化学品系统简介

1、化学品供应系统工程1系统简述本系统由一套HF供应系统和一套HF回收系统组成。两套系统均采用全自动供应方式进行，采用可编程控制器与人机触控屏幕的控制模式，非常人性化设计操控简易。HF供应系统采用双Drum和双桶槽模式，先用气动隔膜泵将Drum中的药液输送到存贮桶槽中，再利用气动隔膜泵将存贮桶槽中的药液供应给机台使用。其中双Drum和双桶槽均采用自动切换功能，系统也将和使用机台进行通讯，进行联动控制。HF回收系统采用双桶槽模式，废液回收时，两桶槽能够自动切换，可利用气动隔膜泵将桶槽中的药液外运到槽车中。2设计参数ChemicaltobeusedDispenseFlowrateofMainPipin

2、gDispensePressureofCCSSOutputportHF供应(HIS-CCSS-121N)(with2pcs6000LStorageTank)301pm2.5kgHF回收(HIS-WCS-11)(with2pcs6000LWasteTank)1501pm3.系统原理图A.HF供应系统(HIS-CCST21N)49%HFTransfer&SupplyUnitManualDiaphragmManualBaHVatvRegulatorvalvPneumaticValvCheckvalvN2FilterN2CouulPneumaticPumpHi-SanityTechnolTransfe

3、r&SupplyUnitA3enuidValvSpeedCuntiulModifierCheckedApprovedCO2UV/IRSensuiHighHighLevelSenosrHighLevelSenosrLowLevelSenosrInductiveProximitySensorModificationsFilterLoadCellBulkheadFittingBHF回收系统(HIS-CCSS-11)CO2thSensorBarDrawnXhejunDate04.16.2008ogyiCo.,LDd.,evelSenosrScaleNoneUnitmmLowlowWasteReclai

4、munitl-11!rrr1巧ManualDiaphragm护EJ*rccp.t.一p*uHighHighLeakSensornuManualBallvalveInductiveProximityValve(rRegulatorvalveDIrN2Gunj|=d-hFlowMeterCO2NozzleSolenoidval禺TouchScreenElManualDamperHELevelSenosrHigh-1J=*Filter2SensorN2Filter岂DIorN2gul丄丁-scTn;/ttic-T-1-11-1T7!丄丄：口MCr、1JL5LevelSenosrLow圏TTE*01U丄。1ri:hiPressureGaugeJCO2UV/IRsensorEEuvauu丄丄BulkheadliLLinguN2couplingLi5LevelSenosrLowLowMagnet丄cPumpPressureTraiismitterHi-SanityTechnolothsensorBarcodeReaderRadarsensorChemicalcouplillgDrawingName13%hfWasteReclaimunitDrawingNumber,evelSenosrDrawnxhejunDateU4.16.2