UpdatedocITRS

1、international technology roadmap for semiconductors2008 update overviewnotes to roadmap users-this document contains links to the 2008 update files for all itrs tables and to the index that contains all 2007 chapters. please refer to the links page.acknowledgmentsinternational roadmap committeeeurop

2、ewolfgangarden, patrickcogez, martgraef japanhidemiishiuchi, toshihikoosadakoreajootaemoon, jaesungroh, taiwanmong-songliang, carlos h. diaz, u.s.a.pushkarapte, bobdoering, paologarginitechnology working group key contributors cross twg study groupalanallan, chriscase, chishihchang, bobdoering, deni

3、sfandel, andrewkahng, harrylevinson, chrislong, shizuosawada, peterzeitzoffsystem drivers and designsatoshiakui, yoshimiasada, kenjiasai, fawzibehmann, valeriabertacco, juanantoniocarballo, doncottrell, wolfgangecker, praveenelakumanan, yoshitadafujinami, yoshiharufurui, shinjifuruno, tamotsuhiwatas

4、hi, koichiroishibashi, billjoyner, andrewkahng, masarukakimoto, haruhisakashiwagi, changkim, victorkravets, vinodmalhotra, kazuyamasu, masamimatsuzaki, mamorumukuno, katsutoshinakayama, saninassif, tomojinukiyama, isaookada, nobuhirookano, nobutoono, davidpan, toshitadasaito, jeanpierreschoellkopf,

5、lotharschrader, yahiroshiotsuki, garysmith, petervanstaa, leonstok, mikiosumitani, ryoichitomishige, hitoshitomizawa, hirokitomoshige, tadaotoyoda, kuniouchiyama, maartenvertregt, alfredwong, akihiroyamada, ichiroyamamoto, davidyehtest and test equipmentrobaitken, ken-ichianzou, davideappello, davea

6、rmstrong, rogerbarth, mikebienek, philburlison, yicai, moulichandramouli, wendychen, calvincheung, stevecomen, dennisconti, jackcourtney, koichieguchi, shawnfetterolf, yasuofujii, annegattiker, atulgoel, kazumihatayama, hisaohoribe, hirokiikeda, kojiisodono, shuichiito, sridharkannan, takuyakobayash

7、i, akitoshikumada, amitmajumdar, prasadmantri, petermaxwell, jerrymcbride, petermuhmenthaler, philnigh, yasumasanishimura, sejangoh, mikepengli, billprice, bradrobbins, paulroddy, mikerodgers, yasuosato, ulrichschoettmer, renesegers, kozaburosuzuki, tetsuotada, kentaoka, wataruuchida, jodyvanhorn, e

8、rikvolkerink, tomwilliams, kooroshzaerpoor, yervantzorianprocessintegration,devices,andstructuresyasushiakasaka, frdricboeuf, joebrewer, jameschung, teddellin, michaelduane, takahisaeimori, toshirohiramoto, dighhisamoto, atsushihori, jimhutchby, jiroida, kiyotakaimai, hirofumiinoue, naokikasai, tzuj

9、aeking, michihikomifuji, takashinakamura, takning, hidekazuoda, mototsuguogura, markrodder, shizuosawada, kentaroshibahara, thomasskotnicki, toshihirosugii, yoshitakatadaki, yukiotagawa, shinichitakagi, yasuhirotakeda, tetsutanaka, luanc.tran, wilmantsai, qixiang, geoffreyyeap, makotoyoshimi, peterz

10、eitzoffradiofrequencyandanalog/mixed-signaltechnologiesforwirelesscommunicationspascalancey, joostvanbeek, herberts.bennett, bobbybrar, pascalchevalier, davidchow, juliocosta, stefaandecoutere, masanorifujisawa, erwinhijzen, dighhisamoto, davehoward, w.margarethuang, anthonya.immorlica, andrejansman

11、, snezanajenei, jayjohn, alvinjoseph, takahirokamei, tomkazior, yukihirokiyota, sebastianliau, ginkouma, melmiller, janerikmueller, hansuoh, jackpekarik, marcoracanelli, bernardsautreuil, hisashi(sam)shichijo, albertwang, dawnwang, chuckweitzel, geoffreyyeap, peterzampardi, binzhao, herbertziratheme

