光刻工艺培训--喷胶状态调整 PPT课件

Dispenseadjustment panc 1 ResistDispenseParameter CoatingprocessparameterPumpAir operatorvalveResist 2 April20 CoatingProcessParameter ResistDispenseResistTemperatureResistDispensesystemPumptype pneumatic motordriven single doublestage ResistFilter material type poresize Dispenseline length diameter material nozzlediameter ResistDispenseResistDispenseVolumeResistDispenseRateDispensePumpadjustmentMotorFlangeTemperature 3 April20 ResistTemperature Oldstylewaterjacked Newstylewaterjacked Resisttemperaturemeasurementatnozzleblockpossible Resisttemperaturemeasurementatnozzleblockshowslargeerror 4 April20 ResistTemperature ResistTemperatureinfluenceonuniformitymajorparametertoadjustcoatinguniformityrecommendedsettingrange 21 0 24 0 CbesttemperaturesofdifferentResistsatsametrackshouldbeascloseaspossible temperaturesettlingtimebetweentworecipes insidewaterjackedarejust7ccofresist nomultipledummydispensebeforeprocessstart ResisttemperatureCalibrationcalibrationneedstobedoneregularly every3 6month watchforrightmeasurementposition oldandnewstyle ResistDispenseAlowresisttemperaturewillcauseanadditionalsuckbackduetocontractionofresist adjustlowinitialsuckback AhighResisttemperaturewillcauseadrippingofResistduetoexpansionofResist adjustahighinitialsuckback 5 April20 ResistDispenseSystem Pumptype PneumaticdrivenPumpsalreadysincelongtimeinusenotforlowdispensevolumeslimiteddispensevolumerepeatabilitynogooddispenseratecontrollowinvestmentcostsIWAKISBpumpMILLIPOREWCDS WCDPpumpIDIPump StepperMotordrivenPumpscancontrollowdispensevolumegoodtoexcellentdispensevolumerepeatabilitycancontrollowdispenserateshighinvestmentcostIWAKIFT100 1pumpCYBOR5120pumpMILLIPOREGEN2MILLIPOREIntelliGENTELRDSpump 6 April20 ResistDispenseSystem Pumptype SingleStagePumpsResistisdispensedthroughthefilterDispenserate filtrationratepoordispenseratecontrolhighstressontheResistDispensestartandshutoffproblemsproblemswithhighviscosityResistairventafterfilterdifficultlowrecoverytimelessexpensiveallpneumaticdrivenpumpsCYBOR5120IWAKIFT100 1 DoubleStagePumpsFirststagepumpfilterstheResistSecondstagepumpdispensesResistFiltrationrateindependentfromdispenseratelowstressontheResistexcellentdispenseratecontrol multiratepossible extendedfilterlifetimereducedmaintenancerequirementsefficientairventincludedlongrecoverytimesexpensiveMILLIPOREGEN2MILLIPOREIntelliGENMILLIPOREPhoto250TELRDS 7 April20 ResistDispenseSystem Pumptype MilliporeIntelliGEN MilliporeGEN2 MilliporeWCDS CYBOR5120 IDI400 8 April20 ResistDispenseSystem windowofoperation 9 April20 ResistDispenseSystem ResistFilter NoFiltrationforhighviscosityResistandPolyimideverylowstressdispenseLowCOO MembraneFiltertodaymostlyusedporesizeandnumberofstacksdependonapplication viscosity membranemadefromPTFE someUPE sometimeslevellingagentsfirstneedtocoverfiltersurfaceafterinstallation striationsfor24h PTFEfilterneedprewetwithsolventpriortotheusewithResist HollowFibreFilterrelativelynewonthemarkednoprewetnecessaryfiltermaterial UPEnotyettestedforallchemicalsnoexperiencewithhighviscosityResist FilterlivetimedependonusedResist typeandsupplierquality dependonusedfiltertypedependonusedPumptypecontinuous daily weeklyparticlecheckisrecommended 10 April20 ResistDispenseSystem ResistFilter SpontaneousWettabilityofTypicalPhotochemicalFilters 11 April20 ResistDispenseSystem Dispenseline Dispenselinelengthasshortaspossiblelengthinwaterjackedapp1mlimitsmaximumofapplicableResistViscosity Dispenselineinnerdiametermustfittotheappliedresistviscosityiftoosmall toolargepressuredropiftoolarge problemswithairbubblesTELstandard 3 2mm 3 0mminwaterjacked replacedamagedtubes 12 April20 ResistDispenseSystem Dispenseline Dispenselineassemblylinemustbeassembledstraightupward noupsanddowns nohorizontalloops ifpossibleshortendispenselineDispenselinematerialTELstandard ultrapurePFAResistnozzleTELstandardNozzlediameter 2 0mm1 5mmnozzlesforlowviscosityresistsapplicablewatchfornozzlecleanness dummydispense watchfornozzledamages nozzleisconsumable ifcometsonwaferfirstchecktheresistnozzle 13 April20 ResistDispenseVolume MinimumDispenseVolumetocoverthewaferandtoachieveagoodcoatinguniformitydependson wafersizeResistvolumeremainingonwaferat1 0 mthickness150mmwafer 0 016cc200mmwafer 0 028cc300mmwafer 0 063ccResistviscosityResistsolventPatterntopographyLayersurfacetensionProcessknowhowuniformityrequirementsResistpumpcapabilities CurrentlyusedDispensevolumesfor 1 mResists 14 April20 ResistDispenseVolume Drypatchcausedby toolowresistvolumetoolowdispenseratetoolowdispensespinspeedtoolowsurfacetensionofsubstratetoohighsurfacetensionofResisttoohighpatterntopography 15 April20 ResistDispenseRate DispenseRate DispenseVolume DispenseTime DispenseRatehighupsbettersurfacecoverageeasiercontrolofdispenseshutoffdownsDispensetimelowdifficulttocontroluniformityonwafer highdispensespinspeedrequired DispenseRatelowupsDispensetimehigheasiercontrolofuniformityonwaferdownsdifficulttocontroldispenseshutoffsurfacecoveragedifficult highdispensespinspeedrequired 16 April20 DispenseRate DispenseRatedependon DispensevolumevolumeischosenfirstiscalculatedfromvolumeandtimeDispensetimedispensetimeischosenaccordingtouniformityrequirementsWaferwafersizewafersurfacetensionpatterntopographyTechnicallimitationminimum lowestratewhichpumpcansupportmaximum highestratewhichpumpcansupport highestpossiblefilterpressure singlestagepumps LimitationsbytheusedResistminimum dispensesplitsintodroplets dependonthesurfacetensionoftheResist maximum higheststresswhichtheResistcanwithstand withoutcavitationsandoutgassing Resistviscosity surfacetension solventsystem 17 April20 ResistDispenseadjustment ResistDispenseParametershouldbe Adjustable parameterare normal Reproducible parameterare known Criticallyare independentofpumptype adjustmentofdispensestartadjustmentofdispenserateadjustmentofdispenseshutoffadjustmentofsuckbackvolumeadjustmentofsuckbackspeedHowtoadjustthedispense dispenseintoglasscylinderwithapp 45 angledropletatdispensestartoratdispenseendwillbeeasiervisiblevariationsindispenseratewillbevisibleusehighspeedcamera extremelyexpensive 18 April20 DispenseAdjustmentGEN2 IntelliGENpump PumpPreparationBeforefirstusefillthedispensesystemwithResist nofilterprewetnecessary usethefollowingpumpparameterforfilling DispenseVolume 6 0ccDispenseRate 1 5cc secPurgeVolume 0 2ccPurgeRate 0 5cc secVentTime 0 4secwhenthepumpisfilledprimethesystem50timeswiththefollowingparameter DispenseVolume 1 5ccDispenseRate 0 5cc secPurgeVolume 5 0ccPurgeRate 1 0cc secVentTime 2 0secpurgethesystembyrunningthefillrecipeanother50times 19 April20 DispenseAdjustmentGEN2 IntelliGENpump PumpPreparationChangeofResistemptythesystemandchangethefilteriftheoldResistisnotcompatiblewiththesolventofthenewResistemptythesystemandpurgeitfirst