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1、9/7/20211chemical hygiene planchemical hygiene plansafety manualsafety manualbob hamiltonbob at 9/7/20212#1 ruleno one may work alone in the nanolab!failure to follow rules can result in suspension of lab privileges.will be warned if logging in alone, or if logging out would leave s

2、omeone alone.can find who is in the lab through mercuryweb.during non-staff hours, confirm presence of another lab member.9/7/20213safety test and quizpassing the safety test qualifies a nanolab member to work in the nanolab. qualified on “nanolab” and virtual equipment “chp”passing an annual, onlin

3、e safety quiz is required to renew membership. lab members receive an automatic email reminder when your safety quiz is due.revisions to chemical hygiene plan are posted in revision history and should be regularly reviewed:9/7/20214telephone system informationthe laboratory has an independent teleph

4、one system:you cannot dial campus numbers with only 5 digits.you can dial lab numbers with only 3 digits.use “all call” to page staff or other members in the lab.during staff hours dial “0” to reach the nanolab officeyou must dial “9” to dial an outside number:both “9 911 and 911 will reach an emerg

5、ency operator.for emergencies dial 9-1-1 from any lab phone.if you use your cellular phone, call campus police at 510-642-33339/7/202159/7/20216emergency responsein event of fire:pull a red fire alarm pull station.pull a blue hazmat alarm pull station.evacuate the building.in event of medical emerge

6、ncy:call 911 if life threatening.visit tang center for minor injuries. if tang center closed, the trauma center at alta bates hospital on ashby and telegraph is at all hours.in event of flooding or utility problem:contact staff.shutoff water supply if you can identify the source.if there is a non-na

7、nolab building issue:contact campus hotline at 510-642-1032.follow up with call to building manager domenico carmagno at 510-502-6025.if you call an emergency phone number on left, follow-up with a call to a number on right.9/7/20217blue hazmat pull stations are located at every emergency exit and a

8、t several locations throughout the lab. lab members shoulduse these pulls when they believe the lab should be evacuated:- hazmat activates blue lights and audible alarm.- hazmat seals all hazardous gases.- hazmat notifies a 24 hour alarm company. that then contacts laboratory staff.- hazmat does not

9、 call 911.- if blue light is flashing upon arrival, you may not enter the lab.at each lab entrance is a firefighter restricted“break glass” emergency ventilation pull station. this station turns off air recirculation and putsthe lab in a state of maximum exhaust.lab members are never allowed to acti

10、vate this pull station!blue hazmat evacuation pulls9/7/20218nanolab evacuation procedure secure your process. as you proceed to a blue emergency exit door ask other lab members to follow. exit the building. if after hours, bring a phone list from the exit door. the assembly area for an emergency exi

11、t from the nanolab is ne of the hearst ave stairwell. the assembly area for sdh is to the west of the qual comm caf remain available to pass on details you have about events that lead to an evacuation. such information is useful. 9/7/20219blue strobe lightsif the blue strobe light is flashing you mu

12、st evacuate the lab. this indicates a potential or real hazardous condition.exit the nanolab using the emergency exit doors. all such doors are painted blue. (all doors painted blue are emergency exit doors).do not exit the lab using the main entrance doors unless absolutely necessary. a blue strobe

13、 is located just inside the lobby doors at ceiling level. if you arrive at these doors and see this light flashing do not enter the nanolab.if you evacuate the lab and have information about the cause of the event please get in touch with a nanolab staff.a blue strobe flashing indicates is a localiz

14、ed event. it does not automatically summon the fire department or police. you do not have to leave sdh.you may re-enter the nanolab once the cause of the is known and the alarm is acknowledged - lights off and horns silenced.9/7/202110nanolab assembly area9/7/202111sdh building & nanolab office emer

15、gency assembly area x119/7/202112clean gowning proper attire requires before entering cleanroom: goggles, bouffant cap, nitrile gloves, shoe covers, gown, boot covers.safety glasses must be worn at all times! safety glasses must comply with osha standard: 1910.133 prescription safety glasses availab

16、le through uc optometry department contact lenses discouraged: they can trap abrasive chemicals next to eyes.no sandals, open toe shoes, hi-heels or bare feet. shorts allowed under full coverall suits.cleanroom face mask is not a safety device!9/7/202114general laboratory practicesgeneral laboratory

17、 practices walk, do not run while in the lab. food or drinks are not allowed in the nanolab. cellular phone use is permitted in gowning area and main lab aisle, along west-windows. use of music players is allowed only in the gowning area only.visitors are allowed on by pre-approval. request permissi

