeviationofcontactlocationinx-axisdirection.Figure6(a)showsanelectricalcircuitforevaluationofoutputvoltageinthex-axisdirectionaccordingtoachangeofcontactposition.First,aninputvoltageof3Visappliedtotheelectrodeboftheupperlayer.Theoppositeelectrodeaissettoground.Whenelectrodedofthelowerlayerisopened,theoutputvoltageismeasuredatelectrodec.Thestagemovesverticallyataspeedof1mm/min,andtheprobeofloadcellmakescontactwiththeupperlayeroftouchpad.Assoonastheprobetouchesthesurfaceofthetouchpad,theloadisincreaseduntilthesignalofloadcellshows0.2N.Whiletheevaluationsystemmaintainsaconstantloadof0.2N,thedataacquisitionboardrecordstheoutputvoltagerelatedtothecontactpositionofthe第8页touchpad.Next,thestagemovesupwardataspeedof1mm/min,andtheloadisfinallyremoved.Thestagemoves1mminthex-axisdirectiontoevaluateanewcontactposition.Theoutputvoltageofpath1showninFig.6(a)isrecordedinasimilarway.TheinitialCPfortheevaluationis5mmawayfromelectrodea.Outputvoltagesaremeasuredevery1mmuntilthefinalCPat35mmisreached.Additionally,path2andpath3arealsoevaluatedtocheckthedeviationerrorofthecontactlocation.Figure6(b)showsanotherelectricalcircuitwithrespecttothreecontactpathsinthey-axisdirection.AsinFig.6(a),aninputvoltageof3Visappliedtoelectrodedofthelowerlayer.Theoppositeelectrodecissettoground.Afterelectrodeaoftheupperlayerisopened,theoutputvoltageismeasuredatelectrodeb.TheinitialCPiny-axisdirectionis5mmfromelectrodec.Theoutputvoltagesaremeasuredevery1mmuntilthefinalCPat35mmisreached.4.2.EvaluationofForceResponseforTouchpadThecalibrationsetupshowninFig.5evaluatestheforceresponseunderastaticloadingcondition.Figure7presentsanelectricalcircuittomeasuretheoutputvoltagecausedbycontactresistance,Rz.Theforceresponseiscalculatedby(5)usingVCP1andVCP2.InthecaseofoutputvoltageVCP2,aninputvoltageof3Visappliedtoelectrodeboftheupperlayer,andthenaopens.OutputvoltageVCP2ismeasuredatelectrodecofthelowerlayer,andthenelectrodedsetstoground.IncaseofVCP1,aninputvoltageof3Visappliedtoelectrodeboftheupperlayer,andthenelectrodecofthelowerlayeropens.OutputvoltageVCP1ismeasuredatelectrodeaoftheupperlayer,andthenelectrodedofthelowerlayerissettoground.Thetouchpadalignswiththeprobeoftheloadcell.Thestagemovesverticallyataspeedof1mm/minuntilaloadisreachedto2N.Thestagemovesupwardtoremovethecontactload.Atthesametime,theoutputvoltageisrecordedunderloadingandunloadingconditions.Figure7alsoshowsthecoordinatesofpoints1,2,and3.