CF introduce

1、1CANDO Proprietary & ConfidentialCANDO Proprietary & ConfidentialCF (Color Filter) introduction20080320Cando QM Doui Chen2CANDO Proprietary & ConfidentialContent TFT LCD Introduction C/F 结构与用途结构与用途 C/F 特性要求特性要求 C/F 制程简介制程简介 提高附加价值技术发展提高附加价值技术发展3CANDO Proprietary & ConfidentialTFT LCD

2、 简介简介LCD控制IC影像处理电路直流变压电路4CANDO Proprietary & Confidential放大TFT-LCD Structure5CANDO Proprietary & Confidential LCD Working Theory (TN Mode)6CANDO Proprietary & Confidential彩色滤光片的结构彩色滤光片的结构彩色滤光片是在玻璃基板上制作出许多红、绿、蓝的图素，每个图素对应液晶显示器上的一个画素。当白色背光通过这些图素后，变成红、绿、蓝光，而构成三原色光。 其结构为玻璃基板（Glass Substrate）上

3、制作防反射之遮光层，即为BM层（Black Matrix），再依序制作上具有透光性红、绿、蓝（RGB）三原色之彩色滤光膜层（滤光层之形状、尺寸、色泽配列，依不同用途之液晶显示器而异），最后溅镀上透明导电膜（ITO）。7CANDO Proprietary & ConfidentialStripe: 常使用于OA的产品，也就是我们常见的NB或桌上型电脑等。原因是现在的软体多半都是视窗化的介面，也就是说，萤幕内容是由一大堆大小不等的方框所组成的。而条状排列恰好可以使这些方框边缘看起来更笔直，而不会让一条直线看起来有毛边或是锯齿状的感觉。Mosaic、Delta: 多应用在AV产品。因为电视信

4、号多半是人物，人物的线条不是笔直的，其轮廓大部分是不规则的曲线。因此一开始，使用于AV产品都是使用马赛克排列。不过最近的AV产品多已改进到使用三角形(Delta)排列。彩色滤光片色彩排列式彩色滤光片色彩排列式MosaicTriangleStrip適合低解析度，小尺寸適合低解析度，小尺寸TV panel 之設計。之設計。常用於常用於Monitor，NB等大等大尺寸尺寸 Panel。8CANDO Proprietary & ConfidentialCIE 1931 Coordinates for National Television Standards Committee (NTSC)

5、Primaries/xyR0.670.33G0.210.71B0.140.08W0.3100.316NTSC Ratio = Area / Area9CANDO Proprietary & ConfidentialColor Filter OutputBlack MatrixR sub-pixelG sub-pixelB sub-pixelITO SputteringPositive resist Coating, Dosing, Developing, Post-baking, Etching, Stripping.R Negative resist Coating, Dosing,

6、 Developing, Post-baking.G Negative resist Coating, Dosing, Developing, Post-baking.B Negative resist Coating, Dosing, Developing, Post-baking.CuttingFinal InspectionCr GlassManufacture of Color Filter10CANDO Proprietary & ConfidentialColor filter ManufactureUVCleanerCoaterPre-bakeAlignerBack ex

7、posureOvenDefect inspectionRepairTitlerDeveloperAlignerUVCleanerCoaterPre-bakeOvenDeveloperUVCleanerCoaterPre-bakeUVOvenDefect inspectionRepairUVCleanerITO sputterAnnealPost-cleanerDefect inspectionRepairUVCleanerCoaterPre-bakeOvenAlignerDeveloperBMDefect inspectionRepairR-G-BOver CoatITOSOC11CANDO

8、Proprietary & ConfidentialColor Filter 形成技術形成技術顏料分散法顏料分散法Etching法法染色法染色法轉寫法轉寫法電著法電著法印刷法印刷法Ink-jet法法12CANDO Proprietary & Confidential 露光露光 現像現像 ( Alkali solution) Coating / prebakePigment Dispersion UVCurable Photoresist(Spin Coater) Color MatrixITO膜厚:15001800著色膜厚:1.22.0m Glass基板基板Cr-BM(1500

9、)Glass基板(0.7mm)n 製程簡單n 品質信賴高L 材料利用率低13CANDO Proprietary & ConfidentialEtching法法 ( Toray ) Glass基板基板 Coating / prebake 露光露光 現像現像 / Etching Color MatrixBMGlass基板(0.7mm)Positive resist著色 polyimideUVPhotomaskPositive resist著色 polyimide 剝離剝離14CANDO Proprietary & Confidential 印刷印刷 Curing Color Mat

