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外文翻译--基于气浮支承和直线电机驱动技术的超精密气浮定位工作平台.doc

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外文翻译--基于气浮支承和直线电机驱动技术的超精密气浮定位工作平台.doc

附录附录一外文文献ANULTRAPRECISIONPOSITIONINGSTAGEISANEWTYPEOFPRECISIONMOTIONMECHANISM,WHICHISBASEDONGASLUBRICATEDBEARINGANDLINEARMOTORDRIVINGTHESTAGECANOVERCOMETHESHORTAGESRESULTFROMTHETRADITIONALPOSITIONINGSTAGE,SUCHASMORETRANSMISSIONS,BIGGERLAGOFRESPONSEANDEXISTEDNONLINEARFRICTIONBETWEENMOVINGPARTSANDSTATICONESTHESTAGECANACHIEVETHENANOMETERPOSITIONINGACCURACYANDRAPIDMOVING,ANDHASBEENWIDELYUSEDINSEMICONDUCTORLITHOGRAPHY,PRECISIONMEASUREMENTANDBIOMEDICALFIELDWHENTHEPOSITIONINGACCURACYAPPROACHESTHETRADITIONMANUFACTURINGLIMITS,TOMEETWITHTHEMORESTABILITYANDFASTERRESPONSEOFTHESTAGEHAVESOMEDIFFICULTYTHEFACTORS,FOREXAMPLETHESTIFFNESSESOFTHEGASLUBRICATEDBEARINGS,THELOCATIONOFTHEBEARINGSANDTHECONFIGURATIONOFSTAGE,CANINFLUENCETHEDYNAMICSCHARACTERISTICOFTHESTAGE,OBVIOUSLYTHEFACTORSHOWTOAFFECTTHEDYNAMICSCHARACTERISTICOFTHESTAGEISSTUDIEDINTHEDISSERTATIONANDCARRIEDOUTINTOOPTIMIZATIONCORRESPONDINGLYTHEPERFORMANCEHASBEENAPPLIEDINTHEDEVELOPMENTOF100NMLITHOGRAPHYSUCCESSFULLYTHESTRUCTURALDYNAMICSANDTHEFINITEELEMENTMETHODAREUSEDTOSTUDYTHESTIFFNESSHOWTOAFFECTTHEDYNAMICSCHARACTERISTICOFTHESTAGETHESTIFFNESSESAREMODIFIEDINTHEDIGITALMODELNATURALFREQUENCIESANDGENERALIZEDSTIFFNESSESOFTHESTAGEAREOBTAINEDBYTHECALCULATIONTHERELATIONSHIPBETWEENTHESUPPORTINGSTIFFNESSANDTHENATURALFREQUENCIESOFTHESTAGEISOBTAINEDBYLEASTSQUAREMETHODTHEOPTIMIZATIONMETHODSOFTHESTIFFNESSACCOUNTINGFORTHEGASLUBRICATEDBEARINGAREOBTAINEDTHROUGHTHESENSITIVITYANALYSISTHEPARTIALGRIDMOBILETECHNOLOGYISPUTFORWARDINTHESTUDYFIRSTLY,ANDSUCCESSEDINAPPLYINGTHEGASLUBRICATEDBEARINGPOSITIONOPTIMIZATIONWHENTHEAIRBEARINGSAREINSTALLEDINDIFFERENTPOSITIONS,THEMAXIMALRATIOBETWEENTHEOPTIMALANDWORSTPOSITIONINTHEFIRST5ORDERNATURALFREQUENCIESIS60961,54736,19246,16210,10917AND12972ANDTHERESPONSEAMPLITUDEISCHANGEDMANIFESTLY,FOREXAMPLETHEMAXIMALRATIOISABOUT10TIMESINTYPICALPOSITIONSTHEDRIVEARMISTHEKEYCOMPONENTOFTHEULTRAPRECISIONPOSITIONINGSTAGETHETOPOLOGYOPTIMIZATIONTECHNOLOGYISUSEDTOSOLVETHEDESIGNOFTHEDRIVEARMTHEPERFECTDESIGNISPROPOSEDTHROUGHTHEOPTIMIZATIONTHEDRIVEARMDESIGNPROBLEMISSOLVEDBASEDONTHERESULTSFROMTHEABOVERESEARCHOFTHEULTRAPRECISIONPOSITIONINGSTAGEWITHGASLUBRICATEDBEARINGS,THEEXPERIMENTALMODALANALYSISISCONDUCTEDONTHESTAGEWHENTHEBEARINGISONTHEGIVENPOSITIONANDTHESTIFFNESSESOFTHEBEARINGSAREEQUALTO70N/ΜM,THEMAXIMALRELATIVEERRORIS324COMPAREDWITHTHERESULTSFROMTHEEXPERIMENTANDTHEFINITEELEMENTANALYSISREGULATEDTHESUPPLYPRESSUREOFTHEGASLUBRICATEDBEARINGS,THEDYNAMICSCHARACTERISTICOFTHESTAGEISCHANGEDCOMPAREDWITHTHERESULTSFROMTHEEXPERIMENTALMODELANALYSISANDTHEFINITEELEMENTANALYSISUNDERTHEDIFFERENTSUPPLYPRESSUREORTHESTIFFNESS,THERESULTSAREINAGREEMENTWITHTHEEXPERIMENTALMODELANALYSISANDTHEFINITEELEMENTANALYSISHIGHSPEEDANDHIGHPRECISIONMOTIONISONEOFTHEMOSTIMPORTANTTECHNIQUESINELECTRONICMANUFACTURINGMACHINESINICPACKING,WITHTHEREDUCTIONINCHIPSIZEANDTHEINCREASEINPRODUCTIVITY,ITNEEDSHIGHERACCELERATION,HIGHERVELOCITYANDHIGHERPRECISION,WHICHCHALLENGESDESIGNINGSUCHCONTROLLERSWITHHIGHPERFORMANCETHISDISSERTATIONANALYZESTHEMOTIONOFTHEICPACKAGINGMACHINESFIRSTTOFINDOUTTHATITISAREPETITIVEFASTMOTIONBETWEENTWOPOINTSWITHHIGHACCELERATIONANDHIGHPOSITIONACCURACY,WHILETHEREQUIREMENTFORTRACKINGERRORDURINGTHEMOTIONISMODESTTHUSITCANBEREGARDEDASAREPETITIVEFASTPOINTTOPOINTMOTIONTHENINDICESABOUTTHEPOINTTOPOINTMOTIONAREPROPOSEDATLAST,BASEDONASERVOSYSTEMWITHHIGHACCELERATION,ANXYPOSITIONPLATFORMDRIVENBYLINEARMOTORS,SOMECONTROLLERSAREPROPOSEDTOMAKETHEPLATFORMPOSITIONQUICKLYWITHHIGHPRECISIONONTHEBASISOFTHEKINETICSANDCONTINUOUSEQUATIONSOFTHEFLUIDMECHANICS,THELAWISSTUDIEDABOUTTHESTATICCHARACTERISTICSOFTHEAEROSTATICGUIDEUSINGORIFICERESTRICTIONTHEINFLUENCEOFTHEORIFICEANDTHETHICKNESSOFTHEAIRFILMONTHECARRYINGCAPACITY,RIGIDITYANDAIRCONSUMPTIONHASBEENANALYZEDTHESTRUCTUREDESIGNMETHODOFTHEAEROSTATICGUIDEISPRESENTEDAGROUPOFOPTIMIZEDPARAMETERSABOUTTHEAEROSTATICGUIDEISPRESENTED,ANDTHESTATICCHARACTERISTICSOFTHEPOSITIONINGTABLEAREVERIFIEDAHIGHSPEEDANDHIGHPRECISIONAIRSUPPORTEDPOSITIONINGTABLEWHICHISDRIVENBYVOICECOILACTUATORS,SUPPORTEDANDDECOUPLEDBYAEROSTATICGUIDEISPRESENTEDITAPPLIESVOICECOILACTUATORSTOREPLACETHEFORMALSERVOMOTORSTHISELIMINATESTHEBACKLASHANDFRICTIONBETWEENTHELEADSCREWANDNUTITAPPLIESTHEAEROSTATICGUIDETOELIMINATEFRICTIONTHETWOVOICECOILACTUATORSAREMOUNTEDONTHEBASEBYUSINGTHEAIRSUPPORTEDDECOUPLESTRUCTURE,SOTHEINERTIAOFTHETABLECANBEREDUCEDTHESEMEANINGSMAKETHEPRECISIONPOSITIONINGTABLEENHANCETHEPERFORMANCEPOSSIBLEWITHHIGHSPEED,HIGHPOSITIONINGACCURACY,HIGHRESOLUTIONANDRELIABILITY,XYTABLECANIMPLEMENTTWODIMENSIONALMOVEMENTANDHASBEENEXTENSIVELYUSEDINMACHININGEQUIPMENTASTHEKEYMOTIONMODULEOFINTEGRATEDCIRCUITSICBONDER,THEEXCELLENTPRECISIONANDDYNAMICPERFORMANCEOFXYTABLEAREIMPORTANTFORBONDINGFACILITIESRECENTLY,WITHTHEINCREASEOFTHEICCHIPINTEGRATIONDEGREEANDGREATDEMANDOFTHEMARKET,HIGHSPEEDANDPRECISIONHAVEBECOMETHETRENDINDEVELOPMENTOFICBONDINGEQUIPMENTNOW,MOSTOFTHEICBONDINGEQUIPMENTS,SUCHASWIREBONDERANDDIEBONDERUSESCREWDRIVENXYTABLELEADSCREWISUSEDASTHESWITCHINGMECHANISMTOCHANGETHEROTARYMOTIONTOLINEARMOTION,WHICHRESULTSINMOTIONGAPANDLARGEINERTIA,LIMITINGTHEPRECISION,SPEEDANDACCELERATIONOFTHETABLETOBEIMPROVEDFURTHERBYUSINGLINEARMOTIONACTUATORINPLACEOFROTATINGELECTRICALMACHINETODRIVEXYTABLE,THEDEFICIENCYOFSCREWDRIVENXYTABLECANBEAVOIDEDTOSOMEEXTENTBUTNEITHERSCREWDRIVENXYTABLENORLINEARMOTORDRIVENXYTABLECANSOLVETHERESPONSELAG,LIMITEDSPEEDANDACCELERATION,ANDITISDIFFICULTTOENHANCETHEPOSITIONINGACCURACYSOTHEHIGHSPEEDANDPRECISIONPOSITIONINGSYSTEMSHOULDBERESEARCHEDBASEDONNEWDRIVINGSYSTEMANDDYNAMICCONTROLALGORITHM,ANDITWILLBEHELPFULTOPROMOTETHEICPACKAGINGEQUIPMENTDEVELOPMENTINTHISPAPER,BASEDONVOICECOILACTUATORVCADIRECTDRIVE,AKINDOFXYTABLEUSINGNOVELFLEXIBLEDECOUPLINGMECHANISMISPROPOSEDBYCONSIDERINGTHEPOSITIONINGTABLEASLUMPEDMASSSPRINGSYSTEMANDUSINGTHENEWTONMECHANICSPRINCIPLEANDELECTROMAGNETICTHEORY,THEDYNAMICMODELOFXYTABLEANDTHEVCAAREDEVELOPED,ANDTHEELECTROMECHANICALCOUPLINGCONTROLMODELOFTHESYSTEMISDEVELOPEDTHROUGHLAPLACETRANSFORMBASEDONDISPLACEMENTPIDCONTROLLER,THELOOPLOCKEDCONTROLLINGALGORITHMFORTHEPOSITIONINGSYSTEMISINVESTIGATED,ANDTHEPRECISIONEXPERIMENTISCARRIEDOUTTHEDESIGNED一XYTABLEMAINLYCONSISTSOFBASE,VOICECOILACTUATOR,XANDYMOBILETABLES,FLEXIBLEDECOUPLINGMECHANISMANDLINEARGRATINGVCAISUSEDASTHEDRIVINGELEMENTREALIZINGTHEDIRECTDRIVEOFXYTABLEYTABLEISMOUNTEDONTHETOPOFXTABLEYAXIALVCAISCONNECTEDWITHYTABLETHROUGHTHEFLEXIBLEDECOUPLINGMECHANISM,ANDSOYAXIALVCACANBEFIXEDONTHEBASETHEINERTIAOFMOTIONREDUCINGMAKESITPOSSIBLETHATTHEPOSITIONINGTABLEMOVESATHIGHSPEEDANDPRECISIONTHELINEARGRATINGMOUNTEDONTHEBASEISUSEDASTHEFEEDBACKELEMENTOFXTABLEANDTHATMOUNTEDONXTABLEISUSEDASTHEFEEDBACKELEMENTOFYTABLESPECIFICFLEXIBLEDECOUPLINGMECHANISMCANBEDESCRIBEDASFOLLOWSYAXIALVCAISFIXEDWITHGUIDINGFIN,ANDTHEGUIDINGFINISMOUNTEDONTHEBASEANDCANMOVEALONGSLIDEWAYINYDIRECTIONONEENDOFTHEPRELOADEDCONNECTINGRODISMOUNTEDONTHEGUIDINGFINANDTHEOTHERENDISCONNECTEDWITHPRELOADEDSPRING,WHILETHEOTHERENDOFSPRINGISMOUNTEDONGUIDINGFINFRONTANDBACKSHAFTINGBEARINGSAREMOUNTEDONGUIDINGFINANDROLLALONGFRONTANDBACKLAPPINGPLATES,RESPECTIVELYYAXIALVCADRIVESYTABLEBYDRIVINGFLEXIBLEDECOUPLINGMECHANISMANDWHENYTABLEMOVESWITHXTABLEINDIRECTION,FRONTANDBACKSHAFTINGBEARINGSROLLALONGFRONTANDBACKLAPPINGPLATESSEPARATELY,SOTHEMOTIONDECOUPLINGOFANDYMOTIONCANBEIMPLEMENTEDFLEXIBLEDECOUPLINGMECHANISMHASFLEXIBLEHINGESANDPRELOADEDSPRINGFLEXIBLEHINGESCANELIMINATETHEDEFORMATIONINTERFERENCECAUSEDBYTHEASSEMBLYERROR,ANDTHESMALLELASTICDEFORMATIONCANELIMINATETHEINSTANTINTERFERENCEGENERATEDBYTHELARGEINERTIARESULTINGFROMTHEHIGHSPEEDANDACCELERATIONPRELOADEDSPRINGCANELIMINATETHECLEARANCE.VCAISASPECIALDIRECTDRIVEELEMENTITSOPERATINGPRINCIPLEISLORENTZFORCETHEVERSATILEDIRECTDRIVECHARACTERISTICSOFVCA,SUCHASHIGHSPEEDANDACCELERATION,COGFREE,INFINITEPOSITIONSENSITIVEANDPRECISECONTROLCHARACTERISTICSMAKEVCAAPERFECTDIRECTDRIVESERVOCONTROLDEVICEITISADAPTIVEINHIGHACCE1ERATION,HIGHFREQUENCYMOTIVATIONANDHIGHPRECISIONPOSITIONINGCONTROLSYSTEMSOTHELAL30005085一BVCAISSELECTEDFROMSMACANDITSPEAKFORCEIS202N.MAXIMUMDISPLACEMENT50MM,FORCECONSTANT86,ANDMAXIMUMMOVINGMASS08KGINORDERTOIMPROVETHESYSTEMRELIABILITY,MOSTOFTHECOMPONENTSARESELECTEDFROMMATUREPRODUCTSLINEARMOTIONGUIDESVR3125PX17ZANDRSH一9KMARESELECTEDFROMTHKNK一9/12TNANDNK一8/12TNSHAFTBEARINGSOFINAAREUSEDINTHESYSTEMTHEKEYPARTS,SUCHASX,YTABLEANDGUIDINGFINAREMADEOFHARDALUMINUMINORDERTOIMPROVETHESPEEDANDPOSITIONINGACCURACYOFXYTABLEUSEDFORICBONDER,BASEDONVCADIRECTDRIVE,ANXYTABLEUSINGNOVELFLEXIBLEDECOUPLINGMECHANISMISPROPOSEDTHEINERTIAOFMOTIONREDUCINGMAKESITPOSSIBLETHATTHEPOSITIONINGTABLEMOVESATHIGHSPEEDANDPRECISIONTHELINEARGRATINGISUSEDASTHEFEEDBACKELEMENTSOHIGHSPEEDANDPRECISIONPOSITIONINGOFTHETABLECANBEEFFECTIVELYGUARANTEEDXYTABLEDEFORMATIONINTERFERENCECAUSEDBYASSEMBLYERRORANDINSTANTINTERFERENCEGENERATEDBYDYNAMICLOADMOVINGWITHHIGHSPEEDANDACCELERATIONCANBEELIMINATEDTHROUGHTHEFLEXIBLEDECOUPLINGMECHANISMBYCONSIDERINGTHEPOSITIONINGTABLEASLUMPEDMASSSPRINGSYSTEMANDUSINGTHENEWTONMECHANICSPRINCIPLEANDELECTROMAGNETICTHEORY,THEELECTROMECHANICALCOUPLINGCONTROLMODELOFTHESYSTEMISDEVELOPEDBASEDONDISPLACEMENTPIDCONTROLLER,THELOPLOCKEDCONTROLLINGALGORITHMFORTHEPOSITIONINGSYSTEMISPROPOSEDTHESYSTEMDYNAMICPERFORMANCEISIMPROVEDEFFECTIVELYTHEEXPERIMENTALRESULTSVALIDATEDTHECORRECTNESSOFTHEMODELANDTHETHEORYCOMPAREDWITHTRADITIONALXYTABLE,THETABLEHASHIGHERSPEEDACCELERATIONANDPOSITIONINGACCURACY

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