CT扩散炉培训教材(设备中英文版)ppt课件

centrotherm扩散炉设备培训equipmenttrainingofcentrothermDiffusionfurnace,1,Centrotherm扩散炉的组成,ALoadingbox推舟部分B.TGA有毒气体排放C.Heatingfurnace加热部分D.Gascabinet气柜,2,设备平面结构Equipmentplanestructure,1、CMI电脑2、Loadingbox上料箱3、Toxicgases有毒气体排放4、Furnace炉体5、Gasbox气源柜,3,Loadingbox上料箱,Baddlehead舟头,Loadingwafer加栽的硅片,4,Loadingbox上料箱,Mechanicalarm机械臂,5,Loadingbox上料箱,Storagerack1，2存储位1、2,Paddlebearing,adjustablepaddleposition碳化硅桨支座，调节桨位置,6,TGA有毒气体排放,quartzdoor石英门,Doorcylinder炉门气缸,7,Heatingfurnace炉膛,1、CMSmodule3、Powerconnectioncover2、Thermocoupleconnection4、Temperaturesensormodule,8,Gascabinet气源柜,1、Flowmeter气体流量计2、Pneumaticvalve气动阀,1,2,9,Coolingwaterinletandwatersystem冷却水系统,Coolingtothetopofthefurnacebodyandfurnace对炉膛顶部和炉体进行冷却,10,Thermostaticbath恒温槽,OnthePOCL3constanttemperatureprocess,normaltemperature20degrees对POCL3进行恒温作用，正常工艺温度20度,11,Siliconcarbidepaddle碳化硅桨,Bearingquartzandsilicon,andoutofthecarriership承载石英舟和硅片石英舟进出的载体,12,Rangedetectionalarm范围检测报警器,Detectionofarangeofwhetherobject,avoidhitboatphenomenon,thisrangecanbeadjusted检测某个范围内是否有物体，避免出现撞舟现象，些范围可进行调节,13,CommunicationNetworkOverview通信网络总览,14,Heatingsystem加热系统,15,Coolingsystem冷却系统,1、Heatexchanger2、Cooling3、Shutoffvalve,1、Cooling4、Heatexchanger2、Themainfan5、Electronicdevices3、Coolingtheairpassage,16,Alarmlampinformation,17,Operationpanel操作面板,operationpanel4keyboardTouchscreen5touchscreenbuttonUSBsocket,18,Operationpanel操作面板,TheequipmenthasthefollowingbuttonStopaction-AllthemechanicalactionofloadingboxarestopLoadingboxlighting-openclosethelampoftheloadingboxAutohandmanualswitch-Loadingandunloadingoftheoperatingsystemcanmanualoperationinanopenfeedingbox4Allowstounlock-Pressthisbutton,tounlockthecar,19,Operationpanel操作面板,1pushbuttonABCkeyboardcall4pushbuttonrightmousebuttonPushbuttontaskchange5pushbuttonshiftPushbuttonbrightnessABCkeyboardcall-callsupclossesthekeyboardonthetouchscreen,keyboardentriescanbecarriedoutdirectlyonthetouchsceen.Pushbuttontaskchange-changesataskwindowsPushbuttonbrightness-pressthisbuttontogetherwiththeshifebuttontoincreasethebrightnessofthetouchscress.Pushbuttonrightmousebuttonopensrightmousebuttoncontextmenu,pressthisbuttontogetherwiththeshiftbuttontoreducethetouchscreen.Pushbuttonshiftcallsupthesecondkeyboardlevel,pushthisbushbuttontogetherwiththerequiredfunctionbutton.,20,CMIinterfaceCMI桌面信息,Systemname7alarmcloseDatetime8notesCentrothermlogoandsystem9additionalinformationInformationbuttonCurrentdisplayareainthe10systemmodeInformationfield11connectionstatewithCECGEMSystemstatusLoginlogoutbutton,21,CMIinterfaceCMI桌面信息,Jobs4setupSystem5alarmsDatslog6help(onlinehelp),22,TheCMIuserinterfaceCMI使用者桌面,Titlebar3navigationbarCommandbar4informationfieldwithvariablefieldareas,23,简单介绍CESAR界面AbriefintroductiontoCESARinterface,上图是CESAR的界面：1.系统工艺状态2.工艺时间状态3.时间日期4.气体流量状态5.系统准备状态6.温度检测显示ThisisaCESARinterface：1.Systemprocess2.Processtime3.Timeanddate4.Gasflowstate5.Systemreadiness6.Temperaturedetectionanddisplay,24,CT操作注意事项CToperationmattersneedingattention,1.SLS处于“UP”位置时，管内有舟时不可手动进桨SLSintheUPposition,theinnertubehasaboatcannotbemanuallyintothepaddle.2.SLS处于“DOWN”位置时，桨上有舟时不得手动进舟。