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外文翻译--采用表面微加工技术制造微型行星齿轮减速器.doc

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外文翻译--采用表面微加工技术制造微型行星齿轮减速器.doc

附录附录一英文材料MICROPLANETARYREDUCTIONGEARUSINGSURFACEMICROMACHININGABSTRACTAMICROPLANETARYGEARMECHANISMFEATURINGAHIGHGEARREDUCTIONRATIOWITHCOMPACTNESSINSIZEISPRESENTEDINTHISPAPERSUMMITVISEMPLOYEDFORTHEFABRICATIONMETHODSOTHATTHEREDUNDANCYOFASSEMBLINGPARTSISELIMINATEDTHEDESIGNRULESOFWHICHHASALSOBEENCHECKEDTOMAKEFULLUSEOFTHEBENEFITSOFTHESURFACEMICROMACHINING,THEPLANETARYREDUCTIONGEARISDESIGNEDTOWARDUSINGTHEONCHIPMICROENGINETHEEXPECTEDGEARREDUCTIONRATIOISCALCULATEDANDCOMPAREDWITHTHECONVENTIONALCHAINGEARMECHANISMTHEMICROPLANETARYGEARMECHANISMPRESENTEDINTHISPAPERISEXPECTEDTOHAVE1621REDUCTIONRATIOUTILIZINGLESSSPACECONSUMPTIONTHISISANORDEROFMAGNITUDEHIGHERTHANTHEPREVIOUSLYREPORTEDDESIGNINASINGLEREDUCTIONGEARTRAINKEYWORDSMEMS,PLANETARYGEAR,REDUCTIONGEARSURFACEMICROMACHINING,SUMMITVPROCESSNOMENCLATUREASUNGEARBPLANETGEARSCINTERNALGEARFIXEDDINTERNALGEARROTARYNTHENUMBEROFUNITSOFGEARTRAINDDIAMETEROFTHEPITCHCIRCLENNUMBEROFTEETHPNUMBEROFPLANETSINTRODUCTIONTHEGEARMECHANISMSINMICROELECTROMECHANICALSYSTEMSMEMSARECOMMONLYEXPECTEDTOGENERATEHIGHTORQUEINTHECONFINEDMICROSIZESYSTEMSHOWEVER,ITISGENERALLYDIFFICULTFORTHEMICROSCALESYSTEMSTOHAVESUCHAHIGHTORQUEWITHOUTHAVINGMULTIPLEREDUCTIONSYSTEMSTHEDESIGNOFTHEREDUCTIONGEARDRIVEBASEDONAPLANETARYPARADOXGEARMECHANISMCANINCREASETHETORQUEWITHINACOMPACTAREA,SINCETHEMICROPLANETARYGEARSYSTEMHASANADVANTAGEOFHIGHREDUCTIONRATIOPERUNITVOLUME1HOWEVERITSMECHANISMISSOCOMPLICATEDTHATRELATIVELYFEWATTEMPTSHAVEBEENMADETOMINIATURIZETHEGEARSYSTEMS23SUZUMORIETAL2USEDTHEMECHANICALPARADOXPLANETARYGEARMECHANISMTODRIVEAROBOTFOR1INPIPESFORWARDORBACKWARDTHEYEMPLOYEDASINGLEMOTORTODRIVETHEGEARMECHANISMSWITHHIGHREDUCTIONRATIOPRECISEGEARFABRICATIONWASENABLEDBYMICROWIREELECTRICALDISCHARGEMACHININGMICROEDMTHESEPARTS,HOWEVER,SHOULDBEASSEMBLEDBEFORETHEDRIVEMOTORISATTACHEDTOTHEGEARBOXTAKEUCHIETAL3ALSOUSEDMICROEDMTOFABRICATETHEMICROPLANETARYGEARSTHEYSUGGESTEDSPECIALCERMETSORHIGHCARBONSTEELFORPOSSIBLEMATERIALSWHILETHEDESIGNCANACHIEVEAREDUCTIONRATIOOF200,THEGEARSSHOULDALSOBEASSEMBLEDANDMOTORDRIVENTOENABLETHEDRIVINGOFTHEPLANETARYGEARBYONCHIPMEANS,SANDIAULTRAPLANARMULTILEVELMEMSTECHNOLOGYSUMMITVPROCESS4FORPLANETARYGEARFABRICATIONISADOPTEDINTHISSTUDYTHESUMMITVPROCESSISTHEONLYFOUNDRYPROCESSAVAILABLEWHICHUTILIZESFOURLAYERSOFRELEASABLEPOLYSILICON,FORATOTALOFFIVELAYERSINCLUDINGAGROUNDPLANE5DUETOTHISFACT,ITISFREQUENTLYUSEDINCOMPLICATEDGEARMECHANISMSBEINGDRIVENBYONCHIPELECTROSTATICACTUATORS5HOWEVER,INMANYCASES,THEMICROENGINESMAYNOTPRODUCEENOUGHTORQUETODRIVETHEDESIREDMECHANICALLOAD,SINCETHEIRELECTROSTATICCOMBDRIVESTYPICALLYONLYGENERATEAFEWTENSOFMICRONEWTONSOFFORCEFORTUNATELY,THESEENGINESCANEASILYBEDRIVENATTENSOFTHOUSANDSOFREVOLUTIONSPERMINUTESTHISMAKESITVERYFEASIBLETOTRADESPEEDFORTORQUE7RODGERSETAL7PROPOSEDTWODUALLEVELGEARSWITHANOVERALLGEARREDUCTIONRATIOOF121THUSSIXOFTHESEMODULARTRANSMISSIONASSEMBLIESCANHAVEA2,985,9841REDUCTIONRATIOATTHECOSTOFTHEHUGESPACEWITHTHEDESIREFORSIZECOMPACTNESSANDATTHESAMETIME,HIGHREDUCTIONRATIOS,THEPLANETARYGEARSYSTEMISPRESENTEDINTHISPAPERITWILLBETHEFIRSTPLANETARYGEARMECHANISMUSINGSURFACEMICROMACHINING,TOTHEAUTHORSKNOWLEDGETHEPRINCIPLESOFOPERATIONSOFTHEPLANETARYGEARMECHANISM,FABRICATION,ANDTHEEXPECTEDPERFORMANCEOFTHEPLANETARYGEARSYSTEMSAREDESCRIBEDINTHISPAPERPRINCIPLESOFOPERATIONANALTERNATIVEWAYOFUSINGGEARSTOTRANSMITTORQUEISTOMAKEONEORMOREGEARS,IE,PLANETARYGEARS,ROTATEOUTSIDEOFONEGEAR,IESUNGEARMOSTPLANETARYREDUCTIONGEARS,ATCONVENTIONALSIZE,AREUSEDASWELLKNOWNCOMPACTMECHANICALPOWERTRANSMISSIONSYSTEMS1THESCHEMATICOFTHEPLANETARYGEARSYSTEMEMPLOYEDISSHOWNINFIGURESINCESUMMITVDESIGNSARELAIDOUTUSINGAUTOCAD2000,THEFIGURE1ISGENERATEDAUTOMATICALLYFROMTHELAYOUTMASKSAPPENDIX1ONEUNITOFTHEPLANETARYGEARSYSTEMISCOMPOSEDOFSIXGEARSONESUNGEAR,A,THREEPLANETARYGEARS,B,ONEFIXEDRINGGEAR,C,ONEROTATINGRINGGEAR,D,ANDONEOUTPUTGEARTHENUMBEROFTEETHFOREACHGEARISDIFFERENTFROMONEANOTHEREXCEPTAMONGTHEPLANETARYGEARSANINPUTGEARISTHESUNGEAR,A,DRIVENBYTHEARMCONNECTEDTOTHEMICROENGINETHEROTATINGRINGGEAR,D,ISSERVEDASANOUTPUTGEARFOREXAMPLE,IFTHEARMDRIVESTHESUNGEARINTHECLOCKWISEDIRECTION,THEPLANETARYGEARS,B,WILLROTATECOUNTERCLOCKWISEATTHEIROWNAXISANDATTHESAMETIME,THOSEWILLROTATEABOUTTHESUNGEARINCLOCKWISEDIRECTIONRESULTINGINPLANETARYMOTIONDUETOTHERELATIVEMOTIONBETWEENTHEPLANETARYGEARS,B,ANDTHEFIXEDRINGGEAR,C,THEROTATINGRINGGEAR,D,WILLROTATECOUNTERCLOCKWISEDIRECTIONTHISISSOCALLEDA3KMECHANICALPARADOXPLANETARYGEAR1FABRICATIONPROCEDUREANDTESTSTRUCTURESTHEFEATURESOFTHESUMMITVPROCESSOFFERFOURLEVELSOFSTRUCTURALPOLYSILICONLAYERSANDANELECTRICALPOLYLEVEL,ANDALSOEMPLOYTRADITIONALINTEGRATEDCIRCUITPROCESSINGTECHNIQUES4THESUMMITVTECHNOLOGYISESPECIALLYSUITABLEFORTHEGEARMECHANISMTHEPLANETARYGEARMECHANISMCANBEDRIVENBYTHEONCHIPENGINEANDTHUSISANOTHERREASONOFUSINGTHESUMMITVPROCESSSINCETHESANDIAPROCESSISSUCHAWELLKNOWNPROCEDURE57,ONLYBRIEFEXPLANATIONISPRESENTEDFIGURE2REPRESENTSTHECROSSSECTIONALVIEWOFFIGURE1,ANDALSOWASGENERATEDFROMTHEAUTOCADLAYOUTMASKSAPPENDIX1THEDISCONTINUITYINTHECROSSSECTIONISFORTHEETCHHOLESTHEPOLY1GRAYISUSEDFORTHEHUBSANDALSOPATTERNEDTOMAKETHEFIXEDRINGGEAR,IE,C,THESUNGEAR,IE,A,THEROTATINGRINGGEAR,IE,C,ANDTHEOUTPUTGEARISPATTERNEDINTHEPOLY2SINCETHEPLANETARYGEARNEEDSTOCONTACTBOTHTHEFIXEDRINGANDROTATINGRINGGEAR,POLY2ISADDEDTOPOLY3,WHERETHEGEARTEETHAREACTUALLYFORMEDTHEPOLY4LAYERISUSEDFORTHEARMTHATDRIVESTHESUNGEARAFTERTHERELEASEETCH,THEPLANETARYGEARSWILLFALLDOWNSOTHATTHOSEWILLENGAGEBOTHTHERINGGEARSTHEFIGURESFORTHETESTSTRUCTURESAREPRESENTEDINAPPENDIX2SINCETHEAIMOFTHISPAPERISTOSUGGESTAGEARREDUCTIONMECHANISM,THEPLANETARYGEARSYSTEMISDECOMPOSEDTOSEVERALGEARUNITSTOVERIFYITSPERFORMANCETHEFIRSTTESTSTRUCTUREISABOUTTHEARM,WHICHROTATESTHESUNGEAR,CONNECTEDTOTHEONCHIPENGINETHEANGULARVELOCITYOFTHEARMDEPENDSONTHEENGINEOUTPUTSPEEDTHESECONDTESTSTRUCTUREDESCRIBESTHEPOINTATWHICHTHESUNGEARANDPLANETARYGEARSAREENGAGEDTOTHEFIXEDRINGGEARBECAUSEOFTHEFACTTHATTHERINGGEARISFIXED,THEPLANETARYGEARISJUSTTRANSMITTINGTHETORQUEFROMTHESUNGEARTOTHEFIXEDRINGGEARWITHOUTPLANETMOTION,EG,ROTATINGITSOWNAXISNOTAROUNDTHESUNGEARWHENTHEROTATINGRINGGEARISMOUNTEDONTOPOFTHEFIXEDRINGGEAR,IE,THETHIRDTESTSTRUCTURE,THEPLANETARYGEARSBEGINTOROTATEAROUNDTHESUNGEARSOTHATTHEPLANETMOTIONAREENABLEDTHEREFORE,ONCEONEOUTPUTGEARISATTACHEDTOTHEROTATINGRINGGEAR,IE,THEFINALTESTSTRUCTURE,THEWHOLEREDUCTIONUNITISCOMPLETEDDISMANTLINGTHEPLANETARYGEARINTOTHREETESTSTRUCTURESALLOWSTHEPINPOINTINGOFPOSSIBLEERRORSINTHEGEARSYSTEMSOLUTIONSPROCEDUREANDEXPECTEDPERFORMANCETHEREDUCTIONRATIOISDEFINEDASTHERATIOBETWEENTHEANGULARVELOCITYOFTHEDRIVERGEARANDTHATOFTHEDRIVENGEARHIGHREDUCTIONRATIOSINDICATETRADINGSPEEDFORTORQUEFOREXAMPLE,A101GEARREDUCTIONUNITCOULDINCREASETORQUEANORDEROFMAGNITUDESINCETHEGEARSINTHEPLANETARYSYSTEMSHOULDBEMESHEDTOONEANOTHER,THEDESIGNOFGEARMODULESHOULDFOLLOWARESTRICTIONFOREXAMPLE,THENUMBEROFTEETHFORTHESUNGEARPLUSEITHERTHATOFTHEFIXEDRINGGEARORTHATOFTHEROTATINGRINGGEARSHOULDBETHEMULTIPLEOFTHENUMBEROFPLANETS,PEQUATION1EQUATION2,WHICHREPRESENTTHEREDUCTIONRATIO,SHOULDOBSERVETHEEQUATION1FIRSTTHENISTHENUMBEROFTHETEETHFORCORRESPONDINGGEARGEARS,A,B,C,DINTHEPLANETARYGEAISACOMPARABLESIZEOFTHECURRENTGEARREDUCTIONUNITS5,ANDTHETOOTHNUMBERSARE12,29,69,AND72RESPECTIVELYTHEREFORETHEOVERALLREDUCTIONRATIOIS1621FROMEQUATION2RODGERSETAL7REPORTEDA121REDUCTIONUNITUSINGSURFACEMICROMACHINING,WHICHISLESSTHANORDEROFMAGNITUDEFORTHEGEARREDUCTIONRATIOOFTHEPLANETARYGEARSYSTEMALTHOUGHTHEREDUCTIONFROMRODGERSETAL7NEEDSTOBEOCCUPIEDINAPPROXIMATELY0093MM2,THEPLANETARYGEARSYSTEMONLYUTILIZESANAREAOFAPPROXIMATELY0076MM2THUS,THISPLANETARYREDUCTIONDESIGNCANACHIEVEAN

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