beforefilterchange withthethinneroftheoldresistthenemptythesystemagainandchangethefilterifthenewResistisnotcompatiblewiththethinneroftheoldResistpurgethesystemfirstwiththethinnerofthenewResistemptythesystemagainandcarryoutsameprocedureasfor firstuse Changeoffiltermakesurethatnodummydispensecanoccurchangethefilterandrunthe prime procedure50times 20 April20 DispenseAdjustmentGEN2 IntelliGENpump Ready 21 April20 DispenseAdjustmentGEN2 IntelliGENpump 1 Dispense 22 April20 DispenseAdjustmentGEN2 IntelliGENpump 2 Feed fillpump 23 April20 DispenseAdjustmentGEN2 IntelliGENpump 3 Filtration 24 April20 DispenseAdjustmentGEN2 IntelliGENpump 4 Vent 25 April20 DispenseAdjustmentGEN2 IntelliGENpump 5 Purge 26 April20 IntelliGENPumprecipe Generalsettings beforefirstusechangethefollowingfactorydefaultsettings EV 1 externalvalveused VD 0 valvedelay 0 RR 1 Recirculationrecipe 1 MM 3 multiplefixed time variablerate SA saveall NeverusethecommandDF setsallparameterbacktofactorydefaults Pumppressure 40kPaPumpvacuum 75kPa 27 April20 IntelliGENpumpassembly ResistPressure Reservoir Drain Externalvalve IntelliGENpump ResistBottle Permanentvacuumisappliedtotheoutletvalveifanexternalvalveisused 28 April20 IntelliGENpumpdispenseadjustments ExternalShut off Suck backvalve Suck backvolume Outlet Inlet Suck backvalve Shut offvalve SpeedcontrollerShut off SCvalveclose SpeedcontrollerDispensestart SCvalveopen SpeedcontrollerSuck backvelocity SCsuck back 29 April20 IntelliGENpumpdispenseadjustments DispenseStartTheSpeedcontroller dispensestart SCvalveopen hastobeealwaysfullyopen Suck backatdispensestartindicatesairbubblesindispenselineorpumpdispenserateatdispensestartisdeterminedbypressurebuildupindispenselineanddependonResistviscositylengthofdispenseline beforeandafterexternalvalve innerdiameterofdispenselinekinksorsharpbendsindispenseline mayalsobeinsidewaterjacked ifdispenserateriseupistooslowpre drippinghappensatdispensestartthisproblemcanbecorrectedby increaseddispenserateatdispensestart multiratedispense eliminationofdispenselineproblems kinks length loops airbubbles 30 April20 IntelliGENpumpdispenseadjustments Dispenseratedispensesplitsintodropletsifrateistoolow steppermotorstepsvisible dispenseratesplitsintotwopartsifrateisreducedtoostrong system swings dispenseratemaysplitintotwopartsif SCvalveopen isnotfullyopened 31 April20 IntelliGENpumpdispenseadjustments DispenseShut off Shut offtooearlypressureindispenselinestillhighshut offveryfast dropletmightberipofftheresiststreamairbubblessuckedintothenozzle Shut offtoolatepressureindispenselinealmost 0 dispenserategetsverylowanddispensesplitsintodropletsdropletremainingatnozzletip 32 April20 IntelliGENpumpdispenseadjustments DispenseShut offadjustmentfullyclosetheSuck backvolumeadjustmentbeforeadjustingtheShut offbyusingthespeedcontroller Shut off closingtheSCwilldelaytheShut off fullyopentheSCcloseitinstepsof180 untilShutofistoolateopenitinstepsof45 alwaysfixthelocknut fixingthelocknutmaychangetheadjustmentagain byusingthe Suckbackdelay parameterofpumprecipe SCvalveclose fullyopened set SB delay to0 10secdecreaseinstepsof0 01secfineadjustitinstepsof0 005sec Shut offbest 33 April20 IntelliGENpumpdispenseadjustments Suck backopenspeedcontroller suck back fullyadjust1 2mmsuck back SBvolumeccw