18、on request via: visitor at always remove your gloves as you exit the laboratory. it is recommended lab users wash their hands after leaving the nanolab or other campus labs.9/7/202115the laboratory is equipped with ten safety shower/eyewash systems. five of these are sited

19、in fully-equipped safety stations located between bays.each safety station is equipped with:1. safety shower2. eyewash3. first aid kit4. chemical spill clean up kit5. hf burn paste and ph test strips* two safety stations are equipped with defibrillatorseyewash, showers, safety stationseyewash, showe

20、rs, safety stations9/7/202116use of safety stationsfirst aid:minor injuries can be treated at a safety station with a first aid kit.report all use of the first aid kit on mercury under equipment named “safety”. serious injuries require medical attention. use 911 from any phone to summon help. if a 9

21、11 call is not required lab members should seek treatment at the tang student health center during open hours or a hospital trauma center, such as alta bates emergency.all injuries requiring treatment must be reported to the nanolab office within 24 hours or, on the following monday if an injury occ

22、urs on a weekend or holiday. reports are made in person or via phone, not on-line.9/7/202117chemicals common chemicals are supplied by the nanolab. for use in nanolab only. chemicals are stored in lab member accessible labeled cabinets throughout the lab. chemicals are also stored in rolling carts u

23、nder the sinks. view available chemicals on mercury.9/7/202118special chemicals a “special chemical” is a proper name for any chemical not supplied by the nanolab. special chemicals must be approved prior to bringing them into the nanolab. approval process: obtain a material safety data sheet (msds)

24、. email msds to chemical safety officer bill flounders (bill at ) and request special chemical review. if approved, when you obtain your chemical, visit the nanolab office to obtain a red “approved special chemical” label. even if previously approved, additional purchases of the sam

25、e chemical must go through the approval process to maintain up to date chemical inventories. it is recommended that you complete the approval process prior to ordering chemical. special chemicals may require special hazardous waste disposal methods.9/7/202119transporting chemicalslab members are nev

26、er allowed in the chemical storage areas within the gas vaults, rooms 399 and 599 without staff escort or prior approval.make sure there are no open bottles of desired chemical already in the area.use safety carriers to move bottles within the nanolab.store opened standard chemicals in designated ar

27、eas near the sinks.notify staff if there is no stock of a chemical.chemical transport between levels is to be minimized:no chemicals are allowed in the lab passenger elevator.always use bottle carriers in the stairs or the chemical “dumb waiter”.199/7/202120chemical transport“dumb waiter”9/7/202121w

28、orking with chemicals all wet chemical work must be performed at a nanolab sink.: you must wear protective equipment (ppe) when working with any chemicals: chemically resistant gloves, face shield & apron.you must wear chemically-rated gloves, chemical resistant apron and a face shield when working

29、with any chemicals. the only exception to this rule is the tri-polymer chemically resistant gloves are not required when handling small amber bottles of photoresist.9/7/202122working with chemicals respirators are not required when working with standard or approved special chemicals at nanolab sinks

30、. nanolab sinks are annually certified as fume hoods. if your process requires you to handle chemicals outside of a nanolab sink, review your process with chemical safety officer bill flounders. incidental use of isopropanol, methanol, or acetone squeeze bottles outside of nanolab sinks is permitted

31、. cal-osha requires all chemical containers to be labeled with their content!229/7/202123working with chemicalsalways add acid to water.exception being piranhado not use glassware with hf acid.ongoing processed must be labeled for chemical content, contact information date and time of return.place s

32、etups toward the back of fume hood where there is maximum exhaust.clean unidentified spills by:checking ph with a test strip.if strongly acidic or basic (ph 10) use a sink hose to flush into the sink.if neutral, mop up with techni-cloths. all chemicals must be stored in proper containers with the co

33、ntents identified! 9/7/202124dry chemicals measure dry chemicals by pouring into weigh boat or weighing paper: always use a clean spatula if scooping is necessary. never return chemicals to the source bottle. all chemicals must be labeled and stored in proper containers, i.e. no beakers with foil or

34、 unlabeled dry chemicals.9/7/202125storing chemicals9/7/202126chemical disposaldoes it contain metal ions?yesis it non-halogenated water soluble solvent or acid or base?is it water immiscible or halogenated solvent?take to msink 1, 16,18is organic waste bottle more than 75% full?pour in funnelyesyes

35、replace full with empty bottle, capping full one lightlytake full to chemical disposal cabinet in 582acomplete and attach hazmat sticker, fill out chemical disposal manifestnoaspirate in sinkdid you receive special chemical approval?stop, see chemical safety officernonoyesnofollow disposal guideline

