利用晶体生长软件对蓝宝石晶体生长的仿真计算方法

利用晶体生长软件FEMAG对蓝宝石晶体生长的仿真计算方法当前第1页\共有33页\编于星期四\20点CONFIDENTIALGeneralintroductionSapphireGrowthContent当前第2页\共有33页\编于星期四\20点CONFIDENTIALIntroduction

Formorethan25years,FEMAGSoftdevelopssimulationsoftwarededicatedtotheresearchanddevelopmentofoptimalcrystalgrowthprocesses.1984 FirstresearchonGermaniumgrowthinUniversityofLouvain.

Prof.FrançoisDupret1989 FirstresearchonSilicongrowthinUniversityofLouvain.1992 FirstcollaborationswithmajorICcompanies. Developmentofdefect-freesiliconwaferproduction.Today,morethan 35patentsarereferencingFEMAGSoftware2003 FEMAGSoftS.A.,spin-offfromUniversityofLouvain.2006 CollaboratrionwithmajorSolarcompanies. Developmentoflow-costandlow-oxygencontentprocesses.2009 Largeinvestmentforanewsoftwareframework 2010 ReleaseofSoftwareapplicationforSapphireingotproduction.当前第3页\共有33页\编于星期四\20点CONFIDENTIALCzochralskiprocess当前第4页\共有33页\编于星期四\20点CONFIDENTIALDirectionalSolidificationSystem当前第5页\共有33页\编于星期四\20点CONFIDENTIALFloatingZoneProcess当前第6页\共有33页\编于星期四\20点CONFIDENTIALSapphireGrowthbyCZandkyropoulos当前第7页\共有33页\编于星期四\20点CONFIDENTIALSapphiregrowthbyHEM当前第8页\共有33页\编于星期四\20点CONFIDENTIALWhatareFEMAGsoftware?Process-dedicatedsimulationtools,adaptedtoyourownprocessesandabletosolveyourproblems.Global

Allthefurnacecomponentsareconsidered.

Alltheheattransfermodeareconsidered(radiationtransfer,heatconduction,meltandgasconvection)InductionandohmicheatingTimeDependent当前第9页\共有33页\编于星期四\20点CONFIDENTIALProcess-dedicatedtools

FEMAG-CZ :CzochralskiFEMAG-FZ :FloatingZoneFEMAG-VB :VerticalBridgmanFEMAG-CZ/OX :CzochralskiforSapphireFEMAG-KY :KyropoulosFEMAG-DS :DirectionalSolidificationFEMAG-HEM :HeatExchangeMethodGainoftime.ProcessmasteringAccurateandrighttothepoint当前第10页\共有33页\编于星期四\20点CONFIDENTIALPlatformorientedFRAMEWORK:FEMAG3RADIATIONCONVECTION…MESHGEOMETRYCONDUCTIONFEMAG-CZFEMAG-HEMFEMAG-DSFEMAG-KYROPOULOSFEMAG3NEW2011Veryaccurate:FiniteElementandSpectralmethodsVeryefficient:3Dsimulationsinless1dayVeryflexible:Veryfastdevelopmentofnewdemand

…当前第11页\共有33页\编于星期四\20点CONFIDENTIALGlobalsimulations

CzochralskiFurnaceforSiliconHEMFurnaceforSapphireNosimplificationoftheprocessconditions当前第12页\共有33页\编于星期四\20点CONFIDENTIALDynamicsimulationsAdynamicsimulationtoolCompleteprocesssimulationDynamiceffectofinterfacedeformationVaryingprocessingconditions

当前第13页\共有33页\编于星期四\20点CONFIDENTIALSapphireCrystalGrowthSimulation

当前第14页\共有33页\编于星期四\20点CONFIDENTIALSapphireSimulationObjectiveThemarketofSapphireisexperiencingaveryfastgrowthrateandbecomeverycompetitiveManycompaniesinvestinsimulationsoftwareinordertoreinforcetheirpositionsHEM,CzochralskiandKyropoulosprocessrequireoptimizationandagoodunderstandingStrongneedforefficientnumericaltools.

