半导体行业名词解释.doc

项次 简称 英 文 名 称 中 文 说 明1 J* u8 L e* B: L$ i( 产业 IC Intergrated Circuit 集成电路# u, # q2 T: J gb. x TFT Thin Film Transistor 薄膜晶体管( m; Z( & s3 ci4 u LCD Liquid Crystal Display 液晶显示器# u( C+ l: N0 V! c0 a% * N CF Color Filter 彩色滤光片$ W# g5 c/ |0 + i9 T+ w: K LTPS Low Temperature Poly Silicon 低温多晶硅p : _: & h$ d3 z* T- , | PDP Plasma Display Panel 电浆显示器% O O: q( F( # 6 1 L$ v9 J LCM Liquid Crystal Module 液晶显示器模块4 O! V+ F5 N7 R/ R# o/ o MEMS Micro Electro-Mechanical System 微机电系统) p# o7 d5 p& s- Q9 Q OLED Organic Light Emitting Diode 有机发光二极管) zZ Z2 W2 F9 LED Light Emitting Diode 发光二极管/ C: E7 $ R- k3 W LD Laser Diode 雷射二极管; d1 ?: T! S. Q/ o1 + B. y系统 UPWS Utility Cooling Water Supply 制程冷却水供应端9 - I I+ x; R UPWR Utility Cooling Water Return 制程冷却水回水端% p: T( ; D& A# Q7 DIWS Deionized Water Supply 纯水(去离子水)供应端5 J7 o! k5 g/ t8 g7 e9 z$ E( a DIWR Deionized Water Return 纯水(去离子水)回水端1 w5 D9 h. b7 + q CW City Water 自来水% f - _$ v% L2 F) d GEX General Exhaust 一般排8 g6 d: 0 b) D o/ SEX Scrubber Exhaust 酸碱排8 F1 T) 9 F0 |; e. mA VEX Solvent Exhaust 有机排! J2 A# B2 V& . X AEX Ammonia Exhaust 氨排) j% T0 z$ w5 n2 q PV Process Vacuum 制程真空 5 G( z$ i$ q! w- / B CV Clean Vacuum 清洁用真空8 Q, DB2 y4 XX; I GIS Gas Information System 气体监控系统5 | Y. 5 D4 g! d* h GDS Gas Detector System n J! v& |6 _0 h! Y v GMS Gas Monitoring System ( s7 Q# I8 Se( u SCADA Supervisory Control And Data Acquisition 电力遥控系统# E9 4 g; 9 V2 i6 x HPCDA High Pressure Compressor Dry Air 高压压缩干燥空气 _+ p4 b% n) l- s5 _# e; X Clean Booth 无尘隔间 V$ % i, f* k1 D) C/R Clean Room 无尘室9 / R. x: ?9 N# o, w9 r d5 e8 _设备/材料 GC Gas Cabinet 气瓶柜( n$ w+ H. M; V$ O# J* m GR Gas Rack 气瓶架/ D( H3 G0 z) + g1 Y 2 o VMB Valve Manifold Box 特气分流箱6 f3 W( O4 o6 s, D VMP Valve Manifold Panel 特气分流盘) Q. r# i1 1 K1 w A T-Box Tee- Box 化学分流箱- M: ?, W2 t7 E SMB Sample Box 化学取样箱* A, H: L5 L& u3 P DP Distribuction Panel 惰气分流盘( C, U. 9 B& T1 _1 ?L! r V BSGS Bulk Specialty Gas System 大宗特殊气体系统) y+ Q+ ?$ g8 s5 F! W5 w$ 0 g HAPA High Efficiency Particulate Air Filter 高性能空气过滤器3 & S# M+ W% q, L ULPA Ultra Low Penetration Air Filter 超高性能空气过滤器$ Z# C6 g* M4 g2 M, m4 p0 K1 g SMIF Standard Mechanical Interface 机械标准接口- d6 K, Y/ ?/ Z/ w! L/C Load Cell (Scale) 磅秤; kg7 z+ s- X5 |6 Z9 j EFS Excel Flow Sensor 过流量计5 X* 3 D3 S! D+ X7 J DPS Differential Pressure Switch 差压计7 D1 r$ l; u4 s DPG Differential Pressure Gauge 差压表: ! Q4 s7 * x5 f. L* F EMO Emergency Menual Shut-Off 紧急关断装置+ p) P3 g- C F z F- H GALV Galvanized 镀锌管材7 p0 F% p N- S; v AP Acid Pickled 化学酸洗; w! e, F- w: Z- s5 C3 B BA Bright Annealing 钝化处理 r$ Q k9 E* . W+ B1 Z BAS Bright Annealing+Super Micro Cleaning 钝化处理+精密洗净0 S& u2 f+ C1 W; e& t# EP Electro Polishing 电解抛光% G! N2 C& f+ o _ B; S9 j EPS Electro Polishing+Super Micro Cleaning 电解抛光+精密洗净7 ?2 h8 a& . i% Y D8 ?3 P V+V Vim(Vacuum Induction Melting)+Var(Vacuum Arc Remelting) 真空二重溶解超清静钢2 N; N6 E/ h U C-22 Hastelloy 耐腐蚀性(材料)+ w* w3 8 J. X! h b0 C SS Stainless Steel 不锈钢; d. K/ 6 w7 c: b. W+ ?0 C数值 T.O.C. Total Organic Carbon 总和有机物 K% h$ 4 r. l3 o4 p- m: w/ n T.D.S. Total Dissolven Solids 总和溶解物. f6 O 4 , % | al HPM Hazardous Process Materials 高危害性物质+ Z6 s L k/ t% G, TLV Threshold Limit Valve 最大危险浓度 m! 1 H3 Y TWA Time Weighted Average 工作日时量平均容许浓度( x8 z% s; a* # D STEL Short Term Exposure Limit 短时间时量平均容许浓度6 A/ $ U2 ) & d3 e2 I+ T. b Ceiling 最高容许浓度) b1 p G( B% T- ; o LD50 Lethal Dose Fifty 半致死剂量; o1 C- p# 5 D% F LC50 Lethal Concentration Fifty 半致死浓度5 W: C: V% i$ N& D* x( P) t MTBF Mean Time Between Failure 平均故障间隔时间% R0 / t8 Pr5 ! w# G MTTR Mean Time To Repair 平均修复时间- b8 n1 G( 0 g6 . 其它 MSDS Material Safety Data Sheet 物质安全数据表3 p2 h, K6 1 T* * U8 & i5 G SL1/SL2 Safety Level 1/2 安全等级1/2 V3 R(