andfixthelocknutwait5minandreadjustsuck backvolume mighthavechangedduetoinfluenceofresisttemperature closespeedcontroller suck back instepsof180 untilasuck backisoccurringdonotchangethesuck backvolumeagain ifSBoccurstooearlyitoccursduringdispenseandisthereforenotvisible finetunethetimebetweenshut offandsuck backto0 5 1 0secnevercreateanoverlayofshut offandsuck backprogrammablesuck backofpumpisnotworking 1mminnozzleequals0 003ccbutminimumprogrammableincrementis0 01cc 34 April20 IntelliGENpumpdispenseadjustments PumpFeedreloadstheresistintotheFeedPumpFeedTimesettingintherecipeisjustatimeframegiventothepump longerFeedTimedonotslowdowntherefillrate reloadrateisinfluencebyvacuumappliedtoFeedPump pumpinternalcontrol ResistviscositytubelengthanddiameterbetweenreservoirandpumpPumpVentventstheResistfilterventedvolumeisusuallysenttodrain VentispartoftheResistconsumptionnecessaryventfrequencyandtimedependonusedResist outgasing viscosity contentofsurfactants frequencyofuse fordummydispenseventfrequencyshouldbesetto 1 PumpPurgepurgesasmallamountoftheResistfromtheDispensePumpbacktothepumpinlet notpartoftheResistconsumption airbubblescreatedinfilterarepurgedout noairbubblescanreachthedispenseline consumescapacityofDispensePump 7 0cc partially shouldnotbelargerthan1 2cc 35 April20 GEN2pumprecipe Generalsettings Pumppressure 40kPaPumpvacuum 75kPa 36 April20 GEN2pumpadjustments Speedcontrolleratline 6 SCvalveclose ResistPressure Reservoir Drain GEN2pump ResistBottle 37 April20 GEN2pumpadjustments DispensestartnoadjustmentsincenoexternalvalveusedmultiratedispensenotpossiblethereforepumpneedstobeassembledascloseaspossibletothedispensenozzleallothersanaloguetoIntelliGENDispensesameasforIntelliGENsingledispenseratenomultiratepossibleDispenseShut offclosingof SCvalveclose willdelayShut offinthesamewayasatI ntelliGENpumpsincethepumpisnotusedwithanexternalvalvetheShut offcanbeadjustedtoolatebecauseofthemuchlargerdistancebetweenoutletvalveandnozzleSuck backnosuck backviaexternalvalvepossibleprogrammablesuck backofpumpisnotworking 1mminnozzleequals0 003ccbutminimumprogrammableincrementis0 01cc 38 April20 IWAKIBellowspumpadjustments PumpPreparation IWAKIF T100 1 IWAKISB Beforefirstuseprimethedispensesystemwithsolvent originalResistthinnerormajorResistsolvent neveruseAceton purgethedispensesystemwithapp 1litreofsolvent reducedispensepressureifpneumaticpumpisused sinceviscosityofsolventismuchlowerthanthoseofresist emptythesystemuptothefilter takecarethatthereservoirisreallyempty donotemptythefiltersinceitwillclogassoonasairgetsin primethedispensesystemwithResistpurgethedispensesystemwithatleast1litreofresist usemaximumpumpstroketopurgeairoutofthepumpandthedispenseline ventthefilterthoroughly 39 April20 IWAKIBellowspumpadjustments PumpPreparation IWAKIF T100 1 IWAKISB ChangeofResistemptythesystemandchangethefilteriftheoldresistisnotcompatiblewiththesolventofthenewResistemptythesystemandpurgeitfirst beforefilterchange withthethinneroftheoldresistthenemptythesystemagain changethefilterandcarryoutsameprocedureasfor firstuse Changeoffilter fast takeoutfilterwithoutdryingoutthepump makesurethatnodummydispensecanoccur emptythefilterhousing rinseitwiththinner putinthenewfilterandfillit3 4withResistthinnerreassemblethefilterhousingandpurgethedispensesystemwithabout1 2litreofResistChangeoffilter save