36、s provided during special chemical reviewyestreat as photoresistcollect separatelyno9/7/202127chemical bottle disposal take empty bottles of drain disposable chemicals to the automated bottle rinse station in 582a.rinse using the in foot-peddles of the bottle rinse station. wearing a face shield and

37、 gloves.cross out label with an x and place in bins near the rinse station. empty bottles of non-drain disposable solvent bottles should be placed in rear of fume hood to allow bottle to dry out, then put in a trash can. bottles of silicon etch should be washed and placed in marked bin in 582a for r

38、efilling.9/7/202128chemical waste bottles9/7/202129photoresist & spin coatingsresidues from spin coating such as aluminum foil, cleanroom wipes, swabs, etc, that contain volatile solvents should be disposed of in the vented waste cans located at msink1 and msink3.299/7/202130chemical exposures remov

39、e the affected clothing. rinse the exposed areas with water for 15 minutes using a safety shower or eyewash. notify staff after exposure using the posted emergency contact information. in an emergency, the deck hoses are usually your closest source of water.9/7/202131eye exposure if eyes are exposed

40、:flush eyes for at least15 minutes not less! use an eye-wash. sinks have di deck guns which can be used followed by an eye wash. contact staff for assistance or cal 911. follow up eye exposures with visit to a medical professional.all eye exposures require a follow up visit to tang center or a hospi

41、tal emergency room.lab members should assist a colleague in the event of an eye exposure!319/7/202132hf burns hf acts as an anesthetic, you may not feel the burn until damage is already done. if exposed: remove affected clothing, flush with cold water for 15 minutes. massage calcium gluconate ointme

42、nt from safety stations onto exposed area. notify staff after exposure, using posted emergency contact information.9/7/202133tmah tmah is used as photoresist developer it is hazardous by ingestion, inhalation, skin exposure or eye contact. exposure to concentrations 15% may cause respiratory or hear

43、t failure. flush expose area with water for 15 minutes. notify staff after exposure, using posted emergency contact information.9/7/202134chemical spills during staff hours, contact a staff member. contain spills using the spill containment kit available at safety stations. contact staff for assista

44、nce using the posted emergency contact information posted at every phone. final spill cleanup must be done by trained staff certified for spill cleanup.9/7/202135toxic metals general practices for handling metals: consider all metal dust as potentially hazardous minimize quantities protect bench top

45、 with disposable covers. confine material as you work change gloves when leaving the area solutions used for etching of toxic materials requires proper disposal confine dust - use dampened lab wipes to collect metal dust contact staff for proper disposal of cleaning materials contaminated with toxic

46、 metals mechanical cleaning should be done with fume hood at 200 ft per minute face velocity and a hepa vacuum do not use n2 blowoff guns - use a hepa vacuum new evaporation sources or sputter targets must be reviewed as special chemicals9/7/202136work with gallium arsenides or other highly toxic me

47、tals must first be reviewed with bill flounders!follow the same procedures as outlined for: special chemicals369/7/202137sharps & dangerous objects dispose broken glassware in yellow trash pails labeled “broken glass”. dispose si wafers in the blue si wafer recycle bins. dispose needles, razor blade

48、s, and other sharp objects in red “sharps” bins. mercury thermometers are banned from the lab. contact lab staff in event of a mercury spill. batteries and electronic waste disposal is via the nanolab office to assure proper disposal.9/7/202138cylinder gases lab members are not allowed to handle com

49、pressed gas cylinders. corrosive and toxic gases are kept in the dedicated gas vaults, room 399 and 599. gases are stored in ventilated steel gas cabinets. toxic gases are monitored by the toxic gas monitoring system, which will shut them off at source if leak is detected or if hazmat alarm is pulle

50、d. lab members are never allowed in the gas and chemical storage areas, rooms 399 and 599 without staff escort or prior approval.9/7/202139radiation sources lasers are banned without the approval of bill flounders (bill at ). more information on safe use of lasers at http:/nanolab.b

51、/factsheets/74lasersafety.pdf ionizing radiation is produced at the scanning electron microscopes and the x-ray diffractometer. those working in the presence of these machines must read the ucs radiation safety guidelines for non-users.9/7/202140cryogens review eh&s cryogen fact sheet bef

52、ore working with cryogens. liquid nitrogen is stored in vacuum jacketed cylinders called dewars. hazards are from freezing burns and asphyxiation due to sudden oxygen depletion. wear gloves and goggles when transferring to a smaller container. use care to avoid spills to minimize damage to the floor in the lab.9/7/202141flooding in the lab search for the source of the leak and turn off the supply valve. use the squeegees located in the freight elevator vestibule area to direct most water to floor drain. use the wet vacuum located in the freight elevator vestibule ar

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