《ARRAY工程简介》PPT课件.ppt

ARRAY工程简介,NPI 段晓海,2,目录,ARRAY制造流程图 PVD简介 CVD工程 WET工程 DRY工程 PHOTO工程 TSET简介,3,ARRAY制造流程图,4,TFT Array组成材料,5,TFT GATE电极形成,6,TFT Active(岛状半导体形成),7,TFT S/D源漏电极形成,8,TFT 钝化层及接触孔形成,9,TFT ITO像素电极形成,10,PVD简介,物理气相沉积PVD(Physical Vapor Deposition),阴极,靶材,阳极,腔体,泵,基板,11,PECVD简介,电浆辅助化学气相沉积 Plasma Enhanced Chemical Vapor Deposition,12,WET简介-湿刻设备构成,IN CV,EUV,N CV,ETCH,ZONE,DI RINSE UNIT,A/K,dry2,dry1,液刀,风帘,干燥风刀,置换液刀,Out CV,13,WET简介各工艺单元功能,设备主要工艺单元： EUV unit:祛除玻璃表面有机残留物。 Etch zone:刻蚀区域 Rinse unit:水洗单元 Dry unit：干燥单元 液刀：主要起预湿（置换），冲刷的效果。 风帘：主要是吹掉玻璃上残余的药液 风刀：干燥的玻璃的效果。,14,WET简介工程概念图,15,DRY简介,光阻剥膜,16,DRY简介,17,PHOTO-曝光显影蚀刻基本概念,18,PHOTO-显影,19,PHOTO-显影,20,TEST AOI Auto optical inspection configuration,21,TEST AOI Auto optical inspection configuration,图形处理单元,3GB44unit=132GB,G Size,The CCD sensor detect the substrate, Image by the process unit. Defect can be reviewed precisely,22,TEST-O/S TEST,O/S test design,Panel structure for O/S Test Every data line extands out of the active area connect with O/S pad On the other side all data line connected together by Shorting bar,23,TEST Array Test,Array Tester, Test station Electrical cabinet Operator console Environmental Enclosure,24,TEST-Array TEST,Array tester,Array tester Using instructions in the selected processing recipe, the pattern generator sends test signals to the probe frame. The illuminator is turned on, a bias voltage applied to the modulator and an image captured by the CCD camera. The image is sent to the image processing computer (IPPC) and panel flaws are identified and stored in the defect file by the Sun host computer.,Array tester optical part Light from the illuminator is reflected by the modulator and the image captured on the CCD camera. The image is then processed and analyzed for defects.,25,TEST-TEG TESTER,26,TEST-TEG Measurement Structure,Measurement Structure,27,TEST- Array laser repair,28,TEST- Array laser configuration,LASER OSCILLATOR : DIODE-PUMPED Q-SWITCHED LASER MATERIAL : Nd:YAG WAVELENGTH : 1064nm / 532nm /355nm PULSE REPETITION RATE : 1pps TO 100 PPS OUTPUT S