SLSintheDOWNposition,thepaddleisnotmanuallyintotheboatboat.3.桨上有舟时，舟不在正确位置，不准切换到自动运行模式。Oarsonaboat,theboatisnotinthecorrectposition,arenotallowedtoswitchtoautomaticrunningmode.,25,CT操作注意事项CToperationmattersneedingattention,4.进舟、退舟失败报警时，一定要检查舟的位置是否在合理的位置，才可以对报警进行复位，自动/手动的切换要谨慎，若舟不在正确位置，请手动移至正确位置后再对报警进行复位（炉门以桨的位置作为开闭标准）Intotheboat,boatbackfailurealarm,besuretochecktheboatpositionisinareasonableposition,canalarmreset,automatic/manualswitchmustbecareful,iftheshipisnotinthecorrectposition,pleasemanuallymovedtothecorrectpositionafterthealarmreset(doortopaddlepositionasopeningandclosingstandard),26,5.舟位于存储架（storage2,3）时，一定要确认存储架上的感应器有没有感应到，否则有可能导致撞舟。Whentheboatislocatedonthestoragerack(storage2,3),makesurethatthestorageracksensorissensed,otherwisemaycausethebumpedboat.6.从手动切换自动时，Grip一定要在Middle位置，否则机械臂可能因无法正常运行而报警。Frommanualautomatic,GripmustbeintheMiddleposition,ormechanicalarmmaybeduetonormaloperationandalarm.,27,7.进舟后，工艺无法运行，先确认舟在桨上的位置，以及Tube=readySLS=UPTGA=YES然后进行操作。Intheboat,technologycannotrun,makesuretheboatontheoarposition,aswellasTube=readySLS=UPTGA=YESthenoperation.,8.机械臂运动时不要上料，以免上料时抖动机械臂撞到舟。,Asmechanicalarmmovementnotfeeding,inordertoavoidfeedingtimejittermechanicalarmhittheboat。,9.单一炉管有故障时，应该及时琐闭并降温，以节约能源。,Singletubehasfault,shouldbetimelyandclosedandcooling,inordertosaveenergy.,28,常见故障,1.ProcessrecipehasterminatedwitherrorstateAC进行中的工艺以错误状态结束警报确认Tostore储存Tostoreenableunload储存并缷下Restartrecipe重新开始工艺A用于选错工艺号，手动结束工艺，重新开始新的其他工艺时进行选择B多数情况下选择此项C工艺中断需要重新进行时选择，但不建议使用，建议选择（B）ProcessrecipehasterminatedwitherrorstateACOngoingprocesstoendtheerrorstatusAlarmconfirmationTostoreTostoreenableunloadRestartrecipeAUsedthewrongprocessnumber，Handendoftheprocess，StartanewchoicewhenotherprocessesBInmostcases,choicethisoneCInterruptsneedtore-processtheselection,butnotrecommended,recommendedtochoose(B)。,29,Boatalreadyintube-Select:Process=0.Unload=1(.)选择0或1说明：当管内有舟存在时，异常排除后手动运行工艺时会出现此提示Boatalreadyintube-Select:Process=0.Unload=1(.)Description:Whenthetubehasaboatthere,theexceptionruleoutrunningprocessmanuallyafterthispromptwillappear.,30,Losthomingcheckpoti失去引导，检查位置（一般此警报会自动解除）说明：此警报会自动解除，但需要检查一下桨是否在原点位置即可LosthomingcheckpotiCheckthelocation(usuallythealarmwillbeautomaticallylifted)Description:Thisalarmwillbeautomaticallylifted,butneedCheckwhethertheoriginlocationtopaddle,31,4.Recipeabort2-processaborttocontinue:enterAB工艺退出运行终止！继续，请输入AB说明：对工艺异常结束的手动确认，然后就会出现报警Recipeabort2-processaborttocontinue:enterABDescription:Themanualconfirmationprocessends,5.Recipecouldntbestartedpleasecheckprotocolforreason!工艺不能运行，请检查原因Recipecouldntbestartedpleasecheckprotocolforreason!,32,.6.Boatsensorofgradhaschangedwithoutpermission机械手上的传感器被非允许的改动说明：机械臂在上下移动的时候，前后不能移动，若前后位置发生移动机械将被锁定，出现报警，此报警需设备人员的密码登陆在Handing对话框中的Tech模式下进行复位BoatsensorofgradhaschangedwithoutpermissionDescription:Theroboticarmtomoveupanddownwhenyoucannotmovearound,ifthelocationismovedaroundthemachinewillbelocked,analarm,thealarmequipment,personnelneedtologinapassworddialogboxintheTechHandingresetmode,33,7.Thereisalreadyanactiverecipe工艺名fromlocaltisting已有工艺在此管的工艺列表中说明：这两个报警经常出现，若能够确认此管未有工艺在运行，就必须将此管重新启动，如果有工艺运行，可以将工艺手动停止，或者等待工艺结束。Thereisalreadyanactiver