薄膜技术英文课件：1introduction

1、Technology of Thin Film: IntroductionOutlineConcept of thin filmDifference between thin film and block materialHistory of thin film and coatingdModern technology for thin film depositionThe content of this course2What is the “thin film”34567891011a very thin layer of a substance on a supporting mate

2、rial; especially : a coating (as of a semiconductor) that is deposited in a layer one atom or one molecule thickThin film: thickness less than 1 micrometerCoating: thickness lagrer than1 micrometerWhat is the thin film？12Difference between thin film and block material13Thin film vs. block materialBo

3、lckThin filmDensityMelting pointCrystalline sizesmall（um )Large(mm)142. Thin film vs. block material-1BolckThin filmDensityMelting pointCrystalline sizesmall（um )Large(mm)15Density g/cm3Temprature of substrate16Thin film vs. block materialBolckThin filmDensitybtf（有问题）Melting pointMbMtfCrystalline si

4、zesmall（um )Large(mm)172. Thin film vs. block material-1BolckThin filmDensitybtf（有问题）Melting pointMbMtfCrystalline sizesmall（um )Large(mm)18Melting point ()Thickness ()192. Thin film vs. block materialBolckThin filmDensitybtf（有问题）Melting pointMbMtfCrystalline sizesmall（um )Large(mm)202. Thin film vs

5、. block material-1BolckThin filmDensitybtf（有问题）Melting pointMbMtfCrystalline sizesmall（um )Large(mm)212. Thin film vs. block material -2Stoichiometric ratioNon-stoichiometry is common in thin filmSiO2 SiOxTransparent conductive film Tin indium oxide (InSnyOx) Conductivity condConductivecond 22 Compa

6、ring to bulk materials, thin film materials have some unique properties233. The History of Thin Film or CoatingApplication in ancient timeApplication in morden time2425Gold-decorated Technology 鎏 金The process of “liujing”Making AuHg alloy (煞金)Brushing Au compound (抹金)Evaprating Hg (开金)Making Au dens

7、er（密集的） (压光)26Bronze（青铜） Mirror Polishing27Bronze Mirror PolishingBronze mirror from easten han dynastyThere is Sn rich transparent layer with several hundred nanometer thickness on the surface of mirror. Dense SnO2 films with microcrystallines are detected on the top of the Sn rich layer.28Glazing

8、上 釉Glazing for ceramic beautiful clean29Application in Modern TimeElectronic thin filmOptical thin filmMagnetic thin filmMechanical functional thin film30Electronic thin filmConductive thin film and dielectric（介电） thin film for semiconductive dives and integrated circuit（集成电路）Al、 polysilicon、SiO2 Su

9、perconductive thin filmYBaCuOPhotoelectric(光电的) thin filmGaN 、GaAs/GaAlAs、a-Si/a-SiCThin film resistor（电阻）, thin film capacitor（电容）Ni-Cr low resistance thin film resistorThin-film solar cellelectroluminescenceConductive thin filmIC31Electronic thin filmFlat plate displayITO transparent conductive th

10、in film、Y2O3、Ta2O5 dielectronic thin film，Al electrode thin filmPiezoelectric(1.压电的) thin film for wave filteringZnO 、AlNSensitive thin film for sensorSnOx32Optical thin film薄膜Antireflective(1.减反射) thin filmMgF2ZnS2Reflective filmInformation store thin filmTbFeCoDieletric and semiconductive thin fil

11、m for optical device and light guideSolar control thin filmTi、ITO 光开关33Magnetic thin filmGiant magnetoresistance thin film34Hard coating, anti-corrosion and lubricating coatingsTiN、NiCrAlY、MoS2Decorative coating仿金TiN、黑色TiC35 The application of thin films or coatings has a long history Thin films are

12、 applied in everywhere in our morden society, such as energy, materials and information. Mastering the technology for thin film would be useful for your further development! 364. Morden deposition technology of thin filmGrowth from bottom to up（向外生长）Gas Solid(Vapor deposition气相沉积)Physical vapor depo

13、sitionChemical vapor depositionLiquid SolidSpray method（喷涂法）Sol-gel（溶胶凝胶） methodIon and molecule in solutionEletrochemistry methodLangmuir-Blodgett methodMolecular self-assembly Solid37(3.装配, 组装,总成)4. Morden deposition technology of thin filmIon implantationGrowth from up to bottom（向内生长）38Physical v

14、apor deposition（PVD）Atoms or ionsCoatingsSubtrateTarget or evapration source Eavpration/ supttering process39Chemical vapor deposition（CVD） Thermal decomposition Reaction on surface of substrate40 The process of chemically reacting a volatile compound of a material to be deposited, with other gases,

15、 to produce a nonvolatile solid that deposits atomistically on a suitably placed substrate.4. Morden deposition technology of thin filmGrowth from bottom to upGas Solid(Vapor deposition)Physical vapor depositionChemical vapor depositionLiquid SolidSpray methodSol-gel methodIon and molecule in soluti

16、onEletrochemistry methodLangmuir-Blodgett methodMolecular self-assembly Solid41Spray Process Heating spraied materials to melting Blow the materials to the substrate42Sol-Gel Method43Spray Process Heating spraied materials to melting Blow the materials to the substrate444. Morden deposition technolo

17、gy of thin filmGrowth from bottom to upGas Solid(Vapor deposition)Physical vapor depositionChemical vapor depositionLiquid SolidSpray methodSol-gel methodIon and molecule in solutionEletrochemistry methodLangmuir-Blodgett methodMolecular self-assembly Solid45Electrochemical deposition（Eletroplating）

18、 An ionic metal is supplied with electrons to form a non-ionic coating on a substrate. The external electrical power is used. A common system involves a chemical solution with the ionic form of the metal, an anode (positively charged) which may consist of the metal being plated (a soluble anode) or

19、an insoluble anode (usually carbon, platinum, titanium, lead, or steel), and finally, a cathode (negatively charged) where electrons are supplied to produce a film of non-ionic metal.化学镀Electrochemical deposition（ Eletroless plating） Also known as chemical or auto-catalytic plating, is a non-galvani

20、c plating method that involves several simultaneous（同时发生的） reactions in an aqueous（水的） solution, which occur without the use of external electrical power. Langmuir-Blodgett Process One or more monolayers（单层） of an organic material, deposited from the surface of a liquid onto a solid by immersing (or emerging) the solid substrate into (or from) the liquid.Molecular Self-assembly Molecular self-assembly is the process by which molecules adopt a defined arrangement without guidance or management from an outside source.The DNA structure at left (schematic shown) wi