12、rging research deviceshiroyukiakinaga, tetsuyaasai, yujiawano, georgebourianoff, michelbrillouet, joebrewer, johncarruthers, ralphcavin, uinchung, philippecoronel, kristinde meyer, erikdebenedictis, simondelonibus, mikeforshaw, michaelfrank, akirafujiwara, christiangamrat, mikegarner, danhammerstrom

13、, tsuyoshihasegawa, shigenorihayashi, danherr, mutsuohidaka, toshirohiramoto, jimhutchby, yasuoinoue, adrianionescu, koheiitoh, kiyoshikawabata, seiichirokawamura, rickkiehl, tsujaeking liu, atsuhirokinoshita, hiroshikotaki, netykrishna, zorankrivokapic, philkuekes, loulome, hiroshimizuta, kwokng, w

14、eixinni , fumiyukinihey, dmitrinikonov, takning, ferdinandpeper, muraliramachandran, lotharrisch, daveroberts, sadasshankar, kentaroshibahara, kaushalsingh, thomasskotnicki, satoshisugahara, shinichitakagi, luantran, kenuchida, yasuowada, rainerwaser, jeffwelser, franswidershoven, philipwong, kojiro

15、yagami, davidyeh, inseokyeo, inkyoo, makotoyoshimi, peterzeitzoff, yuegangzhang, victorzhimovemerging research materialshiroakinaga, robertd.allen, nobuoaoi, koyuasai, yujiawano, danielcamillebensahel, chuckblack, thomasbjornholm, ageethbol, billbottoms, georgebourianoff, alexbratkovski, marieburnha

16、m, williambutler, johncarruthers, zhihongchen, rinncleavelin, reedcontent, hongjiedai, joedesimone, jeandijon, terryfrancis, satoshifujimura, c.michaelgarner, avikghosh, emmanuelgiannelis, michaelgoldstein, joegordon, greghagashi, jamesb.hannon, craighawker, roberthelms, rudihendel, danielherr, susa

17、nholl, haroldhosack, jimhutchby, saoriishizu, koheiito, jamesjewett, antoinekahn, sergiekalinin, tedkamins, takashikariya, masashikawaski, steveknight, gertjankoster, rogerlake, louislome, allanmacdonald, francoismartin, erikomatsui, fumihiromatsukura, robertd.miller, andrewmillis, yoshiyukimiyamoto

18、, christopherb.murray, paulnealey, wexinni, fumiyukinihey, dmitrinikonov, yoshionishi, chrisober, junichionodera, brianraley, ramamoorthyramesh, nachiketraravikar, markreed, curtrichter, daveroberts, francesross, tadashisakai, larssamuelson, mitusrusato, johnhenryscott, farhangshadman, sadasivanshan

19、kar, atsushishiota, reyessierra, kaushalk.singh, susannestemmer, naoyukisugiyama, kokitamura, yasuhidetomioka, evgenytsymbal, emanueltutuc, kenuchida, johnunguris, bertvermiere, yasuowada, vijaywakharkar, kangwang, rainerwaser, stanleywilliams, c.p.wong, h.s.philipwong, walterworth, hiroshiyamaguchi

20、, toruyamaguchi, inkyeongyoo, victorzhirnovfrontendprocesseskhaledahmed, mauroalessandri, michaelalles, luisaparicio, leoarcher, amulyaathayde, souvikbanerjee, joelbarnett, twanbearda, meridithbeebe, ivan(skip)berry, fredericboeuf, billbowers, ianbrown, arifinbudihardio, mayankt.bulsara, jeffbutterb

21、augh, georgek.celler, cetincetinkaya, juanitachambers, markchang, victorchia, lisacheung, chinchengchien, philclark, luigicolumbo, jeffreycross, michaelcurrent, adriendanel, carlosh.diaz, anthony(tony)dip, brucedoris, roxannedulas, laszlofabry, jefffarber, suefelch, grahamfisher, hideakifujiwara, no

22、buofujiwara, nicholafuller, glenngale, ernstgaulhofer, gabegebara, mikegoldstein, hansgossmann, yujigoto, christianegottschalk, dineshc.gupta, aomarhalimaoui, qingyuanhan, dickhockett, andrewhoff, yoshimasahorii, ronhoyer, makaremhussein, huangtsunghwang, kojiizunome, rajjammy, ravikanjolia, bruceke

23、llerman, simonkirk, briankirkpatrick, hiroshikitajima, martinknotter, danielkoos, tomkropewnicki, larrylarson, jefflauerhaas, kuntacklee, tomlii, honglin, minglin, lewisliu, shihhsinlo, tommckenna, paulmertens, ichiromizushima, jimmoreland, paulmorgan, wolfgangmueller, brianmurphy, anthonymuscat, to

24、shionagata, touficnajia, sadaonakajima, yasuonara, masaakiniwa, farannouri, atsushiogura, toshihideohgata, hiroshioji, carlosburn, jingoopark, friedrichpassek, ericpersson, darrylpeters, gerdpfeiffer, francescopipia, noelpoduje, jagdishprasad, krishnaswamyramkumar, rickreidy, karenreinhardt, hwasung

25、rhee, jaesungroh, gundusabde, akirasakai, thomasschwarze tomseidel, architasengupta, jimshen, wolfgangsievert, stephensilverman, gregsmith, chrissparks, bobstandley, chrisstapelmann, singpintay, honghsiangtsai, hsinghuangtseng, hidetsuguuchida, stevenverhaverbeke, peterwagner, hitoshiwakabayashi, mi

26、kewalden, masaharuwatanabe, neilweaver, tedwhite, rickwise, hanxulithographywillconley, kevincummings, nigelfarrar, theodorefedynyshyn, genefuller, janicegolda, georgegomba, isamuhanyu, naoyahayashi, scotthector, danherr, iwaohigashikawa, masaomikameyama, keishirokurihara, davidkyser, michaellercel,

27、 harrylevinson, yuanshengma, scottmackay, susumumori, shigerumoriya, yasushiohkubo, shinjiokazaki, yoshimitsuokuda, junichionodera, ericpanning, conniereed, mordechairothschild, masarusasago, kazuyukisuko, takashitaguchi, hidehitotanaka, tsuneoterasawa, yoshihitotodokoro, walttrybula, takayukiuchiya

28、ma, maurovasconi, keijiwada, philware, johnwiesner, grantwillson, masakiyamabe, yuichiyamada, atsukoyamaguchi, tadayukiyamaguchi, tetsuiyamaguchi, larryzurbrickinterconnectshuheiamakawa, nobuoaoi, sitaramarkalgud, lucillearnaud, mandeepbamal, kojiban, hansjoachimbarth, ericbeyne, christophercase, ro

29、bincheung, alexisfarcy, paulfeeney, bobgeffken, masayukihiroi, haroldhosack, yasushiigarashi, masayoshiimai, sibumkim, maurokobrinski, scottlist, j.d.luttmer, mikemills, azadnaeemi, nsnagaraj, tomojinakamura, yuichinakao, eiichinishimura, akiraouchi, wernerpalmer, rickreidy, hidekishibata, larrysmit

30、h, michelestucchi, katsuhikotokushige, thomastoms, manabutsujimura, kazuyoshiueno, detlefweber, osamuyamazaki, c.h.yufactoryintegrationmahmoudaghel, hiroyukiakimori, jimammenheuser, robertatherthon, mohammadavishan, danielbabbs, robertbachrach, mariefrancebernard, josefbichlmeier, davidbouldin, mich

31、aelbufano, hugochang, jonathanchang, shichungchang, alchasey, allanchen, argonchen, phchen, thomaschen, ivanchou, marschou, yonchou, ericchristensen, hiroyukichuma, kandicollier, blainecrandell, jeanfrancoisdelbes, rondenison, eddobson, hansmartindudenhausen, klauseberhardt, masaruegami, daveegglest

32、on, ericenglhardt, neilfisher, lenfoster, terryfrancis, masazumifukushima, ashwinghatalia, detlevglueen, barbaragoldstein, tongovaarts, ariehgreenberg, davegross, mutazhaddadin, svenhahn, martinhaller, chungsoohan, clintharris, masahirohasegawa, parrishawkins, haraldheinrich, larryhennessy, donaldhi

