SECSI_SECSII_HSMS_GEM总结.ppt

SEMI,Cim部Cell与Module科徐宝龙,SEMI,SEMI:SemiconductorEquipmentandMaterialsInternational国际半导体设备与材料产业协会,SEMICONTENTS,EquipmentAutomationHardwareEquipmentAutomationSoftwareFacilitiesFlatPanelDisplayGasesMaterialsMicrolithographyPackagingProcessChemicalsSafetyGuidelinesSiliconMaterials&ProcessControlTraceabilitySemiconductor,EIS用到标准,SECS:SemiconductorEquipmentCommunicationStandardSECSI(E4)SECSII(E5)GEM(E30)HSMS(E37),SECSI,该标准定义了半导体工艺设备（晶片制造，加工，检测，组装，打包设备）和主机之间交换消息通信的接口。该标准包括物理连接器（9-pinor25-pin），电平信号，传输速率，以及交换消息的逻辑协议。,物理传输单位,传输10个bit，0和9是开始和结束信号，1-8bit是数据,逻辑传输单位（Block）,ReceiveEOT,1byte,Blocklength,10254byte,block,2byte,Checksum,先传输块的长度，在传输块，最后发送校验码,Block组成,DefineinE5,SECSIHeader组成,HandshakeBytes,ENQ5RequesttoSendEOT4ReadytoReceiveACK6CorrectReceptionNAK21IncorrectReception,HSMS,HIGH-SPEEDSECSMESSAGESERVICES,HSMSGeneralMessageFormat,Length=HeaderLength+MessageTextLength,FormatisspecifiedbyPType,HSMSHeader组成,HeaderByte2-3,Ptype=0,Function,HeaderByte2,HeaderByte3,W=1：reply，W=0Noreply,PType(PresentationType),0SECS-IIEncoding1127Reservedforsubsidiarystandards128255Reserved,notused,SType(SessionType),SType是一个识别该消息是HSMSDataMessage(value=0)或者其他HSMSControlMessages(other).,0DataMessage1Select.req2Select.rsp3Deselect.req4Deselect.rsp5Linktest.req6Linktest.rsp7Reject.req8(notused)9Separate.req10(notused)11127Reservedforsubsidiarystandards128255Reserved,notused,SelectStatus,DeselectStatus,RejectReasonCode,HSMSConnectionStateDiagram,NotConnection,NotSelected,Selected,Connection,T7ConnectionTimeout.,2,3,4,5,1,7,HSMS,TCP/IP,ConnectModes,SECSII,DataStructuresDataItem|VariableItem|ObjectDictionaryMessageDetail,DataStructures,0=Illegal,dataformaterror1=Onebinarylengthbyte(max=255)2=Twobinarylengthbytes(max=64k)3=Threebinarylengthbytes(max=7.99M),ItemFormatCodes,000000LIST(lengthinelements)001000Binary001001Boolean010000ASCII1010001JIS-80100102-bytecharacter2,40110008-byteinteger(signed)20110011-byteinteger(signed)0110102-byteinteger(signed)20111004-byteinteger(signed)21000008-bytefloatingpoint31001004-bytefloatingpoint31010008-byteinteger(unsigned)21010011-byteinteger(unsigned)1010102-byteinteger(unsigned)21011004-byteinteger(unsigned)2,example,a.binary10101010.00100001Item,binary,1lengthbyte000000011bytelong10101010databyteb.“ABC”01000001ItemASCII,1lengthbyte00000011Threebyteslong01000001ASCIIA01000010ASCIIB01000011ASCIICc.Anitemcontainsthreebinarynumbersin2-bytesignedintegerform.01101001Item,2-byteintegers000000102bytestotal(2/2=1integers)xxxxxxxxMSBytenumberxxxxxxxxxLSBytenumberx,GEM,GENERICMODELFORCOMMUNICATIONSANDCONTROLOFMANUFACTURINGEQUIPMENT该标准定义了一套通用的设备的动作以及通信功能的标准。,HarelNotation,State,ORSubstates,ANDSubstates,Transition状态转换标志,Defaultentrypoint默认进入点,h,History历史记录,s,Select,c,Conditionalselector,CommunicationsStateDiagram,c,RS1f14,RS1f13,ECID=2,ControlStateModel,OfflineEQPcantcommunicationwithHostexceptS1F13,S1F17andS2F42.andSxFyreplyS*F0.,OffLine-OnLineneedsendS2F17Date&TimeRequestIfPTSTLRorURreportceid200203,ECID=3,ProcessingStateDiagram,LimitStateModel,DISABLED,BELOWLIMIT,NOZONE,ABOVELIMIT,C,ENABLED,StateDiagramforAlarmALIDn,AlarmClear,AlarmSet,S5F1AlarmReportSent,S5F3Enable/DisableAlarmSend(EAS),S5F103CurrentAlarmSetListRequest,transaction,TransactionDefinitionAtransactionformsthebasisforallinformationexchangesinSECS-II.Atransactionconsistsofeitheraprimarymessageforwhichnoreplyisrequested,oraprimarymessagewhichrequestsareplytogetherwithitscorrespondingsecondarymessage.Secondarymessagescannotrequestareply.SystemBytesT3TimeOutS*F0,S6F1,S9F*noReplymessage,conversation,Aconversationisaseriesofoneormorerelatedtransactionsusedtocompleteaspecifictask.ConversationTimeout(S9F13),Session,sessionarela