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1、Multi-wire EDM Slicing MethodSchool of Mechanical and Precision instrument EngineeringSchool of Mechanical and Precision instrument EngineeringChen Chen yuyu long longMulti-wire EDM Slicing MethodIntroductionthe silicon carbide is attracted as a material of next-generation semiconductor. Thus, it is
2、 necessary to slice these materials high efficiently. A multi-wire saw method is conventionally applied to slicing of these ingots, However, this method has some problems such as large cracks on sliced surface and large kerf loss due to the mechanical contact removalMulti-wire EDM Slicing MethodMult
3、i-wire EDM Slicing MethodMulti-wire EDM Slicing MethodExperimental Procedures1. tension of these wire electrodes was varied to obtain the same stress for various cross sections2. The height direction of wire electrode was arranged in parallel to the machining direction3. observed The vibration of wi
4、re electrode by a high speed shutter cameraMulti-wire EDM Slicing MethodMulti-wire EDM Slicing MethodMulti-wire EDM Slicing MethodFig3. Example of wire movement observationMulti-wire EDM Slicing MethodFigure 3 shows observation results of non-vibrated and vibrated wire electrode. The base is the ori
5、ginal width dw of wire electrode with track-shaped section, and dm is the width of tilted and moved wire electrode. The vibration amplitude AW in one side of wire electrode was calculated by the equation: Multi-wire EDM Slicing MethodFig. 4 Vibration amplitude of wire electrode with track-shaped sec
6、tion for various aspect ratiosMulti-wire EDM Slicing MethodFig. 5 Vibration amplitude of wire electrode with track-shaped section for various wire running speedsMulti-wire EDM Slicing MethodExperimental ResultsThe track-shaped section wire electrode with aspect ratio of 1:2.0 showed similar tendency of vibration amplitude in one side under the every
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