33、cks, toshiyahirai, michiohonma, yasutakahorii, cjhuang, royhunter, takeshiikeda, junjiiwasaki, manijanakiram, tomjefferson, melvinjung, kazuhirokakizaki, franklinkalk, nobuokanamori, atsuyakanoh, atsuhikokato, shigerukobayashi, shoichikodama, k.t.kuo, toddlasater, yclee, yashianli, spanlu, tommarian

34、o, donmartin, lesmashall, billmiller, davemiller, kazutakamishima, akiramitsui, ryoujimori, kazuhiromorimoto, jamesmorrison, jamesmoyne, eckhardmller, donmyers, seiyanakagawa, hidekinakajima, seiichinakazawa, philnaughton, kenjironawa, andreasneuber, takayukinishimura, richardoechsner, shuzoohshio,

35、dougoler, masashiomori, yasuoonodera, mikiootani, c.h.park, seorapark, s.h.park, fernandizpatrick, mikepatterson, willperakis, devpillai, scottpugh, adrianpyke, gopalrao, joereiss, ralphrichardson, lancerist, georgroeder, clausschneider, mikeschwartz, marlinshopbell, courtskinner, arniesteinman, dan

36、stevens, shigerusuga, keisukesuzuki, aboltaghizadeh, junichitakeuchi, hiromichitani, keisuketanimoto, naritoshitsuzuki, toshiyukiuchino, kensukeuriga, krvadivazhagu, bradvaneck, joostvanherk, philippevialletelle, tikarawada, alanweber, harveywohlwend, rexwright, bevanwu, hiromiyajima, makotoyamamoto

37、assemblyandpackagingjosephadam, berndappelt, richardarnold, muhannads.bakir, souvikbanerjee, stevebezuk, mariobolanos, w.r.bottoms, chishihchang, clintonchao, carlchen, williamchen, sonjincho, bobchylak, kishordesai, michelgarnier, stevegreathouse, georgeharman, shuhyaharuguchi, ryoharutaharuta, har

38、oldhosack, mikehung, johnhunt, hisaokasuga, namseogkim, michitakakimura, takanorikubo, choonheunglee, rickyswlee, rongshenlee, sebastianliau, weichunglo, abhaymaheshwan, debendramallik, masaomatsuura, leimercado, stanmihelcic, hirofuminakajima, keithnewman, luunguyen, masashiotsuka, richardf.otte, b

39、obpfahl, gillespoupon, klauspressel, charlesreynolds, charlesrichardson, berndroemer, coentak, takashitakata, shigeyukiueda, shojiuegaki, ryosukeusui, henryutsunomiya, jameswilcox, maxjuergenwolf, jiexue, zhipingyang, eijiyoshidaenvironment,safety,andhealthjunichiaoyama, jamesbeasley, lauriebeu, han

40、speterbipp, reedcontent, tomdiamond, johnharland, davidharman, bobhelms, georgehoshi, stanhughes, shigehito ibuka, jimjewett, bruceklafter, joeylu, edmccarthy, lauramedicino, michaelmocella, kochunmou, philnaughton, takayukioogoshi, brianraley, jeffreysczechowski, farhangshadman, mikesherman, harryt

41、hewissen, tetsutomine, timwooldridge, walterworthyieldenhancementrajatagrawal, scottanderson, hyunchulbaek, davidblackford, andrewbomber, traceyboswell, markcamenzind, jillcard, jancavelaars, c.h.chang, jeffchapman, chanyuanchen, uricho, jamess.clarke, scottcovington, markcrockett , dirkdevries, joh

42、ndegenova, jamesdougan, dianedougherty, janiceedler, francoisfinck, frankflowers, danfuchs, takashifutatsuki, barrygotlinsky, jeffreyhanson, allysonhartzell, takahikohashidzume, teruyukihayashi, robhenderson, benoithirschberger, christophhocke, kazuhirohonda, jimhuang, stphanehubac, stevehues, masak

43、azuichikawa, masahikoikeno, francescailluzzi, billyjones, keithkerwin, katsunobukitami, isaokojima, johnkurowski, sumiokuwabara, sangkyupark, boblatimer, slavalibman, chrislong, lukelovejoy, michaellurie, stevenma , koseimatsumoto, jamesmcandrew, lenmei, yokomiyazaki , fumiomizuno, williammoore, chr

