外文翻译--对由微注塑模型的聚合物微结构复制的实施和分析 英文版.pdf

INSTITUTEOFPHYSICSPUBLISHINGJOURNALOFMICROMECHANICSANDMICROENGINEERINGJMICROMECHMICROENG142004415–422PIIS096013170469783XIMPLEMENTATIONANDANALYSISOFPOLYMERICMICROSTRUCTUREREPLICATIONBYMICROINJECTIONMOLDINGYUCHUANSU1,2,JATANSHAH3ANDLIWEILIN1,21BERKELEYSENSORACTUATORCENTER,UNIVERSITYOFCALIFORNIA,BERKELEY,CA94720,USA2DEPARTMENTOFMECHANICALENGINEERING,UNIVERSITYOFCALIFORNIA,BERKELEY,CA94720,USA3DEPARTMENTOFMECHANICALENGINEERING,UNIVERSITYOFMICHIGAN,ANNARBOR,MI48105,USAEMAILYUCHSUMEBERKELEYEDURECEIVED30SEPTEMBER2003PUBLISHED17DECEMBER2003ONLINEATSTACKSIOPORG/JMM/14/415DOI101088/09601317/14/3/015ABSTRACTTHISPAPERPRESENTSTHEADAPTATIONOFACONVENTIONALINJECTIONMOLDINGPROCESSTOTHEMASSREPLICATIONOFPOLYMERICMICROSTRUCTURESWITHAPPROPRIATEMOLDDESIGNANDPROCESSCONTROLUSINGWETETCHEDSILICONWAFERSWITHMICROSTRUCTURESONTHESURFACESASMOLDINSERTS,WEHAVESUCCESSFULLYPREDICTED,IMPROVEDANDOPTIMIZEDTHEREPLICATIONRESULTSTHEFLOWBEHAVIORSOFPOLYMERMELTSINMICROMOLDCAVITIESARECHARACTERIZEDBYBOTHSIMULATIONANDEXPERIMENTSAM