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doc no. : nanoton-dac-ta0011 nanoton gmbhinstruction card rev. : h sheet :1of18 operation : (工序名称) :track alignment(vb) process procedure part name :project : (产品编号) :nanoton nano-head(品种) :msk800/msk802/msk804/msk805 machine use :tweezer ,stereo scope, oven machineprocess code : (所需机器) :ta station, 100x镜, oven machine(工序代号) :ta001 tools 否则,知会工程人员调整。 important : only documents with red “released“ stamp are considered as official. form no : qf-eng-0010c-02 doc no. :nanoton-dac-ta0011 nanoton gmbhinstruction card rev. :h sheet :13of18 4.10 “slot 5x engagement“ select and joystick menu will appear. 点击“slot 5x engagement”键,显示操纵杆菜单。 4.10.1 banance the optical flat such that you see frings of right slot on the module a in the field of view.using joystick adjust the picture to proper position.then click “done“.using the mouse place the arrow on the center of the main fringe and on the module edge. now two lines appear. left mouse click on the text box and input the number of frings seen on the screen(3 frings at most). then measure the three other targets like this.afer measurement,the main screen will appear. 平稳地把滤光片放在module a和b中间,直到能看到module a右边槽(slot)干涉条纹, 可用操纵杆菜单屏调节键把图形移动到所需位置(光标线中间与module上交界线大体重合) ,然后点击“done”键。弹出该固定的图象框,根据该图象象框下面的选择提示(slot和 fringe),用光标分别在槽边和主要干涉条纹的中间点出一条标记线. 在点击“input fringe number“对话框,输入干涉条纹的数量(注意:干涉条纹的数量肯定不能显示超过三条,否则 返工。), 然后机器会依次自动走到module a左边的槽(slot), modue b左边的槽(slot), module b右边的槽(slot)提示操作员按上面的过程操作。测量完干涉条纹的数量后,机器返回主菜单。 important : only documents with red “released“ stamp are considered as official. form no : qf-eng-0010c-02 using the mouse place the arrow on the center of the main frings and left click,a line will appear in the selected area. 用鼠标在主要干涉条纹中间(左击)点 出一条标记线。 doc no. :nanoton-dac-ta0011 nanoton gmbhinstruction card rev. :h sheet :14of18 tree kinds of frings as follows: 干涉条纹的数量规定如下三图(分别为0,1,2条) important : only documents with red “released“ stamp are considered as official. form no : qf-eng-0010c-02 using the mouse place the arrow on the module edge and left click,a line will appear in the selected area. 用鼠标在module边缘(左击)点出一条 标记线。 left mouse click in the text box and input the number of fringes seen in the screen。 点击“input fringe number“ 对话框,输入干涉条纹的数量。 this indicates 0 fringes. 干涉条纹数量为0。 doc no. :nanoton-dac-ta0011 nanoton gmbhinstruction card rev. :h sheet :15of18 4.11 “final measure“locate the a right target using the joystick menu and the other three target locations will be found and measured automatically.slot engagement and track alignment result will be displayed when measurements are completed. 点击“final measure”键,在joystick屏用调节键找到module a的右边target, 点击“done”键后, 机器会自动对好4个target,然后,slot engagement和track aligment的结果会自动显示出来。 (如下图示) important : only documents with red “released“ stamp are considered as official. form no : qf-eng-0010c-02 this indicates 1 fringe. 干涉条纹数量为1。 this indicates 2 fringe. 干涉条纹数量为2。 doc no. :nanoton-dac-ta0011 nanoton gmbhinstruction card rev. :h sheet :16of18 control pointlimit /spec track alignment+/- 1 um gap spacing (trk1&16) 1501 +/- 45 um gap parallelism+/- 2.5 um mod a/b to left/right slot distance 0.356 +/- 0.050 mm 4.12 post uv audit- it will be the responsibility of engineering to audit 10 out of every 100 head assemblies built.use a stereoscope(x10) to visually inspect both ends of the assembly for module to module parallelism. head assemblies should represent example 1 in the diagram below.if the average of the 10 assemblies audited should begin to show peaks or valley as shown in example 2 or 3 ,an adjustment of the roll micrometer is needed.do not adjust roll due to the inspection of one part. 固化后检查,工程人员抽检10%的料,在10x下检查module a和module b的两端的平行情况, 如图1为ok, 图2, 图3为failure,若10个head都有图2或图3的情况,工程人员需调整roll旋钮。 4.13 apply bondline 7247 at the two ends of head. 在head的两端涂7247胶水 4.13.1 remove syringe from freezer,check expiration date on syinge has not expired before using.thaw enough so that the viscosity is such that it can be dispensed and flow to the tip.if adhesive is expired,contact safety representive for disposal. 从冰箱内取出注射器,检查注射器的胶水有无过期。解冻后,胶水才挤出到针尖,若胶水 过期,按安全使用说明处理。 important : only documents with red “released“ stamp are considered as official. form no : qf-eng-0010c-02 doc no. :nanoton-dac-ta0011 nanoton gmbhinstruction card rev. :h sheet :17of18 4.13.2 mount to efd dispenser, apply 7247 glue at both end of the head( use the piston which for op-61 to push the adhesive to the tip and apply as specified). 装上efd喷嘴,用7247胶涂head两端(要用装上op-61胶水的活塞杆挤出胶水)。 4.13.3 the adhesive can not be out of the freezer longer than 35 minuts. 要求胶水必需在35min内使用。 4.13.4 adhsive can not be thawed and refrozen.allow adhesive to sit until solid then dispose in common trash. 胶水不能回收或重新冷冻,挤出不用胶水,等胶水固化后,才按适合方法处理。 4.13.5 apply specified amount of bondline 7247 to each end of the modules.the adhesive should extend over both module but not to exceed the 0.4mm thickness at each end of the module as shown in the picture below. 在module两端点上适量的7247胶水。要求7247胶水能盖住之前的op-61胶水,但不能超过两 端0.4mm的厚度(如下图所示) 4.13.6 place the tape head surface up in tray so that the 7247 does not flow to the ths and /or the transverse slots. 把点完7247胶水的head平放好,要求把tbs面(contact lapping surface)朝上放好,避免胶水流 到 tbs或transverse slots. 4.13.7 cure head assembly for 4 hours at 65(+/-5). 把head放进锔炉内锔炉,要求: 65(+/-5), 4hrs. 4.14 inspection head afer curing 固化后胶水检查 4.14.1 click “measure“ in the main menu. 从主菜单中选择“measure”键。 4.14.1.1 click “measure post adhesive cure“,if you want to measure head assembly. 若测量head assembly,则选择“measure post adhesive cure”. 4.14.1.2 click “measure in carrier“ ,if you want to measure head to carrier. 若测量head to carrier, 则选择“measure in carrier” 4.14.2 input heads id.locate head with module a on stationary mount.use 5x lens to measure slot engagement and 40x lens to measure track alignment. 输入head id, 装上做好的head,只用module a的一边装固在stationary mount上即可, 选用5x测量slot engagement, 然后用40x,测量track alignment. 操作雷同做料过程。 control pointlimit /spec track alignment +/- 2 um gap spacing (trk1&16) 1500 +/- 75 um gap parallelism +/- 5 um mod a/b to left/right slot distance 0.356 +/- 0.080 mm important : only documents with red “released“ stamp are considered as official. form no : qf-eng-001

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