第9页Fig.7.Electricalcircuitformeasurementofforceresponseandthecoordinatesofthreecontactpoints.5.ResultsandDiscussion5.1.ContactPositionofTouchpadFigure8(a)presentstheoutputvoltageVout,xaccordingtothreecontactpathsinthex-axisdirection.Afittingcurveusingtheleast-squaremethodiscalculatedbyusingoutputvoltagesobtainedfromthethreepaths.Thefittingcurvehasaslopeof0.049withrespecttocontactpositionX,anditsinterceptis0.025.Theoutputvoltagesshowagoodcoincidencewiththefittingcurve.Thismeanstheoutputislinearlywelldistributed.Figure8(b)showstheoutputvoltageVout,yaccordingtothethreepathswithrespecttocontactpositionY.Afittingcurveusinglinearregressionisobtainedbyaveragingthedataofthethreepaths.Thefittingcurvehasaslopeof0.047withrespecttocontactpositionY,anditsinterceptis0.044.Aswiththex-axis,theoutputvoltagesalsoshowagoodcoincidencewiththefittingcurve.Theslopeofthex-axisislittledifferentfromthatofthey-axis.Thedeviationerrorofthecontactlocationshowsapproximately4mmaccordingtotheresultsobtainedfromx-axisandy-axisdirections.Meanwhile,thetouchpadshowshighnoiselevelbecauseithashighlineresistancecomparabletotheinput第10页impedanceofthedataacquisitionboard.Therefore,thehighnoisecausesadifferenceofslopebetweenthex-axisandy-axis.Thehighimpedanceofthetouchpadalsomakestheoutputvoltagedecrease.Thus,themeasuredvoltagesarelowerthanthetheoreticaloutputvoltageaccordingto(1)and(2).ThelineresistanceshouldbeafewKtodecreasethenoiselevelandlowerthedeviationerrorofcontactlocation.Fig.8.Outputvoltageoftouchpadaccordingtothreepaths:(a)x-axisdirectionand(b)y-axisdirection5.2.ForceResponseofTouchpadConsideringthesizeofahumanfingertip,weusedaprobewithadiameterof10mmtoobtainthesensitivityofatouchpadwithrespecttocontactforce.InthecaseofoutputvoltageVCP1,(3)showstheoutput第11页voltagedecreasesaccordingtoanincreasingcontactload.Forexample,whenthecontactresistanceRzhasaninfinitevalue,theoutputvoltageistheoreticallyequaltotheinputvoltage.InthecaseofoutputvoltageVCP2,(4)showstheoutputvoltageincreasesaccordingtoanincreasingcontactload.Forexample,theoutputvoltagehaszerovaluewhenthecontactresistancehasaninfinitevalue.Thus,theoutputvoltageVin(5)alwayshasapositivevaluewithrespecttothecontactload.However,theoutputvoltagedecreasesexponentiallywithincreasingcontactload.Figure9presentsthefinaloutputvoltagecalculatedbyusingvoltagesVCP1andVCP2.Theoutputvoltagesofthreepointsshowthatthecontactoccursataloadof0.2N.Thetouchpadshowsahysteresiserrorrateofabout11%anduniformityerrorrateofabout3%.Intheregionbelow1N,thesensitivityisapproximately0.12V/N,andabove1N,thesensitivityisroughly0.02V/N.However,thenonlinearityintheregionbelow1Nis36.5%.Intheregionabove1N,itisroughly16.3%.Theoutputvoltagesshowalmostthesamebehaviorregardlessofthecontactpositions.Figure9alsopresentstheinverseofoutputvoltageVatthreepointstoshowthebehavioroftheoutputvoltageaccordingtotheincreasingcontactload.Fig.9.Loadingandunloadingresponseoftouchpadatthreepoints.第12页6.ConclusionInthispaper,wehaveproposedatouchpadthatcanmeasurecontactlocationandforcesimultaneously.Weaveusedacontact-resistance-typeforcesensorusingtworesistivelayers.Thetouchinputdevicehasfoursignallines.Itis40mminwidthand40mminlength.Thedeviationerrorofthecontactlocationwasapproximately4mmconsideringtheevaluationresultsofcontactlocationsinx-axisandy-axisdirections.Theforcesensitivityofthetouchpadisobtainedusingacalibrationsetup.Intheregionbelow1N,thesensitivitywasapproximately0.12V/N.Above1N,thesensitivitywasroughly0.02V/N.Theforceresponseshowedahysteresiserrorrateofabout11%anduniformityerrorrateofabout3%.Wehaveconfirmedthatthetouchpadisapplicableasaouchinputdeviceforcontactlocationandforcesensing.第13页中文翻译稿触摸板的力量和位置传感本文提出的基于触摸板的接触电阻式力传感器的制作模型的设计。触摸屏作为一个触摸输入设备，能够同时感知接触位置和接触力。触摸板的宽是40毫米和长是40毫米。触摸板是通过使用一个简单的丝网印刷技术来制造。接触位置是由具有称重传感器和三轴阶段的标定装置来评价的。位置误差是相对于x轴和y轴方向约为4毫米。制备的触控板的强迫响应是通过加载和卸载探针得到的三点。触摸板可以检测从0N到2N负载。触摸板显示约11%的滞后误差率和大约3%的均匀性的误差率。关键词：触摸输入设备，触摸屏，触摸板，接触电阻式力传感器，接触力，接触的位置。1.简介最近，个人电脑，移动电话，和其他多媒体设备已经发展成为用户友好的即使他们包括越来越多的功能。此外，它们的结构和尺寸越来越小，小型化。因此，用户需要一个更大的各种用户友好的输入设备，如鼠标，键盘，触摸板，触摸屏。特别是，由于其局限性的大小触摸屏和触摸板在移动电话和MP3播放器方面发展迅速。自20世纪70年代其用于军事，触摸屏已经成为移动设备的主要输入接口的一个重要组成部分。在1994年Glidepoint商业化后，苹果采用触摸屏作为其权力书的笔记本电脑的输入设备。触摸板主要是通过改善其设计和传感器来得到发展的。同时，由于苹果公司推出的智能手机，iPhone，用户界面（UI）被认为是可以吸引用户的重要参数。然而，大多数触摸输入设备，如触摸板和触摸屏，当用户触摸装置可以测量其接触位置。从用户的观点来看，即将到来的触摸板和触摸屏需要的力元件并且，如果可能的话，接触位置。如果一个输入装置可以通过接触和联系感知力和位置，一些手机制造商可以释放多种可用于通信和游戏移动设备。特别是，当一个人的手指与设备接触时，力的强度可以作为包含游戏机和手机一种新的功能。使用力/压力传感器研究接触的位置和力已在机器人和医疗器械1-8领域进行了。