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外文翻译--基于气浮支承和直线电机驱动技术的超精密气浮定位工作平台.doc

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外文翻译--基于气浮支承和直线电机驱动技术的超精密气浮定位工作平台.doc

附录附录一外文文献Anultraprecisionpositioningstageisanewtypeofprecisionmotionmechanism,whichisbasedongaslubricatedbearingandlinearmotordriving.Thestagecanovercometheshortagesresultfromthetraditionalpositioningstage,suchasmoretransmissions,biggerlagofresponseandexistednonlinearfrictionbetweenmovingpartsandstaticones.Thestagecanachievethenanometerpositioningaccuracyandrapidmoving,andhasbeenwidelyusedinsemiconductorlithography,precisionmeasurementandbiomedicalfield.Whenthepositioningaccuracyapproachesthetraditionmanufacturinglimits,tomeetwiththemorestabilityandfasterresponseofthestagehavesomedifficulty.Thefactors,forexamplethestiffnessesofthegaslubricatedbearings,thelocationofthebearingsandtheconfigurationofstage,caninfluencethedynamicscharacteristicofthestage,obviously.Thefactorshowtoaffectthedynamicscharacteristicofthestageisstudiedinthedissertationandcarriedoutintooptimizationcorrespondingly.Theperformancehasbeenappliedinthedevelopmentof100nmlithographysuccessfully.Thestructuraldynamicsandthefiniteelementmethodareusedtostudythestiffnesshowtoaffectthedynamicscharacteristicofthestage.Thestiffnessesaremodifiedinthedigitalmodel.Naturalfrequenciesandgeneralizedstiffnessesofthestageareobtainedbythecalculation.Therelationshipbetweenthesupportingstiffnessandthenaturalfrequenciesofthestageisobtainedbyleastsquaremethod.Theoptimizationmethodsofthestiffnessaccountingforthegaslubricatedbearingareobtainedthroughthesensitivityanalysis.Thepartialgridmobiletechnologyisputforwardinthestudyfirstly,andsuccessedinapplyingthegaslubricatedbearingpositionoptimization.Whentheairbearingsareinstalledindifferentpositions,themaximalratiobetweentheoptimalandworstpositioninthefirst5ordernaturalfrequenciesis6.0961,5.4736,1.9246,1.6210,1.0917and1.2972.Andtheresponseamplitudeischangedmanifestly,forexamplethemaximalratioisabout10timesintypicalpositions.Thedrivearmisthekeycomponentoftheultraprecisionpositioningstage.Thetopologyoptimizationtechnologyisusedtosolvethedesignofthedrivearm.Theperfectdesignisproposedthroughtheoptimization.Thedrivearmdesignproblemissolved.Basedontheresultsfromtheaboveresearchoftheultraprecisionpositioningstagewithgaslubricatedbearings,theexperimentalmodalanalysisisconductedonthestage.Whenthebearingisonthegivenpositionandthestiffnessesofthebearingsareequalto70N/μm,themaximalrelativeerroris3.24comparedwiththeresultsfromtheexperimentandthefiniteelementanalysis.Regulatedthesupplypressureofthegaslubricatedbearings,thedynamicscharacteristicofthestageischanged.Comparedwiththeresultsfromtheexperimentalmodelanalysisandthefiniteelementanalysisunderthedifferentsupplypressureorthestiffness,theresultsareinagreementwiththeexperimentalmodelanalysisandthefiniteelementanalysis.Highspeedandhighprecisionmotionisoneofthemostimportanttechniquesinelectronicmanufacturingmachines.InICpacking,withthereductioninchipsizeandtheincreaseinproductivity,itneedshigheracceleration,highervelocityandhigherprecision,whichchallengesdesigningsuchcontrollerswithhighperformance.ThisdissertationanalyzesthemotionoftheICpackagingmachinesfirsttofindoutthatitisarepetitivefastmotionbetweentwopointswithhighaccelerationandhighpositionaccuracy,whiletherequirementfortrackingerrorduringthemotionismodest.Thusitcanberegardedasarepetitivefastpointtopointmotion.Thenindicesaboutthepointtopointmotionareproposed.Atlast,basedonaservosystemwithhighacceleration,anXYpositionplatformdrivenbylinearmotors,somecontrollersareproposedtomaketheplatformpositionquicklywithhighprecision.Onthebasisofthekineticsandcontinuousequationsofthefluidmechanics,thelawisstudiedaboutthestaticcharacteristicsoftheaerostaticguideusingorificerestriction.Theinfluenceoftheorificeandthethicknessoftheairfilmonthecarryingcapacity,rigidityandairconsumptionhasbeenanalyzed.Thestructuredesignmethodoftheaerostaticguideispresented.Agroupofoptimizedparametersabouttheaerostaticguideispresented,andthestaticcharacteristicsofthepositioningtableareverified.Ahighspeedandhighprecisionairsupportedpositioningtablewhichisdrivenbyvoicecoilactuators,supportedanddecoupledbyaerostaticguideispresented.Itappliesvoicecoilactuatorstoreplacetheformalservomotors.Thiseliminatesthebacklashandfrictionbetweentheleadscrewandnut.Itappliestheaerostaticguidetoeliminatefriction.Thetwovoicecoilactuatorsaremountedonthebasebyusingtheairsupporteddecouplestructure,sotheinertiaofthetablecanbereduced.Thesemeaningsmaketheprecisionpositioningtableenhancetheperformancepossible.Withhighspeed,highpositioningaccuracy,highresolutionandreliability,XYtablecanimplementtwodimensionalmovementandhasbeenextensivelyusedinmachiningequipment.AsthekeymotionmoduleofintegratedcircuitsICbonder,theexcellentprecisionanddynamicperformanceofXYtableareimportantforbondingfacilities.Recently,withtheincreaseoftheICchipintegrationdegreeandgreatdemandofthemarket,highspeedandprecisionhavebecomethetrendindevelopmentofICbondingequipment.Now,mostoftheICbondingequipments,suchaswirebonderanddiebonder.usescrewdrivenXYtable.Leadscrewisusedastheswitchingmechanismtochangetherotarymotiontolinearmotion,whichresultsinmotiongapandlargeinertia,limitingtheprecision,speedandaccelerationofthetabletobeimprovedfurther.ByusinglinearmotionactuatorinplaceofrotatingelectricalmachinetodriveXYtable,thedeficiencyofscrewdrivenXYtablecanbeavoidedtosomeextent.ButneitherscrewdrivenXYtablenorlinearmotordrivenXYtablecansolvetheresponselag,limitedspeedandacceleration,anditisdifficulttoenhancethepositioningaccuracy.Sothehighspeedandprecisionpositioningsystemshouldberesearchedbasedonnewdrivingsystemanddynamiccontrolalgorithm,anditwillbehelpfultopromotetheICpackagingequipmentdevelopment.Inthispaper,basedonvoicecoilactuatorVCAdirectdrive,akindofXYtableusingnovelflexibledecouplingmechanismisproposed.ByconsideringthepositioningtableaslumpedmassspringsystemandusingtheNewtonmechanicsprincipleandelectromagnetictheory,thedynamicmodelofXYtableandtheVCAaredeveloped,andtheelectromechanicalcouplingcontrolmodelofthesystemisdevelopedthroughLaplacetransform.BasedondisplacementPIDcontroller,thelooplockedcontrollingalgorithmforthepositioningsystemisinvestigated,andtheprecisionexperimentiscarriedout.Thedesigned一XYtablemainlyconsistsofbase,voicecoilactuator,XandYmobiletables,flexibledecouplingmechanismandlineargrating.VCAisusedasthedrivingelement.RealizingthedirectdriveofXYtable.YtableismountedonthetopofXtable.yaxialVCAisconnectedwithYtablethroughtheflexibledecouplingmechanism,andsoyaxialVCAcanbefixedonthebase.Theinertiaofmotionreducingmakesitpossiblethatthepositioningtablemovesathighspeedandprecision.ThelineargratingmountedonthebaseisusedasthefeedbackelementofXtableandthatmountedonXtableisusedasthefeedbackelementofYtable.SpecificflexibledecouplingmechanismcanbedescribedasfollowsyaxialVCAisfixedwithguidingfin,andtheguidingfinismountedonthebaseandcanmovealongslidewayinydirection.Oneendofthepreloadedconnectingrodismountedontheguidingfinandtheotherendisconnectedwithpreloadedspring,whiletheotherendofspringismountedonguidingfin.Frontandbackshaftingbearingsaremountedonguidingfinandrollalongfrontandbacklappingplates,respectively.yaxialVCAdrivesYtablebydrivingflexibledecouplingmechanism.AndwhenYtablemoveswithXtableindirection,frontandbackshaftingbearingsrollalongfrontandbacklappingplatesseparately,sothemotiondecouplingofandYmotioncanbeimplemented.Flexibledecouplingmechanismhasflexiblehingesandpreloadedspring.Flexiblehingescaneliminatethedeformationinterferencecausedbytheassemblyerror,andthesmallelasticdeformationcaneliminatetheinstantinterferencegeneratedbythelargeinertiaresultingfromthehighspeedandacceleration.Preloadedspringcaneliminatetheclearance.VCAisaspecialdirectdriveelement.ItsoperatingprincipleisLorentzforce.TheversatiledirectdrivecharacteristicsofVCA,suchashighspeedandacceleration,cogfree,infinitepositionsensitiveandprecisecontrolcharacteristicsmakeVCAaperfectdirectdriveservocontroldevice.Itisadaptiveinhighacce1eration,highfrequencymotivationandhighprecisionpositioningcontrolsystem.SotheLAL30005085一BVCAisselectedfromSMAC.anditspeakforceis202N.Maximumdisplacement50mm,forceconstant86,andmaximummovingmass0.8kg.Inordertoimprovethesystemreliability,mostofthecomponentsareselectedfrommatureproducts.LinearmotionguidesVR3125PX17ZandRSH一9KMareselectedfromTHK.NK一9/12TNandNK一8/12TNshaftbearingsofINAareusedinthesystem.Thekeyparts,suchasX,Ytableandguidingfinaremadeofhardaluminum.InordertoimprovethespeedandpositioningaccuracyofXYtableusedforICbonder,basedonVCAdirectdrive,anXYtableusingnovelflexibledecouplingmechanismisproposed.Theinertiaofmotionreducingmakesitpossiblethatthepositioningtablemovesathighspeedandprecision.Thelineargratingisusedasthefeedbackelementsohighspeedandprecisionpositioningofthetablecanbeeffectivelyguaranteed.XYtabledeformationinterferencecausedbyassemblyerrorandinstantinterferencegeneratedbydynamicloadmovingwithhighspeedandaccelerationcanbeeliminatedthroughtheflexibledecouplingmechanism.ByconsideringthepositioningtableaslumpedmassspringsystemandusingtheNewtonmechanicsprincipleandelectromagnetictheory,theelectromechanicalcouplingcontrolmodelofthesystemisdeveloped.BasedondisplacementPIDcontroller,theloplockedcontrollingalgorithmforthepositioningsystemisproposed.Thesystemdynamicperformanceisimprovedeffectively.Theexperimentalresultsvalidatedthecorrectnessofthemodelandthetheory.ComparedwithtraditionalXYtable,thetablehashigherspeedaccelerationandpositioningaccuracy.

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