Radiationeffectsintheparticipatingcrystalandmeltisacomplexproblem.当前第15页\共有33页\编于星期四\20点CONFIDENTIALSapphireSimulationObjectiveOurgoalistoprovideaccurate

simulationtool,abletotakealltheprocessfeaturesintoaccountandtooptimize

thegrowthprocessintermsoftheresultingcrystalquality.当前第16页\共有33页\编于星期四\20点CONFIDENTIALSapphireSimulationObjectiveKYROPULOSCZOCHRALSKIHEM当前第17页\共有33页\编于星期四\20点CONFIDENTIALFEMAG-CZ/OXFEMAG-CZ/OXSoftwaretosimulateSapphireGrowthbyCZandKyropoulosSpecifications:Temperatureinthesapphireand

inallfurnacecomponentsbysolvingtheglobalheattransferinthefurnace(radiation,conduction,convection).Flowvelocityinthesapphireliquidphase.Crystallizationfrontshape

OhmicandInductionHeatingAdvancedradiationheattransferinthesapphireGasconvectionAnisotropicthermalstressesinthecrystal当前第18页\共有33页\编于星期四\20点CONFIDENTIALTemperatureintheHotZoneFEMAG-CZ/OXCZprocess

withInductionHeatingsystemInductionHeating

system当前第19页\共有33页\编于星期四\20点CONFIDENTIALTemperatureinthecrystal

andinthemeltFEMAG-CZ/OXCZprocess

withInductionHeatingsystem当前第20页\共有33页\编于星期四\20点CONFIDENTIALMeltvelocityamplitude

FEMAG-CZ/OXCZprocess

withInductionHeatingsystemTheinterfaceshapeandpositionisaresultofthesimulation当前第21页\共有33页\编于星期四\20点FEMAGSoft©2012Temperature

fieldinthemeltStream

functionFEMAG-CZ/OX/CZandKYROPOULOSprocess当前第22页\共有33页\编于星期四\20点FEMAGSoft©2012Meltmeshes

BLM(boundarylayermesh)Coarse

meshBLMmeshisveryimportanttosimulatetheinterface当前第23页\共有33页\编于星期四\20点FEMAGSoft©2012LocaltemperaturefieldResultusingcoarsemeshResultusingBLMmeshBLMmeshenablesabetterpredictionofthecrystalisationinterface当前第24页\共有33页\编于星期四\20点FEMAGSoft©2012VelocityfieldResultusingcoarsemeshResultusingBLMmesh当前第25页\共有33页\编于星期四\20点CONFIDENTIALFEMAG-HEMFEMAG-HEMSoftwaretosimulateSapphireGrowthbyHeatExchangeMethodSpecifications:Temperatureinthesapphireand

inallfurnacecomponentsbysolvingtheglobalheattransferinthefurnace(radiation,conduction,convection).Flowvelocityinthesapphireliquidphase.Crystallizationfrontshape

AdvancedradiationheattransferinthesapphireGasconvectionAnisotropicthermalstressesinthecrystal当前第26页\共有33页\编于星期四\20点CONFIDENTIALFEMAG-HEMFEMAGSoftCADtooltointroducethegeometry当前第27页\共有33页\编于星期四\20点CONFIDENTIALFEMAG-HEMGlobalTemperatureinthefurnace当前第28页\共有33页\编于星期四\20点CONFIDENTIALFEMAG-HEMMeltconvectionDetailofmeltconvection当前第29页\共有33页\编于星期四\20点CONFIDENTIALFEMAG-HEMTemperaturedistributioninthecrystalandmeltfordifferenttimesVelocityamplitudedistributioninthemeltfordifferenttimes当前第30页\共有33页\编于星期四\20点CONFIDENTIALAnisotropicThermalStress(HEMSapphireA-axis)FEMAG-HEMquasi-