44、ismuller, jonathanm.myers, yoshikazunakagawa, yoshinorinagatsuka, andreasneuber, kazuonishihagi, andreasnutsch, josephosullivan, akiraokamoto, michaelotto, takanoriozawa, kevinpate, dilippatel, lotharpfitzner, larryrabellino, dieterrathei, j.ritchison, daveroberts, danrodier, biswanathroy, koichiros

45、aga, koichisakurai, tonyschleisman, sarahschoen, hisaharuseita, kevinsequin, ryushioda, yoshimishiramizu, aaronshupp, drewsinha, terrystange, valstradzs, yoshitakatatsumoto, edterrell, inesthurner, barttillotson, stephentoebes, jimmytseng, takahirotsuchiya, kentsugane, rickudischas, tingswang, jianw

46、ei, danwilcox, hubertwinzig, c.s.yang, dimitryznamenskymetrologyjohnallgair, chasarchie, billbanke, meredithbeebe, benbunday, soobokchin, hyunmocho, alaindiebold, mikegarner, danherr, thomashingst, richardhockett, kazuhirohonda, masakazuichikawa, masahikoikeno, eiichikawamura, chulhongkim, steveknig

47、ht, mariokobrinsky, isaokojima, sumiokuwabara, jackmartinez, fumiomizuno, yoshitomonakagawa, kazuonishihagi, akiraokamoto, georgeorji, ingridpeterson, noelpoduje, bartrijpers, j.h.shieh, sumitoshimizu, atsushisomeya, vladimirukraintsev, bradvaneck, victorvartanian, maurovasconi, andrasvladar, yuichi

48、royamazakimodelingandsimulationdlfaemmer, nobutoshiaoki, susumuasada, augustobenvenuti, ingobork, michang, jaehoonchoi, wonyoungchung, andekeersgieter, wolfgangdemmerle, rolandgull, hirokazuhayashi, berthuizing, naokiizumi, hervejaouen, jongminkim, mitsunorikimura, tatsuyakunikiyo, erasmuslanger, gi

49、lleslecarval, wilfriedlerch, jrgenlorenz, t.c.lu, rainerminixhofer, mitikomiuramattausch, wolfgangmolzer, victormoroz, chandramouli, mitsutoshinakamura, seijiogata, hwasikpark, nobuyukisano, shigeosatoh, yimingsheu, hyungsoonshin, walttrybula, hiroyukiumimoto, tetsunoriwada, c.s.yehregional support

50、teamswe acknowledge and thank the regional teams for their support: europekoenigswinter teamjapannoborufurukawa koreabaekeunjun, jae-minjun, in-heejung, j.w.kotaiwancelia shihusayumikotakamori, lindawilsonintel meeting support teambarbarapebworthismitomabell, michiohonma, bradvaneck, sematechmariogo

51、nzales, donnatowery semi north america agnescobar, patgardner, annamorais, maritepantangco siajudyajifurodgers, jasonwebb, robinwebbtable of contentsoverview1special section: energy in the itrs2overall roadmap technology characteristics 2008 update4summary4update notes42008 update: working group sum

52、maries9system drivers and design summary9test and test equipment21process integration, devices, and structures23radiofrequencyandanalog/mixed-signaltechnologiesforwirelesscommunications26emerging research devices27emerging research materials32front end processes33lithography36difficult challenges36l

53、ithography technology requirements37interconnect38factory integration41assembly and packaging44environment, safety, and health47yield enhancement50metrology53modeling and simulation55glossary 2008 ortc update58appendixitrs tables listing65list of tablestable aimprovement trends for ics enabled by fe

54、ature scaling1table sysd2soc consumer driver design productivity trends-updated10table desn1overall design technology challenges15table desn3correspondence between system-level design requirements and solutions18table tst1summary of key test drivers, challenges, and opportunities22table pids1aproces

55、s integration difficult challengesnear-term years24table pids1bprocess integration difficult challengeslong-term years25table erd1workshops and forum conducted by erd/erm working groups in 2008-2009.27table fep1front end processes difficult challenges34table lith2lithography difficult challenges36table intc1interconnect difficult challenges-updated39table fac1afactory integration