高温应用电极材料整理a

1、制备方法 文献电极材料Ti/Pt溅射+lift-offIEEE Germany 2010 Integrity ofMicro-Hotplates During High-Temperature Operation Monitored byDigital Holographic Microscopy100nmPt/10nmTi（DC sputter）JMS MIT 1998 Investigation ofhigh-temperature degradation ofplatinum thin films with an in situresistance measurement apparat

2、usSAA 2009 Stability of thinplatinum films implemented in high-temperature microdevicesSAB D.Briand 2011 Drop-coatedmetal-oxide gas sensor on polyimidefoil with reduced power consumptionfor wireless applications20nmTi/130nmPt, sputtering, lift-offSAB D.Briand 2012Environmental monitoring with amulti

3、sensor platform on polyimidefoil20nmTi/130nmPt, sputtering, lift-offTa/Pt溅射+IBESAA 2009 Stability of thinplatinum films implemented in high-temperature microdevicesIEEEIUS T.Aubert 2009 Studyof tantalum and iridium as adhesionlayers for Pt/LGS high temperatureSAW devices10nmTa/100nmPtsputter,Ir EB,p

4、hotolithography,IBEAPL T.Aubert 2010 Surfaceacoustic wave devices based onAlNsapphire structure for hightemperature applications10nmTa/100nmPtsputter,photolithography,IBEIEEE France T.Aubert 2011Behavior of PlatinumTantalum asInterdigital Transducers for SAWDevices in High-TemperatureEnvironments10n

5、mTa/100nmPtsputter,photolithography,IBEPSPIE T.Aubert 2011 WirelessSAW sensor for high temperatureapplications material point of viewIEEE France T.Aubert 2011Behavior of Platinum Tantalum asInterdigital Transducers for SAWDevices in High-TemperatureEnvironments10nmTa/100nmPtsputter，DC60wTa,15wTi,pho

6、tolithography,IBEIEEE T.Aubert 2012Investigations on AlN SapphirePiezoelectric Bilayer Structure forHigh-Temperature SAW Applications10nmTa/100nmPtsputter,photolithography,IBETi/PtEB蒸发+lift-offIEEE CMU P.Zheng 2011Langasite SAW temperature and oxygenmulti-sensor10nmTi/100nmPt,E-beam,lift-offIEEE CMU

7、 P.Zheng 2012Langasite surface acoustic wavesensors_ Fabrication and testing 10nmTi/100nmPt,lift-offTa/PtEB蒸发+lift-offNanoscale 2012Tin oxide nanowire sensor withintegrated temperature and gatecontrol for multi-gas recognition200nmPt/20nmTaEB+lift-offPt/RhEB蒸发，lift-offIEEE M.P.da cunha UM 2007Enabli

8、ng Very High TemperatureAcoustic Wave Devices for Sensor &Frequency Control ApplicationsPt+10%Rh+ZrO2,Pt/10%Rh/Zr在O2下EB蒸发，IEEE UM M.P.da Cunha 2008High Temperature StabilityofLangasite Surface Acoustic WaveDevicesIEEE UM M.P.da Cunha 2011Wireless Acoustic Wave Sensors andSystems for Harsh Enviro

9、nmentApplicationsIEEE UM MP.da Cunha 2011Improved SHSAW TransductionEfficiency Using Grating and UniformElectrode GuidingIEEE UM MP.da Cunha 2011Recent Advances in Harsh EnvironmentAcoustic Wave Sensors forContemporary ApplicationsPt/Rh/ZrO2,lift-offIEEE UM M.P.da Cunha 2012Determination and Experim

10、entalVerification of High-Temperature SAWOrientations on LangatateIrIEEEIUS T.Aubert 2009 Studyof tantalum and iridium as adhesionlayers for Pt/LGS high temperatureSAW devices10nmTa/100nmPtsputter,Ir EB,photolithography,IBEIEEE France T.Aubert 2011Behavior of Platinum Tantalum asInterdigital Transdu

11、cers for SAWDevices in High-TemperatureEnvironmentsIEEE T.Aubert 2012 IridiumInterdigital Transducers for High-Temperature Surface Acoustic WaveApplications10nmTi/100nmIr,E-Beam蒸发，photolithography,IBETa/Pt溅射+IBEAl 溅射JAP Sweden 2003 Surfaceacoustic wave propagationcharacteristics of aluminum nitridet

12、hin films grown on polycrystallinediamond200nm Al,DC sputtering,50sccmAr,900W DC,温度50SAB spain 2011 Surface acousticwave gas sensors based onpolyisobutylene and carbon nanotubecomposites200nm Al,RF sputtering, usingphotolithographic techniquesSAB spain D.Matatagui 2011Chemical warfare agents simulan

13、tsdetection with an optimized SAWsensor array200nm Al,RF sputtering, usingphotolithographic techniquesAl溅射，lift-offJCG W.Water Taiwai 2003 Theinvestigation of preferred orientationgrowth of ZnO films on the PbTiO3-based ceramics and its application forSAW devices300nm Al,lift-offSAB W.Water Taiwan 2

14、009Using ZnO nanorods to enhancesensitivity of liquid sensor200nm Al,sputteringSAA W.Water Taiwan 2010 Lovewave ultraviolet photodetector usingZnO nanorods synthesized on 90-rotated ST-cut (4245) quartz200nm Al,sputteringUltrasonics W.Water Taiwan2012 ZnO thin film with nanorodarrays applied to flui

15、d sensor200nm Al,sputteringAl 热蒸发+湿法刻蚀SAB Ulsan 2010 Surface acousticwave humidity sensor based onpolycrystalline AlN thin film coatedwith solgel derivednanocrystalline zinc oxide film100nmAl,Thermal evaporation, wetetching (CH3COOH: HNO3:H3PO4:H2O=1:4:4:1)ASS DT Phan 2010 The effect ofpost-annealin

16、g on surface acousticwave devices based on ZnO thin filmsprepared by magnetron sputtering100nmAl,Thermal evaporation, Aletchant (10 g K3Fe(CN)6 + 1 g KOH in100ml water)ME DT.Phan 2010 Surfaceacoustic wave characteristics of ZnOfilms grown on a polycrystalline 3C-SiC buffer layer100nmAl,Thermal evapo

17、ration, Aletchant (10 g K3Fe(CN)6 + 1 g KOH in100ml water)SAB H.S.Hong Ulsan 2010Humidity sensing characteristics of Ga-doped zinc oxide film grown on apolycrystalline AlN thin film based on asurface acoustic100nmAl,Thermal evaporation, wetetching (CH3COOH: HNO3:H3PO4:H2O=1:4:4:1)SAB D.T.Phan 2011 S

18、urfaceacoustic wave hydrogen sensors basedon ZnO nanoparticles incorporatedwith a Pt catalystSAB DT.Phan 2012 High-sensitivity humidity sensors withZnO nanorods based two-port surfaceacoustic wave delay linesame as SAB Ulsan 2010Al 热蒸发+lift-offJAP Nancy MB Assouar 2005Effect of deposition temperature onsurface acoustic wave velocity ofaluminum nitride films determined byBrillouin spectroscopy150nmAl,UV lithography,wet etching,A