外文翻译--显微车床的影像反馈控制 英文版.pdf

VISUALFEEDBACKCONTROLOFAMICROLATHEHIROTAKAOJIMA1,KATSUHIROSAITO1,LIBOZHOU1,JUNSHIMIZU1,HIROSHIEDA11IBARAKIUNIVERSITYKEYWORDSMICROLATH,VISUALFEEDBACK,POSITIONCONTROLABSTRACTMICROMACHININGPROGRESSESRAPIDLYINRECENTYEARSINTHISRESEARCH,AMICROLATHEWHICHISINSTALLABLEANDOPERATIONALINSIDESEMVACUUMCHAMBERHASBEENDESIGNEDANDDEVELOPEDASAFIRSTSTEP,VISUALLYGUIDEDMICROLATHESYSTEMISDEVELOPEDWITHIMAGEOFCCDCAMERADEVICEINSTEADOFSEMIMAGEUNLIKETHECONVENTIONALFEEDBACKCONTROLWHICHPOSITIONSTHEXYTABLEONLY,THISSCHEMEOFFERSADIRECTCONTROLOFTHEPOSITION,PATHANDSPEEDOFTHETOOLTIPUSINGPROPOSEDMETHOD,CUTTINGEXPERIMENTWASACHIEVED,ANDITISCONFIRMEDTHATDEVELOPEDMICROLATHESYSTEMISEFFECTIVETODOCUTTING1INTRODUCTIONRECENTLY,THESYSTEMCAPABLEOFPRODUCINGTHEMICROPARTSAREREQUESTEDALONGWITHTHEMINIATURIZATION1MICROMACHININGPROGRESSESRAPIDLYINRECENTYEARSTHEEXPLORATORYRESEARCHHASAPPROACHEDTOALEVELOFACCESSINGASINGLEMOLECULEORATOMASADRIVINGFORCE,MEMSMICROELECTRONICMECHANICALSYSTEMHASBEENPLAYINGAMAJORROLEINMAKINGMICROCOMPONENTSANDDEVICESHO