emptythesystemandchangethefiltercarryoutsameprocedureasfor firstuse 40 April20 IWAKIBellowspumpadjustments PTFEbellows ResistPressure Reservoir Drain Externalvalve ResistBottle Filter 41 April20 IWAKIBellowspumpadjustments SteppermotorforF T100 1 PipingdiagramforIWAKIBellowspump 42 April20 IWAKIBellowspumpadjustments DispenseStartMakesurethatpumpandfilterareproperlyventedbeforeanypumpadjustmentduetothedispensethroughthefilterthepressurebuildupinthedispenselinewillbeveryslowthiscausesdropletsatdispensestartiftheexternalvalveisopenedlater byclosing SCvalveopen thepressurehasbeenbuildupalready therateriseupatdispensestartcanbeadjustediftheexternalvalveisopenedtoolatethepressureinthedispenselineisalreadyveryhigh thedispensestartswitha splash bestvisiblebydispensingintoglasscup thedelayofvalveopeningtimewillchangethedispensevolume Attentionif SCvalveopen isclosedtoomuchtheexternalvalvewillnotopen thiswilldamagethebellowsofthepump F T100 1motorwillapplyextremelyhighpressuretothesystem 43 April20 IWAKIBellowspumpadjustments dispensestartoftenlooksdifferentforseconddispenseResistpressureindispenselinereleasesovertimeResistpressureinlineisstillhighifseconddispenseisimmediateafterfirstdispense dummydispenseatlothead foradjustmentofdispensestartalwayswaitapp30secbetweentwodispensesResistpressureinlineisthushigherthusearliershut offisadjusted time Resistpressureatfilteroutlet Firstdispense predrippingaftersometimeairbubblesinsystemventfilerpurgeairoutfrompumpbyfullstroke F T100 1 filtercloggednewfilter prewetthefilterwithsolventagainoldfilter changefilterSpeedcontrollermisadjustedreadjustSC don tforgettofixlocknut Seconddispensedispense DispenseStart 44 April20 IWAKIBellowspumpadjustments DispenseShut offadjustmentMakesurethatpumpandfilterareproperlyventedbeforeanypumpadjustmentfullyclosetheSuck backvolumeadjustmentbeforeadjustingtheShut offbyusingthespeedcontroller Shut off closingtheSC A willdelaytheShut off fullyopentheSC A closeitinstepsof180 untilShut offistoolate dropletattheend openitinstepsof45 alwaysfixthelocknut fixingthelocknutmaychangetheadjustmentagain F T100 1 byusingthe AVdelaytime canjustbesetinstepsof0 1sec cannotbeusedforadjustmentofShut off 45 April20 IWAKIBellowspumpadjustments Dispenseratedispensesplitsintodropletsifrateistoolowdispenserateistoohighatdispensestartif SCvalveopen isclosedtoomuchdispenserateistoolowatdispensestartif SCvalveopen isopenedtoomuchF T100 1setinPumprecipeforMKVz 7 8CalibrationFactoractsonDispensetimesetDispenserateisnotrealdispenseratetheDispenseratemustbechangedtogetsamedispensetimeattwopumpswheretheCalibrationFactorisdifferentforACT8CalibrationFactoractsonDispenserateSBSeriesadjustedbySpeedcontroller Pumpdown checkwithStopwatch watchingthepumpsensors notthedispense useaverageofatleast5measurementsreadjustregularly 46 April20 IWAKIBellowspumpadjustments DispenseVolumeMakesurethatpumpandfilterareproperlyventedbeforeanypumpadjustmentdonotadjustvolumebeforeadjustingDispenseStart Shut offandSuck backF T100 1VolumesettinginpumprecipecalibrationwithCalibrationFactorinpumprecipe watchforDispenserateatMKVz 7 8 ifmeasuredvolumediffersmorethan 10 fromsetvaluedoublecheckpumpset upandventingwaitatleast30secbetweentwoconsecutivedispensessetMaximumPumpCapacityto8 0cc topurgeoutaircontinuously SBSeriesVolumesettingbyStrokelengthadjustmentdialcalibrationbychangingstrokelengthwaitatl