10、rix Ink轉寫轉寫 LevelingPS版 (Al)BlanketInk-jet法法 (CANON,EPSON)Principle : Mechanical Printing.Application: LCD : CF/ Cell PI coating/ Cell ball spacer OLED15CANDO Proprietary & ConfidentialMain component : Drop inspection / Module print head / Variable pitch arrays system G7 FPD Inkjet EquipmentLitr

11、ex.16CANDO Proprietary & ConfidentialDifferent Methods of CF Production17CANDO Proprietary & Confidential黑色数组图案黑色数组图案(BM)总长总长_Total PitchTotal Pitch 变宽部份偏移18CANDO Proprietary & ConfidentialTemperature Effect in Exposure23.022.523.519CANDO Proprietary & Confidential位置精确度位置精确度 (Positio

12、n Accuracy)正常X, Y轴偏移玻璃黑色数组图案(BM)Theta角偏移20CANDO Proprietary & Confidential黑色数组图案黑色数组图案(BM)的线宽的线宽/ /开口率开口率线宽变宽 = 开口率变小21CANDO Proprietary & Confidential彩色滤光片彩色滤光片ITO的特性要求的特性要求ITO = Indium Tin OxideTarget: 90 wt. % In2O3-10 wt.% SnO2.光學光學spec.: Transmittance 92% at 550 nm. 22CANDO Proprietary

13、& ConfidentialITO Sputter SystemCassette StationRobotTransfer StageTargetRotation ChamberVacuum ChamberPartition台車移動方向台車移動方向Glass in vertical position, perpendicular to the screen23CANDO Proprietary & Confidential玻玻 璃璃 基基 板板Metal Mask ITO 膜膜ITOITOITOITOITOITOe-e-e-接地接地BM Patterne-e-e-e-e-e-e

14、-ITOITOITOITO接觸後，若電子流過大，將使Cr Pattern邊緣或尖端異常放電而呈燒灼狀。e-ITO SputterITO成膜因素：1. 基板温度：基板温度越高则透光率越好且导电率也相对提高。2. 放电气体的压力：通入的气体主要是Ar及少量的O2。3. 放电功率：ITO的成膜速率与放电电力成正比例的增加。4. 电流电压特性：相同的放电功率，电压愈低ITO膜的抵抗值也愈低。 24CANDO Proprietary & ConfidentialRGB Profile 之影響之影響RGBsubstrateBMCase 1. Overhung有效厚度有效厚度變薄或斷路變薄或斷路RG

15、BsubstrateBMCase 2. Narrow Slit between Thick Color Resists 抵抗值抵抗值升高升高BGRsubstrateBMCase 3. Stack with each other 有效厚度有效厚度正常正常抵抗值抵抗值不受影響不受影響ITO Sputter25CANDO Proprietary & ConfidentialTFT - Glass Spacer or Plastic Spacer etc. - Random Distribution - Cause Diffraction - Lowering ContrastSchemati

16、c Diagram of TFT-LCD using SpacerGlassBlack MatrixAlignment LayerGlassITO - Lithography Process - Uniform Distribution on TFT - Easy Cell Gap ControlSpacerSpacerOver-CoatPS Introduction 26CANDO Proprietary & ConfidentialRound shapeTapered shapeSteep shapePS ProfilePS Introduction 27CANDO Proprie

17、tary & ConfidentialPS Location28CANDO Proprietary & ConfidentialNew Tech.-Integrated Photo SpacerConventional StructureColor FilterTFTColor FilterTFTNovel StructureGlass SubstratePhoto SpacerPhoto SpacerSpacer-Balln 提高對比值提高對比值n Cell Gap 均一均一n 增加耐衝擊性增加耐衝擊性n 減少漏光減少漏光K 配向可能有陰影配向可能有陰影29CANDO Proprietary & ConfidentialMVA(Multi-domain Vertical Alignment)OFF state BLACKColor FilterTFTON state GRAYColor FilterTFT10 20m1.5 4mColor FilterTFTON state WHITEn CFCF附附三角錐突起物三角錐突起物n廣視角技術：視角達廣視角技術：視角達 160 160 度度n富士通專利富士通