GWSP系列无油涡旋真空泵技术资料.doc

工业标准无油涡旋真空泵组成与工作原理/Construction and Operating PrincipleGWSP系列无油涡旋真空泵由泵头、电机、机座等构成。泵头含有动、定涡旋盘、曲轴、密封件、风扇和泵壳等。涡旋盘为圆形平面和其上伸出的一条或几条渐开线螺旋形盘壁组成，定涡旋盘与动涡旋盘组成涡旋盘付构成无油涡旋真空泵的基本抽气机构。工作过程中动、定涡旋盘互不接触，依靠相对运动形成容积不断缩小的新月形吸气腔和压缩腔，通过吸气、压缩、排气的循环，使气体从抽气口吸入、排气口排出，实现对被抽腔体抽真空。GWSP series oil free scroll vacuum pump is constructed with fixed scrolls, orbiting scroll, main shaft, cooling fans, crank shaft kits, and bracket. Its operating principle is based on two spiral cylinders, one offset and orbiting against the other with an offset of 180. Thus several crescent-shaped pockets of differing sizes are created. By means of an eccentric drive, the orbiting scroll is made to orbit about the fixed scroll, reducing the volume of the pockets and compressing gases from the outside towards the inside thereby pumping the gases from vacuum chamber.GWSP系列 0(360)气体从外缘被吸 90 气体在气腔内被压缩 180气体被压缩至排气口 270气体被压出排气口应用/ApplicationsGWSP150GWSP300GWSP600GWSP1000镀膜/Coating/*真空炉/Vacuum Furnace/*烘箱 手套箱/Glove Box*排气台/Vacuum Exhaust Station*真空封装 存储/Vacuum Packing*检漏/Leak Detector*/气体回收再循环/Gas recovery*激光/Laser Processing*冷冻干燥/Vacuum Dry*高真空试验台/High Vacuum Test Station*/分析测试仪器/Analyser*/电子束 高能物理/High Energy Physics/*罗茨泵前级/Rough Pump for Roots Pump/*分子泵前级/Rough Pump for Molecular Pump* 工业标准无油涡旋真空泵GWSP系列性能曲线/Performance CurveGWSP1000GWSP600GWSP300GWSP150排气速度（L/min）Pumping speedInlet pressure进气压力(Pa)外形与连接尺寸/Connection SizeModelABCDEFGHMNKd1d2GWSP100054835939733626718412119522430319140162GWSP60048731636029125216093174.5206288174.54016GWSP30045729033626724516093169200275156.52516GWSP150416245277220214109821301552501352516 工业标准无油涡旋真空泵GWSP系列技术指标/Technical Specification型号/ModelGWSP1000GWSP600GWSP300GWSP150排气速度Displacement50Hzl/s16.68.74.32.0l/min996.0522.0258.0120.0m3/h59.831.315.57.2cfm35.818.79.34.360Hzl/s19.910.45.12.4l/min1194.0624.0306.0144.0m3/h71.637.418.38.6cfm42.822.310.95.1极限真空度/Ultimate PressurePa1.01.02.68.0Torr7.510-37.510-31.910-26.010-2mbar1.010-21.010-22.610-28.010-2psi1.410-41.410-43.810-41.210-3被抽气体种类/Pumping gas用于抽洁净气体和含有水分的气体，不能抽有毒、易燃易爆、腐蚀性以及蒸汽、化学品、溶剂及大量粉末等。Suitable for use on Clean processes only. Do not use explosive, flammable, toxic or corrosive substances or substances which contain chemicals, solvents or particles.漏率（排气口和气镇阀关）/Leakage110-2Pal/s（110-4mbar l/s）最大进/排气压力Max. Inlet/Exhaust PressureMPa0.1 /0.13工作环境温度Ambient Operation Temp/540/41104最大水分处理能力Max. Water TreatmentG/day255电机Motor输出功率/OutputkW/hp1.50/2.000.75/1.000.55/0.740.37/0.49工作电压Operating VoltageVAC380/220380/220220380/220220380/220220转速/Speedrpm1410噪音值/Noise LeveldB(A)63636357进/排气口尺寸Inlet/Exhaust FlangemmKF40/162KF40/16KF25/16KF25/16外形尺寸/Over Sizemm548359397487316360457290336416245277重量/Weightkg52363218冷却方式/Cooling Type气冷/Air cooled其他/Others带气镇阀/With air flush 工业标准无油涡旋真空泵GWSP系列GWSP系列无油涡旋真空泵特点工作可靠多年在半导体、微电子、电力、航天、新能源等行业生产线上的应用，证明纪维公司的GWSP系列无油涡旋真空泵能够长期、稳定、可靠工作，胜任工业生产的要求。品种齐全、用途广泛GWSP系列无油涡旋真空泵包括GWSP150、GWSP300、GWSP600、GWSP1000四个品种，适用于抽洁净气体。性能优秀提供清洁无油真空环境，提升制造产品质量：不用油润滑或者水密封，没有返油与水蒸汽，被抽系统清洁、干净，产品成品率高。压力范围宽、极限真空度高、能快速到达极限真空：极限真空度达到1Pa；能快速到达极限真空；从大气到极限真空的宽压力范围内工作稳定，能耗变化小，适合重复快速启动。噪音低、振动低、温升低、可靠耐用：抽气、压缩、排气过程稳定进行，脉动小，噪音与振动更低。运动机构、密封材料性能优异、结构独特，温升更低，设计寿命达5年，可靠耐用。效率高、节能环保：进气口、排气口互相隔绝，气腔被有效密封，泄漏、返流小, 工作中没有喷油，不污染环境，能耗仅为普通油真空泵的60%,更加高效率,节能环保。成本低性能可靠、价格合理，节省采购成本；使用中不需要冷却水和润滑油，能耗低，配件质优价廉，服务及时可靠，节省运行成本