在一个基于力传感器的阵列触觉传感器的情况下，使用的输入和输出信号线9同时获得接触的位置和力第14页的扫描过程是很容易的。然而，应用于触觉传感器具有许多信号线的手机的移动设备是困难的由于其手机大小的限制。因此，有必要降低应用触觉传感器的移动电话的信号线的数量。另一方面，在现有的电容式触控板的情况下，它也能同时感知位置和力。然而，力本质上是通过改变接触面积，使人类的手指与设备接触而造成的。因此，它感知一支笔的力量是不容易的因为其接触面积不相对于触摸变化。此外，电容式触摸板需要有关单元的传感器阵列来获取位置和力的许多信号线。本文提出了一种不透明的输入一个类似笔记本电脑的触摸板采用接触电阻式力传感器装置，可同时检测接触的位置和力。2.触摸板的设计图1（a）通过接触电阻式力传感器同时获得接触的位置和力来显示示意图的触摸板。该传感器具有信号线的两个电阻层和四导电层。该设计类似于一个四线电阻式触摸屏。当上部基板内的一个接触点（CP），例如，CP1，是由一个手指或笔在一定的压力下压制时，上板基板的电阻层与下基片内电阻层的CP2接触。图1（a）使用接触电阻式力传感器的触摸板的原理图和（b）它的等效电路由四线电阻和接触电阻组成。当一个电阻层连接到两个导电层，如银，铜层，电阻层在x轴和y轴方向成为一个一维的电阻。因此，上、下基板层具有四个电极：a，b，c，d。图1（b）显示的X轴和Y轴分量的线电阻和接触电阻之间的CPS。近电极X线电阻是Rx1和Rx2。同时，Y轴附近的电极线电阻，Ry1和Ry2。接触电阻通过CPS是归零，这是由加载条件下的一个接触面积的变化引起的。通过测量在X轴和Y轴方向的接触电阻和各线电阻得到接触的位置和力。为了测量X轴定位组件，输入电压（Vin）应用于电极B，和电极a设置接地。然后，输出电压（Vout）的测量是在任一电极c或d。因此，输出电压Vout，x可以表示为第15页在Y轴组件的情况下，输入电压被施加到电极d，电极c设置接地。输出电压Vout，Y的测量是在任一电极a或b表达为接触载荷可以通过使用CPCP1和2之间的接触电阻Rz获得。输入电压被施加到电极a，电极c设置接地。输出电压VCP1是在电极d是开放时通过测量电极b得到的。以类似的方式，输出电压VCP2是当其他信号线b是开放时通过信号线d而得到的。该VCP1和VCP2输出电压可以表示为最后，VCP1和VCP2之间的电压差V是通过下式获得图2显示了一个触摸板设计同时测量接触的位置和力的设计。输入设备宽是40毫米和长是40毫米的。点的间隔需要保持上、下基板层之间的距离。点间隔（直径是0.3毫米和高度是0.01毫米）上的电阻层形成的下基板。之间的间隔距离为2.5毫米。第16页图2有电阻层和间隔点触控板的原理图设计3.触摸板的制造图3给出一个触摸板采用丝印工艺制作的过程。我们使用50M聚对苯二甲酸乙二醇酯薄膜作为传感器的基片（图3（a）。在加工之前，这层薄膜是在丙酮中浸泡10分钟，去除有机碎屑。其次，薄膜除去丙酮甲醇冲洗5分钟。甲醇和去离子水冲洗。然后，将膜干燥。导电层，电阻层，和间隔点涂用丝网印刷技术。我们使用一种有限的半自动印刷机的线，它使用一个正方形的边式刮刀。硬胶刮的是邵氏硬度聚氨酯材料（HS）70硬度因为要涂墨水到屏幕上的面具。导电层是用银墨在冲洗膜形成（CMI有限公司）（图3（b）。银打印网格为300网格尺寸。涂膜需要放在室温下30分钟。接下来，将膜固化在烤箱中140C下10分钟。用碳糊电阻层（CMI有限公司）涂一次（图3（c）。打印网格尺寸是250网格。涂膜固化在烤箱中150下，60分钟被后放在室温下30分钟。接着，使用UV油墨（CMI有限公司）点的间隔形成在他的电阻层（图3（d）。网眼的尺寸为325网格。经涂覆的UV油墨固化的UV光系统，持续1分钟。我们使用双涂覆粘合带粘结上、下基板（图3（e）。图4显示了一个采用的制造工艺的触摸板。由于导电层涂覆宽度4毫米，该触摸板的有效面积为36毫米36毫米。由于碳墨的表面电阻率约2M，在导电层之间的线阻抗约1.9M。第17页图3接触的位置和力传感器的触摸板的制造工艺图4制作的触摸板（40毫米宽和40毫米长）4.评估设置我们使用一个评价系统获得在静载荷作用下的动力响应的一个触摸屏的位置偏差。图5显示了评价系统具有三轴负载传感器和三轴线性阶段。垂直分力，FZ（三轴力传感器），用于测量触摸板的动力响应。其他组件，Fx，Fy，用于检查加载和卸载条件下的触第18页摸板和负载单元之间的一致性。一个负载单元的容量是在Fx，Fy，和Fz组件50N。三轴线性阶段可以在x轴和y轴方向移动，使翻译阶段应用在Z轴方向的一些负载。我们用直径1毫米的探头来评估接触位置的分辨率。在一个大的探头的情况下，测量位置精确的分辨率是不容易的，分辨率的误差趋于比探头的尺寸比例大。在静荷载动力响应的情况下，另一个探头的直径为图5校准设置有三轴负载传感器和三轴线性图6根据接触位置变化测量阶段评价接触的位置和力触摸板的灵敏输出电压电路：（a）x轴方度。向和y轴方向（b）10mm。在Z轴方向的一个线性阶段的运动范围是50毫米，和它的位置分辨率为1M。校准设置得到负载的传感器信号和控制的线性阶段的运动保持载荷。该放大器（科仪有限公司，模型2310）放大的力信号和发送到数据采集板（美国国家仪器有限公司，新型PXI-6251）。软件，LabVIEW，被应用于控制线性阶段和获取传感器的信号。4.1.一个触摸板的偏差评估触摸板是在x轴方向阶段测量的接触位置的偏差相关。图6（a