StrasbaughCMP化学机械抛光设备

1、共5頁20080708(1)ScrubberinterfaceIn-linetransfersinterface(2)CassetteelevatorLoaderelevatorUnloaderelevator(3)WafertransfermethodVacuumadsorptionbytheform)(4)SensorsLoaderelevatorunloaderelevatorRobotarmloadstationUnloadstationinlinetransferinterface3-2)Polishtablesection(1)Size(2)Material(3)Drive(4)R

2、otationalspeedarmStrasbaughCMPPolisher1MachineinformationManufacturer:STRASBAUGH(US)Vintage:1996,2Model:6DS-SPS/N:00209902ConfigurationThepresentequipmentconsistsofModel6DS-SPbodyTemperaturecontrolunitVacuumplant3PerformanceTheperformanceofthissystemisasfollow31)TransfersectionWaferinversionandpushm

3、echanismMappingdatatransfermechanismtwocassettes(cassettesareputnormally)oncassette(usedasabuffercassettetobeputreverse)wafertransferrobot(withthestainlesssteeltransferCassetteschecksensor(microswitch)Cassetteschecksensor(microswitch)Waferchecksensor(vacuumswitch)Waferchecksensor(vacuumswitch)Waferc

4、hecksensor(capacitiveoropticsensor)lotendsensor(capacitivesensor)28”Graniteandstainlesssteel(chemicals-proofcoating)Brushlessservomotorgear(ratio15:1)10125rpm1(S.P.)Temperatureregulationrange+5C+35C(controlledbytheconstanttemperaturewatercirculationunit)Flatness1.27um共5頁2OO8O7O8(7)Conditioningarm(8)

5、Conditioning3-3、Spindlecarrier(1)Carrier(2)Processingmethod(3)Drive(4)Revolutionspeedrange(5)Spindleforce(6)Forcecontro1(7)Waferhold(8)Uniformitycontrol(9)Vacuumchuck3-4、Slurryline(1)Feedmethod(2)Rinsemethod(3)Monitor3-5、Cleaningsection(1)Carriercleaning(2)Wafercleaning3-6、Parametersnewarm04diamondp

6、latediskOOgritprovidedwiththestopperPN25219O8”ViPRRCarrierTwowafersprocessedsimultaneouslyusingthedoubleheadBrushlessservomo，togrear1O25Orpm1(S.R.)O227kg2(S.P.)FeedbackwiththeEPregulatorandtheloadcellAttransfe：rvacuumchuc；katpolis：hwater-heldBack-pressuremethodResilientvacuumchuckforViPRRCarrierPoli

7、shtabletwoseries&DIWflushing(withpressuregauge)EachserieswithO1OOOml/minDeliverylin，eslurrynozzleshallbemadeofTeflonDIwaterflushingSlurryPhCleanedatloaudnloadstationCurtainrinse，dcleanedatload/unloadstationthefollowingparameterscan：besetPolishTime(sec)SpindleSpeed(rpm)TableSpeed(rpm)PolishForce(1)bs

8、ForceRamp(sec)BackPressure(psi)BackpressureRamp(sec)Slurry1Flow(ml/min)Slurry2Flow(ml/min)RingForce*NumberofprocessstepsCanbesetupto1Osteps3-7、MonitoringSpindle(L/R)PolishForce(1bs.)共5頁20080708BackPressure(psi)SpindleSpeed(rpm)SpindlemotorloadcurrentPolishtableTableSpeed(rpm)TablemotorloadcurrentSur

9、facetemperatureSlurryFlowra，tepHCirculationWaterinouttemperatureflowratePolish，paidnsertpadTimecountofcumulativeusage4Machinesize&weightThefollowingdimensionandweightoftheequipmentarespecifiedModel6DS-SPMainbodyDimensionw2540mm，dl830mm，h2040mmWeight3410kgConstanttemperatureWatercirculationunitDimens

10、ionw660mm，d533mm，h1016mmWeight160kgVacuumplantDimensionw782mm，d533mm，hl524mmWeight68kg5FacilitiesThefacilitiesoftheequipmentarespecified：asfollows5-1)Model6DS-SPbodyElectricpowersupplC0connection20010(V)60A50HzTypelGrounding1cableDIWaterPressure3.0kgcm2Flowrate(1.34mh)Connection38”FNPT(connectedwith

11、D1waterpressureincreasingunit)AvalveshallbeaddedatinletCDAPressure7.0kg/cm。Flowratel37mhConnection38”SUS316LPT-EPSwagelockSupplypressureisbetween6.58c.m5k2gwhichrequiresinevitableenoughpressureproofattheequipmentsideInorganicsystemexhaustFlowrate(420m3h)Connection：6SUSsingle*SUSsingletubelength2”Dra

12、inTabledrai：n112FNPT(slurryconc)Loaderdrai：n112”FNPT(slurryrinse)D1waterret：urn38”FNPT(slurryrinse)*Drainpa：nOutletshouldbeprovidedatthedrainholeSlurryBulkslurryoptionSlurryINPFA4”1tubeSlurryoutPFA4”1tube*Doubletubingshallbeinsidebetweentheunits，andcommunicationtubingoutsidetheequipment(ProvidedbyTY

13、KCompany)5-2)Temperaturecontrolunit(1)ElectricpowerAC02OO(V)土103OA5OHz1cableforgroundConnections3Pterminalboard(2)CoolingWateroiuntPressure0.7kgcm。Flowrate0.3m3hConnection12NPT(INOUT)*Thesupplypressureis06k.5g1cm2,therefor,strongpressureproofisrequiredattheequipmentsideorotherwisearegulatormustbeprovided5-3、Vacuumplan